Process control; Yield prediction

Industry

CPC
B81C99/0065

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C99/00Subject matter not provided for in other groups of this subclass

Current Industry

B81C99/0065Process control; Yield prediction

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Atomic-scale e-beam sculptor
- Patent number 11,518,674
- Issue date Dec 6, 2022
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma health determination in semiconductor substrate processing r...
- Patent number 10,920,320
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Junghoon Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical-systems processing method, and micro-elect...
- Patent number 10,662,059
- Issue date May 26, 2020
- Hitachi, Ltd.
- Keiji Watanabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS manufacturing method and MEMS manufacturing apparatus
- Patent number 10,605,824
- Issue date Mar 31, 2020
- Hitachi, Ltd.
- Shuntaro Machida
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS manufacturing system and MEMS manufacturing method
- Patent number 10,538,429
- Issue date Jan 21, 2020
- Hitachi, Ltd.
- Misuzu Sagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Device manufacturing method and device manufacturing apparatus
- Patent number 10,002,801
- Issue date Jun 19, 2018
- Hitachi, Ltd.
- Misuzu Sagawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 9,714,473
- Issue date Jul 25, 2017
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching apparatus and methods
- Patent number 9,640,370
- Issue date May 2, 2017
- SPTS Technologies Limited
- Oliver James Ansell
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for adaptive feedback controlled polishing
- Patent number 9,573,243
- Issue date Feb 21, 2017
- Headway Technologies, Inc.
- Terry Moore
- B24 - GRINDING POLISHING
Information Patent Grant
Micro-electro-mechanical structure (MEMS) capacitor devices, capaci...
- Patent number 8,739,096
- Issue date May 27, 2014
- International Business Machines Corporation
- Christopher V. Jahnes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 8,702,956
- Issue date Apr 22, 2014
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cavity process etch undercut monitor
- Patent number 8,652,971
- Issue date Feb 18, 2014
- Texas Instruments Incorporated
- Ricky Alan Jackson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System for measuring a shape, method for measuring a shape, and com...
- Patent number 8,543,352
- Issue date Sep 24, 2013
- Dai Nippon Printing Co., Ltd.
- Yuki Aritsuka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Differential critical dimension and overlay metrology apparatus and...
- Patent number 8,035,824
- Issue date Oct 11, 2011
- International Business Machines Corporation
- Christopher Ausschnitt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Trench depth monitor for semiconductor manufacturing
- Patent number 7,795,045
- Issue date Sep 14, 2010
- Icemos Technology Ltd.
- Hugh J. Griffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Differential critical dimension and overlay metrology apparatus and...
- Patent number 7,700,247
- Issue date Apr 20, 2010
- International Business Machines Corporation
- Christopher Ausschnitt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive measurement method and system for nanoimprint process mo...
- Patent number 7,682,552
- Issue date Mar 23, 2010
- Industrial Technology Research Institute
- Chin-Chung Nien
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metrology structure and methods
- Patent number 7,678,289
- Issue date Mar 16, 2010
- Hewlett-Packard Development Company, L.P.
- Stephen Jalrus Potochnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for monitoring a microstructure etching process
- Patent number 7,672,750
- Issue date Mar 2, 2010
- Point 35 Microstructures Ltd.
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Wet etch processing
- Patent number 7,651,946
- Issue date Jan 26, 2010
- University College Cork—National University of Ireland, Cork
- Nicolle Wilke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for maintaining parallelism of layers and/or a...
- Patent number 7,588,674
- Issue date Sep 15, 2009
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of making a MEMS device by monitoring a process parameter
- Patent number 7,569,488
- Issue date Aug 4, 2009
- QUALCOMM MEMS Technologies, Inc.
- Marjorio Rafanan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Digital lithography using real time quality control
- Patent number 7,559,619
- Issue date Jul 14, 2009
- Palo Alto Research Center Incorporated
- Steven E. Ready
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and device for wafer backside alignment overlay accuracy
- Patent number 7,494,830
- Issue date Feb 24, 2009
- Taiwan Semiconductor Manufacturing Company
- Sheng-Chieh Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and processing system for monitoring status of system compon...
- Patent number 7,479,454
- Issue date Jan 20, 2009
- Tokyo Electron Limited
- David L. O'Meara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for mixing reactants
- Patent number 7,479,186
- Issue date Jan 20, 2009
- California Institute of Technology
- Stephen R. Quake
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device wafer-level package
- Patent number 7,466,018
- Issue date Dec 16, 2008
- Texas Instruments Incorporated
- Thomas A. Kocian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for quantifying over-etch of a conductive feature
- Patent number 7,419,609
- Issue date Sep 2, 2008
- Texas Instruments Incorporated
- Raba Mezenner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Metrology structure and methods
- Patent number 7,365,405
- Issue date Apr 29, 2008
- Stephen J. Potochnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High throughput screening of crystallization of materials
- Patent number 7,326,296
- Issue date Feb 5, 2008
- California Institute of Technology
- Stephen R. Quake
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC-SCALE E-BEAM SCULPTOR
