Monitoring physical parameters in the etching chamber

Industry

CPC
B81C2201/0138

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/0138Monitoring physical parameters in the etching chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Methods and systems for transmission and detection of free radicals
- Patent number 11,592,394
- Issue date Feb 28, 2023
- Wisconsin Alumni Research Foundation
- J. Leon Shohet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Enhanced microfabrication using electrochemical techniques
- Patent number 11,549,903
- Issue date Jan 10, 2023
- National Technology & Engineering Solutions of Sandia, LLC
- Christian Arrington
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cryogenic atomic layer etch with noble gases
- Patent number 11,515,166
- Issue date Nov 29, 2022
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cryogenic atomic layer etch with noble gases
- Patent number 11,087,989
- Issue date Aug 10, 2021
- Applied Materials, Inc.
- Alvaro Garcia De Gorordo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for tuning plasma potential using variable mode plasma chamber
- Patent number 11,049,692
- Issue date Jun 29, 2021
- Mattson Technology, Inc.
- Stephen E. Savas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a reflection-reducing layer system
- Patent number 10,782,451
- Issue date Sep 22, 2020
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Ulrike Schulz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chemical liquid treatment apparatus and chemical liquid treatment m...
- Patent number 10,748,791
- Issue date Aug 18, 2020
- Kioxia Corporation
- Hiroaki Yamada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System implementing machine learning in complex multivariate wafer...
- Patent number 10,615,009
- Issue date Apr 7, 2020
- Lam Research Corporation
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon-based component with at least one chamfer and its fabricati...
- Patent number 10,197,973
- Issue date Feb 5, 2019
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Chemical liquid treatment apparatus and chemical liquid treatment m...
- Patent number 10,157,756
- Issue date Dec 18, 2018
- TOSHIBA MEMORY CORPORATION
- Hiroaki Yamada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective patterning of titanium encapsulation layers
- Patent number 10,005,662
- Issue date Jun 26, 2018
- Texas Instruments Incorporated
- Lee Alan Stringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and process of implementing machine learning in complex mult...
- Patent number 9,972,478
- Issue date May 15, 2018
- Lam Research Corporation
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective patterning of an integrated fluxgate device
- Patent number 9,771,261
- Issue date Sep 26, 2017
- Texas Instruments Incorporated
- Lee Alan Stringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component with a reduced contact surface and its fa...
- Patent number 9,731,964
- Issue date Aug 15, 2017
- Nivarox-Far S.A.
- Alex Gandelhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for etching a layer on a silicon semiconductor substrate
- Patent number 8,946,090
- Issue date Feb 3, 2015
- Robert Bosch GmbH
- Volker Becker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective etching of semiconductor substrate(s) that preserves unde...
- Patent number 8,703,003
- Issue date Apr 22, 2014
- SPTS Technologies Limited
- Kyle S. Lebouitz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trench depth monitor for semiconductor manufacturing
- Patent number 7,795,045
- Issue date Sep 14, 2010
- Icemos Technology Ltd.
- Hugh J. Griffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for monitoring a microstructure etching process
- Patent number 7,672,750
- Issue date Mar 2, 2010
- Point 35 Microstructures Ltd.
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wet etch processing
- Patent number 7,651,946
- Issue date Jan 26, 2010
- University College Cork—National University of Ireland, Cork
- Nicolle Wilke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of making a MEMS device by monitoring a process parameter
- Patent number 7,569,488
- Issue date Aug 4, 2009
- QUALCOMM MEMS Technologies, Inc.
- Marjorio Rafanan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and processing system for monitoring status of system compon...
- Patent number 7,479,454
- Issue date Jan 20, 2009
- Tokyo Electron Limited
- David L. O'Meara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for detecting an endpoint in a vapor phase etch
- Patent number 7,189,332
- Issue date Mar 13, 2007
- Texas Instruments Incorporated
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for vapor phase etching of silicon
- Patent number 7,041,224
- Issue date May 9, 2006
- Reflectivity, Inc.
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for flow of process gas in an ultra-clean envi...
- Patent number 6,949,202
- Issue date Sep 27, 2005
- Reflectivity, Inc.
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for achieving improved selectivity in an etching process
- Patent number 6,942,811
- Issue date Sep 13, 2005
- Reflectivity, Inc.
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process monitoring apparatus and method
- Patent number 6,652,710
- Issue date Nov 25, 2003
- Applied Materials, Inc.
- James P. Cruse
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas phase silicon etching with bromine trifluoride
