Processes for releasing structures not provided for in group B81C1/00476

Industry

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B81C1/00484

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00484Processes for releasing structures not provided for in group B81C1/00476

Industries

Patents Grantslast 30 patents

Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,993,512
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing damper structures on a micromechanical wafer
- Patent number 11,472,698
- Issue date Oct 18, 2022
- Robert Bosch GmbH
- Michael Stumber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for manufacturing micromechanical components and method for...
- Patent number 11,434,131
- Issue date Sep 6, 2022
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Nicolas Blondiaux
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
- Patent number 11,274,037
- Issue date Mar 15, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yang-Che Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
- Patent number 11,180,366
- Issue date Nov 23, 2021
- General Electric Company
- Marco Francesco Aimi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for multiple-patterning nanosphere lithography for fabricat...
- Patent number 11,037,794
- Issue date Jun 15, 2021
- The Regents of the University of California
- Xiaobin Xu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and systems for fabricating miniaturized nanotube sensors
- Patent number 11,019,734
- Issue date May 25, 2021
- Tula Health, Inc.
- Robert Davis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods for manufacturing micromechanical components and method for...
- Patent number 10,954,123
- Issue date Mar 23, 2021
- CSEM Centre Suisse d'Electronique et de Microtechnique S.A. Recherche et Deve...
- Nicolas Blondiaux
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a MEMS element
- Patent number 10,775,170
- Issue date Sep 15, 2020
- Robert Bosch GmbH
- Joerg Braeuer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,734,237
- Issue date Aug 4, 2020
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Field emission devices and methods of making thereof
- Patent number 10,504,772
- Issue date Dec 10, 2019
- Infineon Technologies AG
- Alfons Dehe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of forming space for use in analysis devices
- Patent number 10,364,142
- Issue date Jul 30, 2019
- Canon Kabushiki Kaisha
- Masafumi Morisue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Spectrally and temporally engineered processing using photoelectroc...
- Patent number 10,115,599
- Issue date Oct 30, 2018
- The Board of Trustees of the University of Illinois
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS and method for forming the same
- Patent number 10,023,459
- Issue date Jul 17, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor and method of manufacturing the same
- Patent number 9,919,917
- Issue date Mar 20, 2018
- SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Jong Woon Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Simplified MEMS device fabrication process
- Patent number 9,630,836
- Issue date Apr 25, 2017
- MEMS DRIVE, INC.
- Roman Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Production of micro-mechanical devices
- Patent number 9,482,863
- Issue date Nov 1, 2016
- Apple Inc.
- Raviv Erlich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Elimination of silicon residues from MEMS cavity floor
- Patent number 8,921,165
- Issue date Dec 30, 2014
- Cavendish Kinetics, Inc.
- Brian I. Troy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micro-electro-mechanical device, in part...
- Patent number 8,679,887
- Issue date Mar 25, 2014
- STMicroelectronics S.r.l.
- Simone Sassolini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of semiconductor device including etching step
- Patent number 8,603,920
- Issue date Dec 10, 2013
- Denso Corporation
- Katsuhiko Kanamori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and a method of fabricating a micromechan...
- Patent number 8,278,725
- Issue date Oct 2, 2012
- Agency for Science, Technology and Research
- Sudhiranjan Tripathy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micro-electro-mechanical device, in part...
- Patent number 8,193,550
- Issue date Jun 5, 2012
- STMicroelectronics S.r.l.
- Simone Sassolini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bonded wafer assembly system and method
- Patent number 7,943,489
- Issue date May 17, 2011
- Texas Instruments Incorporated
- Daryl Ross Koehl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of producing mechanical components of MEMS or NEMS structure...
- Patent number 7,932,118
- Issue date Apr 26, 2011
- Commissariat a l'Energie Atomique
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a micromachined polymer beam structure
- Patent number 7,774,930
- Issue date Aug 17, 2010
- California Institute of Technology
- Yu-Chong Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor etching process to release single crystal silicon mir...
- Patent number 7,666,319
- Issue date Feb 23, 2010
- Miradia Inc.
- Kegang Huang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb structure fabrication methods and systems
- Patent number 7,479,402
- Issue date Jan 20, 2009
- Honeywell International Inc.
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and structure for fabricating mechanical mirror structures u...
- Patent number 7,449,284
- Issue date Nov 11, 2008
- Miradia Inc.
- Xiao Charles Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for fabricating a micro-electro-mechanical system with mova...
- Patent number 7,422,928
- Issue date Sep 9, 2008
- Matsushita Electric Works, Ltd.
- Naomasa Oka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ion implanted microscale and nanoscale device method
- Patent number 7,419,917
- Issue date Sep 2, 2008
- The Aerospace Corporation
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
- Publication number 20240262681
