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B81C1/00246
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00246
Monolithic integration
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Patents Grants
last 30 patents
Information
Patent Grant
Integrated digital force sensors and related methods of manufacture
Patent number
11,946,817
Issue date
Apr 2, 2024
DecaWave, Ltd.
Ali Foughi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
Patent number
11,847,851
Issue date
Dec 19, 2023
Invensense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical apparatus having hermitic chamber
Patent number
11,820,650
Issue date
Nov 21, 2023
Industrial Technology Research Institute
Bor-Shiun Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for processing a layer structure and microelectromechanical...
Patent number
11,787,686
Issue date
Oct 17, 2023
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device including a microelectromechanical structure a...
Patent number
11,691,870
Issue date
Jul 4, 2023
STMicroelectronics S.r.l.
Alessandro Tocchio
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
Patent number
11,667,517
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device including a microelectromechanical structure a...
Patent number
11,667,519
Issue date
Jun 6, 2023
STMicroelectronics S.r.l.
Alessandro Tocchio
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfabricated ultrasonic transducer having individual cells with...
Patent number
11,559,827
Issue date
Jan 24, 2023
BFLY OPERATIONS, INC.
Susan A. Alie
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultrasonic imaging devices, systems and methods
Patent number
11,439,364
Issue date
Sep 13, 2022
BFLY OPERATIONS, INC.
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
Patent number
11,358,862
Issue date
Jun 14, 2022
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Antenna apparatus
Patent number
11,362,411
Issue date
Jun 14, 2022
SOFANT TECHNOLOGIES LTD
Nakul Raghavanand Haridas
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Device for protecting FEOL element and BEOL element
Patent number
11,345,591
Issue date
May 31, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Ping-Chun Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for integrating complementary metal-oxide-semiconductor (CMO...
Patent number
11,342,266
Issue date
May 24, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric micromachined ultrasonic transducers and methods for...
Patent number
11,329,098
Issue date
May 10, 2022
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated acoustic filter on complementary metal oxide semiconduct...
Patent number
11,309,352
Issue date
Apr 19, 2022
QUALCOMM Incorporated
Sinan Goktepeli
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
Patent number
11,261,083
Issue date
Mar 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
Patent number
11,263,424
Issue date
Mar 1, 2022
Invensense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Absolute and differential pressure sensors and related methods
Patent number
11,254,565
Issue date
Feb 22, 2022
Semiconductor Components Industries, LLC
Michael J. Seddon
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integrated digital force sensors and related methods of manufacture
Patent number
11,255,737
Issue date
Feb 22, 2022
NEXTINPUT, INC.
Ali Foughi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS-MEMS integration with through-chip via process
Patent number
11,235,969
Issue date
Feb 1, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for processing a layer structure and microelectromechanical...
Patent number
11,180,362
Issue date
Nov 23, 2021
Infineon Technologies AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nano-electromechanical system (NEMS) device structure and method fo...
Patent number
11,167,984
Issue date
Nov 9, 2021
Taiwan Semiconductor Manufacturing Co., Ltd
Hsin-Ping Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical device and corresponding production method
Patent number
11,130,672
Issue date
Sep 28, 2021
Robert Bosch GmbH
Johannes Baader
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ultrasonic sensing device
Patent number
11,107,858
Issue date
Aug 31, 2021
Invensense, Inc.
Renata Melamud Berger
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microelectromechanical device, method for manufacturing a microelec...
Patent number
11,078,072
Issue date
Aug 3, 2021
Infineon Technologies Dresden GmbH & Co. KG
Thoralf Kautzsch
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Integration scheme for microelectromechanical systems (MEMS) device...
Patent number
11,078,074
Issue date
Aug 3, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
CMOS thermal fluid flow sensing device employing a flow sensor and...
Patent number
11,035,709
Issue date
Jun 15, 2021
Cambridge Enterprise Limited
Andrea De Luca
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanopatterned biosensor electrode for enhanced sensor signal and se...
Patent number
11,022,577
Issue date
Jun 1, 2021
International Business Machines Corporation
Emily R. Kinser
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming semiconductor package and semiconductor package
Patent number
11,014,805
Issue date
May 25, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Complementary metal-oxide-semiconductor (CMOS) micro electro-mechan...
