Methods for preserving structures not provided for in groups B81C1/00785 - B81C1/00825

Industry

CPC
B81C1/00833

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00833Methods for preserving structures not provided for in groups B81C1/00785 - B81C1/00825

Industries

Patents Grantslast 30 patents

Information Patent Grant
MEMS device manufacturing method and mems device
- Patent number 11,597,648
- Issue date Mar 7, 2023
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for protecting FEOL element and BEOL element
- Patent number 11,345,591
- Issue date May 31, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ping-Chun Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for the exposure of a region on one face of an electronic d...
- Patent number 10,809,621
- Issue date Oct 20, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Jean Charbonnier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for protecting FEOL element and BEOL element
- Patent number 10,508,028
- Issue date Dec 17, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ping-Chun Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device and method for protecting FEOL element and BEOL element
- Patent number 10,155,660
- Issue date Dec 18, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ping Chun Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-optical bench device with highly/selectively-controlled optic...
- Patent number 10,120,134
- Issue date Nov 6, 2018
- Si-Ware Systems
- Bassam Saadany
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integration of active devices with passive components and MEMS devices
- Patent number 9,751,753
- Issue date Sep 5, 2017
- Newport Fab, LLC
- Michael J. DeBar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanisms for forming micro-electro mechanical system device
- Patent number 9,352,953
- Issue date May 31, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Ren Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanisms for forming micro-electro mechanical system device
- Patent number 8,994,129
- Issue date Mar 31, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Ren Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Constrained oxidation of suspended micro- and nano-structures
- Patent number 8,415,220
- Issue date Apr 9, 2013
- International Business Machines Corporation
- Tymon Barwicz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Protection of cavities opening onto a face of a microstructured ele...
- Patent number 8,153,503
- Issue date Apr 10, 2012
- Commissariat a l'Energie Atomique
- Barbara Charlet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing an electronic assembly; an electronic asse...
- Patent number 7,884,289
- Issue date Feb 8, 2011
- NXP B.V.
- Johannes W. Weekamp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for stripping sacrificial layer in MEMS assembly
- Patent number 7,432,572
- Issue date Oct 7, 2008
- Texas Instruments Incorporated
- Joshua Malone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for stripping sacrificial layer in MEMS assembly
- Patent number 6,951,769
- Issue date Oct 4, 2005
- Texas Instruments Incorporated
- Joshua Malone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-shadowing MEM structures
- Patent number 6,937,131
- Issue date Aug 30, 2005
- Memx, Inc.
- Murray Steven Rodgers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Self-shadowing MEM structures
- Patent number 6,824,278
- Issue date Nov 30, 2004
- Memx, Inc.
- Murray Steven Rodgers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor pressure sensor having refer...
- Patent number 6,495,389
- Issue date Dec 17, 2002
- Denso Corporation
- Seiichiro Ishio
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
- Publication number 20220289564
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Chun YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE MANUFACTURING METHOD AND MEMS DEVICE
- Publication number 20210147224
- Publication date May 20, 2021
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
- Publication number 20200115223
- Publication date Apr 16, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Chun YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
- Publication number 20190112184
- Publication date Apr 18, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Chun YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vent Attachment System For Micro-Electromechanical Systems
- Publication number 20180009655
- Publication date Jan 11, 2018
- W.L. GORE & ASSOCIATES, INC.
- Andrew J. Holliday
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Vent Attachment System For Micro-Electromechanical Systems
- Publication number 20160167948
- Publication date Jun 16, 2016
- W.L. GORE & ASSOCIATES, INC.
- Andrew J. Holliday
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE
- Publication number 20150021723
- Publication date Jan 22, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Ren CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUF...
- Publication number 20120146452
- Publication date Jun 14, 2012
- Miradia, Inc.
- HUA-SHU WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Constrained Oxidation of Suspended Micro- and Nano-Structures
- Publication number 20110207335
- Publication date Aug 25, 2011
- International Business Machines Corporation
- Tymon Barwicz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROTECTION OF CAVITIES OPENING ONTO A FACE OF A MICROSTRUCTURED ELE...
- Publication number 20090263920
- Publication date Oct 22, 2009
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Barbara Charlet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING AN ELECTRONIC ASSEMBLY; AN ELECTRONIC ASSE...
- Publication number 20090159331
- Publication date Jun 25, 2009
- NXP B.V.
- Johannes W. Weekamp
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF PERFORMING DOUBLE-SIDED PROCESSES UPON A WAFER
- Publication number 20060030120
- Publication date Feb 9, 2006
- Shih-Feng Shao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for stripping sacrificial layer in MEMS assembly
- Publication number 20060014312
- Publication date Jan 19, 2006
- Texas Instruments, Inc.
- Joshua Malone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-shadowing MEM structures
- Publication number 20050101048
- Publication date May 12, 2005
- Murray Steven Rodgers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-shadowing MEM structures
- Publication number 20050088765
- Publication date Apr 28, 2005
- Murray Steven Rodgers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-shadowing MEM structures
- Publication number 20050087826
- Publication date Apr 28, 2005
- Murray Steven Rodgers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for stripping sacrificial layer in MEMS assembly
- Publication number 20040248417
- Publication date Dec 9, 2004
- TEXAS INSTRUMENTS INCORPORATED
- Joshua J. Malone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Self-shadowing MEM structures
- Publication number 20030174929
- Publication date Sep 18, 2003
- Murray Steven Rodgers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical device contact terminals free of particle generation
- Publication number 20030107137
- Publication date Jun 12, 2003
- Roger J. Stierman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing semiconductor pressure sensor having refer...
- Publication number 20020028529
- Publication date Mar 7, 2002
- Seiichiro Ishio
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Methods for preserving structures not provided for in groups B81C1/00785 - B81C1/00825

