TREA

the substrate being a semiconductor, using technologies not covered by one of groups H01L21/8206, H01L21/8213 , H01L21/822, H01L21/8252 and H01L21/8254

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  • CPC
  • H01L21/8256
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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/8256the substrate being a semiconductor, using technologies not covered by one of groups H01L21/8206, H01L21/8213 , H01L21/822, H01L21/8252 and H01L21/8254
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