Pre-CMOS

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CPC
B81C2203/0728

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C2203/00Forming micro-structural systems

Current Industry

B81C2203/0728Pre-CMOS

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Integrated digital force sensors and related methods of manufacture
- Patent number 11,946,817
- Issue date Apr 2, 2024
- DecaWave, Ltd.
- Ali Foughi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducer having individual cells with...
- Patent number 11,559,827
- Issue date Jan 24, 2023
- BFLY OPERATIONS, INC.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated digital force sensors and related methods of manufacture
- Patent number 11,255,737
- Issue date Feb 22, 2022
- NEXTINPUT, INC.
- Ali Foughi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducer having individual cells with...
- Patent number 10,967,400
- Issue date Apr 6, 2021
- Butterfly Network, Inc.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming a microelectromechanical systems (MEMS) device using silico...
- Patent number 10,604,405
- Issue date Mar 31, 2020
- Infineon Technologies Dresden GmbH
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducer having individual cells with...
- Patent number 10,525,506
- Issue date Jan 7, 2020
- Butterfly Networks, Inc.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfabricated ultrasonic transducer having individual cells with...
- Patent number 10,512,936
- Issue date Dec 24, 2019
- Butterfly Network, Inc.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor having a bossed diaphragm
- Patent number 10,370,243
- Issue date Aug 6, 2019
- Honeywell International Inc.
- Carl Stewart
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 10,087,071
- Issue date Oct 2, 2018
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu-Heng Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor, manufacturing method of pressure sensor, altimeter...
- Patent number 9,994,439
- Issue date Jun 12, 2018
- Seiko Epson Corporation
- Yusuke Matsuzawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming a suspended structure and a transistor co-integra...
- Patent number 9,193,582
- Issue date Nov 24, 2015
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Eric Ollier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for fabricating tri-layer beams
- Patent number 8,673,671
- Issue date Mar 18, 2014
- Wispry, Inc.
- Shawn J. Cunningham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structures for fabricating MEMS devices on compliant layers
- Patent number 8,367,451
- Issue date Feb 5, 2013
- Wispry, Inc.
- Jin Qiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Devices for fabricating tri-layer beams
- Patent number 8,319,312
- Issue date Nov 27, 2012
- Wispry, Inc.
- Arthur S. Morris, III
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for releasing the suspended structure of a NEMS and/or NEMS...
- Patent number 8,211,729
- Issue date Jul 3, 2012
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Cecilia Dupre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device with integrated circuit and encapsulated N/MEMS and method f...
- Patent number 8,183,078
- Issue date May 22, 2012
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Eric Ollier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated microphone
- Patent number 8,169,042
- Issue date May 1, 2012
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Silicon carbide MEMS structures and methods of forming the same
- Patent number 8,154,092
- Issue date Apr 10, 2012
- Case Western Reserve University
- Jeffrey M. Melzak
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming monolithic CMOS-MEMS hybrid integrated, packaged...
- Patent number 8,101,458
- Issue date Jan 24, 2012
- Advanced Microfab, LLC
- G. Krishna Kumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro-electro-mechanical device
- Patent number 8,093,088
- Issue date Jan 10, 2012
- Semiconductor Energy Laboratory Co., Ltd.
- Fuminori Tateishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating an integrated CMOS-MEMS device
- Patent number 8,012,785
- Issue date Sep 6, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system and process of making the same
- Patent number 7,935,556
- Issue date May 3, 2011
- MEMSmart Semiconductor Corp.
- Li-Ken Yeh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device with integrated circuit electrically connected...
- Patent number 7,919,814
- Issue date Apr 5, 2011
- Hitachi, Ltd.
- Yasushi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming an integrated MEMS resonator
- Patent number 7,863,069
- Issue date Jan 4, 2011
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of micro-electro-mechanical device
- Patent number 7,820,470
- Issue date Oct 26, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Fuminori Tateishi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated microphone
- Patent number 7,795,695
- Issue date Sep 14, 2010
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 7,776,665
- Issue date Aug 17, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Konami Izumi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-compatible bulk-micromachining process for single-crystal MEMS...
- Patent number 7,749,789
- Issue date Jul 6, 2010
- Solid-State Research, Inc.
- Demetrios P Papageorgiou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 7,642,612
- Issue date Jan 5, 2010
- Semiconductor Energy Laboratory Co., Ltd.
- Konami Izumi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for fabricating high aspect ratio MEMS device with integrate...
- Patent number 7,618,837
- Issue date Nov 17, 2009
- Peking University
- Guizhen Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
INTEGRATED DIGITAL FORCE SENSORS AND RELATED METHODS OF MANUFACTURE
- Publication number 20220268648
- Publication date Aug 25, 2022
- NextInput, Inc.
- Ali Foughi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...
- Publication number 20210291228
- Publication date Sep 23, 2021
- Butterfly Network, Inc.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...
- Publication number 20200070206
- Publication date Mar 5, 2020
- Butterfly Network, Inc.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED DIGITAL FORCE SENSORS AND RELATED METHODS OF MANUFACTURE
- Publication number 20190383676
- Publication date Dec 19, 2019
- NextInput, Inc.
- Ali Foughi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...
- Publication number 20190160490
- Publication date May 30, 2019
- Butterfly Network, Inc.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...
- Publication number 20180369862
- Publication date Dec 27, 2018
- Butterfly Network, Inc.
- Susan A. Alie
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORMING A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE USING SILICO...
- Publication number 20180290883
- Publication date Oct 11, 2018
- INFINEON TECHNOLOGIES DRESDEN GMBH
- Thoralf KAUTZSCH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20180111824
- Publication date Apr 26, 2018
- Taiwan Semiconductor Manufacturing company Ltd.
- TZU-HENG WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRESSURE SENSOR HAVING A BOSSED DIAPHRAGM
- Publication number 20160257561
- Publication date Sep 8, 2016
- HONEYWELL INTERNATIONAL INC.
- Carl Stewart
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Structure with Multiple Active Layers in an SOI Wafer
- Publication number 20160043108
- Publication date Feb 11, 2016
- Silanna Semiconductor U.S.A., Inc.
- Stephen A. Fanelli
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A SUSPENDED STRUCTURE COMPONENT AND A TRANSIS...
- Publication number 20140162392
- Publication date Jun 12, 2014
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Eric Ollier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR FABRICATING TRI-LAYER BEAMS
- Publication number 20130143347
- Publication date Jun 6, 2013
- wiSpry, Inc.
- Arthur Sherman Morris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING MONOLITHIC CMOS-MEMS HYBRID INTEGRATED, PACKAGED...
- Publication number 20110027941
- Publication date Feb 3, 2011
- Advanced Microfab, LLC
- G. Krishna Kumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OF MICRO-ELECTRO-MECHANICAL DEVICE
- Publication number 20110012111
- Publication date Jan 20, 2011
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Fuminori TATEISHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR RELEASING THE SUSPENDED STRUCTURE OF A NEMS AND/OR NEMS...
- Publication number 20100317137
- Publication date Dec 16, 2010
- COMMISSAR. A L'ENERG. ATOM. ET AUX ENERG. ALTERN.
- Cécilia DUPRE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DEVICE WITH INTEGRATED CIRCUIT AND ENCAPSULATED N/MEMS AND METHOD F...
- Publication number 20100314668
- Publication date Dec 16, 2010
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENG ALT.
- Eric Ollier
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Microphone
- Publication number 20100289097
- Publication date Nov 18, 2010
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method Of Fabricating An Integrated CMOS-MEMS Device
- Publication number 20100273286
- Publication date Oct 28, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chih Liang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM
- Publication number 20100109121
- Publication date May 6, 2010
- MEMSMART SEMICONDUCTOR CORP.
- Li-Ken YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20100087048
- Publication date Apr 8, 2010
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Konami Izumi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CMOS-COMPATIBLE BULK-MICROMACHINING PROCESS FOR SINGLE-CRYSTAL MEMS...
- Publication number 20090275162
- Publication date Nov 5, 2009
- SOLID-STATE RESEARCH
- Demetrios P. Papageorgiou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED MEMS DEVICE AND CONTROL CIRCUIT
- Publication number 20090261416
- Publication date Oct 22, 2009
- Wolfgang Raberg
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor device and method of manufacturing the same
- Publication number 20090134459
- Publication date May 28, 2009
- Yasushi GOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND STRUCTURES FOR FABRICATING MEMS DEVICES ON COMPLIANT LAYERS
- Publication number 20090134513
- Publication date May 28, 2009
- Jin Qiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR FABRICATING TRI-LAYER BEAMS
- Publication number 20090134492
- Publication date May 28, 2009
- Arthur S. Morris, III
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical System and Process of Making the Same
- Publication number 20090057817
- Publication date Mar 5, 2009
- Li-Ken YEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED ARRANGEMENT AND METHOD FOR PRODUCTION
- Publication number 20080217149
- Publication date Sep 11, 2008
- Ulrich Schmid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Integrated Microphone
- Publication number 20070087466
- Publication date Apr 19, 2007
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of Forming an Integrated MEMS Resonator
- Publication number 20070072327
- Publication date Mar 29, 2007
- Analog Devices, Inc.
- Jason W. Weigold
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a micro-electro-mechanical device
- Publication number 20070072331
- Publication date Mar 29, 2007
- Dan W. Chilcott
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Integrated digital force sensors and related methods of manufacture

