Plasma polymerization

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CPC
B81C2201/018

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2201/00Manufacture or treatment of micro-structural devices or systems

Current Industry

B81C2201/018Plasma polymerization

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Inkjet printing process
- Patent number 12,194,751
- Issue date Jan 14, 2025
- LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Nicolas Godard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 12,134,555
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical systems fabricated by printing-based assembly
- Patent number 12,136,620
- Issue date Nov 5, 2024
- The Board of Trustees of the University of Illinois
- John A. Rogers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device using a metallic movable part...
- Patent number 12,122,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite timepiece and method for producing same
- Patent number 12,091,314
- Issue date Sep 17, 2024
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Sébastien Lani
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Methods and devices for fabricating and assembling printable semico...
- Patent number 12,074,213
- Issue date Aug 27, 2024
- The Board of Trustees of the University of Illinois
- Ralph G. Nuzzo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma micronozzle adapter
- Patent number 11,993,011
- Issue date May 28, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Eric Langlois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Damascene interconnect structure, actuator device, and method of ma...
- Patent number 11,987,493
- Issue date May 21, 2024
- Hamamatsu Photonics K.K.
- Daiki Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flexible electrode and preparation method thereof
- Patent number 11,970,391
- Issue date Apr 30, 2024
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Tianzhun Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabrication of omni-view peripheral scanning system
- Patent number 11,926,523
- Issue date Mar 12, 2024
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro mechanical system and manufacturing method thereof
- Patent number 11,851,321
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Li Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of depositing nanotwinned nickel-molybdenum-tungsten alloys
- Patent number 11,851,320
- Issue date Dec 26, 2023
- The Johns Hopkins University
- Gi-Dong Sim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating micro electro-mechanical systems structures
- Patent number 11,845,654
- Issue date Dec 19, 2023
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional features formed in molded panel
- Patent number 11,807,523
- Issue date Nov 7, 2023
- Hewlett-Packard Development Company, L.P.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a tiltable suspended structure controlled by ele...
- Patent number 11,681,141
- Issue date Jun 20, 2023
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method for manufacturing same
- Patent number 11,673,797
- Issue date Jun 13, 2023
- SHANGHAI INDUSTRIAL UTECHNOLOGY RESEARCH INSTITUTE
- Shinan Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for CMOS-MEMS thin film encapsulation
- Patent number 11,667,517
- Issue date Jun 6, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of constructing a micromechanical device
- Patent number 11,667,521
- Issue date Jun 6, 2023
- City University of Hong Kong
- Yang Lu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vertical nanopore coupled with a pair of transverse electrodes havi...
- Patent number 11,644,435
- Issue date May 9, 2023
- Seagate Technology LLC
- ShuaiGang Xiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Attachment method for microfluidic device
- Patent number 11,571,692
- Issue date Feb 7, 2023
- PhysioLogic Devices, Inc.
- Peter C. Lord
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic microchips by 3D printing
- Patent number 11,560,305
- Issue date Jan 24, 2023
- Gregory Nordin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,521,840
- Issue date Dec 6, 2022
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a micromechanical device having a damper struc...
- Patent number 11,505,455
- Issue date Nov 22, 2022
- Robert Bosch GmbH
- Holger Hoefer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective step coverage for micro-fabricated structures
- Patent number 11,499,218
- Issue date Nov 15, 2022
- Si-Ware Systems
- Mostafa Medhat
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stretchable form of single crystal silicon for high performance ele...
- Patent number 11,456,258
- Issue date Sep 27, 2022
- The Board of Trustees of the University of Illinois
- John A. Rogers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nonplanar patterned nanostructured surface and printing methods for...
- Patent number 11,446,918
- Issue date Sep 20, 2022
- 3M Innovative Properties Company
- James Zhu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a device having a three-dimensional magnet...
- Patent number 11,417,448
- Issue date Aug 16, 2022
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Thomas Lisec
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonding pad layer system, gas sensor and method for manufacturing a...
- Patent number 11,407,635
- Issue date Aug 9, 2022
- Robert Bosch GmbH
- Andreas Scheurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for forming a biological microdevice
- Patent number 11,351,537
- Issue date Jun 7, 2022
- University of Central Florida Research Foundation, Inc.
- Swaminathan Rajaraman
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME
- Publication number 20250011157
- Publication date Jan 9, 2025
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Frank Senger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20240359969
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE
- Publication number 20240316642
- Publication date Sep 26, 2024
- Henan University
- Guanghong Yang
- B22 - CASTING POWDER METALLURGY
Information Patent Application
BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240280513
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jae Hong LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20240279051
- Publication date Aug 22, 2024
- HAMAMATSU PHOTONICS K. K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240083742
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ting-Li YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A MICROFLUIDIC SENSOR
- Publication number 20230404777
- Publication date Dec 21, 2023
- CAMBRIDGE ENTERPRISE LIMITED
- Sohini KAR-NARAYAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Attachment Method for Microfluidic Device
- Publication number 20230364604
- Publication date Nov 16, 2023
- PhysioLogic Devices, Inc.
- Peter C. Lord
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...
- Publication number 20230294980
- Publication date Sep 21, 2023
- Vanguard International Semiconductor Corporation
- RAKESH CHAND
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Structure for CMOS-MEMS Thin Film Encapsulation
- Publication number 20230278856
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chia Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...
- Publication number 20230271825
- Publication date Aug 31, 2023
- RESEARCH INSTITUTE OF TSINGHUA UNIVERSITY IN SHENZHEN
- Quanshui ZHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE WITH AN ANCHOR
- Publication number 20230234837
- Publication date Jul 27, 2023
- SKYWORKS GLOBAL PTE. LTD.
- Guofeng Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULAT...
- Publication number 20230219804
- Publication date Jul 13, 2023
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Xuecui ZOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...
- Publication number 20230127477
- Publication date Apr 27, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Murray BEARD
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...
- Publication number 20230120240
- Publication date Apr 20, 2023
- IBULE PHOTONICS
- Sang Goo LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM
- Publication number 20230072948
- Publication date Mar 9, 2023
- Beijing Voyager Technology Co., Ltd.
- Youmin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...
- Publication number 20230066841
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROELECTRONIC DEVICE
- Publication number 20230065179
- Publication date Mar 2, 2023
- ROBERT BOSCH GmbH
- Jochen Tomaschko
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PUMP
- Publication number 20220397110
- Publication date Dec 15, 2022
- Microjet Technology Co., Ltd.
- Hao-Jan MOU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20220274827
- Publication date Sep 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Li YANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE
- Publication number 20220258243
- Publication date Aug 18, 2022
- HENAN UNIVERSITY
- Guanghong Yang
- B22 - CASTING POWDER METALLURGY
Information Patent Application
FLEXIBLE ELECTRODE AND PREPARATION METHOD THEREOF
- Publication number 20220234885
- Publication date Jul 28, 2022
- SHENZHEN INSTITUTES OF ADVANCED TECHNOLOGY
- Tianzhun WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Optical Systems Fabricated by Printing-Based Assembly
- Publication number 20220199606
- Publication date Jun 23, 2022
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- John A. ROGERS
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20220128498
- Publication date Apr 28, 2022
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Seungeon MOON
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL FEATURES FORMED IN MOLDED PANEL
- Publication number 20220002149
- Publication date Jan 6, 2022
- Hewlett-Packard Development Company, L.P.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES
- Publication number 20210395081
- Publication date Dec 23, 2021
- The University of British Columbia
- Edmond Cretu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...
- Publication number 20210387852
- Publication date Dec 16, 2021
- Hamamatsu Photonics K.K.
- Daiki SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INKJET PRINTING PROCESS
- Publication number 20210379898
- Publication date Dec 9, 2021
- LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- Nicolas Godard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LASER ASSISTED METAL ADHESION TO INDIUM TIN OXIDE ON GLASS, QUARTZ,...
- Publication number 20210380919
- Publication date Dec 9, 2021
- King Abdullah University of Science and Technology
- Ulrich BUTTNER
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Plasma polymerization

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Inkjet printing process

Method and structure for CMOS-MEMS thin film encapsulation

Optical systems fabricated by printing-based assembly

Micro-electromechanical system device using a metallic movable part...

Composite timepiece and method for producing same

Methods and devices for fabricating and assembling printable semico...

Plasma micronozzle adapter

Damascene interconnect structure, actuator device, and method of ma...

Flexible electrode and preparation method thereof

Method and apparatus for controlling stress variation in a material...

Microfabrication of omni-view peripheral scanning system

Micro-electro mechanical system and manufacturing method thereof

Method of depositing nanotwinned nickel-molybdenum-tungsten alloys

Methods of fabricating micro electro-mechanical systems structures

Three-dimensional features formed in molded panel

MEMS device having a tiltable suspended structure controlled by ele...

Microstructure and method for manufacturing same

Method and structure for CMOS-MEMS thin film encapsulation

Method of constructing a micromechanical device

Vertical nanopore coupled with a pair of transverse electrodes havi...

Attachment method for microfluidic device

Microfluidic microchips by 3D printing

Method and apparatus for controlling stress variation in a material...

Method for producing a micromechanical device having a damper struc...

Selective step coverage for micro-fabricated structures

Stretchable form of single crystal silicon for high performance ele...

Nonplanar patterned nanostructured surface and printing methods for...

Method for manufacturing a device having a three-dimensional magnet...

Bonding pad layer system, gas sensor and method for manufacturing a...

System and method for forming a biological microdevice

Patents Applicationslast 30 patents

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING SAME

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

A MICROFLUIDIC SENSOR

Attachment Method for Microfluidic Device

MICRO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICES AND FABRICATION METH...

Method and Structure for CMOS-MEMS Thin Film Encapsulation

ATOMIC-SMOOTH DEVICE WITH MICROSTRUCTURE, AND METHOD FOR PREPARING...

MEMS MICROPHONE WITH AN ANCHOR

COMPACT ENHANCED SENSITIVITY TEMPERATURE SENSOR USING AN ENCAPSULAT...

MULTI-LEVEL MICROELECTROMECHANICAL SYSTEM STRUCTURE WITH NON-PHOTOD...

PIEZOELECTRIC SINGLE-CRYSTAL ELEMENT, MEMS DEVICE USING SAME, AND M...

Method and Apparatus for Controlling Stress Variation in a Material...

MICROFABRICATION OF OMNI-VIEW PERIPHERAL SCANNING SYSTEM

MICRO-ELECTROMECHANICAL SYSTEM DEVICE USING A METALLIC MOVABLE PART...

METHOD FOR PRODUCING A MICROELECTRONIC DEVICE

MICRO-ELECTROMECHANICAL SYSTEM PUMP

MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

CONSTRUCTION METHOD FOR 3D MICRO/NANOSTRUCTURE

FLEXIBLE ELECTRODE AND PREPARATION METHOD THEREOF

Optical Systems Fabricated by Printing-Based Assembly

GAS SENSOR AND MANUFACTURING METHOD THEREOF

THREE-DIMENSIONAL FEATURES FORMED IN MOLDED PANEL

METHODS OF FABRICATING MICRO ELECTRO-MECHANICAL SYSTEMS STRUCTURES

DAMASCENE INTERCONNECT STRUCTURE, ACTUATOR DEVICE, AND METHOD OF MA...

INKJET PRINTING PROCESS

LASER ASSISTED METAL ADHESION TO INDIUM TIN OXIDE ON GLASS, QUARTZ,...