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Optical aspects of catoptric systems
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last 30 patents
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Patent Grant
Optical objective for operation in EUV spectral region
Patent number
11,934,105
Issue date
Mar 19, 2024
Nikon Corporation
Daniel Gene Smith
G02 - OPTICS
Information
Patent Grant
Optical objective for operation in EUV spectral region
Patent number
11,899,371
Issue date
Feb 13, 2024
Nikon Corporation
Daniel Gene Smith
G02 - OPTICS
Information
Patent Grant
UV lithography system
Patent number
11,561,476
Issue date
Jan 24, 2023
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
Patent number
11,467,501
Issue date
Oct 11, 2022
Nikon Corporation
Hideki Komatsuda
G02 - OPTICS
Information
Patent Grant
Imaging optical unit for EUV microlithography
Patent number
11,422,470
Issue date
Aug 23, 2022
Carl Zeiss SMT GmbH
Johannes Ruoff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Illumination system with curved 1d-patterned mask for use in EUV-ex...
Patent number
11,300,884
Issue date
Apr 12, 2022
Nikon Corporation
Daniel Gene Smith
G02 - OPTICS
Information
Patent Grant
Systems and methods using mask pattern measurements performed with...
Patent number
11,281,093
Issue date
Mar 22, 2022
Samsung Electronics Co., Ltd.
Ji Hoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging optical unit for imaging an object field into an image field
Patent number
11,119,413
Issue date
Sep 14, 2021
Carl Zeiss SMT GmbH
Johannes Ruoff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for producing a mirror as an optical component for an optica...
Patent number
11,092,897
Issue date
Aug 17, 2021
Carl Zeiss SMT GmbH
Stefan Hembacher
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Systems and methods using mask pattern measurements performed with...
Patent number
11,061,322
Issue date
Jul 13, 2021
Samsung Electronics Co., Ltd.
Ji Hoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-mirror UV-LED optical lithography system
Patent number
11,042,097
Issue date
Jun 22, 2021
Soulnano Limited
Cho Hang Wong
G02 - OPTICS
Information
Patent Grant
Reflective image-forming optical system, exposure apparatus, and de...
Patent number
10,976,669
Issue date
Apr 13, 2021
Nikon Corporation
Yoshio Kawabe
G02 - OPTICS
Information
Patent Grant
Illumination optic for projection lithography
Patent number
10,928,733
Issue date
Feb 23, 2021
Carl Zeiss SMT GmbH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position measurement of optical elements in a lithographic apparatus
Patent number
10,908,508
Issue date
Feb 2, 2021
Carl Zeiss SMT GmbH
Erik Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
Patent number
10,866,522
Issue date
Dec 15, 2020
Nikon Corporation
Hideki Komatsuda
G02 - OPTICS
Information
Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
Patent number
10,684,551
Issue date
Jun 16, 2020
Carl Zeiss SMT GmbH
Norman Baer
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Imaging optical unit and projection exposure unit including same
Patent number
10,656,400
Issue date
May 19, 2020
Carl Zeiss SMT GmbH
Markus Schwab
G02 - OPTICS
Information
Patent Grant
Metal-compound-removing solvent and method in lithography
Patent number
10,622,211
Issue date
Apr 14, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
An-Ren Zi
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Reflective image-forming optical system, exposure apparatus, and de...
Patent number
10,599,042
Issue date
Mar 24, 2020
Nikon Corporation
Yoshio Kawabe
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection lens, projection exposure apparatus and projection expos...
Patent number
10,591,825
Issue date
Mar 17, 2020
Carl Zeiss SMT GmbH
Stephan Andre
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,558,126
Issue date
Feb 11, 2020
ASML Netherlands B.V.
Jan Bernard Plechelmus Van Schoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical unit for imaging an object field into an image f...
Patent number
10,558,026
Issue date
Feb 11, 2020
Carl Zeiss SMT GmbH
Markus Schwab
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical unit for EUV projection lithography
Patent number
10,545,323
Issue date
Jan 28, 2020
Carl Zeiss SMT GmbH
Markus Schwab
G02 - OPTICS
Information
Patent Grant
Imaging optical unit and projection exposure apparatus including same
Patent number
10,527,832
Issue date
Jan 7, 2020
Carl Zeiss SMT GmbH
Markus Schwab
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Position measurement of optical elements in a lithographic apparatus
Patent number
10,509,325
Issue date
Dec 17, 2019
Carl Zeiss SMT GmbH
Erik Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Projection optical system, exposure apparatus, and device manufactu...
Patent number
10,495,978
Issue date
Dec 3, 2019
Canon Kabushiki Kaisha
Yasuhito Sasaki
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging optical system and projection exposure installation for mic...
Patent number
10,481,500
Issue date
Nov 19, 2019
Carl Zeiss SMT GmbH
Hans-Juergen Mann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for aligning a mirror of a microlithographic projection expo...
Patent number
10,359,703
Issue date
Jul 23, 2019
Carl Zeiss SMT GmbH
Rolf Freimann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Imaging optical unit for imaging an object field into an image fiel...
Patent number
10,330,903
Issue date
Jun 25, 2019
Carl Zeiss SMT GmbH
Alexander Wolf
G02 - OPTICS
Information
Patent Grant
EUV exposure apparatus with reflective elements having reduced infl...
