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G01N2223/611
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PHYSICS
G01
Measuring instruments
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N2223/00
Investigating materials by wave or particle radiation
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G01N2223/611
patterned objects electronic devices
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Patents Grants
last 30 patents
Information
Patent Grant
Large die wafer, large die and method of forming the same
Patent number
12,322,707
Issue date
Jun 3, 2025
Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.
Sheng Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Full beam metrology for x-ray scatterometry systems
Patent number
12,320,763
Issue date
Jun 3, 2025
KLA Corporation
Antonio Arion Gellineau
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
X-ray analysis system and method with multi-source design
Patent number
12,292,396
Issue date
May 6, 2025
SHENZHEN ANGSTROM EXCELLENCE TECHNOLOGY CO. LTD
Xuena Zhang
G01 - MEASURING TESTING
Information
Patent Grant
Apparatus and method for computed tomography system calibration
Patent number
12,292,394
Issue date
May 6, 2025
Baker Hughes Holdings LLC
Alexander Suppes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Parameterizing x-ray scattering measurement using slice-and-image t...
Patent number
12,288,706
Issue date
Apr 29, 2025
Carl Zeiss SMT GmbH
Hans Michael Stiepan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Characterizing and measuring in small boxes using XPS with multiple...
Patent number
12,281,893
Issue date
Apr 22, 2025
NOVA MEASURING INSTRUMENTS INC.
Heath Pois
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method, apparatus, and program for determining condition related to...
Patent number
12,243,711
Issue date
Mar 4, 2025
HITACHI HIGH-TECH CORPORATION
Takahiro Nishihata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Inspection device
Patent number
12,228,527
Issue date
Feb 18, 2025
Saki Corporation
Hiroyuki Murata
G01 - MEASURING TESTING
Information
Patent Grant
Transmissive small-angle scattering device
Patent number
12,222,303
Issue date
Feb 11, 2025
Rigaku Corporation
Naoki Matsushima
G01 - MEASURING TESTING
Information
Patent Grant
Image processing and detection of discontinuities in battery cells
Patent number
12,203,880
Issue date
Jan 21, 2025
GM Global Technology Operations LLC
Sean Robert Wagner
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Industrial x-ray workpiece measuring system and method for operatin...
Patent number
12,203,876
Issue date
Jan 21, 2025
Intom GmbH
Severin Ebner
G01 - MEASURING TESTING
Information
Patent Grant
Systems and methods for voltage contrast defect detection
Patent number
12,196,692
Issue date
Jan 14, 2025
ASML Netherlands B.V.
Weiming Ren
G01 - MEASURING TESTING
Information
Patent Grant
X-ray based measurements in patterned structure
Patent number
12,196,691
Issue date
Jan 14, 2025
Nova Ltd.
Gilad Barak
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for efficient high harmonic generation
Patent number
12,196,688
Issue date
Jan 14, 2025
ASML Netherlands B.V.
Petrus Wilhelmus Smorenburg
G01 - MEASURING TESTING
Information
Patent Grant
Image pickup device and image generation method
Patent number
12,181,425
Issue date
Dec 31, 2024
Kioxia Corporation
Takeshi Yamane
G01 - MEASURING TESTING
Information
Patent Grant
Utilize machine learning in selecting high quality averaged SEM ima...
Patent number
12,182,983
Issue date
Dec 31, 2024
ASML Netherlands B.V.
Chen Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Bonding wire for semiconductor devices
Patent number
12,166,006
Issue date
Dec 10, 2024
NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
Tomohiro Uno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding wire for semiconductor devices
Patent number
12,132,026
Issue date
Oct 29, 2024
NIPPON STEEL CHEMICAL & MATERIAL CO., LTD.
Tomohiro Uno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for estimating the occurrence of defects, and computer-reada...
Patent number
12,111,272
Issue date
Oct 8, 2024
HITACHI HIGH-TECH CORPORATION
Hiroshi Fukuda
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method and apparatus for monitoring beam profile and power
Patent number
12,105,036
Issue date
Oct 1, 2024
ASML Netherlands B.V.
Jian Zhang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Small-angle X-ray scatterometry
Patent number
12,085,521
Issue date
Sep 10, 2024
BRUKER TECHNOLOGIES LTD.