- Patent number 6,436,229
- Issue date Aug 20, 2002
- California Institute of Technology
- Yu-Chong Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical device manufacturing process
- Patent number 6,337,027
- Issue date Jan 8, 2002
- Rockwell Science Center, LLC
- Kurt D. Humphrey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas-phase silicon etching with bromine trifluoride
- Patent number 6,162,367
- Issue date Dec 19, 2000
- California Institute of Technology
- Yu-Chong Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for monitoring processes using multiple parame...
- Patent number 5,910,011
- Issue date Jun 8, 1999
- Applied Materials, Inc.
- James P. Cruse
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND SYSTEMS FOR TRANSMISSION AND DETECTION OF FREE RADICALS
- Publication number 20230375474
- Publication date Nov 23, 2023
- Wisconsin Alumni Research Foundation
- J. Leon Shohet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES
- Publication number 20210398815
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Alvaro GARCIA DE GORORDO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
System Implementing Machine Learning in Complex Multivariate Wafer...
- Publication number 20180247798
- Publication date Aug 30, 2018
- LAM RESEARCH CORPORATION
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHEMICAL LIQUID TREATMENT APPARATUS AND CHEMICAL LIQUID TREATMENT M...
- Publication number 20180005854
- Publication date Jan 4, 2018
- Toshiba Memory Corporation
- Hiroaki YAMADA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELECTIVE PATTERNING OF TITANIUM ENCAPSULATION LAYERS
- Publication number 20170341934
- Publication date Nov 30, 2017
- TEXAS INSTRUMENTS INCORPORATED
- Lee Alan Stringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Selective Patterning of an Integrated Fluxgate Device
- Publication number 20170267521
- Publication date Sep 21, 2017
- TEXAS INSTRUMENTS INCORPORATED
- Lee Alan Stringer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Selective Etching Of Semiconductor Substrate(s) That Preserves Unde...
- Publication number 20100267242
- Publication date Oct 21, 2010
- XACTIX, INC.
- Kyle S. Lebouitz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ETCHING A LAYER ON A SILICON SEMICONDUCTOR SUBSTRATE
- Publication number 20100203739
- Publication date Aug 12, 2010
- Volker Becker
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRENCH DEPTH MONITOR FOR SEMICONDUCTOR MANUFACTURING
- Publication number 20090200547
- Publication date Aug 13, 2009
- ICEMOS TECHNOLOGY LTD.
- Hugh J. Griffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM
- Publication number 20080318344
- Publication date Dec 25, 2008
- QUALCOMM Incorporated
- Marjorio Rafanan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method And Apparatus For Monitoring A Microstructure Etching Process
- Publication number 20080147229
- Publication date Jun 19, 2008
- POINT 35 MICROSTRUCTURES LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method And Apparatus For Monitoring Plasma Conditions In An Etching...
- Publication number 20080134757
- Publication date Jun 12, 2008
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wet etch processing
- Publication number 20070134829
- Publication date Jun 14, 2007
- Nicolle Wilke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH
- Publication number 20070119814
- Publication date May 31, 2007
- TEXAS INSTRUMENTS INCORPORATED
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for monitoring plasma conditions in an etching...
- Publication number 20060211253
- Publication date Sep 21, 2006
- Ing-shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and processing system for monitoring status of system compon...
- Publication number 20050070104
- Publication date Mar 31, 2005
- TOKYO ELECTRON LIMITED
- David L. O'Meara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Thin film resistor etch
- Publication number 20050003673
- Publication date Jan 6, 2005
- Omid Mahdavi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and method for detecting an endpoint in a vapor phase etch
- Publication number 20040069747
- Publication date Apr 15, 2004
- REFLECTIVITY, INC., a California corporation
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods for formation of air gap interconnects
- Publication number 20030073302
- Publication date Apr 17, 2003
- REFLECTIVITY, INC., a California corporation
- Andrew G. Huibers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for vapor phase etching of silicon
- Publication number 20020195423
- Publication date Dec 26, 2002
- REFLECTIVITY, INC.
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for achieving improved selectivity in an etching process
- Publication number 20020121502
- Publication date Sep 5, 2002
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process Monitoring Apparatus and Method
- Publication number 20010051437
- Publication date Dec 13, 2001
- JAMES P. CRUSE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Gas phase silicon etching with bromine trifluoride
- Publication number 20010002663
- Publication date Jun 7, 2001
- California Institute of Technology, a corporation
- Yu-Chong Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Monitoring physical parameters in the etching chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods and systems for transmission and detection of free radicals

