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MEMBRANE FOR EUV LITHOGRAPHY
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Publication number 20240004283
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Publication date Jan 4, 2024
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ASML NETHERLANDS B.V.
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Maxim Aleksandrovich Nasalevich
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G02 - OPTICS
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OPTICAL ASSEMBLY WITH COATING AND METHODS OF USE
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Publication number 20230408906
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Publication date Dec 21, 2023
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Pei-Cheng Hsu
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DETECTION METHOD OF EUV PELLICLE STATUS
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Publication number 20230393489
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Publication date Dec 7, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Yen-Hao LIU
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G06 - COMPUTING CALCULATING COUNTING
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PELLICLE FRAME WITH STRESS RELIEF TRENCHES
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Publication number 20230324787
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Publication date Oct 12, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Kuo-Hao LEE
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PELLICLE REMOVAL TOOL
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Publication number 20230274965
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Publication date Aug 31, 2023
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PHOTRONICS, INC.
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Hilario Ar-Miguel Alvarez
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H01 - BASIC ELECTRIC ELEMENTS
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EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE
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Publication number 20230213865
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Publication date Jul 6, 2023
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Ushio Denki Kabushiki Kaisha
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Hajime KIKUIRI
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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PHOTOMASK INCLUDING PELLICLE
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Publication number 20230111608
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Publication date Apr 13, 2023
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SK HYNIX INC.
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Tae Joong HA
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C01 - INORGANIC CHEMISTRY
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METHOD FOR GENERATING EUV RADIATION
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Publication number 20230064760
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Publication date Mar 2, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Sheng-Min WANG
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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