Torsion bars

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CPC
B81B2203/0154

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/0154Torsion bars

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS device with damping fluid vertically sandwiched between moving...
- Patent number 12,215,020
- Issue date Feb 4, 2025
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fabrication of MEMS device with automated dispensing of damping flu...
- Patent number 12,195,326
- Issue date Jan 14, 2025
- Mirrocle Technologies Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device and method for manufacturing same
- Patent number 12,180,063
- Issue date Dec 31, 2024
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror unit and optical module
- Patent number 12,152,878
- Issue date Nov 26, 2024
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure, micromechanical system and method of pro...
- Patent number 12,151,935
- Issue date Nov 26, 2024
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 12,116,268
- Issue date Oct 15, 2024
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical structure and method of providing the same
- Patent number 12,071,338
- Issue date Aug 27, 2024
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Christian Drabe
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Waterproof MEMS button device, input device comprising the MEMS but...
- Patent number 12,050,102
- Issue date Jul 30, 2024
- STMicroelectronics S.r.l.
- Gabriele Gattere
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with a dual hinge structure
- Patent number 12,007,555
- Issue date Jun 11, 2024
- Lumentum Operations LLC
- Wenlin Jin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Actuator device
- Patent number 11,952,265
- Issue date Apr 9, 2024
- Hamamatsu Photonics K.K.
- Sadaharu Takimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror unit and optical module
- Patent number 11,879,731
- Issue date Jan 23, 2024
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device with improved dynamic mechanical performance through da...
- Patent number 11,772,959
- Issue date Oct 3, 2023
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror device
- Patent number 11,762,191
- Issue date Sep 19, 2023
- Mitsubishi Electric Corporation
- Shingo Moriue
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,740,452
- Issue date Aug 29, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,733,509
- Issue date Aug 22, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,703,679
- Issue date Jul 18, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,703,680
- Issue date Jul 18, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical microsystem and associated manufacturing method
- Patent number 11,679,974
- Issue date Jun 20, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Thierry Hilt
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having a tiltable suspended structure controlled by ele...
- Patent number 11,681,141
- Issue date Jun 20, 2023
- STMicroelectronics S.r.l.
- Roberto Carminati
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Accelerometer contact microphones and methods thereof
- Patent number 11,678,113
- Issue date Jun 13, 2023
- Georgia Tech Research Corporation
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Out-of-plane hinge for micro and nanoelectromechanical systems with...
- Patent number 11,674,344
- Issue date Jun 13, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Samer Dagher
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical module
- Patent number 11,635,290
- Issue date Apr 25, 2023
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,635,613
- Issue date Apr 25, 2023
- Hamamatsu Photonics K.K.
- Tatsuya Sugimoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Optical device
- Patent number 11,629,947
- Issue date Apr 18, 2023
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror unit and optical module
- Patent number 11,629,946
- Issue date Apr 18, 2023
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror unit and optical module
- Patent number 11,624,605
- Issue date Apr 11, 2023
- Hamamatsu Photonics K.K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hinge offering a reduced sensitivity to internal stresses
- Patent number 11,584,636
- Issue date Feb 21, 2023
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Patrice Rey
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device
- Patent number 11,472,697
- Issue date Oct 18, 2022
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MMS, MMS array, MEMS actuator and method for providing an MMS
- Patent number 11,459,229
- Issue date Oct 4, 2022
- Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Peter Duerr
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hinged microelectromechanical and/or nanoelectromechanical device w...
- Patent number 11,459,227
- Issue date Oct 4, 2022
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Loic Joet
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20250044074
- Publication date Feb 6, 2025
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL PRESSURE SENS...
- Publication number 20240425351
- Publication date Dec 26, 2024
- ROBERT BOSCH GmbH
- Christoph Schelling
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial Sensor
- Publication number 20240425357
- Publication date Dec 26, 2024
- SensorTek technology Corp.
- Shih-Yuan LIU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL REFLECTIVE DEVICE
- Publication number 20240317576
- Publication date Sep 26, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Kensuke MIHARA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
IN-PLANE AND OUT-OF-PLANE ACCELEROMETER
- Publication number 20240300805
- Publication date Sep 12, 2024
- Murata Manufacturing Co., Ltd.
- Ville-Pekka RYTKÖNEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE
- Publication number 20240288681
- Publication date Aug 29, 2024
- STANLEY ELECTRIC CO., LTD
- Susumu NAKAMURA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20240190699
- Publication date Jun 13, 2024
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...
- Publication number 20240174510
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...
- Publication number 20240174509
- Publication date May 30, 2024
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20240110779
- Publication date Apr 4, 2024
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS
- Publication number 20240025733
- Publication date Jan 25, 2024
- Calient Technologies, Inc.
- Andrew HOCKING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE
- Publication number 20240012237
- Publication date Jan 11, 2024
- Magic Leap, Inc.
- Julien Gamet
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...
- Publication number 20230399224
- Publication date Dec 14, 2023
- Mirrorcle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Accelerometer Contact Microphones And Methods Thereof
- Publication number 20230276171
- Publication date Aug 31, 2023
- Georgia Tech Research Corporation
- Farrokh Ayazi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE
- Publication number 20230234834
- Publication date Jul 27, 2023
- Murata Manufacturing Co., Ltd.
- Mikko PARTANEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL DEVICE
- Publication number 20230221106
- Publication date Jul 13, 2023
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE
- Publication number 20230185081
- Publication date Jun 15, 2023
- FUJIFILM CORPORATION
- Keisuke AOSHIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL DEVICE
- Publication number 20230152572
- Publication date May 18, 2023
- ROBERT BOSCH GmbH
- Frank Schatz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL SCANNING DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND...
- Publication number 20230094213
- Publication date Mar 30, 2023
- Mitsubishi Electric Corporation
- Yusuke SHIRAYANAGI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR UNIT AND OPTICAL MODULE
- Publication number 20230003504
- Publication date Jan 5, 2023
- HAMAMATSU PHOTONICS K. K.
- Tomofumi Suzuki
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...
- Publication number 20230002215
- Publication date Jan 5, 2023
- Mirrocle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ACTUATOR DEVICE
- Publication number 20220242721
- Publication date Aug 4, 2022
- HAMAMATSU PHOTONICS K. K.
- Sadaharu TAKIMOTO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS
- Publication number 20220204339
- Publication date Jun 30, 2022
- Beijing Voyager Technology Co., Ltd.
- Sae Won Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH A DUAL HINGE STRUCTURE
- Publication number 20210396993
- Publication date Dec 23, 2021
- Lumentum Operations LLC
- Wenlin JIN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE AND METHOD OF PROVIDING THE SAME
- Publication number 20210387851
- Publication date Dec 16, 2021
- FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG e.V.
- Christian DRABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL STRUCTURE, MICROMECHANICAL SYSTEM AND METHOD OF PRO...
- Publication number 20210380401
- Publication date Dec 9, 2021
- Fraunhofer Gesellschaft zur Forderung der angewandten Forschung e.V.
- Christian DRABE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICAL MODULE
- Publication number 20210278274
- Publication date Sep 9, 2021
- HAMAMATSU PHOTONICS K. K.
- Tomofumi SUZUKI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICAL MICROSYSTEM AND ASSOCIATED MANUFACTURING METHOD
- Publication number 20210163279
- Publication date Jun 3, 2021
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Thierry HILT
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MIRROR DEVICE
- Publication number 20210165209
- Publication date Jun 3, 2021
- Mitsubishi Electric Corporation
- Shingo MORIUE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE
- Publication number 20210163280
- Publication date Jun 3, 2021
- Mirrocle Technologies, Inc.
- Stefan Richter
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Torsion bars

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS device with damping fluid vertically sandwiched between moving...

Fabrication of MEMS device with automated dispensing of damping flu...

Optical device and method for manufacturing same

Mirror unit and optical module

Micromechanical structure, micromechanical system and method of pro...

MEMS device with improved dynamic mechanical performance through da...

Micromechanical structure and method of providing the same

Waterproof MEMS button device, input device comprising the MEMS but...

MEMS device with a dual hinge structure

Actuator device

Mirror unit and optical module

MEMS device with improved dynamic mechanical performance through da...

Mirror device

Optical device

Optical device

Optical device

Optical device

Mechanical microsystem and associated manufacturing method

MEMS device having a tiltable suspended structure controlled by ele...

Accelerometer contact microphones and methods thereof

Out-of-plane hinge for micro and nanoelectromechanical systems with...

Optical module

Optical device

Optical device

Mirror unit and optical module

Mirror unit and optical module

Hinge offering a reduced sensitivity to internal stresses

MEMS device

MMS, MMS array, MEMS actuator and method for providing an MMS

Hinged microelectromechanical and/or nanoelectromechanical device w...

Patents Applicationslast 30 patents

MIRROR UNIT AND OPTICAL MODULE

MICROELECTROMECHANICAL DEVICE, MICROELECTROMECHANICAL PRESSURE SENS...

Inertial Sensor

OPTICAL REFLECTIVE DEVICE

IN-PLANE AND OUT-OF-PLANE ACCELEROMETER

MEMS OPTICAL DEFLECTOR AND OPTICAL SCANNING DEVICE

ACTUATOR DEVICE

FABRICATION OF MEMS DEVICE WITH AUTOMATED DISPENSING OF DAMPING FLU...

MEMS DEVICE WITH DAMPING FLUID VERTICALLY SANDWICHED BETWEEN MOVING...

MIRROR UNIT AND OPTICAL MODULE

MEMS MIRROR ARRAYS WITH REDUCED COUPLING BETWEEN MIRRORS

SCANNING MIRROR SYSTEMS AND METHODS OF MANUFACTURE

MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...

Accelerometer Contact Microphones And Methods Thereof

LOW-IMPACT OUT-OF-PLANE MOTION LIMITER MEMS DEVICE

OPTICAL DEVICE

MICROMIRROR DEVICE AND OPTICAL SCANNING DEVICE

MICROMECHANICAL DEVICE

OPTICAL SCANNING DEVICE AND METHOD FOR MANUFACTURING THE SAME, AND...

MIRROR UNIT AND OPTICAL MODULE

MEMS DEVICE WITH IMPROVED DYNAMIC MECHANICAL PERFORMANCE THROUGH DA...

ACTUATOR DEVICE

ARRAY OF HEATING RESISTORS FOR MEMS MIRRORS

MEMS DEVICE WITH A DUAL HINGE STRUCTURE

MICROMECHANICAL STRUCTURE AND METHOD OF PROVIDING THE SAME

MICROMECHANICAL STRUCTURE, MICROMECHANICAL SYSTEM AND METHOD OF PRO...

OPTICAL MODULE

MECHANICAL MICROSYSTEM AND ASSOCIATED MANUFACTURING METHOD

MIRROR DEVICE

MEMS DEVICE