Enhanced microfabrication using electrochemical techniques

Cryogenic atomic layer etch with noble gases

Cryogenic atomic layer etch with noble gases

Methods for tuning plasma potential using variable mode plasma chamber

Method for producing a reflection-reducing layer system

Chemical liquid treatment apparatus and chemical liquid treatment m...

System implementing machine learning in complex multivariate wafer...

Silicon-based component with at least one chamfer and its fabricati...

Chemical liquid treatment apparatus and chemical liquid treatment m...

Selective patterning of titanium encapsulation layers

Method and process of implementing machine learning in complex mult...

Selective patterning of an integrated fluxgate device

Micromechanical component with a reduced contact surface and its fa...

Method for etching a layer on a silicon semiconductor substrate

Selective etching of semiconductor substrate(s) that preserves unde...

Trench depth monitor for semiconductor manufacturing

Method and apparatus for monitoring a microstructure etching process

Wet etch processing

Methods of making a MEMS device by monitoring a process parameter

Method and processing system for monitoring status of system compon...

Apparatus and method for detecting an endpoint in a vapor phase etch

Method for vapor phase etching of silicon

Apparatus and method for flow of process gas in an ultra-clean envi...

Method for achieving improved selectivity in an etching process

Process monitoring apparatus and method

Gas phase silicon etching with bromine trifluoride

Microelectromechanical device manufacturing process

Gas-phase silicon etching with bromine trifluoride

Method and apparatus for monitoring processes using multiple parame...

Patents Applicationslast 30 patents

METHODS AND SYSTEMS FOR TRANSMISSION AND DETECTION OF FREE RADICALS

CRYOGENIC ATOMIC LAYER ETCH WITH NOBLE GASES

System Implementing Machine Learning in Complex Multivariate Wafer...

CHEMICAL LIQUID TREATMENT APPARATUS AND CHEMICAL LIQUID TREATMENT M...

SELECTIVE PATTERNING OF TITANIUM ENCAPSULATION LAYERS

Selective Patterning of an Integrated Fluxgate Device

Selective Etching Of Semiconductor Substrate(s) That Preserves Unde...

METHOD FOR ETCHING A LAYER ON A SILICON SEMICONDUCTOR SUBSTRATE

TRENCH DEPTH MONITOR FOR SEMICONDUCTOR MANUFACTURING

INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM

Method And Apparatus For Monitoring A Microstructure Etching Process

Method And Apparatus For Monitoring Plasma Conditions In An Etching...

Wet etch processing

APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH

Method and apparatus for monitoring plasma conditions in an etching...

Method and processing system for monitoring status of system compon...

Thin film resistor etch

Apparatus and method for detecting an endpoint in a vapor phase etch

Methods for formation of air gap interconnects

Method for vapor phase etching of silicon

Method for achieving improved selectivity in an etching process

Process Monitoring Apparatus and Method

Gas phase silicon etching with bromine trifluoride