Suspended structures

Industry

CPC
B81B2203/01

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/01Suspended structures

Industries

Patents Grantslast 30 patents

Information Patent Grant
Triple-membrane MEMS device
- Patent number 12,133,060
- Issue date Oct 29, 2024
- Infineon Technologies AG
- Marc Fueldner
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator package architecture
- Patent number 12,132,420
- Issue date Oct 29, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Xiaolei Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reduced light reflection package
- Patent number 12,133,049
- Issue date Oct 29, 2024
- Invensense, Inc.
- Roberto Brioschi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system device using a metallic movable part...
- Patent number 12,122,665
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tao-Cheng Liu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 12,116,268
- Issue date Oct 15, 2024
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Controlling one or more electrostatic comb structures of a micro-el...
- Patent number 12,116,267
- Issue date Oct 15, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone having a robust backplate
- Patent number 12,116,269
- Issue date Oct 15, 2024
- TDK Corporation
- Anton Leidl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system and method for fabricating MEMS havi...
- Patent number 12,103,845
- Issue date Oct 1, 2024
- United Microelectronics Corp.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mems structure
- Patent number 12,096,183
- Issue date Sep 17, 2024
- FORTEMEDIA, INC.
- Chih-Yuan Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multiaxial strain engineering of defect doped materials
- Patent number 12,077,428
- Issue date Sep 3, 2024
- Massachusetts Institute of Technology
- Subra Suresh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor device and corresponding production method
- Patent number 12,077,429
- Issue date Sep 3, 2024
- Robert Bosch GmbH
- Lars Tebje
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microstructure and method of producing a microstructure
- Patent number 12,071,341
- Issue date Aug 27, 2024
- ams International AG
- Peter Heeb
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of electrical trimming of sensitivity and frequency response...
- Patent number 12,075,212
- Issue date Aug 27, 2024
- Infineon Technologies AG
- Christian Bretthauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Adaptive cavity thickness control for micromachined ultrasonic tran...
- Patent number 12,070,773
- Issue date Aug 27, 2024
- BFLY OPERATIONS, INC.
- Lingyun Miao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for lithography process
- Patent number 12,066,756
- Issue date Aug 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Hung Liao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electromagnetic microspeaker, its coil module, speaker/coil module...
- Patent number 12,060,262
- Issue date Aug 13, 2024
- OTOWAHR TECHNOLOGY INC.
- Yu Min Fu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a TMD structure
- Patent number 12,063,469
- Issue date Aug 13, 2024
- Infineon Technologies AG
- Abidin Güçlü Onaran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acoustic package structure and covering structure
- Patent number 12,063,470
- Issue date Aug 13, 2024
- xMEMS Labs, Inc.
- Chao-Yu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS microphone
- Patent number 12,058,939
- Issue date Aug 6, 2024
- The Regents of the University of Michigan
- Karl Grosh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Thermal metamaterial for low power MEMS thermal control
- Patent number 12,055,927
- Issue date Aug 6, 2024
- Honeywell International Inc.
- Robert Compton
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS microphone and MEMS accelerometer on a single substrate
- Patent number 12,054,383
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Wen Cheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS comprising a movable structural element, and MEMS array
- Patent number 12,054,384
- Issue date Aug 6, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrostatically driven comb structure of MEMS, micro-mirror using...
- Patent number 12,054,387
- Issue date Aug 6, 2024
- Tao Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
- Patent number 12,050,102
- Issue date Jul 30, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device structure with movable membrane
- Patent number 12,043,538
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chuan Teng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a microelectromechanical systems (MEMS) device
- Patent number 12,043,537
- Issue date Jul 23, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shih-Wei Lin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ingress protection mechanism
- Patent number 12,035,092
- Issue date Jul 9, 2024
- GM CRUISE HOLDINGS LLC
- Amanda Lind
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical actuator on insulating substrate
- Patent number 12,030,771
- Issue date Jul 9, 2024
- MICROGLASS LLC
- John Wasserbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a sensor device and moulding support structure
- Patent number 12,024,418
- Issue date Jul 2, 2024
- Melexis Technologies NV
- Appolonius Jacobus Van Der Wiel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
- Publication number 20240351862
- Publication date Oct 24, 2024
- Frore Systems Inc.
- Suryaprakash Ganti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MULTI-LEVEL MEMS PROCESS
- Publication number 20240351864
- Publication date Oct 24, 2024
- InvenSense, Inc.
- Roberto Martini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...
- Publication number 20240351860
- Publication date Oct 24, 2024
- Atomic Machines, Inc.
- William A. Boettcher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL COMPONENT
- Publication number 20240343554
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL ACOUSTIC COMPONENT
- Publication number 20240343552
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Christoph SCHELLING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE
- Publication number 20240343551
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chuan TENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DIAPHRAGM SYSTEM
- Publication number 20240343557
- Publication date Oct 17, 2024
- ROBERT BOSCH GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DOORBELL CAMERA HAVING ACTIVE COOLING
- Publication number 20240336475
- Publication date Oct 10, 2024
- Frore Systems Inc.
- Prabhu Sathyamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240336474
- Publication date Oct 10, 2024
- AAC TECHNOLOGIES PTE. LTD
- Houming Chong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS SOUND TRANSDUCER
- Publication number 20240340597
- Publication date Oct 10, 2024
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Fabian STOPPEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINI PC HAVING ACTIVE COOLING
- Publication number 20240338062
- Publication date Oct 10, 2024
- Frore Systems Inc.
- Prabhu Sathyamurthy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR
- Publication number 20240327198
- Publication date Oct 3, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC CIGARETTE
- Publication number 20240327202
- Publication date Oct 3, 2024
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Jinyang Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM MICROPHONE, MICROPHONE UNIT AND ELE...
- Publication number 20240334132
- Publication date Oct 3, 2024
- GOERTEK MICROELECTRONICS INC.
- Quanbo Zou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MEMS TRANSDUCER DEVICE WITH THIN MEMBRAN...
- Publication number 20240327203
- Publication date Oct 3, 2024
- STMicroelectronics International N.V.
- Mark Andrew SHAW
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE
- Publication number 20240317577
- Publication date Sep 26, 2024
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20240317574
- Publication date Sep 26, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIGHT-BASED TACTILE SENSING WITH DIRECTIONAL SENSITIVITY
- Publication number 20240310226
- Publication date Sep 19, 2024
- The Regents of the University of Michigan
- Pei-Cheng Ku
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM SWITCH AND COMMUNICATION DEVICE
- Publication number 20240312730
- Publication date Sep 19, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Yingli SHI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD FOR MEMS DEVICE
- Publication number 20240308841
- Publication date Sep 19, 2024
- Rohm Co., Ltd.
- Toma FUJITA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Semiconductor Die and Method for Attaching a Semiconductor Die to a...
- Publication number 20240312944
- Publication date Sep 19, 2024
- TE Connectivity Solutions GMBH
- Kaspar Jenni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIAPHRAGM AND MEMS SENSOR
- Publication number 20240300806
- Publication date Sep 12, 2024
- AAC TECHNOLOGIES PTE. LTD
- Anup Patel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...
- Publication number 20240300808
- Publication date Sep 12, 2024
- Analog Devices, Inc.
- Kemiao Jia
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HIGH TEMPERATURE PIEZO-RESISTIVE PRESSURE SENSOR AND PACKAGING ASSE...
- Publication number 20240302237
- Publication date Sep 12, 2024
- Rosemount Aerospace Inc.
- Jun Zheng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY
- Publication number 20240295728
- Publication date Sep 5, 2024
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE
- Publication number 20240288681
- Publication date Aug 29, 2024
- STANLEY ELECTRIC CO., LTD
- Susumu NAKAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION
- Publication number 20240288683
- Publication date Aug 29, 2024
- OQMENTED GMBH
- Ulrich HOFMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR FORMING SEMICONDUCTOR STRUCTURE
- Publication number 20240286889
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- CHING-KAI SHEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Suspended structures

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Triple-membrane MEMS device

MEMS actuator package architecture

Reduced light reflection package

Micro-electromechanical system device using a metallic movable part...

