semiconductor wafer

Industry

CPC
G01N2223/6116

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Parent Industries

GPHYSICS G01Measuring instruments G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES G01N2223/00Investigating materials by wave or particle radiation

Current Industry

G01N2223/6116semiconductor wafer

Industries

Patents Grantslast 30 patents

Information Patent Grant
Image pickup device and image generation method
- Patent number 12,181,425
- Issue date Dec 31, 2024
- Kioxia Corporation
- Takeshi Yamane
- G01 - MEASURING TESTING
Information Patent Grant
Utilize machine learning in selecting high quality averaged SEM ima...
- Patent number 12,182,983
- Issue date Dec 31, 2024
- ASML Netherlands B.V.
- Chen Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System for estimating the occurrence of defects, and computer-reada...
- Patent number 12,111,272
- Issue date Oct 8, 2024
- HITACHI HIGH-TECH CORPORATION
- Hiroshi Fukuda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and apparatus for monitoring beam profile and power
- Patent number 12,105,036
- Issue date Oct 1, 2024
- ASML Netherlands B.V.
- Jian Zhang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Small-angle X-ray scatterometry
- Patent number 12,085,521
- Issue date Sep 10, 2024
- BRUKER TECHNOLOGIES LTD.
- Alex Dikopoltsev
- G01 - MEASURING TESTING
Information Patent Grant
Monitoring properties of X-ray beam during X-ray analysis
- Patent number 12,078,604
- Issue date Sep 3, 2024
- BRUKER TECHNOLOGIES LTD.
- Alexander Krokhmal
- G01 - MEASURING TESTING
Information Patent Grant
Defect characterization method and apparatus
- Patent number 12,067,704
- Issue date Aug 20, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Ning Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Estimating heights of defects in a wafer by scaling a 3D model usin...
- Patent number 12,057,336
- Issue date Aug 6, 2024
- Samsung Electronics Co., Ltd.
- Shashank Shrikant Agashe
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Inspection method, inspection system, and semiconductor fabrication...
- Patent number 12,055,861
- Issue date Aug 6, 2024
- Samsung Electronics Co., Ltd.
- Kihyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Soft x-ray optics with improved filtering
- Patent number 12,025,575
- Issue date Jul 2, 2024
- KLA Corporation
- Alexander Kuznetsov
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Transmissive small-angle scattering device
- Patent number 12,019,036
- Issue date Jun 25, 2024
- Rigaku Corporation
- Naoki Matsushima
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for compact, small spot size soft x-ray scatter...
- Patent number 12,013,355
- Issue date Jun 18, 2024
- KLA Corporation
- David Y. Wang
- G01 - MEASURING TESTING
Information Patent Grant
Characterizing and measuring in small boxes using XPS with multiple...
- Patent number 11,988,502
- Issue date May 21, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath Pois
- G01 - MEASURING TESTING
Information Patent Grant
Inspection method and inspection apparatus
- Patent number 11,978,195
- Issue date May 7, 2024
- Kioxia Corporation
- Keisuke Chiba
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Geometry based three dimensional reconstruction of a semiconductor...
- Patent number 11,953,316
- Issue date Apr 9, 2024
- Applied Materials Israel Ltd.
- Rafael Bistritzer
- G01 - MEASURING TESTING
Information Patent Grant
Process monitoring of deep structures with X-ray scatterometry
- Patent number 11,955,391
- Issue date Apr 9, 2024
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation detection device, recording medium, and positioning method
- Patent number 11,940,397
- Issue date Mar 26, 2024
- Horiba, Ltd.
- Tomoki Aoyama
- G01 - MEASURING TESTING
Information Patent Grant
Lateral recess measurement in a semiconductor specimen
- Patent number 11,921,063
- Issue date Mar 5, 2024
- Applied Materials Israel Ltd.
- Michael Chemama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus adjustment system and inspection apparatus adj...
