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suitable for fluid transfer from the MEMS out of the package or vice-versa
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
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Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00309
suitable for fluid transfer from the MEMS out of the package or vice-versa
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Patents Grants
last 30 patents
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Patent Grant
Method for producing a plurality of sensor devices, and sensor device
Patent number
12,195,330
Issue date
Jan 14, 2025
Robert Bosch GmbH
Daniel Haug
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ingress protection mechanism
Patent number
12,035,092
Issue date
Jul 9, 2024
GM CRUISE HOLDINGS LLC
Amanda Lind
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fluidic cavities for on-chip layering and sealing of separation arrays
Patent number
11,992,837
Issue date
May 28, 2024
International Business Machines Corporation
Evan Colgan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capless semiconductor package with a micro-electromechanical system...
Patent number
11,897,763
Issue date
Feb 13, 2024
STMicroelectronics, Inc.
Jefferson Sismundo Talledo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional features formed in molded panel
Patent number
11,807,523
Issue date
Nov 7, 2023
Hewlett-Packard Development Company, L.P.
Chien-Hua Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device with particle filter and method of manufacture
Patent number
11,787,689
Issue date
Oct 17, 2023
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fluidic cavities for on-chip layering and sealing of separation arrays
Patent number
11,612,889
Issue date
Mar 28, 2023
International Business Machines Corporation
Evan Colgan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package device and method for manufacturing the same
Patent number
11,575,995
Issue date
Feb 7, 2023
Advanced Semiconductor Engineering, Inc.
Chang-Lin Yeh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor package structure and method for manufacturing the same
Patent number
11,535,509
Issue date
Dec 27, 2022
Advanced Semiconductor Engineering, Inc.
Wei-Wei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device packages and methods of manufacturing the same
Patent number
11,524,890
Issue date
Dec 13, 2022
Advanced Semiconductor Engineering, Inc.
Yung-Hsing Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS sensor, MEMS sensor system and method for producing a MEMS sen...
Patent number
11,492,249
Issue date
Nov 8, 2022
Infineon Technologies AG
David Tumpold
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaged pressure sensor device
Patent number
11,427,464
Issue date
Aug 30, 2022
NXP USA, INC.
Weng Foong Yap
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and a manufacturing method thereof
Patent number
11,388,525
Issue date
Jul 12, 2022
WEIFANG GOERTEK MICROELECTRONICS CO., LTD.
Quanbo Zou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Encapsulation of sensing device
Patent number
11,358,861
Issue date
Jun 14, 2022
INDIGO DIABETES NV
Juan Sebastian Ordonez Orellana
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Analyte sensor package with dispense chemistry and microfluidic cap
Patent number
11,351,548
Issue date
Jun 7, 2022
Maxim Integrated Products, Inc.
Joy T. Jones
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfluidic component package
Patent number
11,331,663
Issue date
May 17, 2022
The Regents of the University of California
Mark Bachman
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method for manufacturing a thin filtering membrane and an acoustic...
Patent number
11,317,219
Issue date
Apr 26, 2022
STMicroelectronics S.r.l.
Matteo Perletti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaging for a MEMS transducer
Patent number
11,252,513
Issue date
Feb 15, 2022
Cirrus Logic, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method to create multilayer microfluidic chips using spin-on carbon...
Patent number
11,192,101
Issue date
Dec 7, 2021
International Business Machines Corporation
Chi-Chun Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fluidic cavities for on-chip layering and sealing of separation arrays
Patent number
11,173,486
Issue date
Nov 16, 2021
International Business Machines Corporation
Evan Colgan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three-dimensional features formed in molded panel
Patent number
11,148,942
Issue date
Oct 19, 2021
Hewlett-Packard Development Company, L.P.
Chien-Hua Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor system, sensor arrangement, and assembly method using solder...
Patent number
11,146,893
Issue date
Oct 12, 2021
TE CONNECTIVITY SOLUTIONS GmbH
Predrag Drljaca
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Packaging for a MEMS transducer
Patent number
11,146,894
Issue date
Oct 12, 2021
Cirrus Logic, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a semiconductor die provided with a filter...
Patent number
11,128,958
Issue date
Sep 21, 2021
STMicroelectronics S.r.l.
Giorgio Allegato
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical sensor
Patent number
11,111,137
Issue date
Sep 7, 2021
Robert Bosch GmbH
Johannes Classen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS microphone and method of manufacturing the same
Patent number
11,115,756
Issue date
Sep 7, 2021
DB HITEK CO., LTD.
Hyeok In Kwon
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS acoustic pressure sensor device and method for making same
Patent number
11,053,116
Issue date
Jul 6, 2021
Pixart Imaging Incorporation
Chuan-Wei Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fluidic microelectromechanical sensors/devices and fabrication meth...
Patent number
11,033,898
Issue date
Jun 15, 2021
EZMEMS LTD.
Tsvi Shmilovich
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor device with discharge path, and method for producing...
Patent number
11,027,968
Issue date
Jun 8, 2021
Denso Corporation
Megumi Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS cryocooler systems and methods
Patent number
10,927,001
Issue date
Feb 23, 2021
FLIR Systems, Inc.
Andreas Fiedler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
System And Method For Generating Fluid Flow
Publication number
20240409399
Publication date
Dec 12, 2024
Sonicedge Ltd.
Mordehai Margalit
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIQUID EJECTION CHIP AND METHOD FOR MANUFACTURING LIQUID EJECTION CHIP
Publication number
20240409396
Publication date
Dec 12, 2024
Canon Kabushiki Kaisha
RYOTARO MURAKAMI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ACOUSTIC DEVICE AND MODULE INCLUDING THE SAME
Publication number
20240270567
Publication date
Aug 15, 2024
Murata Manufacturing Co., Ltd.
