Monolithic integration

Industry

CPC
B81C1/00246

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00246Monolithic integration

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic imaging devices, systems and methods
- Patent number 12,076,189
- Issue date Sep 3, 2024
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and MEMS accelerometer on a single substrate
- Patent number 12,054,383
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing monolithic integration of piezoelectric microm...
- Patent number 12,037,239
- Issue date Jul 16, 2024
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS cap for MEMS devices
- Patent number 11,990,498
- Issue date May 21, 2024
- MERIDIAN INNOVATION PTE LTD
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas sensor MEMS structures and methods of fabrication thereof
- Patent number 11,988,600
- Issue date May 21, 2024
- National University of Singapore
- Enrico Macrelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated digital force sensors and related methods of manufacture
- Patent number 11,946,817
- Issue date Apr 2, 2024
- DecaWave, Ltd.
- Ali Foughi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
- Patent number 11,847,851
- Issue date Dec 19, 2023
- Invensense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical apparatus having hermitic chamber
- Patent number 11,820,650
- Issue date Nov 21, 2023
- Industrial Technology Research Institute
- Bor-Shiun Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a layer structure and microelectromechanical...
- Patent number 11,787,686
- Issue date Oct 17, 2023
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including a microelectromechanical structure a...
- Patent number 11,691,870
- Issue date Jul 4, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 11,667,517
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device including a microelectromechanical structure a...
- Patent number 11,667,519
- Issue date Jun 6, 2023
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducer having individual cells with...
- Patent number 11,559,827
- Issue date Jan 24, 2023
- BFLY OPERATIONS, INC.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic imaging devices, systems and methods
- Patent number 11,439,364
- Issue date Sep 13, 2022
- BFLY OPERATIONS, INC.
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device having two buried cavities and manu...
- Patent number 11,358,862
- Issue date Jun 14, 2022
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Antenna apparatus
- Patent number 11,362,411
- Issue date Jun 14, 2022
- SOFANT TECHNOLOGIES LTD
- Nakul Raghavanand Haridas
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device for protecting FEOL element and BEOL element
- Patent number 11,345,591
- Issue date May 31, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ping-Chun Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for integrating complementary metal-oxide-semiconductor (CMO...
- Patent number 11,342,266
- Issue date May 24, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric micromachined ultrasonic transducers and methods for...
- Patent number 11,329,098
- Issue date May 10, 2022
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated acoustic filter on complementary metal oxide semiconduct...
- Patent number 11,309,352
- Issue date Apr 19, 2022
- QUALCOMM Incorporated
- Sinan Goktepeli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fence structure to prevent stiction in a MEMS motion sensor
- Patent number 11,261,083
- Issue date Mar 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Lee-Chuan Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated piezoelectric microelectromechanical ultrasound transduc...
- Patent number 11,263,424
- Issue date Mar 1, 2022
- Invensense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Absolute and differential pressure sensors and related methods
- Patent number 11,254,565
- Issue date Feb 22, 2022
- Semiconductor Components Industries, LLC
- Michael J. Seddon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated digital force sensors and related methods of manufacture
- Patent number 11,255,737
- Issue date Feb 22, 2022
- NEXTINPUT, INC.
- Ali Foughi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS integration with through-chip via process
- Patent number 11,235,969
- Issue date Feb 1, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for processing a layer structure and microelectromechanical...
- Patent number 11,180,362
- Issue date Nov 23, 2021
- Infineon Technologies AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nano-electromechanical system (NEMS) device structure and method fo...
- Patent number 11,167,984
- Issue date Nov 9, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hsin-Ping Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device and corresponding production method
- Patent number 11,130,672
- Issue date Sep 28, 2021
- Robert Bosch GmbH
- Johannes Baader
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ultrasonic sensing device
- Patent number 11,107,858
- Issue date Aug 31, 2021
- Invensense, Inc.
- Renata Melamud Berger
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
HIGHLY SENSITIVE THERMOELECTRIC-BASED INFRARED DETECTOR WITH HIGH C...
- Publication number 20240351863
- Publication date Oct 24, 2024
- Meridian Innovation Pte Ltd
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
- Publication number 20240199412
- Publication date Jun 20, 2024
- InvenSense, Inc.
- Camillo Pilla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
- Publication number 20230382716
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT
- Publication number 20230312337
- Publication date Oct 5, 2023
- 3C PROJECT MANAGEMENT LIMITED
- Gregory John MCAVOY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20230278856
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS
- Publication number 20230079579
- Publication date Mar 16, 2023
- BFLY Operations, Inc
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR CHIP WITH A PLURALITY OF INTEGRATED SENSOR CIRCUITS
- Publication number 20230035123
- Publication date Feb 2, 2023
- INFINEON TECHNOLOGIES AG
- Stephan LEISENHEIMER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE
- Publication number 20220289556
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT
- Publication number 20220289564
- Publication date Sep 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ping-Chun YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTENNA APPARATUS
- Publication number 20220271416
- Publication date Aug 25, 2022
- SOFANT TECHNOLOGIES LTD.
- Nakul Raghavanand HARIDAS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED DIGITAL FORCE SENSORS AND RELATED METHODS OF MANUFACTURE
- Publication number 20220268648
- Publication date Aug 25, 2022
- NextInput, Inc.
- Ali Foughi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MONOLITHIC POST COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR INTEGRATION...
- Publication number 20220185660
- Publication date Jun 16, 2022
- Meridian Innovation Pte Ltd
- Wan Chia Ang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...
- Publication number 20220172506
- Publication date Jun 2, 2022
- InvenSense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS
- Publication number 20220133274
- Publication date May 5, 2022
- BFLY Operations, Inc
- Jonathan M. Rothberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED MEMS-CMOS ULTRASONIC SENSOR
- Publication number 20220130899
- Publication date Apr 28, 2022
- Shenzhen Goodix Technology Co., Ltd.
- Mostafa SOLIMAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Processing a Layer Structure and Microelectromechanical...
- Publication number 20210363002
- Publication date Nov 25, 2021
- INFINEON TECHNOLOGIES AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...
- Publication number 20210291228
- Publication date Sep 23, 2021
- Butterfly Network, Inc.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTERCONNECTION FOR MONOLITHICALLY INTEGRATED STACKED DEVICES AND M...
- Publication number 20210260623
- Publication date Aug 26, 2021
- GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- You QIAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING MONOLITHIC INTEGRATION OF PIEZOELECTRIC MICROM...
- Publication number 20210206630
- Publication date Jul 8, 2021
- VANGUARD INTERNATIONAL SEMICONDUCTOR SINGAPORE PTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL APPARATUS HAVING HERMITIC CHAMBER
- Publication number 20210198101
- Publication date Jul 1, 2021
- Industrial Technology Research Institute
- Bor-Shiun LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...
- Publication number 20210155472
- Publication date May 27, 2021
- STMicroelectronics S.r.l.
- Alessandro Tocchio
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE AND CORRESPONDING PRODUCTION METHOD
- Publication number 20200361765
- Publication date Nov 19, 2020
- ROBERT BOSCH GmbH
- Johannes Baader
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...
- Publication number 20200346925
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20200317506
- Publication date Oct 8, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO-ELECTROMECHANICAL SYSTEM (NEMS) DEVICE STRUCTURE AND METHOD FO...
- Publication number 20200299129
- Publication date Sep 24, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsin-Ping CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELE...
- Publication number 20200290867
- Publication date Sep 17, 2020
- Infineon Technologies Dresden GmbH & Co. KG
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Processing a Layer Structure and Microelectromechanical...
- Publication number 20200277183
- Publication date Sep 3, 2020
- INFINEON TECHNOLOGIES AG
- Andre Brockmeier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...
- Publication number 20200262699
- Publication date Aug 20, 2020
- STMicroelectronics S.r.l.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...
- Publication number 20200250393
- Publication date Aug 6, 2020
- InvenSense, Inc.
- Julius Ming-Lin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONNECTION TO A MICRO ELECTRO-MECHANICAL SYSTEM
- Publication number 20200216310
- Publication date Jul 9, 2020
- Kionix, Inc.
- Andrew Hocking
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Monolithic integration

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and structure for CMOS-MEMS thin film encapsulation

Ultrasonic imaging devices, systems and methods

MEMS microphone and MEMS accelerometer on a single substrate

Method for producing monolithic integration of piezoelectric microm...

