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PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
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PHYSICS
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Photography
Current Industry
G03F
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES
Sub Industries
G03F1/00
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles Mask blanks or pellicles therefor Containers specially adapted therefor Preparation thereof
G03F3/00
Colour separation Correction of tonal value
G03F5/00
Screening processes Screens therefor
G03F7/00
Photomechanical
G03F9/00
Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces
Industries
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Patents Grants
last 30 patents
Information
Patent Grant
Method of forming patterns on substrate by double nanoimprint litho...
Patent number
11,960,203
Issue date
Apr 16, 2024
United Microelectronics Corp.
Yi-Chieh Lai
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Optical lithography system and method of using the same
Patent number
11,960,211
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation filter for a radiation sensor
Patent number
11,960,215
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Vahid Mohammadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solvent compatible nozzle plate
Patent number
11,958,292
Issue date
Apr 16, 2024
Funai Electric Co., Ltd.
Sean T. Weaver
B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information
Patent Grant
Mask, flexible display panel and manufacturing method thereof
Patent number
11,963,431
Issue date
Apr 16, 2024
Chengdu BOE Optoelectronics Technology Co., Ltd.
Qian Hu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of critical dimension control by oxygen and nitrogen plasma...
Patent number
11,960,201
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photoresist composition, coated substrate including the photoresist...
Patent number
11,960,206
Issue date
Apr 16, 2024
Rohm and Hass Electronic Materials LLC
Emad Aqad
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Photosensitive element, resin composition for forming barrier layer...
Patent number
11,960,208
Issue date
Apr 16, 2024
Resonac Corporation
Masakazu Kume
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Photocurable composition, method for producing concave-convex struc...
Patent number
11,958,971
Issue date
Apr 16, 2024
Mitsui Chemicals, Inc.
Takashi Oda
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
Patent number
11,961,708
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Haruyuki Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser interference fringe control for higher EUV light source and E...
Patent number
11,960,210
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun David Yang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Extreme ultraviolet lithography device and method of operating extr...
Patent number
11,960,212
Issue date
Apr 16, 2024
Samsung Electronics Co., Ltd.
Hoduk Cho
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Computer-readable storage medium recording data structure for stori...
Patent number
11,960,214
Issue date
Apr 16, 2024
AUROS TECHNOLOGY, INC.
Sol-Lee Hwang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for manufacturing a horology component
Patent number
11,960,205
Issue date
Apr 16, 2024
Rolex S.A.
Florian Calame
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Resist composition and resist film
Patent number
11,960,207
Issue date
Apr 16, 2024
Zeon Corporation
Manabu Hoshino
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Photolithography method and photolithography system
Patent number
11,959,864
Issue date
Apr 16, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Chi-Hung Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target material control in an EUV light source
Patent number
11,963,285
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Abhiram Lakshmi Ganesh Govindaraju
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
EUV mask defect tool apparatus
Patent number
11,960,202
Issue date
Apr 16, 2024
EUV TECH, INC.
Chami N Perera
G01 - MEASURING TESTING
Information
Patent Grant
Microlithographic fabrication of structures
Patent number
11,960,204
Issue date
Apr 16, 2024
Molecular Imprints, Inc.
Vikramjit Singh
G02 - OPTICS
Information
Patent Grant
Developing treatment method and developing treatment apparatus
Patent number
11,960,209
Issue date
Apr 16, 2024
Tokyo Electron Limited
Akiko Kai
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate holder, lithographic apparatus, device manufacturing meth...
Patent number
11,960,213
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Raymond Wilhelmus Louis Lafarre
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Invariable magnification multilevel optical device with telecentric...
Patent number
11,960,216
Issue date
Apr 16, 2024
ASML Holding N.V.
Lev Ryzhikov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Micro-lens array, projection type image display device, method for...
Patent number
11,960,103
Issue date
Apr 16, 2024
DEXERIALS CORPORATION
Kazuyuki Shibuya
G02 - OPTICS
Information
Patent Grant
Electronic-sensing and magnetic-modulation (ESMM) biosensor for pha...
Patent number
11,951,476
Issue date
Apr 9, 2024
Rutgers, The State University of New Jersey
Umer Hassan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Measurement method and apparatus
Patent number
11,953,823
Issue date
Apr 9, 2024
ASML Netherlands B.V.
Christopher Alan Spence
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Molecular resist composition and patterning process
Patent number
11,953,827
Issue date
Apr 9, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Actinic ray-sensitive or radiation-sensitive resin composition, res...
Patent number
11,953,829
Issue date
Apr 9, 2024
FUJIFILM Corporation
Kazunari Yagi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Photosensitive resin composition, photosensitive resin sheet, cured...
Patent number
11,953,830
Issue date
Apr 9, 2024
Toray Industries, Inc.
Yusuke Komori
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography support cleaning with cleaning substrate having control...
Patent number
11,953,838
Issue date
Apr 9, 2024
ASML Holding N.V.
Keane Michael Levy
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for coating photo resist over a substrate
Patent number
11,955,335
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Hung Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
Publication number
20240126162
Publication date
Apr 18, 2024
S&S TECH CO., LTD.
Yong-Dae KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
IMPRINT APPARATUS AND PRODUCT MANUFACTURING METHOD
Publication number
20240126165
Publication date
Apr 18, 2024
Canon Kabushiki Kaisha
Kenichi Kobayashi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FREEFORM OPTICAL SUBSTRATES IN WAVEGUIDE DISPLAYS
Publication number
20240126166
Publication date
Apr 18, 2024
Applied Materials, Inc.