- Patent number 11,898,968
- Issue date Feb 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Taichi Maeda
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number RE49784
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Weiming Ren
Information Patent Grant
Image processing system
- Patent number 11,852,599
- Issue date Dec 26, 2023
- HITACHI HIGH-TECH CORPORATION
- Nobuhiro Okai
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect detection device, defect detection method, and defect observ...
- Patent number 11,802,841
- Issue date Oct 31, 2023
- HITACHI HIGH-TECH CORPORATION
- Yuji Takagi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Total reflection X-ray fluorescence spectrometer and estimation method
- Patent number 11,796,495
- Issue date Oct 24, 2023
- Rigaku Corporation
- Shinya Kikuta
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Spot-size control in reflection-based and scatterometry-based X-ray...
- Patent number 11,781,999
- Issue date Oct 10, 2023
- BRUKER TECHNOLOGIES LTD.
- Alexander Krokhmal
- G01 - MEASURING TESTING
Information Patent Grant
Dislocation type and density discrimination in semiconductor materi...
- Patent number 11,782,001
- Issue date Oct 10, 2023
- ATTOLIGHT AG
- Marc Fouchier
- G01 - MEASURING TESTING
Information Patent Grant
Transmission X-ray critical dimension (T-XCD) characterization of s...
- Patent number 11,761,913
- Issue date Sep 19, 2023
- BRUKER TECHNOLOGIES LTD.
- Adam Ginsburg
- G01 - MEASURING TESTING
Information Patent Grant
Inspection apparatus for inspecting semiconductor devices using cha...
- Patent number 11,754,517
- Issue date Sep 12, 2023
- Samsung Electronics Co., Ltd.
- Suyoung Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Transmissive small-angle scattering device
- Patent number 11,754,515
- Issue date Sep 12, 2023
- Rigaku Corporation
- Naoki Matsushima
- G01 - MEASURING TESTING
Information Patent Grant
System for estimating the occurrence of defects, and computer-reada...
- Patent number 11,747,291
- Issue date Sep 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Hiroshi Fukuda
- G01 - MEASURING TESTING
Information Patent Grant
Fluorescent X-ray analysis apparatus comprising a plurality of X-ra...
- Patent number 11,733,185
- Issue date Aug 22, 2023
- Rigaku Corporation
- Kiyoshi Ogata
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...
- Publication number 20240418633
- Publication date Dec 19, 2024
- KLA Corporation
- Shova Subedi
- G01 - MEASURING TESTING
Information Patent Application
CHARACTERIZING AND MEASURING IN SMALL BOXES USING XPS WITH MULTIPLE...
- Publication number 20240401940
- Publication date Dec 5, 2024
- NOVA MEASURING INSTRUMENTS INC.
- Heath POIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CHARACTERIZING A NETWORK TO BE ANALYSED COMPRISING PERIO...
- Publication number 20240394867
- Publication date Nov 28, 2024
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Lucas JALOUSTRE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Analysis System
- Publication number 20240393270
- Publication date Nov 28, 2024
- Hitachi High-Tech Corporation
- Azusa KONNO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MIC...
- Publication number 20240393269
- Publication date Nov 28, 2024
- Carl Zeiss SMT GMBH
- Jens Oster
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Analysis Device and Analysis Method
- Publication number 20240385131
- Publication date Nov 21, 2024
- JEOL Ltd.
- Takeshi Otsuka
- G01 - MEASURING TESTING
Information Patent Application
ROENTGEN INTEGRATED METROLOGY FOR HYBRID BONDING PROCESS CONTROL IN...
- Publication number 20240387448
- Publication date Nov 21, 2024
- TOKYO ELECTRON LIMITED
- Francisco MACHUCA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Small-Angle X-Ray Scatterometry
- Publication number 20240377342
- Publication date Nov 14, 2024
- BRUKER TECHNOLOGIES LTD.
- Alex Dikopoltsev
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CONVERTING METROLOGY DATA
- Publication number 20240377343
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Yunbo GUO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING
- Publication number 20240363447
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Te-Chien HOU
- B24 - GRINDING POLISHING
Information Patent Application
SYSTEM AND METHOD FOR DENOISING A REGION OF INTEREST OF A PATTERN
- Publication number 20240361262
- Publication date Oct 31, 2024
- ETROLOGY, LLC
- Vladislav Kaplan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...
- Publication number 20240328970
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND SYSTEM FOR ANOMALY-BASED DEFECT INSPECTION
- Publication number 20240331132
- Publication date Oct 3, 2024
- ASML NETHERLANDS B.V.
- Haoyi LIANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY
- Publication number 20240331179
- Publication date Oct 3, 2024
- Carl Zeiss SMT GMBH
- Dmitry Klochkov
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
TRAINING SCANNING ELECTRON MICROSCOPY IMAGE SELECTION METHOD AND SE...
- Publication number 20240320816
- Publication date Sep 26, 2024
- Samsung Electronics Co., Ltd.
- Nohong Kwak
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR INSPECTION BY FAILURE MECHANISM CLASSIFICATIO...
- Publication number 20240319123
- Publication date Sep 26, 2024
- ASML NETHERLANDS B.V.
- Achim WOESSNER
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
- Publication number 20240311698
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Alexander Freytag
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ELECTRON MICROSCOPE FOR EXAMINING A SPECIMEN
- Publication number 20240302304
- Publication date Sep 12, 2024
- Carl Zeiss SMT GMBH
- Moritz Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DATA ANALYSIS DEVICE, DATA ANALYIS METHOD, PROGRAM, AND RECORDING M...
- Publication number 20240302305
- Publication date Sep 12, 2024
- Sumitomo Electric Industries, Ltd.
- Yutaka HOSHINA
- G01 - MEASURING TESTING
Information Patent Application
X-Ray Scatterometry Based Measurements Of Memory Array Structures S...
- Publication number 20240302301
- Publication date Sep 12, 2024
- KLA Corporation
- Sandeep Inampudi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
- Publication number 20240288389
- Publication date Aug 29, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- B08 - CLEANING
Information Patent Application
Soft X-Ray Optics With Improved Filtering
- Publication number 20240288388
- Publication date Aug 29, 2024
- KLA Corporation
- Alexander Kuznetsov
- G01 - MEASURING TESTING
Information Patent Application
Inspection Device and Inspection Method
- Publication number 20240280520
- Publication date Aug 22, 2024
- Hitachi High-Tech Corporation
- Takashi HIROI
- G01 - MEASURING TESTING
Information Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
- Publication number 20240281952
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...
- Publication number 20240272099
- Publication date Aug 15, 2024
- Carl Zeiss SMT GMBH
- Daniel Schwarz
- G01 - MEASURING TESTING
Information Patent Application
NON-DESTRUCTIVE CLASSIFICATION OF SPECIMENS BASED ON ENERGY SIGNATU...
- Publication number 20240255449
- Publication date Aug 1, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Doron Girmonsky
- G01 - MEASURING TESTING
Information Patent Application
DETECTING DEFECTS IN ARRAY REGIONS ON SPECIMENS
- Publication number 20240255448
- Publication date Aug 1, 2024
- KLA Corporation
- Siqing Nie
- G01 - MEASURING TESTING
Information Patent Application
WAFER MEASUREMENT APPARATUS AND OPERATING METHOD THEREOF
- Publication number 20240248051
- Publication date Jul 25, 2024
- Samsung Electronics Co., Ltd.
- Jaehyung AHN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR MEASURING A LAYER OF A SEMICONDUCTOR DEVIC...
- Publication number 20240241067
- Publication date Jul 18, 2024
- Samsung Electronics Co., Ltd.
- Seungchul Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, APPARATUS, ARTICLES OF MANUFACTURE, AND METHODS TO INSPECT...
- Publication number 20240219326
- Publication date Jul 4, 2024
- Intel Corporation
- Oliver Patterson
- G01 - MEASURING TESTING

