Off-axis setting using a light-guiding element

Industry

CPC
G03F7/70108

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70108Off-axis setting using a light-guiding element

Industries

Patents Grantslast 30 patents

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Optical system of a microlithographic projection exposure apparatus
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Optical system of a microlithographic projection exposure apparatus
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Illumination optical apparatus and projection exposure apparatus
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Illumination optical unit for projection lithography
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Illumination optical apparatus having distribution changing member...
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Illumination apparatus, illumination method, exposure apparatus, an...
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- Issue date Jun 13, 2017
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Off-axis setting using a light-guiding element

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Maskless photolithography devices, methods, and systems

Mirror array

Optical apparatus, machining apparatus, and article manufacturing m...

Exposure apparatus, adjusting method, and article manufacturing method

Illumination optical system, exposure apparatus and device manufact...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Exposure apparatus, exposure method, and device manufacturing method

Illumination optical apparatus, exposure apparatus, and exposure me...

Controller for optical device, exposure method and apparatus, and m...

Source optimization for image fidelity and throughput

Exposure apparatus, exposure method, and device manufacturing method

Illumination optical system, exposure apparatus and device manufact...

Fly's eye optical mirror with a plurality of optical elements rotat...

Optical system of a microlithographic projection exposure apparatus

Position measurement with illumination profile having two diametric...

Controller for optical device, exposure method and apparatus, and m...

Illumination optics for EUV projection lithography

Exposure apparatus, exposure method, and device manufacturing method

Projection exposure methods and systems

Illumination optical apparatus having deflecting member, lens, pola...

Illumination optical apparatus having deflecting member, lens, pola...

Optical system of a microlithographic projection exposure apparatus

Illumination optical apparatus having deflecting member, lens, pola...

Illumination optical apparatus and projection exposure apparatus

Illumination optical unit for projection lithography

Exposure apparatus, exposure method, and device manufacturing method

Illumination optical apparatus having deflecting member, lens, pola...

Illumination optical apparatus having distribution changing member...

Illumination apparatus, illumination method, exposure apparatus, an...

Patents Applicationslast 30 patents

MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS

MASKLESS PHOTOLITHOGRAPHY DEVICES, METHODS, AND SYSTEMS

EXPOSURE METHOD AND APPARATUS, AND METHOD FOR FABRICATING DEVICE WI...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...

CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...

PROJECTION EXPOSURE METHODS AND SYSTEMS

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

ILLUMINATION OPTICS FOR EUV PROJECTION LITHOGRAPHY

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

ILLUMINATION APPARATUS, ILLUMINATION METHOD, EXPOSURE APPARATUS, AN...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

Position Measurement with Illumination Profile having Regions Confi...

EXPOSURE METHOD AND APPARATUS, AND METHOD FOR FABRICATING DEVICE WI...

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS AND DEVICE MANUFACT...

OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, OPTICAL ELEMENT AN...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

CONTROLLER FOR OPTICAL DEVICE, EXPOSURE METHOD AND APPARATUS, AND M...

ILLUMINATION OPTICAL DEVICE, OPTICAL UNIT, ILLUMINATION METHOD, AND...

OPTICAL SYSTEM FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATU...

Optical Integrator, Illumination Optical Device, Aligner, and Metho...

FIELD FACET MIRROR FOR AN ILLUMINATION OPTICS OF A PROJECTION EXPOS...

MICROLITHOGRAPHIC ILLUMINATION SYSTEM

OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS...

DEVICE AND METHOD FOR DETECTING OPTICAL PERFORMANCE OF BEAM SHAPING...

ILLUMINATION OPTICAL UNIT FOR PROJECTION LITHOGRAPHY

FLY'S EYE OPTICAL MIRROR WITH A PLURALITY OF OPTICAL ELEMENTS ROTAT...

METHOD OF ADJUSTING LIGHTING OPTICAL DEVICE, LIGHTING OPTICAL DEVIC...

EXPOSURE APPARATUS, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD