semiconductor wafer

Industry

CPC
G01N2223/6116

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N2223/00Investigating materials by wave or particle radiation

Current Industry

G01N2223/6116semiconductor wafer

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
In situ and tunable deposition of a film
- Patent number 12,359,307
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of failure analysis for defect locations
- Patent number 12,339,202
- Issue date Jun 24, 2025
- Shanghai Huali Integrated Circuit Corporation
- Qiang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 12,334,299
- Issue date Jun 17, 2025
- HITACHI HIGH-TECH CORPORATION
- U Oh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Electron spectroscopy based techniques for determining various chem...
- Patent number 12,326,410
- Issue date Jun 10, 2025
- COZAI LTD
- Hagai Cohen
- G01 - MEASURING TESTING
Information Patent Grant
Large die wafer, large die and method of forming the same
- Patent number 12,322,707
- Issue date Jun 3, 2025
- Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.
- Sheng Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Full beam metrology for x-ray scatterometry systems
- Patent number 12,320,763
- Issue date Jun 3, 2025
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
X-ray analysis system and method with multi-source design
- Patent number 12,292,396
- Issue date May 6, 2025
- SHENZHEN ANGSTROM EXCELLENCE TECHNOLOGY CO. LTD
- Xuena Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Parameterizing x-ray scattering measurement using slice-and-image t...
- Patent number 12,288,706
- Issue date Apr 29, 2025
- Carl Zeiss SMT GmbH
- Hans Michael Stiepan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Characterizing and measuring in small boxes using XPS with multiple...
- Patent number 12,281,893
- Issue date Apr 22, 2025
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, apparatus, and program for determining condition related to...
- Patent number 12,243,711
- Issue date Mar 4, 2025
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmissive small-angle scattering device
- Patent number 12,222,303
- Issue date Feb 11, 2025
- Rigaku Corporation
- Naoki Matsushima
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for voltage contrast defect detection
- Patent number 12,196,692
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Weiming Ren
- G01 - MEASURING TESTING
Information Patent Grant
X-ray based measurements in patterned structure
- Patent number 12,196,691
- Issue date Jan 14, 2025
- Nova Ltd.
- Gilad Barak
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for efficient high harmonic generation
- Patent number 12,196,688
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Petrus Wilhelmus Smorenburg
- G01 - MEASURING TESTING
Information Patent Grant
Image pickup device and image generation method
- Patent number 12,181,425
- Issue date Dec 31, 2024
- Kioxia Corporation
- Takeshi Yamane
- G01 - MEASURING TESTING
Information Patent Grant
Utilize machine learning in selecting high quality averaged SEM ima...
- Patent number 12,182,983
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Chen Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System for estimating the occurrence of defects, and computer-reada...
- Patent number 12,111,272
- Issue date Oct 8, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroshi Fukuda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for monitoring beam profile and power
- Patent number 12,105,036
- Issue date Oct 1, 2024
- ASML Netherlands B.V.
- Jian Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Small-angle X-ray scatterometry
- Patent number 12,085,521
- Issue date Sep 10, 2024
- BRUKER TECHNOLOGIES LTD.
- Alex Dikopoltsev
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring properties of X-ray beam during X-ray analysis
- Patent number 12,078,604
- Issue date Sep 3, 2024
- BRUKER TECHNOLOGIES LTD.
- Alexander Krokhmal
- G01 - MEASURING TESTING
Information Patent Grant
Defect characterization method and apparatus
- Patent number 12,067,704
- Issue date Aug 20, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Ning Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Estimating heights of defects in a wafer by scaling a 3D model usin...
- Patent number 12,057,336
- Issue date Aug 6, 2024
- Samsung Electronics Co., Ltd.
- Shashank Shrikant Agashe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method, inspection system, and semiconductor fabrication...
- Patent number 12,055,861
- Issue date Aug 6, 2024
- Samsung Electronics Co., Ltd.
- Kihyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Soft x-ray optics with improved filtering
- Patent number 12,025,575
- Issue date Jul 2, 2024
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Transmissive small-angle scattering device
- Patent number 12,019,036
- Issue date Jun 25, 2024
- Rigaku Corporation
- Naoki Matsushima
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for compact, small spot size soft x-ray scatter...
- Patent number 12,013,355
- Issue date Jun 18, 2024
- KLA Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Characterizing and measuring in small boxes using XPS with multiple...
- Patent number 11,988,502
- Issue date May 21, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 11,978,195
- Issue date May 7, 2024
- Kioxia Corporation
- Keisuke Chiba
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Geometry based three dimensional reconstruction of a semiconductor...
- Patent number 11,953,316
- Issue date Apr 9, 2024
- Applied Materials Israel Ltd.
- Rafael Bistritzer
- G01 - MEASURING TESTING
Information Patent Grant
Process monitoring of deep structures with X-ray scatterometry
- Patent number 11,955,391
- Issue date Apr 9, 2024
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
WAFER INSPECTION METHOD
- Publication number 20250231121
- Publication date Jul 17, 2025
- Samsung Electronics Co., Ltd.
- Doyoung Yoon
- G01 - MEASURING TESTING
Information Patent Application
E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES
- Publication number 20250231129
- Publication date Jul 17, 2025
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NONDESTRUCTIVE ESTIMATION OF STRUCTURAL PROPERTIES OF A SPECIMEN VI...
- Publication number 20250231132
- Publication date Jul 17, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Doron Girmonsky
- G01 - MEASURING TESTING
Information Patent Application
DEFECT REGION DETECTION DEVICE AND WAFER DEFECT DETECTION SYSTEM IN...
- Publication number 20250217960
- Publication date Jul 3, 2025
- Samsung Electronics Co., Ltd.
- Minsu Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DETERMINATION OF LAYER PROPERTIES USING WIDENING OF AN ELECTRON BEAM
- Publication number 20250216346
- Publication date Jul 3, 2025
- APPLIED MATERIALS ISRAEL LTD.
- Ron MEIRY
- G01 - MEASURING TESTING
Information Patent Application
Analysis System, Analysis Method, and Analysis Program
- Publication number 20250208076
- Publication date Jun 26, 2025
- Hitachi High-Tech Corporation
- Keiichi TANAKA
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
- Publication number 20250208074
- Publication date Jun 26, 2025
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF INSPECTING GROUP-III ELEMENT NITRIDE SUBSTRATE, METHOD OF...
- Publication number 20250201636
- Publication date Jun 19, 2025
- NGK Insulators, Ltd.
- Yoshitaka KURAOKA
- C30 - CRYSTAL GROWTH
Information Patent Application
Collimator for an X-ray inspection system, X-ray laminography syste...
- Publication number 20250198951
- Publication date Jun 19, 2025
- Comet Yxlon GmbH
- André Schu
- G01 - MEASURING TESTING
Information Patent Application
THERMAL CHARACTERIZATION METHOD AND MANUFACTURING OF SEMICONDUCTOR...
- Publication number 20250201633
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sam Vaziri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods And Systems For Spectral Measurements Based On Perturbed Sp...
- Publication number 20250164411
- Publication date May 22, 2025
- KLA Corporation
- William McGahan
- G01 - MEASURING TESTING
Information Patent Application
FIELD OF VIEW SELECTION FOR METROLOGY ASSOCIATED WITH SEMICONDUCTOR...
- Publication number 20250147433
- Publication date May 8, 2025
- ASML NETHERLANDS B.V.
- Tsung-Pao FANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Forward Library Based Seeding For Efficient X-Ray Scatterometry Mea...
- Publication number 20250085241
- Publication date Mar 13, 2025
- KLA Corporation
- Rebecca Shen
- G01 - MEASURING TESTING
Information Patent Application
UTILIZE MACHINE LEARNING IN SELECTING HIGH QUALITY AVERAGED SEM IMA...
- Publication number 20250078244
- Publication date Mar 6, 2025
- ASML NETHERLANDS B.V.
- Chen ZHANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND SYSTEM FOR MATCHING CALIBRATIONS OF DETECTORS IN A DETEC...
- Publication number 20250067685
- Publication date Feb 27, 2025
- Thermo EGS Gauging LLC
- Carter WATSON
- G01 - MEASURING TESTING
Information Patent Application
PRODUCTION SOLUTIONS FOR HIGH-THROUGHPUT/PRECISION XPS METROLOGY US...
- Publication number 20250067691
- Publication date Feb 27, 2025
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- G01 - MEASURING TESTING
Information Patent Application
HYBRID X-RAY AND OPTICAL METROLOGY AND NAVIGATION
- Publication number 20250060324
- Publication date Feb 20, 2025
- TOKYO ELECTRON LIMITED
- Francisco Machuca
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR EVALUATING THE BENDING STIFFNESS OF HIGH ASPECT RATIO NA...
- Publication number 20250052703
- Publication date Feb 13, 2025
- IMEC vzw
- XiuMei Xu
- B82 - NANO-TECHNOLOGY
Information Patent Application
INSPECTION APPARATUS AND METHOD FOR GENERATING INSPECTION IMAGE
- Publication number 20250037269
- Publication date Jan 30, 2025
- NuFlare Technology, Inc.
- Shinji SUGIHARA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETECTING DEFECTS IN SEMICONDUCTOR STRUCTURE AND METHOD...
- Publication number 20250028253
- Publication date Jan 23, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- YEN-FONG CHAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...
- Publication number 20240418633
- Publication date Dec 19, 2024
- KLA Corporation
- Shova Subedi
- G01 - MEASURING TESTING
Information Patent Application
CHARACTERIZING AND MEASURING IN SMALL BOXES USING XPS WITH MULTIPLE...
- Publication number 20240401940
- Publication date Dec 5, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CHARACTERIZING A NETWORK TO BE ANALYSED COMPRISING PERIO...
- Publication number 20240394867
- Publication date Nov 28, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Lucas JALOUSTRE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Analysis System
- Publication number 20240393270
- Publication date Nov 28, 2024
- Hitachi High-Tech Corporation
- Azusa KONNO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MIC...
- Publication number 20240393269
- Publication date Nov 28, 2024
- Carl Zeiss SMT GMBH
- Jens Oster
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Analysis Device and Analysis Method
- Publication number 20240385131
- Publication date Nov 21, 2024
- JEOL Ltd.
- Takeshi Otsuka
- G01 - MEASURING TESTING
Information Patent Application
ROENTGEN INTEGRATED METROLOGY FOR HYBRID BONDING PROCESS CONTROL IN...
- Publication number 20240387448
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Francisco MACHUCA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Small-Angle X-Ray Scatterometry
- Publication number 20240377342
- Publication date Nov 14, 2024
- BRUKER TECHNOLOGIES LTD.
- Alex Dikopoltsev
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CONVERTING METROLOGY DATA
- Publication number 20240377343
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Yunbo GUO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20240363447
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Chien HOU
- B24 - GRINDING POLISHING

