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Micro-structural systems or auxiliary parts thereof not provided for in B81B2207/01 - B81B2207/115
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Micro-structural technology
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MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Micro-structural systems or auxiliary parts thereof
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Micro-structural systems or auxiliary parts thereof not provided for in B81B2207/01 - B81B2207/115
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Patents Grants
last 30 patents
Information
Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
Patent number
11,978,690
Issue date
May 7, 2024
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with particle filter and method of manufacture
Patent number
11,787,689
Issue date
Oct 17, 2023
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic mixing
Patent number
11,760,625
Issue date
Sep 19, 2023
Heriot-Watt University
Maiwenn Kersaudy-Kerhoas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures for packaging stress-sensitive micro-electro-mechanical...
Patent number
11,498,831
Issue date
Nov 15, 2022
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
ESD protection of MEMS for RF applications
Patent number
11,476,245
Issue date
Oct 18, 2022
Qorvo US, Inc.
Roberto Gaddi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pop-up laminate structures with integrated electronics
Patent number
11,419,693
Issue date
Aug 23, 2022
President and Fellows of Harvard College
Joshua B. Gafford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Waterproof microphone and associated packing techniques
Patent number
11,312,620
Issue date
Apr 26, 2022
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Directional microphone and associated packing techniques
Patent number
11,059,716
Issue date
Jul 13, 2021
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device including a capacitor
Patent number
10,861,929
Issue date
Dec 8, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Kai-Fung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures for packaging stress-sensitive micro-electro-mechanical...
Patent number
10,723,616
Issue date
Jul 28, 2020
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tunable power amplifier with wide frequency range
Patent number
10,666,204
Issue date
May 26, 2020
Texas Instruments Incorporated
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Waterproof microphone and associated packing techniques
Patent number
10,562,761
Issue date
Feb 18, 2020
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Directional microphone and associated packing techniques
Patent number
10,508,024
Issue date
Dec 17, 2019
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pop-up laminate structures with integrated electronics
Patent number
10,376,326
Issue date
Aug 13, 2019
President and Fellows of Harvard College
Joshua B. Gafford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structures for packaging stress-sensitive micro-electro-mechanical...
Patent number
10,233,074
Issue date
Mar 19, 2019
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tunable power amplifier with wide frequency range
Patent number
10,116,270
Issue date
Oct 30, 2018
Texas Instruments Incorporated
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Directional microphone and associated packing techniques
Patent number
10,081,537
Issue date
Sep 25, 2018
Kathirgamasundaram Sooriakumar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for an ovenized silicon platform using Si/SiO2 hy...
Patent number
9,957,159
Issue date
May 1, 2018
Weibin Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Structure and method for packaging stress-sensitive micro-electro-m...
Patent number
9,896,330
Issue date
Feb 20, 2018
Texas Instruments Incorporated
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS pressure sensor and method for forming the same
Patent number
9,738,513
Issue date
Aug 22, 2017
MEMSEN ELECTRONICS INC
Manhing Chau
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of lower profile MEMS package with stress isolations
Patent number
9,656,856
Issue date
May 23, 2017
Apple Inc.
Tongbi Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Tunable power amplifier with wide frequency range
Patent number
9,473,078
Issue date
Oct 18, 2016
Texas Instruments Incorporated
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device
Patent number
8,525,277
Issue date
Sep 3, 2013
Seiko Epson Corporation
Shogo Inaba
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a switch system
Patent number
8,506,826
Issue date
Aug 13, 2013
Harris Corporation
John E. Rogers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for cooling an integrated circuit
Patent number
8,237,263
Issue date
Aug 7, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Hau Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SEMICONDUCTOR DEVICE,...
Patent number
6,794,746
Issue date
Sep 21, 2004
Seiko Epson Corporation
Eiichi Sato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, NARROW PITCH CONNECTO...
Patent number
6,573,157
Issue date
Jun 3, 2003
Seiko Epson Corporation
Eiichi Sato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
INTEGRATED SHOWERHEAD
Publication number
20230298862
Publication date
Sep 21, 2023
Applied Materials, Inc.
Alexander BERGER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MONOCRYSTALLINE NICKEL-TITANIUM FILMS ON SINGLE CRYSTAL SILICON SUB...
Publication number
20230052052
Publication date
Feb 16, 2023
Jagannathan Rajagopalan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
Publication number
20230030322
Publication date
Feb 2, 2023
Frore Systems Inc.
Vikram Mukundan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPACT-RESISTANT MICROMECHANICAL ARMS
Publication number
20220411259
Publication date
Dec 29, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Jheng-Hong Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Pop-Up Laminate Structures with Integrated Electronics
Publication number
20220361974
Publication date
Nov 17, 2022
President and Fellows of Harvard College
Joshua B. Gafford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIQUID-RESISTANT AIR INLET PASSIVE DEVICE AND METHODS OF MAKING SAME
Publication number
20220212920
Publication date
Jul 7, 2022
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EXPANSION MEDIATED ADHESIVE DEVICE
Publication number
20210340412
Publication date
Nov 4, 2021
BVW HOLDING AG
Lukas Bluecher
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFLUIDIC MIXING
Publication number
20200140260
Publication date
May 7, 2020
Maiwenn KERSAUDY-KERHOAS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WATERPROOF MICROPHONE AND ASSOCIATED PACKING TECHNIQUES
Publication number
20200131029
Publication date
Apr 30, 2020
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE INCLUDING A CAPACITOR
Publication number
20200006470
Publication date
Jan 2, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Kai-Fung CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRUCTURES FOR PACKAGING STRESS-SENSITIVE MICRO-ELECTRO-MECHANICAL...
Publication number
20190169019
Publication date
Jun 6, 2019
TEXAS INSTRUMENTS INCORPORATED
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TUNABLE POWER AMPLIFIER WITH WIDE FREQUENCY RANGE
Publication number
20190068135
Publication date
Feb 28, 2019
TEXAS INSTRUMENTS INCORPORATED
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DIRECTIONAL MICROPHONE AND ASSOCIATED PACKING TECHNIQUES
Publication number
20190055119
Publication date
Feb 21, 2019
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ESD PROTECTION OF MEMS FOR RF APPLICATIONS
Publication number
20180315748
Publication date
Nov 1, 2018
CAVENDISH KINETICS, INC.
Roberto GADDI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DISPLAY PANEL AND DEVICE USING THE SAME
Publication number
20180141306
Publication date
May 24, 2018
Wuhan China Star Optoelectronics Technology Co., Ltd.
Hongqing CUI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR AN OVENIZED SILICON PLATFORM USING Si/SiO2 HY...
Publication number
20170275157
Publication date
Sep 28, 2017
Evigia Systems, Inc.
Weibin Zhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRUCTURE AND METHOD FOR PACKAGING STRESS-SENSITIVE MICRO-ELECTRO-M...
Publication number
20170197823
Publication date
Jul 13, 2017
TEXAS INSTRUMENTS INCORPORATED
Kurt Peter Wachtler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WATERPROOF MICROPHONE AND ASSOCIATED PACKING TECHNIQUES
Publication number
20170137282
Publication date
May 18, 2017
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR ELEMENT, METHOD FOR MANUFACTURING SENSOR ELEMENT, DETECTION...
Publication number
20170044010
Publication date
Feb 16, 2017
MITSUBISHI ELECTRIC CORPORATION
Tomoya HIRATA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF LOWER PROFILE MEMS PACKAGE WITH STRESS ISOLATIONS
Publication number
20160340175
Publication date
Nov 24, 2016
Apple Inc.
Tongbi Jiang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS PRESSURE SENSOR AND METHOD FOR FORMING THE SAME
Publication number
20160236932
Publication date
Aug 18, 2016
MEMSEN ELECTRONICS INC
MANHING CHAU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TUNABLE POWER AMPLIFIER WITH WIDE FREQUENCY RANGE
Publication number
20160043698
Publication date
Feb 11, 2016
TEXAS INSTRUMENTS INCORPORATED
Aritra Banerjee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A SWITCH SYSTEM
Publication number
20130032570
Publication date
Feb 7, 2013
Harris Corporation
John E. Rogers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE
Publication number
20110241136
Publication date
Oct 6, 2011
SEIKO EPSON CORPORATION
Shogo INABA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Apparatus for Cooling an Integrated Circuit
Publication number
20110156245
Publication date
Jun 30, 2011
Taiwan Semiconductor Manufacturing Company, Ltd.
Ting-Hau Wu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of manufacturing semiconductor device, semiconductor device,...
Publication number
20030197764
Publication date
Oct 23, 2003
SEIKO EPSON CORPORATION
Eiichi Sato
B81 - MICRO-STRUCTURAL TECHNOLOGY