David Alexander SELL
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE DEVICE AND METHOD
Publication number
20240126177
Publication date
Apr 18, 2024
Chun-Jung Chiu
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTICAL IMAGING METHOD, DEVICE AND SYSTEM FOR PHOTOLITHOGRAPHY SYSTEM
Publication number
20240126179
Publication date
Apr 18, 2024
Wuhan Yuwei Optical Software Co., Ltd.
Haiqing Wei
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, CONTROL METHOD OF EXPOSURE APPARATUS, INFORMATI...
Publication number
20240126182
Publication date
Apr 18, 2024
Canon Kabushiki Kaisha
JUN MOIZUMI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Nanoparticle Ink Based Patterning Of Inorganic Materials
Publication number
20240124726
Publication date
Apr 18, 2024
The Trustees of the University of Pennsylvania
Akhila Mallavarapu
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
PHASE SHIFT BLANKMASK AND PHOTOMASK FOR EUV LITHOGRAPHY
Publication number
20240126163
Publication date
Apr 18, 2024
S&S TECH CO., LTD.
Yong-Dae KIM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SPATIAL LIGHT MODULATION UNIT AND EXPOSURE APPARATUS
Publication number
20240126176
Publication date
Apr 18, 2024
Nikon Corporation
Yasuhito KUBOTA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
POLYMER, RESIST COMPOSITION INCLUDING THE SAME, AND METHOD OF FORMI...
Publication number
20240124635
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Minsang KIM
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Application
PHOTOGRAPHIC COLOR IMAGE USING BLACK AND WHITE EMULSION
Publication number
20240126159
Publication date
Apr 18, 2024
Penumbra Foundation
Eric Rosenthal
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RADIATION-SENSITIVE COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20240126167
Publication date
Apr 18, 2024
JSR Corporation
Ken MARUYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTOSENSITIVE RESIN COMPOSITION AND DISPLAY DEVICE
Publication number
20240126169
Publication date
Apr 18, 2024
SAMSUNG DISPLAY CO., LTD.
YANG-HO JUNG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ULTRAVIOLET LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240128701
Publication date
Apr 18, 2024
Gigaphoton Inc.
Atsushi FUCHIMUKAI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BYPASS APPARATUS, LASER APPARATUS, AND ELECTRONIC DEVICE MANUFACTUR...
Publication number
20240128702
Publication date
Apr 18, 2024
Gigaphoton Inc.
Shinichi MATSUMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXTREME ULTRAVIOLET (EUV) MASK AND MANUFACTURING METHOD THEREOF
Publication number
20240126161
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Sungwoo JANG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND PHOTORESIST COMP...
Publication number
20240126170
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chun-Chih HO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SCALING FOR DIE-LAST ADVANCED IC PACKAGING
Publication number
20240126180
Publication date
Apr 18, 2024
Applied Materials, Inc.
Jang Fung CHEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
BEARING SYSTEM, LITHOGRAPHY SYSTEM, AND METHOD FOR PRODUCING A BEAR...
Publication number
20240126184
Publication date
Apr 18, 2024
Carl Zeiss SMT GMBH
Radhakrishna RAO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
GAS LASER AMPLIFIER, GAS LASER APPARATUS, EUV LIGHT GENERATION APPA...
Publication number
20240128705
Publication date
Apr 18, 2024
Mitsubishi Electric Corporation
Tatsuya YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REFLECTIVE PHOTOMASK BLANK AND REFLECTIVE PHOTOMASK
Publication number
20240126160
Publication date
Apr 18, 2024
TOPPAN PHOTOMASK CO., LTD.
Ayumi GODA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Reticle Constructions and Photo-Processing Methods
Publication number
20240126164
Publication date
Apr 18, 2024
Micron Technology, Inc.
Chung-Yi Lee
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ONIUM SALT TYPE MONOMER, POLYMER, CHEMICALLY AMPLIFIED RESIST COMPO...
Publication number
20240126168
Publication date
Apr 18, 2024
Shin-Etsu Chemical Co., Ltd.
Masahiro Fukushima
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HOLLOW STRUCTURE, ELECTRONIC COMPONENT USING SAME, AND NEGATIVE PHO...
Publication number
20240126171
Publication date
Apr 18, 2024
TORAY INDUSTRIES, INC.
Yutaro KOYAMA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST UNDERLAYER COMPOSITION
Publication number
20240126172
Publication date
Apr 18, 2024
Rohm and Haas Electronic Materials L.L.C.
Anton CHAVEZ
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLEXOGRAPHIC PRINTING PLATE PRECURSOR AND MANUFACTURING METHOD OF F...
Publication number
20240126173
Publication date
Apr 18, 2024
FUJIFILM CORPORATION
Kazuki WATANABE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHY
Publication number
20240126174
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Meng-Che Tu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING RESIST PATTERN, METHOD FOR PRODUCING SEMICONDUCT...
Publication number
20240126175
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Seiji NAGAHARA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
EXPOSURE APPARATUS, CONTROL METHOD, AND DEVICE MANUFACTURING METHOD
Publication number
20240126178
Publication date
Apr 18, 2024
Nikon Corporation
Masaki KATO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PROCESS WINDOW BASED ON DEFECT PROBABILITY
Publication number
20240126181
Publication date
Apr 18, 2024
ASML NETHERLANDS B.V.
Abraham SLACHTER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY