profiles not provided for in B81B2203/0376 - B81B2203/0384

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B81B2203/0392

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0392profiles not provided for in B81B2203/0376 - B81B2203/0384

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor structure and method for forming the same
- Patent number 12,017,908
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ching-Kai Shen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,883,845
- Issue date Jan 30, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor structure for reducing temperature-based error
- Patent number 11,852,649
- Issue date Dec 26, 2023
- Murata Manufacturing Co., Ltd.
- Akira Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device and method for making the same
- Patent number 11,851,318
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Tunable nanotextured materials
- Patent number 11,785,943
- Issue date Oct 17, 2023
- UChicago Argonne, LLC
- Philip D. Laible
- A01 - AGRICULTURE FORESTRY ANIMAL HUSBANDRY HUNTING TRAPPING FISHING
Information Patent Grant
Anti-stiction bottom cavity surface for micromachined ultrasonic tr...
- Patent number 11,571,711
- Issue date Feb 7, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Force sensor with MEMS-based device and force touching member
- Patent number 11,137,296
- Issue date Oct 5, 2021
- MIRAMEMS SENSING TECHNOLOGY CO., LTD
- Li-Tien Tseng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for producing same
- Patent number 10,974,958
- Issue date Apr 13, 2021
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Felix Schiebel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Suspended microelectromechanical system (MEMS) devices
- Patent number 10,843,920
- Issue date Nov 24, 2020
- Analog Devices International Unlimited Company
- Kotlanka Rama Krishna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical component
- Patent number 10,794,928
- Issue date Oct 6, 2020
- Robert Bosch GmbH
- Benny Pekka Herzogenrath
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing MEMS microphone
- Patent number 10,773,948
- Issue date Sep 15, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for obtaining at least one structure approximating a sought...
- Patent number 10,739,583
- Issue date Aug 11, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Vincent Reboud
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of fabricating a MEMS and/or NEMS structure comprising at le...
- Patent number 10,585,074
- Issue date Mar 10, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Bruno Fain
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and method for manufacturing the same
- Patent number 10,584,025
- Issue date Mar 10, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Nanochannel device with three dimensional gradient by single step e...
- Patent number 10,464,061
- Issue date Nov 5, 2019
- INTERNATIONAL BUSINESS MACHINES CORPORTAION
- Jingwei Bai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method for semiconductor structure
- Patent number 10,427,935
- Issue date Oct 1, 2019
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Combined-blade open flow path device and joined body thereof
- Patent number 10,258,982
- Issue date Apr 16, 2019
- Japan Science and Technology Agency
- Takahiko Hariyama
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor structure and manufacturing method for the same
- Patent number 10,112,825
- Issue date Oct 30, 2018
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor with side port and method of fabricating same
- Patent number 9,790,089
- Issue date Oct 17, 2017
- NXP USA, INC.
- Chad S. Dawson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS capacitive pressure sensors
- Patent number 9,738,508
- Issue date Aug 22, 2017
- Semiconductor Manufacturing International (Shanghai) Corporation
- Zhongshan Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS capacitive pressure sensors
- Patent number 9,463,975
- Issue date Oct 11, 2016
- Semiconductor Manufacturing International (Shanghai) Corporation
- Zhongshan Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device having a base, a cavity, a diaphragm, and a su...
- Patent number 9,363,617
- Issue date Jun 7, 2016
- OMRON Corporation
- Kazuyuki Ono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS capacitive pressure sensors and fabrication method thereof
- Patent number 9,206,030
- Issue date Dec 8, 2015
- Semiconductor Manufacturing International (Shanghai) Corporation
- Zhongshan Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for etching a complex pattern
- Patent number 9,187,320
- Issue date Nov 17, 2015
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Bernard Diem
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for the production of three-dimensional microstructures
- Patent number 8,986,563
- Issue date Mar 24, 2015
- Nanoscribe GmbH
- Michael Thiel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device
- Patent number 8,698,315
- Issue date Apr 15, 2014
- Kabushiki Kaisha Toyota Chuo Kenkyusho
- Yoshiyuki Hata
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having a rear volume
- Patent number 8,692,339
- Issue date Apr 8, 2014
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for fabricating an out-of-plane MEMS structure
- Patent number 8,404,568
- Issue date Mar 26, 2013
- Honeywell International Inc.
- Michael Foster