Alex Dikopoltsev
G01 - MEASURING TESTING
Information
Patent Grant
Monitoring properties of X-ray beam during X-ray analysis
Patent number
12,078,604
Issue date
Sep 3, 2024
BRUKER TECHNOLOGIES LTD.
Alexander Krokhmal
G01 - MEASURING TESTING
Information
Patent Grant
Defect characterization method and apparatus
Patent number
12,067,704
Issue date
Aug 20, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Ning Huang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Battery holder device and battery test system including the same
Patent number
12,061,157
Issue date
Aug 13, 2024
SK ON CO., LTD.
Hye Ju Jang
G01 - MEASURING TESTING
Information
Patent Grant
Estimating heights of defects in a wafer by scaling a 3D model usin...
Patent number
12,057,336
Issue date
Aug 6, 2024
Samsung Electronics Co., Ltd.
Shashank Shrikant Agashe
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Inspection method, inspection system, and semiconductor fabrication...
Patent number
12,055,861
Issue date
Aug 6, 2024
Samsung Electronics Co., Ltd.
Kihyun Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Soft x-ray optics with improved filtering
Patent number
12,025,575
Issue date
Jul 2, 2024
KLA Corporation
Alexander Kuznetsov
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Transmissive small-angle scattering device
Patent number
12,019,036
Issue date
Jun 25, 2024
Rigaku Corporation
Naoki Matsushima
G01 - MEASURING TESTING
Information
Patent Grant
Diagnosis of cause of degradation of lithium secondary battery
Patent number
12,013,356
Issue date
Jun 18, 2024
LG ENERGY SOLUTION, LTD.
Hyo Jung Yoon
G01 - MEASURING TESTING
Information
Patent Grant
Methods and systems for compact, small spot size soft x-ray scatter...
Patent number
12,013,355
Issue date
Jun 18, 2024
KLA Corporation
David Y. Wang
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
Methods And Systems For Spectral Measurements Based On Perturbed Sp...
Publication number
20250164411
Publication date
May 22, 2025
KLA Corporation
William McGahan
G01 - MEASURING TESTING
Information
Patent Application
FIELD OF VIEW SELECTION FOR METROLOGY ASSOCIATED WITH SEMICONDUCTOR...
Publication number
20250147433
Publication date
May 8, 2025
ASML NETHERLANDS B.V.
Tsung-Pao FANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
DEFORMATION ANALYSIS DEVICE FOR SECONDARY BATTERY AND METHOD THEREOF
Publication number
20250124564
Publication date
Apr 17, 2025
Samsung SDI Co., Ltd.
Seong Ho WOO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
DEFORMATION ANALYSIS DEVICE FOR SECONDARY BATTERY AND METHOD THEREOF
Publication number
20250125431
Publication date
Apr 17, 2025
Samsung SDI Co., Ltd.
Seong Ho WOO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Component authentication using x-ray detectable unique features
Publication number
20250111497
Publication date
Apr 3, 2025
Guilherme Cardoso
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Forward Library Based Seeding For Efficient X-Ray Scatterometry Mea...
Publication number
20250085241
Publication date
Mar 13, 2025
KLA Corporation
Rebecca Shen
G01 - MEASURING TESTING
Information
Patent Application
UTILIZE MACHINE LEARNING IN SELECTING HIGH QUALITY AVERAGED SEM IMA...
Publication number
20250078244
Publication date
Mar 6, 2025
ASML NETHERLANDS B.V.
Chen ZHANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND SYSTEM FOR MATCHING CALIBRATIONS OF DETECTORS IN A DETEC...
Publication number
20250067685
Publication date
Feb 27, 2025
Thermo EGS Gauging LLC
Carter WATSON
G01 - MEASURING TESTING
Information
Patent Application
PRODUCTION SOLUTIONS FOR HIGH-THROUGHPUT/PRECISION XPS METROLOGY US...
Publication number
20250067691
Publication date
Feb 27, 2025
NOVA MEASURING INSTRUMENTS INC.
