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Micro-structural systems or auxiliary parts thereof
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Patents Grants
last 30 patents
Information
Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
Patent number
12,308,302
Issue date
May 20, 2025
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming monocrystalline nickel-titanium films on single c...
Patent number
12,116,271
Issue date
Oct 15, 2024
Arizona Board of Regents on behalf of Arizona State University
Jagannathan Rajagopalan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
Patent number
11,978,690
Issue date
May 7, 2024
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with particle filter and method of manufacture
Patent number
11,787,689
Issue date
Oct 17, 2023
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic mixing
Patent number
11,760,625
Issue date
Sep 19, 2023
Heriot-Watt University
Maiwenn Kersaudy-Kerhoas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures for packaging stress-sensitive micro-electro-mechanical...
Patent number
11,498,831
Issue date
Nov 15, 2022
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
ESD protection of MEMS for RF applications
Patent number
11,476,245
Issue date
Oct 18, 2022
Qorvo US, Inc.
Roberto Gaddi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pop-up laminate structures with integrated electronics
Patent number
11,419,693
Issue date
Aug 23, 2022
President and Fellows of Harvard College
Joshua B. Gafford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Waterproof microphone and associated packing techniques
Patent number
11,312,620
Issue date
Apr 26, 2022
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Directional microphone and associated packing techniques
Patent number
11,059,716
Issue date
Jul 13, 2021
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device including a capacitor
Patent number
10,861,929
Issue date
Dec 8, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Kai-Fung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures for packaging stress-sensitive micro-electro-mechanical...
Patent number
10,723,616
Issue date
Jul 28, 2020
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tunable power amplifier with wide frequency range
Patent number
10,666,204
Issue date
May 26, 2020
Texas Instruments Incorporated
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Waterproof microphone and associated packing techniques
Patent number
10,562,761
Issue date
Feb 18, 2020
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Directional microphone and associated packing techniques
Patent number
10,508,024
Issue date
Dec 17, 2019
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pop-up laminate structures with integrated electronics
Patent number
10,376,326
Issue date
Aug 13, 2019
President and Fellows of Harvard College
Joshua B. Gafford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures for packaging stress-sensitive micro-electro-mechanical...
Patent number
10,233,074
Issue date
Mar 19, 2019
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tunable power amplifier with wide frequency range
Patent number
10,116,270
Issue date
Oct 30, 2018
Texas Instruments Incorporated
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Directional microphone and associated packing techniques
Patent number
10,081,537
Issue date
Sep 25, 2018
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for an ovenized silicon platform using Si/SiO2 hy...
Patent number
9,957,159
Issue date
May 1, 2018
Weibin Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure and method for packaging stress-sensitive micro-electro-m...
Patent number
9,896,330
Issue date
Feb 20, 2018
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS pressure sensor and method for forming the same
Patent number
9,738,513
Issue date
Aug 22, 2017
MEMSEN ELECTRONICS INC
Manhing Chau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of lower profile MEMS package with stress isolations
Patent number
9,656,856
Issue date
May 23, 2017
Apple Inc.
Tongbi Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tunable power amplifier with wide frequency range
Patent number
9,473,078
Issue date
Oct 18, 2016
Texas Instruments Incorporated
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
8,525,277
Issue date
Sep 3, 2013
Seiko Epson Corporation
Shogo Inaba
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a switch system
Patent number
8,506,826
Issue date
Aug 13, 2013
Harris Corporation
John E. Rogers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for cooling an integrated circuit
Patent number
8,237,263
Issue date
Aug 7, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Hau Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE,...
Patent number
6,794,746
Issue date
Sep 21, 2004
Seiko Epson Corporation
Eiichi Sato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NARROW PITCH CONNECTO...
Patent number
6,573,157
Issue date
Jun 3, 2003
Seiko Epson Corporation
Eiichi Sato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
Publication number
20250019230
Publication date
Jan 16, 2025
Jagannathan Rajagopalan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIE STACKING WITH CONTROLLED TILT AND ANGULAR ALIGNMENT
Publication number
20240425364
Publication date
Dec 26, 2024
NXP USA, Inc.
Chayathorn Saklang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE, METHOD FOR MANUFACTURING MEMS DEVICE AND ELECTRONIC DE...
Publication number
20240262678
Publication date
Aug 8, 2024
Beijing BOE Technology Development Co., Ltd.
