Suspended structures

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/01Suspended structures

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microelectromechanical system membrane
- Patent number 12,368,997
- Issue date Jul 22, 2025
- AAC Technologies Pte. Ltd.
- Yannick Pierre Kervran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Compact enhanced sensitivity temperature sensor using an encapsulat...
- Patent number 12,365,580
- Issue date Jul 22, 2025
- King Fahd University of Petroleum & Minerals
- Xuecui Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a sensor or microphone device
- Patent number 12,365,581
- Issue date Jul 22, 2025
- Robert Bosch GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb electrode release process for MEMS structure
- Patent number 12,358,785
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive micromachined ultrasonic transducer and method of manufa...
- Patent number 12,350,710
- Issue date Jul 8, 2025
- Vermon S.A.
- Dominique Gross
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods of fabricating semiconductor structures including cavities...
- Patent number 12,344,524
- Issue date Jul 1, 2025
- Soitec
- Mariam Sadaka
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Neuromorphic micro-electro-mechanical-system device
- Patent number 12,344,523
- Issue date Jul 1, 2025
- SOCPRA Sciences et Genie S.E.C.
- Julien Sylvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor including a pressure sensor chip to detect a differ...
- Patent number 12,339,183
- Issue date Jun 24, 2025
- Murata Manufacturing Co., Ltd.
- Daiki Tsuji
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Cantilever structure with intermediate substrate connection having...
- Patent number 12,330,933
- Issue date Jun 17, 2025
- xMEMS Labs, Inc.
- Jye Ren
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro electro mechanical system and manufacturing method thereof
- Patent number 12,336,432
- Issue date Jun 17, 2025
- STMicroelectronics S.r.l.
- Gianluca Longoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb-driven MEMS resonant scanner with full-circumferential range a...
- Patent number 12,332,428
- Issue date Jun 17, 2025
- The Regents of the University of Michigan
- Haijun Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone
- Patent number 12,330,932
- Issue date Jun 17, 2025
- AAC Acoustic Technologies (Shenzhen) Co., Ltd.
- Zhuanzhuan Zhao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sealed force sensor with etch stop layer
- Patent number 12,332,127
- Issue date Jun 17, 2025
- NEXTINPUT, INC.
- Julius Minglin Tsai
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Interconnection for monolithically integrated stacked devices and m...
- Patent number 12,330,189
- Issue date Jun 17, 2025
- GLOBALFOUNDRIES SINGAPOREPTE. LTD.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capacitive microelectromechanical device and method for forming a c...
- Patent number 12,332,271
- Issue date Jun 17, 2025
- Infineon Technologies AG
- Thoralf Kautzsch
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric sensor with increased sensitivity and devices having...
- Patent number 12,329,033
- Issue date Jun 10, 2025
- Skyworks Solutions, Inc.
- You Qian
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Integrated MEMS electrostatic micro-speaker device and method
- Patent number 12,325,625
- Issue date Jun 10, 2025
- Vibrant Microsystems Inc.
- Steven Nasiri
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Coil module for electromagnetic microspeaker, coil module array and...
- Patent number 12,319,561
- Issue date Jun 3, 2025
- OTOWAHR TECHNOLOGY INC.
- Yu Min Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS environmental sensor and preparation method therefor
- Patent number 12,319,565
- Issue date Jun 3, 2025
- MultiDimension Technology Co., Ltd.
- Insik Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS switch and manufacture method
- Patent number 12,312,237
- Issue date May 27, 2025
- BEIJING BOE TECHNOLOGY DEVELOPMENT CO., LTD.
- Yingli Shi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrode arrangement for a micro-electro-mechanical system includi...
- Patent number 12,312,236
- Issue date May 27, 2025
- Robert Bosch GmbH
- Martin Putnik
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator designs for MEMS-based active cooling
- Patent number 12,317,749
- Issue date May 27, 2025
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Gas sensor and manufacturing method thereof
- Patent number 12,313,611
- Issue date May 27, 2025
- Electronics and Telecommunications Research Institute
- Seungeon Moon
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromagnetic microspeaker, its coil module, speaker/coil module...
- Patent number 12,312,234
- Issue date May 27, 2025
- OTOWAHR TECHNOLOGY INC.
- Yu Min Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Channel for decreasing damping asymmetry
- Patent number 12,312,235
- Issue date May 27, 2025
- Murata Manufacturing Co., Ltd.
- Akira Konno
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device comprising different types of microelectromech...
- Patent number 12,304,807
- Issue date May 20, 2025
- TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Hsiang-Fu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
- Patent number 12,308,302
- Issue date May 20, 2025
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 12,304,806
- Issue date May 20, 2025
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Signal processing circuit for triple-membrane MEMS device
- Patent number 12,304,808
- Issue date May 20, 2025
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for manufacturing a combined microelectromechanical device...
- Patent number 12,297,099
- Issue date May 13, 2025
- STMicroelectronics S.r.l.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...
- Publication number 20250236506
- Publication date Jul 24, 2025
- Nanusens SL
- Josep Montanyà i Silvestre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...
- Publication number 20250236507
- Publication date Jul 24, 2025
- XI'AN JIAOTONG UNIVERSITY
- Xudong FANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST...
- Publication number 20250236508
- Publication date Jul 24, 2025
- GOVERNMENT OF THE UNITED STATES OF AMERICA, as represented by THE SECRETARY O...
- Jon Robert Pratt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR MODULE WITH STRESS-DECOUPLED VIBRATIONAL MODES
- Publication number 20250236509
- Publication date Jul 24, 2025
- Microsoft Technology Licensing, LLC
- Di SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...
- Publication number 20250229292
- Publication date Jul 17, 2025
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION SENSOR
- Publication number 20250230034
- Publication date Jul 17, 2025
- AAC Kaitai Technologies (Wuhan) CO., LTD
- Shitao Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM
- Publication number 20250230039
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Yu Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS
- Publication number 20250223152
- Publication date Jul 10, 2025
- STMicroelectronics International N.V.
- Francesco RIZZINI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETECTION APPARATUS, TRAINING METHOD AND APPARATUS, AND COMPUTER-RE...
- Publication number 20250224292
- Publication date Jul 10, 2025
- BEIJING BOE SENSOR TECHNOLOGY CO., LTD.
- Jie SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING
- Publication number 20250223153
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Hsun LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEM
- Publication number 20250223154
- Publication date Jul 10, 2025
- AAC TECHNOLOGIES PTE. LTD
- Scott Lyall Cargill
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND ELECTRONIC DEVICE
- Publication number 20250220353
- Publication date Jul 3, 2025
- Goertek Microelectronics Inc.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE
- Publication number 20250214829
- Publication date Jul 3, 2025
- MICROGLASS LLC
- John WASSERBAUER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
USE OF MEMS PACKAGES AS ANTENNA SUBSTRATE
- Publication number 20250214832
- Publication date Jul 3, 2025
- Hahn-Schickard-Gesellschaft für angewandte Forschung e.V.
- Achim Bittner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE HAVING MICROELECTROMECHANICAL SYSTEMS DEVICES...
- Publication number 20250214108
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- I-Hsuan Chiu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANOGAP DIELECTRIC MATERIAL
- Publication number 20250206597
- Publication date Jun 26, 2025
- ROBERT BOSCH GmbH
- Mordechai KORNBLUTH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE
- Publication number 20250206599
- Publication date Jun 26, 2025
- Merry Electronics(Shenzhen) Co., Ltd.
- Yung-Hsiang Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS
- Publication number 20250206600
- Publication date Jun 26, 2025
- Soundskrit Inc.
- Wan-Thai Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DIFFERENTIAL MICROPHONE ASSEMBLY
- Publication number 20250206601
- Publication date Jun 26, 2025
- Soundskrit Inc.
- Carly Stalder
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20250206595
- Publication date Jun 26, 2025
- Murata Manufacturing Co., Ltd.
- Matti LIUKKU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250206596
- Publication date Jun 26, 2025
- Seoul National University R&DB Foundation
- Woo Young CHOI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL STRESS-SENSITIVE DEVICE
- Publication number 20250197194
- Publication date Jun 19, 2025
- Rosemount Aerospace Inc.
- John C. Christenson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION ELECTRODES
- Publication number 20250197193
- Publication date Jun 19, 2025
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANTI-STICTION PATTERNING WITHIN MEMS LAYER
- Publication number 20250197192
- Publication date Jun 19, 2025
- InvenSense, Inc.
- Sarah Nitzan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Piezoelectric Motion Limiters for MEMS Autofocus Actuator
- Publication number 20250187903
- Publication date Jun 12, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew NG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator
- Publication number 20250187904
- Publication date Jun 12, 2025
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE
- Publication number 20250187908
- Publication date Jun 12, 2025
- AAC MICROTECH (CHANGZHOU) CO., LTD.
- Yuwei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Device
- Publication number 20250187902
- Publication date Jun 12, 2025
- SensorTek technology Corp.
- Chao-Lin Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD
- Publication number 20250194002
- Publication date Jun 12, 2025
- GOERTEK MICROELECTRONICS INC.
- Tangliu Yan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARA...
- Publication number 20250180889
- Publication date Jun 5, 2025
- Xi'an Zhisensor Technologies Co.,Ltd.
- Xiumin SONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Suspended structures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microelectromechanical system membrane

Compact enhanced sensitivity temperature sensor using an encapsulat...

Micromechanical component for a sensor or microphone device

Comb electrode release process for MEMS structure

Capacitive micromachined ultrasonic transducer and method of manufa...

Methods of fabricating semiconductor structures including cavities...

Neuromorphic micro-electro-mechanical-system device

Pressure sensor including a pressure sensor chip to detect a differ...

Cantilever structure with intermediate substrate connection having...

Micro electro mechanical system and manufacturing method thereof

Comb-driven MEMS resonant scanner with full-circumferential range a...

MEMS microphone

Sealed force sensor with etch stop layer

Interconnection for monolithically integrated stacked devices and m...

Capacitive microelectromechanical device and method for forming a c...

Piezoelectric sensor with increased sensitivity and devices having...

Integrated MEMS electrostatic micro-speaker device and method

Coil module for electromagnetic microspeaker, coil module array and...

MEMS environmental sensor and preparation method therefor

MEMS switch and manufacture method

Electrode arrangement for a micro-electro-mechanical system includi...

Actuator designs for MEMS-based active cooling

Gas sensor and manufacturing method thereof

Electromagnetic microspeaker, its coil module, speaker/coil module...

Channel for decreasing damping asymmetry

Semiconductor device comprising different types of microelectromech...

Anchor and cavity configuration for MEMS-based cooling systems

Actuator device

Signal processing circuit for triple-membrane MEMS device

Process for manufacturing a combined microelectromechanical device...

Patents Applicationslast 30 patents

MEMS DEVICE BUILT USING THE BEOL METAL LAYERS OF A SOLID STATE SEMI...

ALL-SILICON CARBIDE (SiC) ACCELERATION-PRESSURE INTEGRATED SENSOR C...

HIGH-Q MICROMECHANICAL TORSION RESONATOR BASED ON SUSPENDING A TEST...

MEMS MIRROR MODULE WITH STRESS-DECOUPLED VIBRATIONAL MODES

ANTI-STICTION BOTTOM CAVITY SURFACE FOR MICROMACHINED ULTRASONIC TR...

ACCELERATION SENSOR

MEMS ARM FOR MICROELECTROMECHANICAL SYSTEM

MEMS ACCELEROMETER HAVING A HIGH MECHANICAL ROBUSTNESS

DETECTION APPARATUS, TRAINING METHOD AND APPARATUS, AND COMPUTER-RE...

SEMICONDUCTOR STRUCTURE AND METHOD OF MAKING

MICROELECTROMECHANICAL SYSTEM

MEMS MICROPHONE AND ELECTRONIC DEVICE

MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE

USE OF MEMS PACKAGES AS ANTENNA SUBSTRATE

SEMICONDUCTOR DEVICE HAVING MICROELECTROMECHANICAL SYSTEMS DEVICES...

NANOGAP DIELECTRIC MATERIAL

ELECTRONIC DEVICE

ACOUSTIC SENSOR DEVICES WITH MULTIPLE SENSING ELEMENTS

DIFFERENTIAL MICROPHONE ASSEMBLY

MEMS DEVICE

NANO ELECTROMECHANICAL DEVICE AND MANUFACTURING METHOD THEREOF

THREE-DIMENSIONAL STRESS-SENSITIVE DEVICE

ANTI-STICTION ELECTRODES

ANTI-STICTION PATTERNING WITHIN MEMS LAYER

Piezoelectric Motion Limiters for MEMS Autofocus Actuator

Controllable Reflective Optical Unit With MEMS Tip-Tilt Actuator

MANUFACTURING METHOD FOR MICRO-ELECTRO-MECHANICAL MICROPHONE

MEMS Device

VIBRATION SENSOR, ELECTRONIC DEVICE AND VIBRATION DETECTION METHOD

MEMS MICROMIRROR FOR ALLEVIATING OPTICAL PATH BLOCKAGE, AND PREPARA...