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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/20214
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Patents Grants
last 30 patents
Information
Patent Grant
Wafer positioning method and apparatus
Patent number
11,978,677
Issue date
May 7, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature measurement system, temperature measurement method, and...
Patent number
11,972,921
Issue date
Apr 30, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Replaceable module for a charged particle apparatus
Patent number
11,961,698
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Christiaan Otten
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Grid structures of ion beam etching (IBE) systems
Patent number
11,961,706
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chansyun David Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
11,961,710
Issue date
Apr 16, 2024
Canon Anelva Corporation
Tadashi Inoue
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing apparatus, substrate retainer and method of ma...
Patent number
11,961,715
Issue date
Apr 16, 2024
Kokusai Electric Corporation
Daisuke Hara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
Patent number
11,955,315
Issue date
Apr 9, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dieter Hezler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for processing a substrate
Patent number
11,955,333
Issue date
Apr 9, 2024
Applied Materials, Inc.
Jethro Tannos
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dynamic phased array plasma source for complete plasma coverage of...
Patent number
11,948,783
Issue date
Apr 2, 2024
Applied Materials, Inc.
Hari Ponnekanti
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor wafer
Patent number
11,929,229
Issue date
Mar 12, 2024
MI2-FACTORY GMBH
Florian Krippendorf
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma processing method, plasma processing apparatus, and control...
Patent number
11,901,158
Issue date
Feb 13, 2024
Tokyo Electron Limited
Takeshi Kobayashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion milling device
Patent number
11,894,213
Issue date
Feb 6, 2024
HITACHI HIGH-TECH CORPORATION
Asako Kaneko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and charge neutralization method for...
Patent number
11,862,439
Issue date
Jan 2, 2024
Tokyo Electron Limited
Takahiro Kawawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Modular reactor for microwave plasma-assisted deposition
Patent number
11,859,279
Issue date
Jan 2, 2024
DIAM CONCEPT
Alix Gicquel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Adjustable fastening device for plasma gas injectors
Patent number
11,854,769
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yung-Shun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device, method and use for the coating of lenses
Patent number
11,842,889
Issue date
Dec 12, 2023
Schneider GmbH & Co. KG
Gunter Schneider
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing device and substrate processing method
Patent number
11,837,445
Issue date
Dec 5, 2023
JUSUNG ENGINEERING CO., LTD.
Chul-Joo Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Workpiece processing apparatus with plasma and thermal processing s...
Patent number
11,837,447
Issue date
Dec 5, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Setting position of a particle beam device component
Patent number
11,837,434
Issue date
Dec 5, 2023
Carl Zeiss Microscopy GmbH
Andreas Schmaunz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition method
Patent number
11,837,465
Issue date
Dec 5, 2023
Tokyo Electron Limited
Jun Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate carrier apparatus, substrate processing apparatus, and me...
Patent number
11,823,873
Issue date
Nov 21, 2023
ASM IP Holding B.V.
Kazuhiro Nishiwaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rotatable stage
Patent number
11,810,750
Issue date
Nov 7, 2023
Quorum Technologies Ltd.
Robert Morrison
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integral sweep in ion beam system
Patent number
11,784,025
Issue date
Oct 10, 2023
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rotating sample holder for random angle sampling in tomography
Patent number
11,756,762
Issue date
Sep 12, 2023
FEI Company
Bart Jozef Janssen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for implanting ions in wafers
Patent number
11,705,300
Issue date
Jul 18, 2023
MI2-FACTORY GMBH
Florian Krippendorf
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Catalytic thermal deposition of carbon-containing materials
Patent number
11,682,554
Issue date
Jun 20, 2023
Applied Materials, Inc.
Zeqing Shen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated circuit fabrication system with adjustable gas injector
Patent number
11,670,490
Issue date
Jun 6, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Yung-Shun Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System and method for controlling electrostatic clamping of multipl...
Patent number
11,670,532
Issue date
Jun 6, 2023
Applied Materials, Inc.
Scott E. Peitzsch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus
Patent number
11,664,205
Issue date
May 30, 2023
Kokusai Electric Corporation
Naofumi Ohashi
B08 - CLEANING
Information
Patent Grant
Film-forming apparatus, film-forming system, and film-forming method
Patent number
11,664,207
Issue date
May 30, 2023
Tokyo Electron Limited
Masato Shinada
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR FORMING HIGHLY UNIFORM DIELECTRIC FILM
Publication number
20240145217
Publication date
May 2, 2024
Applied Materials, Inc.
Qintao Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROTATABLE TEM GRID HOLDER FOR IMPROVED FIB THINNING PROCESS
Publication number
20240128046
Publication date
Apr 18, 2024
SANDISK TECHNOLOGIES LLC
Xiaochen Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS DESIGN FOR FILM REMOVAL FROM THE BEVEL AND EDGE OF THE SU...
