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CPC
H01J2237/20214

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/20214Rotation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam inspection apparatus
- Patent number 12,261,015
- Issue date Mar 25, 2025
- NuFlare Technology, Inc.
- Atsushi Ando
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and support for coating eyeglass lenses
- Patent number 12,261,031
- Issue date Mar 25, 2025
- Schneider GmbH & Co. KG
- Gunter Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for producing layers with improved uniformity in...
- Patent number 12,258,661
- Issue date Mar 25, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Michael Vergöhl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical devices
- Patent number 12,252,789
- Issue date Mar 18, 2025
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Scanning electron microscope and image generation method using scan...
- Patent number 12,255,043
- Issue date Mar 18, 2025
- Jeol Ltd.
- Takeshi Otsuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holding device
- Patent number 12,249,479
- Issue date Mar 11, 2025
- Nissin Ion Equipment Co., Ltd.
- Yusuke Otsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for metal and ceramic nanolayering for acciden...
- Patent number 12,211,679
- Issue date Jan 28, 2025
- Starfire Industries LLC
- Brian E. Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing film and film deposition system
- Patent number 12,205,817
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Workpiece processing apparatus with thermal processing systems
- Patent number 12,183,558
- Issue date Dec 31, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dixit Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning ion beam deposition and etch
- Patent number 12,176,178
- Issue date Dec 24, 2024
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating apparatus and coating method
- Patent number 12,170,189
- Issue date Dec 17, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface processing equipment and surface processing method
- Patent number 12,154,768
- Issue date Nov 26, 2024
- Industrial Technology Research Institute
- Chih-Chieh Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating substrate support
- Patent number 12,106,944
- Issue date Oct 1, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for beam processing of substrates
- Patent number 12,105,423
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Mirko Vukovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device and substrate processing method
- Patent number 12,106,941
- Issue date Oct 1, 2024
- Jusung Engineering Co., Ltd.
- Chul-Joo Hwang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,087,556
- Issue date Sep 10, 2024
- Kioxia Corporation
- Yosuke Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Movement systems for sputter coating of non-flat substrates
- Patent number 12,080,527
- Issue date Sep 3, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert De Bosscher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating sample holder for random angle sampling in tomography
- Patent number 12,074,007
- Issue date Aug 27, 2024
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition system with integrated cooling on a rotating drum
- Patent number 12,057,297
- Issue date Aug 6, 2024
- Richard DeVito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 12,051,566
- Issue date Jul 30, 2024
- Tokyo Electron Limited
- Hitoshi Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitriding apparatus and nitriding method
- Patent number 12,033,836
- Issue date Jul 9, 2024
- Kobe Steel, Ltd.
- Maiko Abe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device using plasma-enhanced...
- Patent number 12,027,364
- Issue date Jul 2, 2024
- Taiwan Carbon Nano Technology Corporation
- Tsung-Fu Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spinning disk with electrostatic clamped platens for ion implantation
- Patent number 12,002,649
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Robert Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sample mount for electron backscatter diffraction
- Patent number 11,996,264
- Issue date May 28, 2024
- Honeywell Federal Manufacturing & Technologies, LLC
- David M. Wieliczka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen machining device and specimen machining method
- Patent number 11,990,312
- Issue date May 21, 2024
- Jeol Ltd.
- Shogo Kataoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,986,867
- Issue date May 21, 2024
- SCREEN Holdings Co., Ltd.
- Akira Horikoshi
- B08 - CLEANING
Information Patent Grant
Wafer positioning method and apparatus
- Patent number 11,978,677
- Issue date May 7, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measurement system, temperature measurement method, and...
- Patent number 11,972,921
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Takeshi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Replaceable module for a charged particle apparatus
- Patent number 11,961,698
- Issue date Apr 16, 2024
- ASML Netherlands B.V.
- Christiaan Otten
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
BEAM ANGLE ROTATION AND SAMPLE ROTATION
- Publication number 20250104963
- Publication date Mar 27, 2025
- Carl Zeiss SMT GMBH
- Thomas Korb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...
- Publication number 20250095952
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Ori Noked
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION
- Publication number 20250095958
- Publication date Mar 20, 2025
- Applied Materials, Inc.
- Frank SINCLAIR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT APPARATUS
- Publication number 20250079126
- Publication date Mar 6, 2025
- SHIBAURA MACHINE CO., LTD.
- Rintaro SUEKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
In-Vacuum Rotatable RF Component
- Publication number 20250079116
- Publication date Mar 6, 2025
- Applied Materials, Inc.
- Michael Mason Carrell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF
- Publication number 20250069848
- Publication date Feb 27, 2025
- KIOXIA Corporation
- Kazuya HATANO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROSCOPY SAMPLE PREPARATION METHODS AND ASSOCIATED SYSTEMS
- Publication number 20250060289
- Publication date Feb 20, 2025
- FEI Company
- Petra Binknerová
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Ion Milling Device
- Publication number 20250046567
- Publication date Feb 6, 2025
- Hitachi High-Tech Corporation
- Shota AIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONCURRENT OR CYCLICAL ETCH AND DIRECTIONAL DEPOSITION
- Publication number 20250046601
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Morgan EVANS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
JIG AND SAMPLE PROCESSING METHOD
- Publication number 20250037964
- Publication date Jan 30, 2025
- KIOXIA Corporation
- Takafumi INAMORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PROCESSING EQUIPMENT
- Publication number 20250006475
- Publication date Jan 2, 2025
- Industrial Technology Research Institute
- Chih-Chieh Chen
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Sample Milling System and Apparatus and Method for Image Generation
- Publication number 20250006458
- Publication date Jan 2, 2025
- JEOL Ltd.
- Munehiro Kozuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETIC ROTATION DEVICE FOR HIGH VACUUM APPLICATIONS SUCH AS ION A...
- Publication number 20240429019
- Publication date Dec 26, 2024
- SHINE Technologies, LLC
- Daniel Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS FOR BEAM PROCESSING OF SUBSTRATES
- Publication number 20240419080
- Publication date Dec 19, 2024
- TOKYO ELECTRON LIMITED
- Mirko Vukovic
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ROTATING SUBSTRATE SUPPORT
- Publication number 20240420931
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240420935
- Publication date Dec 19, 2024
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Tsunahiko NAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240404795
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Fully Integrated Microcrystal Electron Diffra...
- Publication number 20240387141
- Publication date Nov 21, 2024
- The Regents of the University of California
- Tamir Gonen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORM PLASMA PROCESSING WITH A LINEAR PLASMA SOURCE
- Publication number 20240355592
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Vladimir Nagorny
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE TH...
- Publication number 20240347312
- Publication date Oct 17, 2024
- CARL ZEISS MICROSCOPY GMBH
- Heiko Stegmann
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Sample Holder and Sample Processing Apparatus
- Publication number 20240331970
- Publication date Oct 3, 2024
- JEOL Ltd.
- Jun Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...
- Publication number 20240331969
- Publication date Oct 3, 2024
- FEI Company
- Chad Rue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Microscope Stage Fixture for Horizontal Rotation
- Publication number 20240321546
- Publication date Sep 26, 2024
- Gabriel Demeneghi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240321563
- Publication date Sep 26, 2024
- SHIBAURA MECHATRONICS CORPORATION
- Shigeki MATSUNAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER POSITIONING METHOD AND APPARATUS
- Publication number 20240274478
- Publication date Aug 15, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Holder and Analysis System
- Publication number 20240266141
- Publication date Aug 8, 2024
- Hitachi High-Tech Corporation
- Hiroyuki ASAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING A POSITION OF AN OBJECT IN A BEAM APPARATUS,...
- Publication number 20240258068
- Publication date Aug 1, 2024
- CARL ZEISS MICROSCOPY GMBH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Grid Structures Of Ion Beam Etching (IBE) Systems
- Publication number 20240222071
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chansyun David YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Workpiece Processing Apparatus with Plasma and Thermal Processing S...
- Publication number 20240212981
- Publication date Jun 27, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Dieter Hezler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20240209507
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron beam inspection apparatus

System, method and support for coating eyeglass lenses

Device and method for producing layers with improved uniformity in...

Nano-coating protection method for electrical devices

Scanning electron microscope and image generation method using scan...

Substrate holding device

Method and apparatus for metal and ceramic nanolayering for acciden...

Method for depositing film and film deposition system

Workpiece processing apparatus with thermal processing systems

Scanning ion beam deposition and etch

Coating apparatus and coating method

Surface processing equipment and surface processing method

PECVD apparatus

Rotating substrate support

Apparatus and methods for beam processing of substrates

Substrate processing device and substrate processing method

Plasma processing apparatus and plasma processing method

Movement systems for sputter coating of non-flat substrates

Rotating sample holder for random angle sampling in tomography

Deposition system with integrated cooling on a rotating drum

Plasma processing apparatus

Nitriding apparatus and nitriding method

Method for manufacturing semiconductor device using plasma-enhanced...

Spinning disk with electrostatic clamped platens for ion implantation

Sample mount for electron backscatter diffraction

Specimen machining device and specimen machining method

Substrate processing method and substrate processing apparatus

Wafer positioning method and apparatus

Temperature measurement system, temperature measurement method, and...

Replaceable module for a charged particle apparatus

Patents Applicationslast 30 patents

BEAM ANGLE ROTATION AND SAMPLE ROTATION

CONOSCOPIC WAFER ORIENTATION APPARATUS AND ION IMPLANTER INCLUDING...

CONOSCOPIC WAFER ORIENTATION FOR ION IMPLANTATION

SURFACE TREATMENT APPARATUS

In-Vacuum Rotatable RF Component

CHARGED PARTICLE BEAM APPARATUS AND CONTROL METHOD THEREOF

MICROSCOPY SAMPLE PREPARATION METHODS AND ASSOCIATED SYSTEMS

Ion Milling Device

CONCURRENT OR CYCLICAL ETCH AND DIRECTIONAL DEPOSITION

JIG AND SAMPLE PROCESSING METHOD

SURFACE PROCESSING EQUIPMENT

Sample Milling System and Apparatus and Method for Image Generation

MAGNETIC ROTATION DEVICE FOR HIGH VACUUM APPLICATIONS SUCH AS ION A...

APPARATUS AND METHODS FOR BEAM PROCESSING OF SUBSTRATES

ROTATING SUBSTRATE SUPPORT

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

System and Method for Fully Integrated Microcrystal Electron Diffra...

UNIFORM PLASMA PROCESSING WITH A LINEAR PLASMA SOURCE

DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE TH...

Sample Holder and Sample Processing Apparatus

CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...

Microscope Stage Fixture for Horizontal Rotation

FILM FORMING APPARATUS

WAFER POSITIONING METHOD AND APPARATUS

Sample Holder and Analysis System

METHOD FOR DETERMINING A POSITION OF AN OBJECT IN A BEAM APPARATUS,...

Grid Structures Of Ion Beam Etching (IBE) Systems

Workpiece Processing Apparatus with Plasma and Thermal Processing S...

FILM FORMING APPARATUS