semiconductor wafer

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Image pickup device and image generation method

Utilize machine learning in selecting high quality averaged SEM ima...

System for estimating the occurrence of defects, and computer-reada...

Method and apparatus for monitoring beam profile and power

Small-angle X-ray scatterometry

Monitoring properties of X-ray beam during X-ray analysis

Defect characterization method and apparatus

Estimating heights of defects in a wafer by scaling a 3D model usin...

Inspection method, inspection system, and semiconductor fabrication...

Soft x-ray optics with improved filtering

Transmissive small-angle scattering device

Methods and systems for compact, small spot size soft x-ray scatter...

Characterizing and measuring in small boxes using XPS with multiple...

Inspection method and inspection apparatus

Geometry based three dimensional reconstruction of a semiconductor...

Process monitoring of deep structures with X-ray scatterometry

Radiation detection device, recording medium, and positioning method

Lateral recess measurement in a semiconductor specimen

Inspection apparatus adjustment system and inspection apparatus adj...

Apparatus of plural charged-particle beams

Image processing system

Defect detection device, defect detection method, and defect observ...

Total reflection X-ray fluorescence spectrometer and estimation method

Spot-size control in reflection-based and scatterometry-based X-ray...

Dislocation type and density discrimination in semiconductor materi...

Transmission X-ray critical dimension (T-XCD) characterization of s...

Inspection apparatus for inspecting semiconductor devices using cha...

Transmissive small-angle scattering device

System for estimating the occurrence of defects, and computer-reada...

Fluorescent X-ray analysis apparatus comprising a plurality of X-ra...

Patents Applicationslast 30 patents

COMBINATION OF MULTIWAVELENGTH RAMAN AND SPECTROSCOPIC ELLIPSOMETRY...

CHARACTERIZING AND MEASURING IN SMALL BOXES USING XPS WITH MULTIPLE...

METHOD FOR CHARACTERIZING A NETWORK TO BE ANALYSED COMPRISING PERIO...

Analysis System

METHOD AND DEVICE FOR ANALYSING AN IMAGE OF A MICROLITHOGRAPHIC MIC...

Analysis Device and Analysis Method

ROENTGEN INTEGRATED METROLOGY FOR HYBRID BONDING PROCESS CONTROL IN...

Small-Angle X-Ray Scatterometry

METHOD FOR CONVERTING METROLOGY DATA

APPARATUS AND METHODS FOR CHEMICAL MECHANICAL POLISHING

SYSTEM AND METHOD FOR DENOISING A REGION OF INTEREST OF A PATTERN

METHOD OF 3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREAS...

METHOD AND SYSTEM FOR ANOMALY-BASED DEFECT INSPECTION

3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED ACCURACY

TRAINING SCANNING ELECTRON MICROSCOPY IMAGE SELECTION METHOD AND SE...

SYSTEM AND METHOD FOR INSPECTION BY FAILURE MECHANISM CLASSIFICATIO...

MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...

ELECTRON MICROSCOPE FOR EXAMINING A SPECIMEN

DATA ANALYSIS DEVICE, DATA ANALYIS METHOD, PROGRAM, AND RECORDING M...

X-Ray Scatterometry Based Measurements Of Memory Array Structures S...

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

Soft X-Ray Optics With Improved Filtering

Inspection Device and Inspection Method

3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...

HIGH RESOLUTION, LOW ENERGY ELECTRON MICROSCOPE FOR PROVIDING TOPOG...

NON-DESTRUCTIVE CLASSIFICATION OF SPECIMENS BASED ON ENERGY SIGNATU...

DETECTING DEFECTS IN ARRAY REGIONS ON SPECIMENS

WAFER MEASUREMENT APPARATUS AND OPERATING METHOD THEREOF

APPARATUS AND METHOD FOR MEASURING A LAYER OF A SEMICONDUCTOR DEVIC...

SYSTEMS, APPARATUS, ARTICLES OF MANUFACTURE, AND METHODS TO INSPECT...