semiconductor wafer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

In situ and tunable deposition of a film

Method of failure analysis for defect locations

Charged particle beam device

Electron spectroscopy based techniques for determining various chem...

Large die wafer, large die and method of forming the same

Full beam metrology for x-ray scatterometry systems

X-ray analysis system and method with multi-source design

Parameterizing x-ray scattering measurement using slice-and-image t...

Characterizing and measuring in small boxes using XPS with multiple...

Method, apparatus, and program for determining condition related to...

Transmissive small-angle scattering device

Systems and methods for voltage contrast defect detection

X-ray based measurements in patterned structure

Method and apparatus for efficient high harmonic generation

Image pickup device and image generation method

Utilize machine learning in selecting high quality averaged SEM ima...

System for estimating the occurrence of defects, and computer-reada...

Method and apparatus for monitoring beam profile and power

Small-angle X-ray scatterometry

Monitoring properties of X-ray beam during X-ray analysis

Defect characterization method and apparatus

Estimating heights of defects in a wafer by scaling a 3D model usin...

Inspection method, inspection system, and semiconductor fabrication...

Soft x-ray optics with improved filtering

Transmissive small-angle scattering device

Methods and systems for compact, small spot size soft x-ray scatter...

Characterizing and measuring in small boxes using XPS with multiple...

Inspection method and inspection apparatus

Geometry based three dimensional reconstruction of a semiconductor...

Process monitoring of deep structures with X-ray scatterometry

Patents Applicationslast 30 patents

WAFER INSPECTION METHOD

E-BEAM OPTIMIZATION FOR OVERLAY MEASUREMENT OF BURIED FEATURES

NONDESTRUCTIVE ESTIMATION OF STRUCTURAL PROPERTIES OF A SPECIMEN VI...

DEFECT REGION DETECTION DEVICE AND WAFER DEFECT DETECTION SYSTEM IN...

DETERMINATION OF LAYER PROPERTIES USING WIDENING OF AN ELECTRON BEAM

Analysis System, Analysis Method, and Analysis Program

SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION

METHOD OF INSPECTING GROUP-III ELEMENT NITRIDE SUBSTRATE, METHOD OF...

Collimator for an X-ray inspection system, X-ray laminography syste...

THERMAL CHARACTERIZATION METHOD AND MANUFACTURING OF SEMICONDUCTOR...

Methods And Systems For Spectral Measurements Based On Perturbed Sp...

FIELD OF VIEW SELECTION FOR METROLOGY ASSOCIATED WITH SEMICONDUCTOR...

Forward Library Based Seeding For Efficient X-Ray Scatterometry Mea...

UTILIZE MACHINE LEARNING IN SELECTING HIGH QUALITY AVERAGED SEM IMA...

METHOD AND SYSTEM FOR MATCHING CALIBRATIONS OF DETECTORS IN A DETEC...

PRODUCTION SOLUTIONS FOR HIGH-THROUGHPUT/PRECISION XPS METROLOGY US...

HYBRID X-RAY AND OPTICAL METROLOGY AND NAVIGATION

METHOD FOR EVALUATING THE BENDING STIFFNESS OF HIGH ASPECT RATIO NA...

INSPECTION APPARATUS AND METHOD FOR GENERATING INSPECTION IMAGE

METHOD FOR DETECTING DEFECTS IN SEMICONDUCTOR STRUCTURE AND METHOD...

COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...

CHARACTERIZING AND MEASURING IN SMALL BOXES USING XPS WITH MULTIPLE...

METHOD FOR CHARACTERIZING A NETWORK TO BE ANALYSED COMPRISING PERIO...

Analysis System

METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MIC...

Analysis Device and Analysis Method

ROENTGEN INTEGRATED METROLOGY FOR HYBRID BONDING PROCESS CONTROL IN...

Small-Angle X-Ray Scatterometry

METHOD FOR CONVERTING METROLOGY DATA

APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING