Membership
Tour
Register
Log in
of organic layers
Follow
Industry
CPC
H01L21/31058
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/31058
of organic layers
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Manufacturing method of semiconductor structure
Patent number
11,967,628
Issue date
Apr 23, 2024
NANYA TECHNOLOGY CORPORATION
Chih-Wei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and system for loading a superstrate onto a superstrate chuck
Patent number
11,964,421
Issue date
Apr 23, 2024
Canon Kabushiki Kaisha
Byung-Jin Choi
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Semiconductor package and method
Patent number
11,948,890
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Hao Tseng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,935,757
Issue date
Mar 19, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,923,212
Issue date
Mar 5, 2024
Semes Co., Ltd.
Kyungsik Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
11,915,936
Issue date
Feb 27, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Wei Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ambient controlled two-step thermal treatment for spin-on coating l...
Patent number
11,901,189
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chen-Fong Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of etch-stop layer for enhanced patterning
Patent number
11,869,770
Issue date
Jan 9, 2024
Lam Research Corporation
Nagraj Shankar
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-layer line structure and method for manufacturing thereof
Patent number
11,862,564
Issue date
Jan 2, 2024
Dai Nippon Printing Co., Ltd.
Hiroshi Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device
Patent number
11,843,027
Issue date
Dec 12, 2023
Tokyo Electron Limited
Tatsuya Yamaguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method to improve profile control during selective etching of silic...
Patent number
11,837,474
Issue date
Dec 5, 2023
American Air Liquide, Inc.
Xiangyu Guo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective layer formation using deposition and removing
Patent number
11,804,373
Issue date
Oct 31, 2023
ASM IP Holding, B.V.
Eva E. Tois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and method of manufacture
Patent number
11,776,853
Issue date
Oct 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
11,742,402
Issue date
Aug 29, 2023
NANYA TECHNOLOGY CORPORATION
Chih-Wei Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi-layer structures and methods of forming
Patent number
11,742,204
Issue date
Aug 29, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Chang-Jung Hsueh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Chuck assembly, planarization process, apparatus and method of manu...
Patent number
11,728,203
Issue date
Aug 15, 2023
Canon Kabushiki Kaisha
Seth J. Bamesberger
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor package structure
Patent number
11,699,694
Issue date
Jul 11, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Hsiu Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal etching with in situ plasma ashing
Patent number
11,699,596
Issue date
Jul 11, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsing-Hsiang Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Improving surface topography by forming spacer-like components
Patent number
11,665,897
Issue date
May 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Chang Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming planarization layer and pattern forming method u...
Patent number
11,651,968
Issue date
May 16, 2023
SK Hynix Inc.
Ji Sok Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vertical capacitor structure having capacitor in cavity, and method...
Patent number
11,631,734
Issue date
Apr 18, 2023
Advanced Semiconductor Engineering, Inc.
Syu-Tang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,626,293
Issue date
Apr 11, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Planarization apparatus including superstrate chuck with bendable p...
Patent number
11,587,795
Issue date
Feb 21, 2023
Canon Kabushiki Kaisha
Xiaoming Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing and resin grinding apparatus
Patent number
11,574,804
Issue date
Feb 7, 2023
Disco Corporation
Shinya Watanabe
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Ultra-compact inductor made of 3D Dirac semimetal
Patent number
11,563,078
Issue date
Jan 24, 2023
The University of Utah Research Foundation
Berardi Sensale Rodriguez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Directional selective junction clean with field polymer protections
Patent number
11,562,909
Issue date
Jan 24, 2023
Applied Materials, Inc.
Yu Lei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
11,557,483
Issue date
Jan 17, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Wei Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for curing a shaped film
Patent number
11,550,216
Issue date
Jan 10, 2023
Canon Kabushiki Kaisha
Anshuman Cherala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor wafer dicing process
Patent number
11,545,394
Issue date
Jan 3, 2023
SPTS Technologies Limited
Matthew Michael Day
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self-assembled nanostructures including metal oxides and semiconduc...
Patent number
11,532,477
Issue date
Dec 20, 2022
Micron Technology, Inc.
Nicholas Hendricks
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
METHOD TO IMPROVE PROFILE CONTROL DURING SELECTIVE ETCHING OF SILIC...
Publication number
20240112920
Publication date
Apr 4, 2024
American Air Liquide, Inc.
Xiangyu GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD WITH METAL HARD MASK
Publication number
20240112923
Publication date
Apr 4, 2024
Beijing NAURA Microelectronics Equipment Co., Ltd.
Yu ZHANG
B08 - CLEANING
Information
Patent Application
MULTI-LAYER LINE STRUCTURE
Publication number
20240088040
Publication date
Mar 14, 2024
DAI NIPPON PRINTING CO., LTD.
Hiroshi Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPERSTRATE INCLUDING A BODY AND LAYERS AND METHODS OF FORMING AND...
Publication number
20230415195
Publication date
Dec 28, 2023
Canon Kabushiki Kaisha
Niyaz KHUSNATDINOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING PATTERNS
Publication number
20230406970
Publication date
Dec 21, 2023
Samsung SDI Co., Ltd.
Seung-Wook SHIN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
AMBIENT CONTROLLED TWO-STEP THERMAL TREATMENT FOR SPIN-ON COATING L...
Publication number
20230386852
Publication date
Nov 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chen-Fong Tsai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Multi-Layer Structures and Methods of Forming
Publication number
20230369049
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chang-Jung Hsueh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
Publication number
20230352549
Publication date
Nov 2, 2023
NANYA TECHNOLOGY CORPORATION
Chih-Wei HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...
Publication number
20230335428
Publication date
Oct 19, 2023
Canon Kabushiki Kaisha
SETH J. BAMESBERGER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Info Structure with Copper Pillar Having Reversed Profile
Publication number
20230335426
Publication date
Oct 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsi-Kuei Cheng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHEMICAL MECHANICAL POLISHING PADS FOR IMPROVED REMOVAL RATE AND PL...
Publication number
20230294240
Publication date
Sep 21, 2023
Jonathan G. Weis
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TEMPLATE AND MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20230296979
Publication date
Sep 21, 2023
KIOXIA Corporation
Takeharu MOTOKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLANARIZING AGENT FOR FORMING ORGANIC FILM, COMPOSITION FOR FORMING...
Publication number
20230274936
Publication date
Aug 31, 2023
Shin-Etsu Chemical Co., Ltd.
Yasuyuki YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20230245900
Publication date
Aug 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Hao CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILM FORMING METHOD, ARTICLE MANUFACTURING METHOD, SUPPLY DEVICE, F...
Publication number
20230221636
Publication date
Jul 13, 2023
Canon Kabushiki Kaisha
JUN KATO
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20230146366
Publication date
May 11, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Wei SU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FORMING NANOSTRUCTURES INCLUDING METAL OXIDES USING BLOC...
Publication number
20230116129
Publication date
Apr 13, 2023
Micron Technology, Inc.
Nicholas Hendricks
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD TO IMPROVE PROFILE CONTROL DURING SELECTIVE ETCHING OF SILIC...
Publication number
20230026743
Publication date
Jan 26, 2023
American Air Liquide, Inc.
Xiangyu GUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE LAYER FORMATION USING DEPOSITION AND REMOVING
Publication number
20230016537
Publication date
Jan 19, 2023
ASM IP HOLDING B.V.
Eva E. Tois
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SPLITTING SEMICONDUCTOR WAFERS
Publication number
20230005794
Publication date
Jan 5, 2023
INFINEON TECHNOLOGIES AG
Christian Beyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Universal Surface-Mount Semiconductor Package
Publication number
20220415849
Publication date
Dec 29, 2022
Adventive International Ltd.
Richard K Williams
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20220351964
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECTIONAL SELECTIVE JUNCTION CLEAN WITH FIELD POLYMER PROTECTIONS
Publication number
20220336223
Publication date
Oct 20, 2022
Applied Materials, Inc.
Yu Lei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL ETCHING WITH IN SITU PLASMA ASHING
Publication number
20220336228
Publication date
Oct 20, 2022
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Hsing-Hsiang WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Package with Tilted Interface Between Device Die and Encapsulating...
Publication number
20220238404
Publication date
Jul 28, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Yen Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20220230889
Publication date
Jul 21, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Hao CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Improving Surface Topography by Forming Spacer-Like Components
Publication number
20220199636
Publication date
Jun 23, 2022
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Chang Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIST UNDERLAYER FILM-FORMING COMPOSITION
Publication number
20220146939
Publication date
May 12, 2022
NISSAN CHEMICAL CORPORATION
Hiroto OGATA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Semiconductor Device and Method of Manufacture
Publication number
20220130729
Publication date
Apr 28, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Hung-Hao Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHUCK ASSEMBLY, PLANARIZATION PROCESS, APPARATUS AND METHOD OF MANU...
Publication number
20220115259
Publication date
Apr 14, 2022
Canon Kabushiki Kaisha
SETH J. BAMESBERGER
H01 - BASIC ELECTRIC ELEMENTS