CMOS cap for MEMS devices

Gas sensor MEMS structures and methods of fabrication thereof

Integrated digital force sensors and related methods of manufacture

Integrated piezoelectric microelectromechanical ultrasound transduc...

Microelectromechanical apparatus having hermitic chamber

Method for processing a layer structure and microelectromechanical...

Semiconductor device including a microelectromechanical structure a...

Method and structure for CMOS-MEMS thin film encapsulation

Semiconductor device including a microelectromechanical structure a...

Microfabricated ultrasonic transducer having individual cells with...

Ultrasonic imaging devices, systems and methods

Micro-electro-mechanical device having two buried cavities and manu...

Antenna apparatus

Device for protecting FEOL element and BEOL element

Method for integrating complementary metal-oxide-semiconductor (CMO...

Piezoelectric micromachined ultrasonic transducers and methods for...

Integrated acoustic filter on complementary metal oxide semiconduct...

Fence structure to prevent stiction in a MEMS motion sensor

Integrated piezoelectric microelectromechanical ultrasound transduc...

Absolute and differential pressure sensors and related methods

Integrated digital force sensors and related methods of manufacture

CMOS-MEMS integration with through-chip via process

Method for processing a layer structure and microelectromechanical...

Nano-electromechanical system (NEMS) device structure and method fo...

Micromechanical device and corresponding production method

Ultrasonic sensing device

Patents Applicationslast 30 patents

HIGHLY SENSITIVE THERMOELECTRIC-BASED INFRARED DETECTOR WITH HIGH C...

METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP

MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE

MEMS DEVICE WITH INTEGRATED CMOS CIRCUIT

Method and Structure for CMOS-MEMS Thin Film Encapsulation

ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS

SENSOR CHIP WITH A PLURALITY OF INTEGRATED SENSOR CIRCUITS

MEMS MICROPHONE AND MEMS ACCELEROMETER ON A SINGLE SUBSTRATE

DEVICE FOR PROTECTING FEOL ELEMENT AND BEOL ELEMENT

ANTENNA APPARATUS

INTEGRATED DIGITAL FORCE SENSORS AND RELATED METHODS OF MANUFACTURE

MONOLITHIC POST COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR INTEGRATION...

INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...

ULTRASONIC IMAGING DEVICES, SYSTEMS AND METHODS

INTEGRATED MEMS-CMOS ULTRASONIC SENSOR

Method for Processing a Layer Structure and Microelectromechanical...

MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...

INTERCONNECTION FOR MONOLITHICALLY INTEGRATED STACKED DEVICES AND M...

METHOD FOR PRODUCING MONOLITHIC INTEGRATION OF PIEZOELECTRIC MICROM...

MICROELECTROMECHANICAL APPARATUS HAVING HERMITIC CHAMBER

SEMICONDUCTOR DEVICE INCLUDING A MICROELECTROMECHANICAL STRUCTURE A...

MICROMECHANICAL DEVICE AND CORRESPONDING PRODUCTION METHOD

METHOD FOR INTEGRATING COMPLEMENTARY METAL-OXIDE-SEMICONDUCTOR (CMO...

Method and Structure for CMOS-MEMS Thin Film Encapsulation

NANO-ELECTROMECHANICAL SYSTEM (NEMS) DEVICE STRUCTURE AND METHOD FO...

MICROELECTROMECHANICAL DEVICE, METHOD FOR MANUFACTURING A MICROELE...

Method for Processing a Layer Structure and Microelectromechanical...

MICRO-ELECTRO-MECHANICAL DEVICE HAVING TWO BURIED CAVITIES AND MANU...

INTEGRATED PIEZOELECTRIC MICROELECTROMECHANICAL ULTRASOUND TRANSDUC...

ELECTRICAL CONNECTION TO A MICRO ELECTRO-MECHANICAL SYSTEM