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device manufacturing method and mems device

Device for protecting FEOL element and BEOL element

Process for the exposure of a region on one face of an electronic d...

Device for protecting FEOL element and BEOL element

Device and method for protecting FEOL element and BEOL element

Micro-optical bench device with highly/selectively-controlled optic...

Integration of active devices with passive components and MEMS devices

Mechanisms for forming micro-electro mechanical system device

Mechanisms for forming micro-electro mechanical system device

Constrained oxidation of suspended micro- and nano-structures

Protection of cavities opening onto a face of a microstructured ele...

Method for manufacturing an electronic assembly; an electronic asse...

Method for stripping sacrificial layer in MEMS assembly

Method for stripping sacrificial layer in MEMS assembly

Self-shadowing MEM structures

Self-shadowing MEM structures

Method for manufacturing semiconductor pressure sensor having refer...

Patents Applicationslast 30 patents

DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT

MEMS DEVICE MANUFACTURING METHOD AND MEMS DEVICE

DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT

DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT

Vent Attachment System For Micro-Electromechanical Systems

Vent Attachment System For Micro-Electromechanical Systems

MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE

MICROELECTROMECHANICAL SYSTEM DEVICE AND SEMI-MANUFACTURE AND MANUF...

Constrained Oxidation of Suspended Micro- and Nano-Structures

PROTECTION OF CAVITIES OPENING ONTO A FACE OF A MICROSTRUCTURED ELE...

METHOD FOR MANUFACTURING AN ELECTRONIC ASSEMBLY; AN ELECTRONIC ASSE...

METHOD OF PERFORMING DOUBLE-SIDED PROCESSES UPON A WAFER

Method for stripping sacrificial layer in MEMS assembly

Self-shadowing MEM structures

Self-shadowing MEM structures

Self-shadowing MEM structures

Method for stripping sacrificial layer in MEMS assembly

Self-shadowing MEM structures

Micromechanical device contact terminals free of particle generation

Method for manufacturing semiconductor pressure sensor having refer...