- Publication number 20200247667
- Publication date Aug 6, 2020
- UT-Battelle, LLC
- Sergei V. Kalinin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR CHARACTERIZING CRITICAL PARAMETERS RESULTING...
- Publication number 20180053698
- Publication date Feb 22, 2018
- FREESCALE SEMICONDUCTOR, INC.
- Paige M. Holm
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20140231263
- Publication date Aug 21, 2014
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL STRUCTURE (MEMS) CAPACITOR DEVICES, CAPACI...
- Publication number 20130154054
- Publication date Jun 20, 2013
- International Business Machines Corporation
- Christopher V. JAHNES
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAVITY PROCESS ETCH UNDERCUT MONITOR
- Publication number 20120223401
- Publication date Sep 6, 2012
- TEXAS INSTRUMENTS INCORPORATED
- Ricky Alan Jackson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20120181180
- Publication date Jul 19, 2012
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrochemical Fabrication Methods for Producing Multilayer Struct...
- Publication number 20120114861
- Publication date May 10, 2012
- Microfabrica Inc.
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEM FOR MEASURING A SHAPE, METHOD FOR MEASURING A SHAPE, AND COM...
- Publication number 20100169042
- Publication date Jul 1, 2010
- Dai Nippon Printing Co., Ltd.
- Yuki Aritsuka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL CRITICAL DIMENSION AND OVERLAY METROLOGY APPARATUS AND...
- Publication number 20100103433
- Publication date Apr 29, 2010
- International Business Machines Corporation
- Christopher Ausschnitt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and Apparatus for Maintaining Parallelism of Layers and/or A...
- Publication number 20100038253
- Publication date Feb 18, 2010
- Microfabrica Inc.
- Uri Frodis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TRENCH DEPTH MONITOR FOR SEMICONDUCTOR MANUFACTURING
- Publication number 20090200547
- Publication date Aug 13, 2009
- ICEMOS TECHNOLOGY LTD.
- Hugh J. Griffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIGITAL LITHOGRAPHY USING REAL TIME QUALITY CONTROL
- Publication number 20090185018
- Publication date Jul 23, 2009
- Palo Alto Research Center Incorporated
- Steven E. Ready
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrochemical Fabrication Methods for Producing Multilayer Struct...
- Publication number 20090020433
- Publication date Jan 22, 2009
- Microfabrica Inc.
- Adam L. Cohen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM
- Publication number 20080318344
- Publication date Dec 25, 2008
- QUALCOMM Incorporated
- Marjorio Rafanan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD AND DEVICE FOR WAFER BACKSIDE ALIGNMENT OVERLAY ACCURACY
- Publication number 20080248600
- Publication date Oct 9, 2008
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sheng-Chieh Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Metrology Structure And Methods
- Publication number 20080157078
- Publication date Jul 3, 2008
- Stephen Jalrus Potochnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method And Apparatus For Monitoring A Microstructure Etching Process
- Publication number 20080147229
- Publication date Jun 19, 2008
- POINT 35 MICROSTRUCTURES LIMITED
- Anthony O'Hara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method And Apparatus For Monitoring Plasma Conditions In An Etching...
- Publication number 20080134757
- Publication date Jun 12, 2008
- Advanced Technology Materials, Inc.
- Ing-Shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR QUANTIFYING OVER-ETCH OF A CONDUCTIVE FEATURE
- Publication number 20080113087
- Publication date May 15, 2008
- TEXAS INSTRUMENTS INCORPORATED
- Rabah Mezenner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device Wafer-Level Package
- Publication number 20070228540
- Publication date Oct 4, 2007
- TEXAS INSTRUMENTS INCORPORATED
- Thomas A. Kocian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems and methods for mixing reactants
- Publication number 20070169686
- Publication date Jul 26, 2007
- California Institute of Technology
- Stephen R. Quake
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wet etch processing
- Publication number 20070134829
- Publication date Jun 14, 2007
- Nicolle Wilke
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH
- Publication number 20070119814
- Publication date May 31, 2007
- TEXAS INSTRUMENTS INCORPORATED
- Satyadev R. Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Differential critical dimension and overlay metrology apparatus and...
- Publication number 20070105029
- Publication date May 10, 2007
- International Business Machines Corporation
- Christopher Ausschnitt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Digital lithography using real time quality control
- Publication number 20070035597
- Publication date Feb 15, 2007
- Palo Alto Research Center Incorporated
- Steven E. Ready
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for monitoring plasma conditions in an etching...
- Publication number 20060211253
- Publication date Sep 21, 2006
- Ing-shin Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
High throughput screening of crystallization materials
- Publication number 20060196409
- Publication date Sep 7, 2006
- California Institute of Technology
- Stephen R. Quake
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Metrology structure and methods
- Publication number 20050236681
- Publication date Oct 27, 2005
- Hewlett-Packard Development Company L.P.
- Stephen Jairus Potochnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
High throughput screening of crystallization of materials
- Publication number 20050229839
- Publication date Oct 20, 2005
- California Institute of Technology
- Stephen R. Quake
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS device wafer-level package
- Publication number 20050233498
- Publication date Oct 20, 2005
- Texas Instruments Inc.
- Thomas A. Kocian
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Process control; Yield prediction