Heath POIS
G01 - MEASURING TESTING
Information
Patent Application
HYBRID X-RAY AND OPTICAL METROLOGY AND NAVIGATION
Publication number
20250060324
Publication date
Feb 20, 2025
TOKYO ELECTRON LIMITED
Francisco Machuca
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR EVALUATING THE BENDING STIFFNESS OF HIGH ASPECT RATIO NA...
Publication number
20250052703
Publication date
Feb 13, 2025
IMEC vzw
XiuMei Xu
B82 - NANO-TECHNOLOGY
Information
Patent Application
INSPECTION APPARATUS AND METHOD FOR GENERATING INSPECTION IMAGE
Publication number
20250037269
Publication date
Jan 30, 2025
NuFlare Technology, Inc.
Shinji SUGIHARA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR DETECTING DEFECTS IN SEMICONDUCTOR STRUCTURE AND METHOD...
Publication number
20250028253
Publication date
Jan 23, 2025
Taiwan Semiconductor Manufacturing company Ltd.
YEN-FONG CHAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNED X-RAY EMITTING TARGET
Publication number
20250006451
Publication date
Jan 2, 2025
NOVA MEASURING INSTRUMENTS INC.
David A. REED
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...
Publication number
20240418633
Publication date
Dec 19, 2024
KLA Corporation
Shova Subedi
G01 - MEASURING TESTING
Information
Patent Application
CHARACTERIZING AND MEASURING IN SMALL BOXES USING XPS WITH MULTIPLE...
Publication number
20240401940
Publication date
Dec 5, 2024
NOVA MEASURING INSTRUMENTS INC.
Heath POIS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CHARACTERIZING A NETWORK TO BE ANALYSED COMPRISING PERIO...
Publication number
20240394867
Publication date
Nov 28, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Lucas JALOUSTRE
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Analysis System
Publication number
20240393270
Publication date
Nov 28, 2024
Hitachi High-Tech Corporation
Azusa KONNO
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MIC...
Publication number
20240393269
Publication date
Nov 28, 2024
Carl Zeiss SMT GMBH
Jens Oster
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Analysis Device and Analysis Method
Publication number
20240385131
Publication date
Nov 21, 2024
JEOL Ltd.
Takeshi Otsuka
G01 - MEASURING TESTING
Information
Patent Application
ROENTGEN INTEGRATED METROLOGY FOR HYBRID BONDING PROCESS CONTROL IN...
Publication number
20240387448
Publication date
Nov 21, 2024
TOKYO ELECTRON LIMITED
Francisco MACHUCA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Small-Angle X-Ray Scatterometry
Publication number
20240377342
Publication date
Nov 14, 2024
BRUKER TECHNOLOGIES LTD.
Alex Dikopoltsev
G01 - MEASURING TESTING
Information
Patent Application
METHOD FOR CONVERTING METROLOGY DATA
Publication number
20240377343
Publication date
Nov 14, 2024
ASML NETHERLANDS B.V.
Yunbo GUO
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
Publication number
20240363447
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Te-Chien HOU
B24 - GRINDING POLISHING
Information
Patent Application
SYSTEM AND METHOD FOR DENOISING A REGION OF INTEREST OF A PATTERN
Publication number
20240361262
Publication date
Oct 31, 2024
ETROLOGY, LLC
Vladislav Kaplan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
BATTERY HOLDER DEVICE AND BATTERY TEST SYSTEM INCLUDING THE SAME
Publication number
20240345004
Publication date
Oct 17, 2024
SK On Co., Ltd.
Hye Ju JANG
G01 - MEASURING TESTING
Information
Patent Application
METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...
Publication number
20240328970
Publication date
Oct 3, 2024
Carl Zeiss SMT GMBH
Dmitry Klochkov
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND SYSTEM FOR ANOMALY-BASED DEFECT INSPECTION
Publication number
20240331132
Publication date
Oct 3, 2024
ASML NETHERLANDS B.V.
Haoyi LIANG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY
Publication number
20240331179
Publication date
Oct 3, 2024
Carl Zeiss SMT GMBH
Dmitry Klochkov
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TRAINING SCANNING ELECTRON MICROSCOPY IMAGE SELECTION METHOD AND SE...
Publication number
20240320816
Publication date
Sep 26, 2024
Samsung Electronics Co., Ltd.
Nohong Kwak
G06 - COMPUTING CALCULATING COUNTING