MEMS device with improved dynamic mechanical performance through da...

Controlling one or more electrostatic comb structures of a micro-el...

Microelectromechanical microphone having a robust backplate

Micro-electromechanical system and method for fabricating MEMS havi...

Mems structure

Multiaxial strain engineering of defect doped materials

Micromechanical sensor device and corresponding production method

Micromechanical structure and method of providing the same

Microstructure and method of producing a microstructure

Method of electrical trimming of sensitivity and frequency response...

Adaptive cavity thickness control for micromachined ultrasonic tran...

Method for lithography process

Electromagnetic microspeaker, its coil module, speaker/coil module...

MEMS device with a TMD structure

Acoustic package structure and covering structure

Piezoelectric MEMS microphone

Thermal metamaterial for low power MEMS thermal control

MEMS microphone and MEMS accelerometer on a single substrate

MEMS comprising a movable structural element, and MEMS array

Electrostatically driven comb structure of MEMS, micro-mirror using...

Waterproof MEMS button device, input device comprising the MEMS but...

Semiconductor device structure with movable membrane

Method of manufacturing a microelectromechanical systems (MEMS) device

Ingress protection mechanism

Microelectromechanical actuator on insulating substrate

Method of manufacturing a sensor device and moulding support structure

Patents Applicationslast 30 patents

ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS

MULTI-LEVEL MEMS PROCESS

MICROELECTROMECHANICAL SYSTEMS (MEMS) ACTUATOR WITH MAGNETIC LATCHI...

MICROELECTROMECHANICAL COMPONENT

MICROELECTROMECHANICAL ACOUSTIC COMPONENT

SEMICONDUCTOR DEVICE STRUCTURE WITH MOVABLE MEMBRANE

MICROMECHANICAL DIAPHRAGM SYSTEM

DOORBELL CAMERA HAVING ACTIVE COOLING

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

MEMS SOUND TRANSDUCER

MINI PC HAVING ACTIVE COOLING

ACCELERATION DETECTION DEVICE AND ACCELERATION SENSOR

ELECTRONIC CIGARETTE

MICRO-ELECTRO-MECHANICAL SYSTEM MICROPHONE, MICROPHONE UNIT AND ELE...

METHOD FOR MANUFACTURING A MEMS TRANSDUCER DEVICE WITH THIN MEMBRAN...

OPTICAL REFLECTIVE DEVICE

MEMS ELEMENT, OPTICAL SCANNING DEVICE, AND DISTANCE MEASURING DEVICE

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

LIGHT-BASED TACTILE SENSING WITH DIRECTIONAL SENSITIVITY

MICRO-ELECTROMECHANICAL SYSTEM SWITCH AND COMMUNICATION DEVICE

MEMS DEVICE AND MANUFACTURING METHOD FOR MEMS DEVICE

Semiconductor Die and Method for Attaching a Semiconductor Die to a...

MEMS DIAPHRAGM AND MEMS SENSOR

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

MEMS STRESS ISOLATION TECHNOLOGY WITH BACKSIDE ETCHED ISOLATION TRE...

HIGH TEMPERATURE PIEZO-RESISTIVE PRESSURE SENSOR AND PACKAGING ASSE...

SELF-ALIGNED VERTICAL COMB DRIVE ASSEMBLY

MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE

MICROSCANNER HAVING MEANDER SPRING-BASED MIRROR SUSPENSION

METHOD FOR FORMING SEMICONDUCTOR STRUCTURE