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Atomic-scale e-beam sculptor

Plasma health determination in semiconductor substrate processing r...

Micro-electro-mechanical-systems processing method, and micro-elect...

MEMS manufacturing method and MEMS manufacturing apparatus

MEMS manufacturing system and MEMS manufacturing method

Device manufacturing method and device manufacturing apparatus

Method and apparatus for maintaining parallelism of layers and/or a...

Etching apparatus and methods

Method for adaptive feedback controlled polishing

Micro-electro-mechanical structure (MEMS) capacitor devices, capaci...

Method and apparatus for maintaining parallelism of layers and/or a...

Cavity process etch undercut monitor

System for measuring a shape, method for measuring a shape, and com...

Differential critical dimension and overlay metrology apparatus and...

Trench depth monitor for semiconductor manufacturing

Differential critical dimension and overlay metrology apparatus and...

Capacitive measurement method and system for nanoimprint process mo...

Metrology structure and methods

Method and apparatus for monitoring a microstructure etching process

Wet etch processing

Method and apparatus for maintaining parallelism of layers and/or a...

Methods of making a MEMS device by monitoring a process parameter

Digital lithography using real time quality control

Method and device for wafer backside alignment overlay accuracy

Method and processing system for monitoring status of system compon...

Systems and methods for mixing reactants

MEMS device wafer-level package

Method for quantifying over-etch of a conductive feature

Metrology structure and methods

High throughput screening of crystallization of materials

Patents Applicationslast 30 patents

ATOMIC-SCALE E-BEAM SCULPTOR

SYSTEM AND METHOD FOR CHARACTERIZING CRITICAL PARAMETERS RESULTING...

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

MICRO-ELECTRO-MECHANICAL STRUCTURE (MEMS) CAPACITOR DEVICES, CAPACI...

CAVITY PROCESS ETCH UNDERCUT MONITOR

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

Electrochemical Fabrication Methods for Producing Multilayer Struct...

SYSTEM FOR MEASURING A SHAPE, METHOD FOR MEASURING A SHAPE, AND COM...

DIFFERENTIAL CRITICAL DIMENSION AND OVERLAY METROLOGY APPARATUS AND...

Method and Apparatus for Maintaining Parallelism of Layers and/or A...

TRENCH DEPTH MONITOR FOR SEMICONDUCTOR MANUFACTURING

DIGITAL LITHOGRAPHY USING REAL TIME QUALITY CONTROL

Electrochemical Fabrication Methods for Producing Multilayer Struct...

INDICATION OF THE END-POINT REACTION BETWEEN XeF2 AND MOLYBDENUM

METHOD AND DEVICE FOR WAFER BACKSIDE ALIGNMENT OVERLAY ACCURACY

Metrology Structure And Methods

Method And Apparatus For Monitoring A Microstructure Etching Process

Method And Apparatus For Monitoring Plasma Conditions In An Etching...

METHOD FOR QUANTIFYING OVER-ETCH OF A CONDUCTIVE FEATURE

MEMS Device Wafer-Level Package

Systems and methods for mixing reactants

Wet etch processing

APPARATUS AND METHOD FOR DETECTING AN ENDPOINT IN A VAPOR PHASE ETCH

Differential critical dimension and overlay metrology apparatus and...

Digital lithography using real time quality control

Method and apparatus for monitoring plasma conditions in an etching...

High throughput screening of crystallization materials

Metrology structure and methods

High throughput screening of crystallization of materials

MEMS device wafer-level package