Hiroshi MATSUBARA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
Publication number
20240124300
Publication date
Apr 18, 2024
STMICROELECTRONICS, INC.
Jefferson Sismundo TALLEDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGED CAVITY STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240116752
Publication date
Apr 11, 2024
Zhuhai ACCESS Semiconductor Co., Ltd
Xianming CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INGRESS PROTECTION MECHANISM
Publication number
20230396908
Publication date
Dec 7, 2023
GM Cruise Holdings LLC
Amanda Lind
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING FOR A SENSOR AND METHODS OF MANUFACTURING THEREOF
Publication number
20230314193
Publication date
Oct 5, 2023
Applied Materials, Inc.
Vijay Parkhe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPACT, EASY-TO-PRODUCE MEMS PACKAGE WITH IMPROVED PROTECTIVE PROP...
Publication number
20230242394
Publication date
Aug 3, 2023
HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
Achim Bittner
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Semiconductor Device and Method of Making a MEMS Semiconductor Package
Publication number
20230192478
Publication date
Jun 22, 2023
UTAC Headquarters Pte. Ltd.
Phongsak Sawasdee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS ENVIRONMENTAL SENSOR AND PREPARATION METHOD THEREFOR
Publication number
20230192477
Publication date
Jun 22, 2023
Multidimension Technology Co., Ltd
Insik JIN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLUIDIC CAVITIES FOR ON-CHIP LAYERING AND SEALING OF SEPARATION ARRAYS
Publication number
20230191398
Publication date
Jun 22, 2023
International Business Machines Corporation
Evan Colgan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR PACKAGE WITH EMBEDDED INTEGRATED CIRCUIT
Publication number
20230030627
Publication date
Feb 2, 2023
STMicroelectronics Pte Ltd
Jing-En LUAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PACKAGE WITH METAL COLUMN MOLD BARRIER
Publication number
20220396474
Publication date
Dec 15, 2022
TEXAS INSTRUMENTS INCORPORATED
Rafael Jose Lizares Guevara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PACKAGE DEVICE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20220353619
Publication date
Nov 3, 2022
Advanced Semiconductor Engineering, Inc.
Chang-Lin YEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SENSOR PACKAGE SUBSTRATE, SENSOR MODULE HAVING THE SAME, AND SENSOR...
Publication number
20220267142
Publication date
Aug 25, 2022
TDK Corporation
Kazutoshi TSUYUTANI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
THREE-DIMENSIONAL FEATURES FORMED IN MOLDED PANEL
Publication number
20220002149
Publication date
Jan 6, 2022
Hewlett-Packard Development Company, L.P.
Chien-Hua Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
WAFER LEVEL CHIP SCALE PACKAGING WITH SENSOR
Publication number
20210395077
Publication date
Dec 23, 2021
STMicroelectronics Pte Ltd
Jing-En LUAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CAPLESS SEMICONDUCTOR PACKAGE WITH A MICRO-ELECTROMECHANICAL SYSTEM...
Publication number
20210179423
Publication date
Jun 17, 2021
STMICROELECTRONICS, INC.
Jefferson Sismundo TALLEDO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLUIDIC CAVITIES FOR ON-CHIP LAYERING AND SEALING OF SEPARATION ARRAYS
Publication number
20210146355
Publication date
May 20, 2021
International Business Machines Corporation
Evan Colgan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20210147219
Publication date
May 20, 2021
Advanced Semiconductor Engineering, Inc.
Wei-Wei LIU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE PACKAGES AND METHODS OF MANUFACTURING THE SAME
Publication number
20210130165
Publication date
May 6, 2021
Advanced Semiconductor Engineering, Inc.
Yung-Hsing CHANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICE WITH PARTICLE FILTER AND METHOD OF MANUFACTURE
Publication number
20210114866
Publication date
Apr 22, 2021
TDK Corporation
Wolfgang Pahl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGED PRESSURE SENSOR DEVICE
Publication number
20210009405
Publication date
Jan 14, 2021
NXP USA, Inc.
Weng Foong YAP
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
Publication number
20200336842
Publication date
Oct 22, 2020
DB HITEK CO., LTD.
Hyeok In KWON
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING FOR A MEMS TRANSDUCER
Publication number
20200304921
Publication date
Sep 24, 2020
Cirrus Logic International Semiconductor Ltd.
Roberto BRIOSCHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGING FOR A MEMS TRANSDUCER
Publication number
20200304922
Publication date
Sep 24, 2020
Cirrus Logic International Semiconductor Ltd.
Roberto BRIOSCHI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE WITH DISCHARGE PATH, AND METHOD FOR PRODUCING...
Publication number
20200299128
Publication date
Sep 24, 2020
DENSO CORPORATION
Megumi SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLUIDIC CAVITIES FOR ON-CHIP LAYERING AND SEALING OF SEPARATION ARRAYS
Publication number
20200254446
Publication date
Aug 13, 2020
International Business Machines Corporation
Evan Colgan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS Package, MEMS Microphone and Method of Manufacturing the MEMS...
Publication number
20200245076
Publication date
Jul 30, 2020
SAE Magnetics (H.K.) Ltd.
Koichi Shiozawa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM STRUCTURE AND METHOD FOR FABRICATIN...
Publication number
20200223687
Publication date
Jul 16, 2020
United Microelectronics Corp.
Yuan-Sheng LIN
B81 - MICRO-STRUCTURAL TECHNOLOGY