Publication number
20240128061
Publication date
Apr 18, 2024
Applied Materials, Inc.
FARZAD HOUSHMAND
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BACKSIDE DEPOSITION FOR WAFER BOW MANAGEMENT
Publication number
20240096605
Publication date
Mar 21, 2024
Applied Materials, Inc.
Arun Kumar Kotrappa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM DEPOSITION APPARATUS AND ION BEAM DEPOSITION METHOD USING...
Publication number
20240071712
Publication date
Feb 29, 2024
Samsung Electronics Co., Ltd.
SeungWan YOO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Workpiece Processing Apparatus with Thermal Processing Systems
Publication number
20240055242
Publication date
Feb 15, 2024
Beijing E-Town Semiconductor Technology Co., Ltd.
Dixit Desai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING DEVICE AND SUBSTRATE PROCESSING METHOD
Publication number
20240055233
Publication date
Feb 15, 2024
JUSUNG ENGINEERING CO., LTD.
Chul-Joo HWANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR PREPARING SAMPLES FOR IMAGING
Publication number
20240038486
Publication date
Feb 1, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Ching Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD, APPARATUS AND SYSTEM FOR PROCESSING SEMICONDUCTOR STRUCTURE
Publication number
20240027911
Publication date
Jan 25, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC
Jing LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
Publication number
20240030008
Publication date
Jan 25, 2024
TOKYO ELECTRON LIMITED
Eiki KAMATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING COATING FILMS AND SUBSTRATE PROCESSING APPARATU...
Publication number
20240011146
Publication date
Jan 11, 2024
Seoul National University R&DB Foundation
Seungjun LEE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20230402256
Publication date
Dec 14, 2023
TOKYO ELECTRON LIMITED
Takashi CHIBA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...
Publication number
20230395356
Publication date
Dec 7, 2023
Applied Materials, Inc.
Anantha Subramani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
Publication number
20230395358
Publication date
Dec 7, 2023
Samsung Electronics Co., Ltd.
Daewoong Heo
B08 - CLEANING
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
Publication number
20230374663
Publication date
Nov 23, 2023
JUSUNG ENGINEERING CO., LTD.
Jong Sik KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ROTATING SAMPLE HOLDER FOR RANDOM ANGLE SAMPLING IN TOMOGRAPHY
Publication number
20230377835
Publication date
Nov 23, 2023
FEI Company
Bart Jozef Janssen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Ion Milling Device and Ion Milling Method
Publication number
20230369010
Publication date
Nov 16, 2023
HITACHI HIGH-TECH CORPORATION
Toru Iwaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOSE MAPPING AND SUBSTRATE ROTATION FOR SUBSTRATE CURVATURE CONTROL...
Publication number
20230369014
Publication date
Nov 16, 2023
Applied Materials, Inc.
Pradeep Subrahmanyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES
Publication number
20230343546
Publication date
Oct 26, 2023
CARL ZEISS MICROSCOPY GMBH
Michele Nicoletti
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM ETCHING MACHINE AND LIFTING AND ROTATING PLATFORM DEVICE T...
Publication number
20230326709
Publication date
Oct 12, 2023
JIANGSU LEUVEN INSTRUMENTS CO. LTD
Haiyang LIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR SPUTTERING AND DEPOSITING METAL ON SURFACE OF...
Publication number
20230317429
Publication date
Oct 5, 2023
Bin ZHANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BIASABLE ROTATING PEDESTAL
Publication number
20230282506
Publication date
Sep 7, 2023
Applied Materials, Inc.
Anantha Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR WAFER
Publication number
20230282439
Publication date
Sep 7, 2023
mi2-factory GmbH
Florian KRIPPENDORF
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPECIMEN HOLDER
Publication number
20230268157
Publication date
Aug 24, 2023
Mel-Build Corporation
Hiroya Miyazaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
Publication number
20230260741
Publication date
Aug 17, 2023
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Tetsuya Kudo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
Publication number
20230257869
Publication date
Aug 17, 2023
QORVO BIOTECHNOLOGIES, LLC
Derya Deniz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230260760
Publication date
Aug 17, 2023
TOKYO ELECTRON LIMITED
Ibuki HAYASHI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF IMAGING A SAMPLE WITH A CHARGED PARTICLE BEAM DEVICE, MET...
Publication number
20230253177
Publication date
Aug 10, 2023
Applied Materials, Inc.
Kulpreet Singh VIRDI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEPOSITION METHOD AND DEPOSITION APPARATUS
Publication number
20230230817
Publication date
Jul 20, 2023
TOKYO ELECTRON LIMITED
Hitoshi KATO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF
Publication number
20230229133
Publication date
Jul 20, 2023
TENGXI TECHNOLOGY CO. LTD.
WEI-HAN LO
H01 - BASIC ELECTRIC ELEMENTS