Patent number
11,008,215
Issue date
May 18, 2021
Chuan-Wei Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
Publication number
20230382716
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT
Publication number
20230312337
Publication date
Oct 5, 2023
3C PROJECT MANAGEMENT LIMITED
Gregory John MCAVOY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
Publication number
20230278856
Publication date
Sep 7, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS
Publication number
20230079579
Publication date
Mar 16, 2023
BFLY Operations, Inc
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR CHIP WITH A PLURALITY OF INTEGRATED SENSOR CIRCUITS
Publication number
20230035123
Publication date
Feb 2, 2023
INFINEON TECHNOLOGIES AG
Stephan LEISENHEIMER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
Publication number
20220289556
Publication date
Sep 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
Publication number
20220289564
Publication date
Sep 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ping-Chun YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ANTENNA APPARATUS
Publication number
20220271416
Publication date
Aug 25, 2022
SOFANT TECHNOLOGIES LTD.
Nakul Raghavanand HARIDAS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED DIGITAL FORCE SENSORS AND RELATED METHODS OF MANUFACTURE
Publication number
20220268648
Publication date
Aug 25, 2022
NextInput, Inc.
Ali Foughi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MONOLITHIC POST COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR INTEGRATION...
Publication number
20220185660
Publication date
Jun 16, 2022
Meridian Innovation Pte Ltd
Wan Chia Ang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...
Publication number
20220172506
Publication date
Jun 2, 2022
InvenSense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS
Publication number
20220133274
Publication date
May 5, 2022
BFLY Operations, Inc
Jonathan M. Rothberg
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED MEMS-CMOS ULTRASONIC SENSOR
Publication number
20220130899
Publication date
Apr 28, 2022
Shenzhen Goodix Technology Co., Ltd.
Mostafa SOLIMAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Processing a Layer Structure and Microelectromechanical...
Publication number
20210363002
Publication date
Nov 25, 2021
INFINEON TECHNOLOGIES AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...
Publication number
20210291228
Publication date
Sep 23, 2021
Butterfly Network, Inc.
Susan A. Alie
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTERCONNECTION FOR MONOLITHICALLY INTEGRATED STACKED DEVICES AND M...
Publication number
20210260623
Publication date
Aug 26, 2021
GLOBALFOUNDRIES SINGAPORE PTE. LTD.
You QIAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR PRODUCING MONOLITHIC INTEGRATION OF PIEZOELECTRIC MICROM...
Publication number
20210206630
Publication date
Jul 8, 2021
VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
You Qian
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL APPARATUS HAVING HERMITIC CHAMBER
Publication number
20210198101
Publication date
Jul 1, 2021
Industrial Technology Research Institute
Bor-Shiun LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...
Publication number
20210155472
Publication date
May 27, 2021
STMicroelectronics S.r.l.
Alessandro Tocchio
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL DEVICE AND CORRESPONDING PRODUCTION METHOD
Publication number
20200361765
Publication date
Nov 19, 2020
ROBERT BOSCH GmbH
Johannes Baader
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...
Publication number
20200346925
Publication date
Nov 5, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Wen Cheng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
Publication number
20200317506
Publication date
Oct 8, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Chia Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANO-ELECTROMECHANICAL SYSTEM (NEMS) DEVICE STRUCTURE AND METHOD FO...
Publication number
20200299129
Publication date
Sep 24, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsin-Ping CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELE...
Publication number
20200290867
Publication date
Sep 17, 2020
Infineon Technologies Dresden GmbH & Co. KG
Thoralf KAUTZSCH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method for Processing a Layer Structure and Microelectromechanical...
Publication number
20200277183
Publication date
Sep 3, 2020
INFINEON TECHNOLOGIES AG
Andre Brockmeier
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...
Publication number
20200262699
Publication date
Aug 20, 2020
STMicroelectronics S.r.l.
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...
Publication number
20200250393
Publication date
Aug 6, 2020
InvenSense, Inc.
Julius Ming-Lin Tsai
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICAL CONNECTION TO A MICRO ELECTRO-MECHANICAL SYSTEM
Publication number
20200216310
Publication date
Jul 9, 2020
Kionix, Inc.
Andrew Hocking
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMOS) MICRO ELECTRO-MECHAN...
Publication number
20200207613
Publication date
Jul 2, 2020
CHUAN-WEI WANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ULTRASONIC SENSING DEVICE
Publication number
20200194495
Publication date
Jun 18, 2020
InvenSense, Inc.
Renata Melamud BERGER
B81 - MICRO-STRUCTURAL TECHNOLOGY