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yang-Che CHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER
- Publication number 20210323810
- Publication date Oct 21, 2021
- ROBERT BOSCH GmbH
- Michael Stumber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS FOR MANUFACTURING MICROMECHANICAL COMPONENTS AND METHOD FOR...
- Publication number 20210171340
- Publication date Jun 10, 2021
- CSEM CENTRE SUISSE D'ELECTRONIQUE ET DE MICROTECHNIQUE SA RECHERCHE ET DEVELO...
- Nicolas BLONDIAUX
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Spectrally and Temporally Engineered Processing using Photoelectroc...
- Publication number 20180301344
- Publication date Oct 18, 2018
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Lynford Goddard
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF FORMING SPACE FOR USE IN ANALYSIS DEVICES
- Publication number 20180037455
- Publication date Feb 8, 2018
- Canon Kabushiki Kaisha
- Masafumi Morisue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SIMPLIFIED MEMS DEVICE FABRICATION PROCESS
- Publication number 20170088418
- Publication date Mar 30, 2017
- MEMS DRIVE, INC.
- ROMAN GUTIERREZ
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHANT-FREE METHODS OF PRODUCING A GAP BETWEEN TWO LAYERS, AND DEV...
- Publication number 20130134528
- Publication date May 30, 2013
- Clark Tu-Cuong Nguyen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR
- Publication number 20130032453
- Publication date Feb 7, 2013
- CAVENDISH KINETICS INC.
- Brian I. Troy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, IN PART...
- Publication number 20120208343
- Publication date Aug 16, 2012
- STMicroelectronics S.r.l.
- Simone Sassolini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component and method for manufacturing a micromecha...
- Publication number 20110220471
- Publication date Sep 15, 2011
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICAL SYSTEMS, WAVEGUIDES AND METHODS OF PRODUCTION
- Publication number 20110133597
- Publication date Jun 9, 2011
- ScanNanoTek Oy
- Andrei J. Pavlov
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Manufacturing method of semiconductor device including etching step
- Publication number 20110034031
- Publication date Feb 10, 2011
- DENSO CORPORATION
- Katsuhiko Kanamori
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE AND A METHOD OF FABRICATING A MICROMECHAN...
- Publication number 20100193781
- Publication date Aug 5, 2010
- Agency for Science, Technology and Research
- Sudhiranjan Tripathy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND APPARATUS FOR FLUID DELIVERY AND REMOVAL OF MICRON SCAL...
- Publication number 20100179074
- Publication date Jul 15, 2010
- Honeywell International Inc.
- James Christopher Milne
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bonded Wafer Assembly System and Method
- Publication number 20100075482
- Publication date Mar 25, 2010
- Daryl Ross Koehl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF PRODUCING MECHANICAL COMPONENTS OF MEMS OR NEMS STRUCTURE...
- Publication number 20090170231
- Publication date Jul 2, 2009
- COMMISSARIAT A L'ENERGIE ATOMIQUE
- Philippe Robert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, IN PART...
- Publication number 20080272447
- Publication date Nov 6, 2008
- STMicroelectronics S.r.l.
- Simone Sassolini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FABRICATING WORKPIECE AND LASER PROCESSING APPARATUS
- Publication number 20080217312
- Publication date Sep 11, 2008
- FUJITSU LIMITED
- Fumihiko TOKURA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COMB STRUCTURE FABRICATION METHODS AND SYSTEMS
- Publication number 20070215961
- Publication date Sep 20, 2007
- Lianzhong Yu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process for fabricating a micro-electro-mechanical system with mova...
- Publication number 20070128831
- Publication date Jun 7, 2007
- Matsushita Electric Works, Ltd.
- Naomasa Oka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromachined polymer beam structure method and resulting device fo...
- Publication number 20070052322
- Publication date Mar 8, 2007
- California Institute of Technology
- Yu-Chong Tai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Ion implanted microscale and nanoscale device method
- Publication number 20060276040
- Publication date Dec 7, 2006
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Laser assisted chemical etching method for release of microscale an...
- Publication number 20060183330
- Publication date Aug 17, 2006
- Margaret H. Abraham
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of manufacturing an electronic device and electronic device
- Publication number 20060141786
- Publication date Jun 29, 2006
- Koninklijke Philips Electronics N.V.
- Hendrik Boezen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for fabricating an isolated microelectromechanical system (M...
- Publication number 20060096947
- Publication date May 11, 2006
- Richard D. Harris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and structure for fabricating mechanical mirror structures u...
- Publication number 20050255412
- Publication date Nov 17, 2005
- Miradia Inc.
- Xiao Charles Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectronic mechanical system and methods
- Publication number 20050221528
- Publication date Oct 6, 2005
- Mike Bruner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for fabricating an isolated microelectromechanical system (M...
- Publication number 20040262257
- Publication date Dec 30, 2004
- Richard D. Harris
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a micro-electro-mechanical device, in part...
- Publication number 20040256686
- Publication date Dec 23, 2004
- STMicroelectronics S.r.l.
- Simone Sassolini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for forming a microstructure from a monocrystalline substrate
- Publication number 20040060897
- Publication date Apr 1, 2004
- Michael F. Mattes
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Processes for releasing structures not provided for in group B81C1/00476