Patent number
10,317,802
Issue date
Jun 11, 2019
Carl Zeiss SMT GmbH
Norman Baer
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
IMAGING OPTICAL UNIT
Publication number
20240103382
Publication date
Mar 28, 2024
Carl Zeiss SMT GMBH
Hans-Jürgen Rostalski
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD
Publication number
20230367227
Publication date
Nov 16, 2023
Carl Zeiss SMT GMBH
Heiko Feldmann
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM, AND METHOD FOR OPERATING AN OPTICAL SYSTEM
Publication number
20230324648
Publication date
Oct 12, 2023
Carl Zeiss SMT GMBH
Andre Dirauf
G02 - OPTICS
Information
Patent Application
SPECTROMETRIC METROLOGY SYSTEMS BASED ON MULTIMODE INTERFERENCE AND...
Publication number
20230273531
Publication date
Aug 31, 2023
ASML Holding N.V.
Mohamed SWILLAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM, IN PARTICULAR LITHOGRAPHY SYSTEM
Publication number
20230194994
Publication date
Jun 22, 2023
Carl Zeiss SMT GMBH
Tanja Mueller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL SYSTEM WITH AN APERTURE STOP
Publication number
20230123115
Publication date
Apr 20, 2023
Carl Zeiss SMT GMBH
Tanja Mueller
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
Publication number
20230024028
Publication date
Jan 26, 2023
Nikon Corporation
Hideki Komatsuda
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
UV Lithography System
Publication number
20230011685
Publication date
Jan 12, 2023
Kenneth Carlisle Johnson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MIRROR ASSEMBLY AND OPTICAL ASSEMBLY COMPRISING SAME
Publication number
20220187516
Publication date
Jun 16, 2022
Carl Zeiss SMT GMBH
Alexandra PAZIDIS
G02 - OPTICS
Information
Patent Application
SYSTEMS AND METHODS USING MASK PATTERN MEASUREMENTS PERFORMED WITH...
Publication number
20210302828
Publication date
Sep 30, 2021
Samsung Electronics Co., Ltd.
Ji Hoon Na
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
Publication number
20210200100
Publication date
Jul 1, 2021
Nikon Corporation
Hideki Komatsuda
G02 - OPTICS
Information
Patent Application
MULTI-MIRROR UV-LED OPTICAL LITHOGRAPHY SYSTEM
Publication number
20210200103
Publication date
Jul 1, 2021
Soulnano Limited
Cho Hang WONG
G02 - OPTICS
Information
Patent Application
POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS
Publication number
20210149309
Publication date
May 20, 2021
Carl Zeiss SMT GMBH
Erik Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMAGING OPTICAL UNIT FOR EUV MICROLITHOGRAPHY
Publication number
20200348602
Publication date
Nov 5, 2020
Carl Zeiss SMT GMBH
Johannes Ruoff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION OPTIC FOR PROJECTION LITHOGRAPHY
Publication number
20200348600
Publication date
Nov 5, 2020
Carl Zeiss SMT GMBH
Michael Patra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus, Lithographic Projection Apparatus and Devic...
Publication number
20200209757
Publication date
Jul 2, 2020
ASML NETHERLANDS B.V.
Hans BUTLER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DE...
Publication number
20200174375
Publication date
Jun 4, 2020
Nikon Corporation
Yoshio KAWABE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL OBJECTIVE FOR OPERATION IN EUV SPECTRAL REGION
Publication number
20200117099
Publication date
Apr 16, 2020
Daniel Gene Smith
G02 - OPTICS
Information
Patent Application
POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS
Publication number
20200089126
Publication date
Mar 19, 2020
Carl Zeiss SMT GMBH
Erik Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ILLUMINATION SYSTEM WITH CURVED 1D-PATTERNED MASK FOR USE IN EUV-EX...
Publication number
20200073251
Publication date
Mar 5, 2020
Nikon Corporation
Daniel Gene Smith
G02 - OPTICS
Information
Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
Publication number
20190310555
Publication date
Oct 10, 2019
Carl Zeiss SMT GMBH
Norman Baer
G02 - OPTICS
Information
Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
Publication number
20190302621
Publication date
Oct 3, 2019
Nikon Corporation
Hideki Komatsuda
G02 - OPTICS
Information
Patent Application
PROJECTION OPTICAL UNIT FOR EUV PROJECTION LITHOGRAPHY
Publication number
20190121107
Publication date
Apr 25, 2019
Carl Zeiss SMT GMBH
Markus Schwab
G02 - OPTICS
Information
Patent Application
HIGH NA (NUMERICAL APERTURE) RECTANGULAR FIELD EUV CATOPTRIC PROJEC...
Publication number
20190113723
Publication date
Apr 18, 2019
Nikon Corporation
David M. Williamson
G02 - OPTICS
Information
Patent Application
POSITION MEASUREMENT OF OPTICAL ELEMENTS IN A LITHOGRAPHIC APPARATUS
Publication number
20190086813
Publication date
Mar 21, 2019
Carl Zeiss SMT GMBH
Erik Loopstra
G02 - OPTICS
Information
Patent Application
IMAGING OPTICAL SYSTEM
Publication number
20190025710
Publication date
Jan 24, 2019
Hans-Juergen Mann
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROJECTION OPTICAL UNIT FOR IMAGING AN OBJECT FIELD INTO AN IMAGE F...
Publication number
20190025562
Publication date
Jan 24, 2019
Carl Zeiss SMT GMBH
Markus Schwab
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Projection Lens, Projection Exposure Apparatus and Projection Expos...
Publication number
20180364583
Publication date
Dec 20, 2018
Carl Zeiss SMT GMBH
Stephan Andre
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REFLECTIVE IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DE...
Publication number
20180299781
Publication date
Oct 18, 2018
Nikon Corporation
Yoshio KAWABE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EUV EXPOSURE APPARATUS WITH REFLECTIVE ELEMENTS HAVING REDUCED INFL...
Publication number
20180299784
Publication date
Oct 18, 2018
Carl Zeiss SMT GMBH
Norman Baer
B82 - NANO-TECHNOLOGY