Jingwen GUO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
Publication number
20240243035
Publication date
Jul 18, 2024
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED SHOWERHEAD
Publication number
20230298862
Publication date
Sep 21, 2023
Applied Materials, Inc.
Alexander BERGER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
Publication number
20230052052
Publication date
Feb 16, 2023
Jagannathan Rajagopalan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
Publication number
20230030322
Publication date
Feb 2, 2023
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPACT-RESISTANT MICROMECHANICAL ARMS
Publication number
20220411259
Publication date
Dec 29, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Jheng-Hong Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Pop-Up Laminate Structures with Integrated Electronics
Publication number
20220361974
Publication date
Nov 17, 2022
President and Fellows of Harvard College
Joshua B. Gafford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIQUID-RESISTANT AIR INLET PASSIVE DEVICE AND METHODS OF MAKING SAME
Publication number
20220212920
Publication date
Jul 7, 2022
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EXPANSION MEDIATED ADHESIVE DEVICE
Publication number
20210340412
Publication date
Nov 4, 2021
BVW HOLDING AG
Lukas Bluecher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFLUIDIC MIXING
Publication number
20200140260
Publication date
May 7, 2020
Maiwenn KERSAUDY-KERHOAS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WATERPROOF MICROPHONE AND ASSOCIATED PACKING TECHNIQUES
Publication number
20200131029
Publication date
Apr 30, 2020
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE INCLUDING A CAPACITOR
Publication number
20200006470
Publication date
Jan 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Kai-Fung CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRUCTURES FOR PACKAGING STRESS-SENSITIVE MICRO-ELECTRO-MECHANICAL...
Publication number
20190169019
Publication date
Jun 6, 2019
TEXAS INSTRUMENTS INCORPORATED
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TUNABLE POWER AMPLIFIER WITH WIDE FREQUENCY RANGE
Publication number
20190068135
Publication date
Feb 28, 2019
TEXAS INSTRUMENTS INCORPORATED
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIRECTIONAL MICROPHONE AND ASSOCIATED PACKING TECHNIQUES
Publication number
20190055119
Publication date
Feb 21, 2019
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ESD PROTECTION OF MEMS FOR RF APPLICATIONS
Publication number
20180315748
Publication date
Nov 1, 2018
CAVENDISH KINETICS, INC.
Roberto GADDI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DISPLAY PANEL AND DEVICE USING THE SAME
Publication number
20180141306
Publication date
May 24, 2018
Wuhan China Star Optoelectronics Technology Co., Ltd.
Hongqing CUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR AN OVENIZED SILICON PLATFORM USING Si/SiO2 HY...
Publication number
20170275157
Publication date
Sep 28, 2017
Evigia Systems, Inc.
Weibin Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRUCTURE AND METHOD FOR PACKAGING STRESS-SENSITIVE MICRO-ELECTRO-M...
Publication number
20170197823
Publication date
Jul 13, 2017
TEXAS INSTRUMENTS INCORPORATED
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WATERPROOF MICROPHONE AND ASSOCIATED PACKING TECHNIQUES
Publication number
20170137282
Publication date
May 18, 2017
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...
Publication number
20170044010
Publication date
Feb 16, 2017
MITSUBISHI ELECTRIC CORPORATION
Tomoya HIRATA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF LOWER PROFILE MEMS PACKAGE WITH STRESS ISOLATIONS
Publication number
20160340175
Publication date
Nov 24, 2016
Apple Inc.
Tongbi Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PRESSURE SENSOR AND METHOD FOR FORMING THE SAME
Publication number
20160236932
Publication date
Aug 18, 2016
MEMSEN ELECTRONICS INC
MANHING CHAU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TUNABLE POWER AMPLIFIER WITH WIDE FREQUENCY RANGE
Publication number
20160043698
Publication date
Feb 11, 2016
TEXAS INSTRUMENTS INCORPORATED
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A SWITCH SYSTEM
Publication number
20130032570
Publication date
Feb 7, 2013
Harris Corporation
John E. Rogers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20110241136
Publication date
Oct 6, 2011
SEIKO EPSON CORPORATION
Shogo INABA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Apparatus for Cooling an Integrated Circuit
Publication number
20110156245
Publication date
Jun 30, 2011
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Hau Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of manufacturing semiconductor device, semiconductor device,...
Publication number
20030197764
Publication date
Oct 23, 2003
SEIKO EPSON CORPORATION
Eiichi Sato
B81 - MICRO-STRUCTURAL TECHNOLOGY