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Dual micro-electro mechanical system and manufacturing method thereof

Method for producing damper structures on a micromechanical wafer

Methods for manufacturing micromechanical components and method for...

Dual micro-electro mechanical system and manufacturing method thereof

Methods for forming a MEMS device layer on an active device layer a...

Methods for multiple-patterning nanosphere lithography for fabricat...

Methods and systems for fabricating miniaturized nanotube sensors

Methods for manufacturing micromechanical components and method for...

Method for manufacturing a MEMS element

Spectrally and temporally engineered processing using photoelectroc...

Field emission devices and methods of making thereof

Method of forming space for use in analysis devices

Spectrally and temporally engineered processing using photoelectroc...

MEMS and method for forming the same

Inertial sensor and method of manufacturing the same

Simplified MEMS device fabrication process

Production of micro-mechanical devices

Elimination of silicon residues from MEMS cavity floor

Method for manufacturing a micro-electro-mechanical device, in part...

Manufacturing method of semiconductor device including etching step

Micromechanical structure and a method of fabricating a micromechan...

Method for manufacturing a micro-electro-mechanical device, in part...

Bonded wafer assembly system and method

Method of producing mechanical components of MEMS or NEMS structure...

Method of manufacturing a micromachined polymer beam structure

Semiconductor etching process to release single crystal silicon mir...

Comb structure fabrication methods and systems

Method and structure for fabricating mechanical mirror structures u...

Process for fabricating a micro-electro-mechanical system with mova...

Ion implanted microscale and nanoscale device method

Patents Applicationslast 30 patents

DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF

METHOD FOR PRODUCING DAMPER STRUCTURES ON A MICROMECHANICAL WAFER

METHODS FOR MANUFACTURING MICROMECHANICAL COMPONENTS AND METHOD FOR...

Spectrally and Temporally Engineered Processing using Photoelectroc...

METHOD OF FORMING SPACE FOR USE IN ANALYSIS DEVICES

SIMPLIFIED MEMS DEVICE FABRICATION PROCESS

ETCHANT-FREE METHODS OF PRODUCING A GAP BETWEEN TWO LAYERS, AND DEV...

ELIMINATION OF SILICON RESIDUES FROM MEMS CAVITY FLOOR

METHOD FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, IN PART...

Micromechanical component and method for manufacturing a micromecha...

ELECTROMECHANICAL SYSTEMS, WAVEGUIDES AND METHODS OF PRODUCTION

Manufacturing method of semiconductor device including etching step

MICROMECHANICAL STRUCTURE AND A METHOD OF FABRICATING A MICROMECHAN...

METHODS AND APPARATUS FOR FLUID DELIVERY AND REMOVAL OF MICRON SCAL...

Bonded Wafer Assembly System and Method

METHOD OF PRODUCING MECHANICAL COMPONENTS OF MEMS OR NEMS STRUCTURE...

METHOD FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE, IN PART...

METHOD FOR FABRICATING WORKPIECE AND LASER PROCESSING APPARATUS

COMB STRUCTURE FABRICATION METHODS AND SYSTEMS

Process for fabricating a micro-electro-mechanical system with mova...

Micromachined polymer beam structure method and resulting device fo...

Ion implanted microscale and nanoscale device method

Laser assisted chemical etching method for release of microscale an...

Method of manufacturing an electronic device and electronic device

Method for fabricating an isolated microelectromechanical system (M...

Method and structure for fabricating mechanical mirror structures u...

Microelectronic mechanical system and methods

Method for fabricating an isolated microelectromechanical system (M...

Method for manufacturing a micro-electro-mechanical device, in part...

Method for forming a microstructure from a monocrystalline substrate