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for eliminating delamination between amorphous silicon layers
- Patent number 8,309,441
- Issue date Nov 13, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jiou-Kang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated flow cell with semiconductor oxide tubing
- Patent number 8,213,015
- Issue date Jul 3, 2012
- Agilent Technologies, Inc.
- Karsten Kraizcek
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
CONNECTION LINE STRUCTURE AND FORMING METHOD THEREOF
- Publication number 20240351859
- Publication date Oct 24, 2024
- WUHAN NEURACOM TECHNOLOGY DEVELOPMENT CO., LTD.
- Li HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
- Publication number 20240286889
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20240100566
- Publication date Mar 28, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20230149976
- Publication date May 18, 2023
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MAKING THE SAME
- Publication number 20220340407
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME
- Publication number 20220340408
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR STRUCTURE FOR REDUCING TEMPERATURE-BASED ERROR
- Publication number 20220268799
- Publication date Aug 25, 2022
- Murata Manufacturing Co., Ltd.
- Akira KONNO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SUSPENDED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES
- Publication number 20200283291
- Publication date Sep 10, 2020
- Analog Devices International Unlimited Company
- Kotlanka Rama Krishna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20200156110
- Publication date May 21, 2020
- Butterfly Network, Inc.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FORCE SENSOR
- Publication number 20190368951
- Publication date Dec 5, 2019
- MiraMEMS Sensing Technology Co., Ltd.
- Li-Tien TSENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR SEMICONDUCTOR STRUCTURE
- Publication number 20190016591
- Publication date Jan 17, 2019
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20180208455
- Publication date Jul 26, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Xianchao Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20180208460
- Publication date Jul 26, 2018
- United Microelectronics Corp.
- Te-Huang Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SENSOR WITH SIDE PORT AND METHOD OF FABRICATING SAME
- Publication number 20170174509
- Publication date Jun 22, 2017
- NXP USA, Inc.
- Chad S. Dawson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMBINED-BLADE-TYPE OPEN FLOW PATH DEVICE AND JOINED BODY THEREOF
- Publication number 20170044002
- Publication date Feb 16, 2017
- Japan Science and Technology Agency
- Takahiko HARIYAMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR ETCHING A COMPLEX PATTERN
- Publication number 20140342557
- Publication date Nov 20, 2014
- COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENE. ALT.
- Bernard Diem
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20130212882
- Publication date Aug 22, 2013
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Dae Sik LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS
- Publication number 20130057557
- Publication date Mar 7, 2013
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Ravindra Vaman Shenoy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20130049212
- Publication date Feb 28, 2013
- KABUSHIKI KAISHA TOYOTA CHUO KENKYUSHO
- Yoshiyuki HATA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR THE PRODUCTION OF THREE-DIMENSIONAL MICROSTRUCTURES
- Publication number 20120325775
- Publication date Dec 27, 2012
- Nanoscribe GmbH
- Michael Thiel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME
- Publication number 20120286402
- Publication date Nov 15, 2012
- Chin-Te Kuo
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FLOW PATH DEVICE
- Publication number 20120009097
- Publication date Jan 12, 2012
- PANASONIC CORPORATION
- Takeki YAMAMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Process for Eliminating Delamination between Amorphous Silicon Layers
- Publication number 20110263106
- Publication date Oct 27, 2011
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jiou-Kang Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20110236277
- Publication date Sep 29, 2011
- ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE
- Dae Sik LEE
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20110204457
- Publication date Aug 25, 2011
- Omron Corporation
- Kazuyuki Ono
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT HAVING A REAR VOLUME
- Publication number 20110198713
- Publication date Aug 18, 2011
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR THE PRODUCTION OF MULTI-STEPPED SUBSTRATE
- Publication number 20110089141
- Publication date Apr 21, 2011
- ULVAC,INC.
- Ai Tanaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC CIRCUIT ELEMENT COMPRISING MICROFLUIDIC CHANNEL WITH N...
- Publication number 20110033338
- Publication date Feb 10, 2011
- INCYTO CO., LTD.
- Sin Kil Cho
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MICRO-NANO FLUIDIC BIOCHIP FOR ASSAYING BIOLOGICAL SAMPLE
- Publication number 20110027873
- Publication date Feb 3, 2011
- INCYTO CO., LTD.
- Sin Kil Cho
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CHANNEL FOR CAPILLARY FLOW, BIOSENSOR DEVICE AND METHOD FOR FORMING...
- Publication number 20100326844
- Publication date Dec 30, 2010
- Mark Hyland
- B81 - MICRO-STRUCTURAL TECHNOLOGY

profiles not provided for in B81B2203/0376 - B81B2203/0384

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor structure and method for forming the same

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Anchor structure for reducing temperature-based error

MEMS device and method for making the same

Tunable nanotextured materials

Anti-stiction bottom cavity surface for micromachined ultrasonic tr...

Force sensor with MEMS-based device and force touching member

Micromechanical component and method for producing same

Suspended microelectromechanical system (MEMS) devices

Microelectromechanical component

Method for manufacturing MEMS microphone

Method for obtaining at least one structure approximating a sought...

Method of fabricating a MEMS and/or NEMS structure comprising at le...

MEMS microphone and method for manufacturing the same

Nanochannel device with three dimensional gradient by single step e...

Manufacturing method for semiconductor structure

Combined-blade open flow path device and joined body thereof

Semiconductor structure and manufacturing method for the same

MEMS sensor with side port and method of fabricating same

MEMS capacitive pressure sensors

MEMS capacitive pressure sensors

Semiconductor device having a base, a cavity, a diaphragm, and a su...

MEMS capacitive pressure sensors and fabrication method thereof

Method for etching a complex pattern

Method for the production of three-dimensional microstructures

Semiconductor device

Micromechanical component having a rear volume

Systems and methods for fabricating an out-of-plane MEMS structure

Process for eliminating delamination between amorphous silicon layers

Integrated flow cell with semiconductor oxide tubing

Patents Applicationslast 30 patents

CONNECTION LINE STRUCTURE AND FORMING METHOD THEREOF

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

MEMS DEVICE AND METHOD FOR MAKING THE SAME

SEMICONDUCTOR STRUCTURE AND METHOD FOR FORMING THE SAME

ANCHOR STRUCTURE FOR REDUCING TEMPERATURE-BASED ERROR

SUSPENDED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

FORCE SENSOR

MANUFACTURING METHOD FOR SEMICONDUCTOR STRUCTURE

MEMS MICROPHONE AND METHOD FOR MANUFACTURING THE SAME

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

MEMS SENSOR WITH SIDE PORT AND METHOD OF FABRICATING SAME

COMBINED-BLADE-TYPE OPEN FLOW PATH DEVICE AND JOINED BODY THEREOF

METHOD FOR ETCHING A COMPLEX PATTERN

MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME

HIGH AREA STACKED LAYERED METALLIC STRUCTURES AND RELATED METHODS

SEMICONDUCTOR DEVICE

METHOD FOR THE PRODUCTION OF THREE-DIMENSIONAL MICROSTRUCTURES

PROTUBERANT STRUCTURE AND METHOD FOR MAKING THE SAME

FLOW PATH DEVICE

Process for Eliminating Delamination between Amorphous Silicon Layers

MICROFLUID CONTROL DEVICE AND METHOD OF MANUFACTURING THE SAME

SEMICONDUCTOR DEVICE

MICROMECHANICAL COMPONENT HAVING A REAR VOLUME

METHOD FOR THE PRODUCTION OF MULTI-STEPPED SUBSTRATE

MICROFLUIDIC CIRCUIT ELEMENT COMPRISING MICROFLUIDIC CHANNEL WITH N...

MICRO-NANO FLUIDIC BIOCHIP FOR ASSAYING BIOLOGICAL SAMPLE

CHANNEL FOR CAPILLARY FLOW, BIOSENSOR DEVICE AND METHOD FOR FORMING...