Microfabricated ultrasonic transducer having individual cells with...

Integrated digital force sensors and related methods of manufacture

Microfabricated ultrasonic transducer having individual cells with...

Forming a microelectromechanical systems (MEMS) device using silico...

Microfabricated ultrasonic transducer having individual cells with...

Microfabricated ultrasonic transducer having individual cells with...

Pressure sensor having a bossed diaphragm

Semiconductor structure and manufacturing method thereof

Pressure sensor, manufacturing method of pressure sensor, altimeter...

Method of forming a suspended structure and a transistor co-integra...

Methods and devices for fabricating tri-layer beams

Method and structures for fabricating MEMS devices on compliant layers

Devices for fabricating tri-layer beams

Method for releasing the suspended structure of a NEMS and/or NEMS...

Device with integrated circuit and encapsulated N/MEMS and method f...

Integrated microphone

Silicon carbide MEMS structures and methods of forming the same

Method of forming monolithic CMOS-MEMS hybrid integrated, packaged...

Manufacturing method of micro-electro-mechanical device

Method of fabricating an integrated CMOS-MEMS device

Microelectromechanical system and process of making the same

Semiconductor device with integrated circuit electrically connected...

Method of forming an integrated MEMS resonator

Manufacturing method of micro-electro-mechanical device

Integrated microphone

Semiconductor device and manufacturing method thereof

CMOS-compatible bulk-micromachining process for single-crystal MEMS...

Semiconductor device and manufacturing method thereof

Method for fabricating high aspect ratio MEMS device with integrate...

Patents Applicationslast 30 patents

INTEGRATED DIGITAL FORCE SENSORS AND RELATED METHODS OF MANUFACTURE

MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...

MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...

INTEGRATED DIGITAL FORCE SENSORS AND RELATED METHODS OF MANUFACTURE

MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...

MICROFABRICATED ULTRASONIC TRANSDUCER HAVING INDIVIDUAL CELLS WITH...

FORMING A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE USING SILICO...

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

PRESSURE SENSOR HAVING A BOSSED DIAPHRAGM

Semiconductor Structure with Multiple Active Layers in an SOI Wafer

PRODUCTION METHOD FOR A SUSPENDED STRUCTURE COMPONENT AND A TRANSIS...

METHODS AND DEVICES FOR FABRICATING TRI-LAYER BEAMS

METHOD OF FORMING MONOLITHIC CMOS-MEMS HYBRID INTEGRATED, PACKAGED...

MANUFACTURING METHOD OF MICRO-ELECTRO-MECHANICAL DEVICE

METHOD FOR RELEASING THE SUSPENDED STRUCTURE OF A NEMS AND/OR NEMS...

DEVICE WITH INTEGRATED CIRCUIT AND ENCAPSULATED N/MEMS AND METHOD F...

Integrated Microphone

Method Of Fabricating An Integrated CMOS-MEMS Device

MICROELECTROMECHANICAL SYSTEM

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

CMOS-COMPATIBLE BULK-MICROMACHINING PROCESS FOR SINGLE-CRYSTAL MEMS...

INTEGRATED MEMS DEVICE AND CONTROL CIRCUIT

Semiconductor device and method of manufacturing the same

METHOD AND STRUCTURES FOR FABRICATING MEMS DEVICES ON COMPLIANT LAYERS

METHODS AND DEVICES FOR FABRICATING TRI-LAYER BEAMS

Microelectromechanical System and Process of Making the Same

INTEGRATED ARRANGEMENT AND METHOD FOR PRODUCTION

Integrated Microphone

Method of Forming an Integrated MEMS Resonator

Method for manufacturing a micro-electro-mechanical device