Transferring the substrates through a series of coating stations

Industry

CPC
C23C14/568

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/568Transferring the substrates through a series of coating stations

Industries

Patents Grantslast 30 patents

Information Patent Grant
Magnetic levitation system, base and carrier of a magnetic levitati...
- Patent number 12,119,173
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Henning Aust
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 12,068,142
- Issue date Aug 20, 2024
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport system
- Patent number 12,015,319
- Issue date Jun 18, 2024
- Canon Kabushiki Kaisha
- Takeshi Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method to evaporate an OLED layer stack in a vertical or...
- Patent number 11,972,964
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Sebastian Gunther Zang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of low defectivity electrochromic devices
- Patent number 11,947,232
- Issue date Apr 2, 2024
- View, Inc.
- Sridhar Karthik Kailasam
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System for forming nano-laminate optical coating
- Patent number 11,897,811
- Issue date Feb 13, 2024
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of low defectivity electrochromic devices
- Patent number 11,891,327
- Issue date Feb 6, 2024
- View, Inc.
- Anshu A. Pradhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-chamber substrate processing platform
- Patent number 11,860,528
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal nanoparticle fabrication on TCO for plasmonic interaction of...
- Patent number 11,851,743
- Issue date Dec 26, 2023
- SunDensity, Inc.
- Nishikant Sonwalkar
- B82 - NANO-TECHNOLOGY
Information Patent Grant
In-line monitoring of OLED layer thickness and dopant concentration
- Patent number 11,856,833
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device, method and use for the coating of lenses
- Patent number 11,842,889
- Issue date Dec 12, 2023
- Schneider GmbH & Co. KG
- Gunter Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus
- Patent number 11,821,067
- Issue date Nov 21, 2023
- Canon Anelva Corporation
- Masahiro Atsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic layer deposition apparatus and method of manufacturing orga...
- Patent number 11,778,890
- Issue date Oct 3, 2023
- Samsung Display Co., Ltd.
- Su-Hwan Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line coater for vacuum deposition of thin film coatings
- Patent number 11,732,349
- Issue date Aug 22, 2023
- OOO IZOVAK TEHNOLOGII
- Vladimir J. Shiripov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 11,688,589
- Issue date Jun 27, 2023
- View, Inc.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor component with oxidized aluminum nitride film and man...
- Patent number 11,652,190
- Issue date May 16, 2023
- SKY TECH INC.
- Jing-Cheng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Counter electrode material for electrochromic devices
- Patent number 11,635,665
- Issue date Apr 25, 2023
- View, Inc.
- Anshu A. Pradhan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device for processing a component, carriage for the device, and met...
- Patent number 11,628,459
- Issue date Apr 18, 2023
- SCIA SYSTEMS GMBH
- Daniel Haustein
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus
- Patent number 11,608,555
- Issue date Mar 21, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum process apparatus and vacuum process method
- Patent number 11,600,295
- Issue date Mar 7, 2023
- Canon Anelva Corporation
- Hiroshi Yakushiji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation device for cutting tool provided with coating film,...
- Patent number 11,512,386
- Issue date Nov 29, 2022
- Mitsubishi Materials Corporation
- Masao Kawamura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Film formation apparatus and film formation method
- Patent number 11,505,866
- Issue date Nov 22, 2022
- SHIBAURA MECHATRONICS CORPORATION
- Daisuke Ono
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for contactless transportation of a device in...
- Patent number 11,508,595
- Issue date Nov 22, 2022
- Applied Materials, Inc.
- Henning Aust
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Flexible substrate deposition system
- Patent number 11,499,221
- Issue date Nov 15, 2022
- FLISOM AG
- Bernhard Schlaeppi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Fabrication of low defectivity electrochromic devices
- Patent number 11,440,838
- Issue date Sep 13, 2022
- View, Inc.
- Anshu A. Pradhan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier with vertical grid for supporting substrates in coater
- Patent number 11,424,109
- Issue date Aug 23, 2022
- View, Inc.
- Bo Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System with dual-motion substrate carriers
- Patent number 11,414,748
- Issue date Aug 16, 2022
- Intevac, Inc.
- Terry Bluck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Counter electrode for electrochromic devices
- Patent number 11,370,699
- Issue date Jun 28, 2022
- View, Inc.
- Dane Gillaspie
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for processing long base material by roll-to-roll method...
- Patent number 11,352,697
- Issue date Jun 7, 2022
- Sumitomo Metal Mining Co., Ltd.
- Hideharu Okami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organic layer deposition apparatus and method of manufacturing orga...
- Patent number 11,335,892
- Issue date May 17, 2022
- SAMSUNG DISPLAY CO., LTD.
- Su-Hwan Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SURFACE TREATMENT APPARATUS
- Publication number 20240318303
- Publication date Sep 26, 2024
- SHIBAURA MACHINE CO., LTD.
- Kazuhiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING
- Publication number 20240191341
- Publication date Jun 13, 2024
- INTEVAC, INC.
- Samuel D. Harkness
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
- Publication number 20240186064
- Publication date Jun 6, 2024
- Evatec AG
- Claudiu Valentin FALUB
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240186160
- Publication date Jun 6, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME
- Publication number 20240183029
- Publication date Jun 6, 2024
- SAMSUNG DISPLAY CO., LTD.
- HYUNEOK SHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20240150888
- Publication date May 9, 2024
- Applied Materials, Inc.
- Bhaskar PRASAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE HOLDER, SUBSTRATE HOLDING METHOD, AND FILM FORMATION APPA...
- Publication number 20240150889
- Publication date May 9, 2024
- Resonac Corporation
- Chihiro TAMURA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION
- Publication number 20240130210
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
- Publication number 20240112932
- Publication date Apr 4, 2024
- Japan Display Inc.
- Takanobu TAKENAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE
- Publication number 20240102147
- Publication date Mar 28, 2024
- nexTC Corporation
- Cory K. Perkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR CHANGING TEST SUBSTRATES IN A CONTINUOUS-FLOW...
- Publication number 20240102155
- Publication date Mar 28, 2024
- Solayer GmbH
- Jens HERGENRÖTHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Multi-chamber Configuration
- Publication number 20240087924
- Publication date Mar 14, 2024
- HINE AUTOMATION, LLC
- Joseph Arthur Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING APPARATUS
- Publication number 20240068087
- Publication date Feb 29, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Shubo WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD
- Publication number 20240060170
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- MANABU HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240052477
- Publication date Feb 15, 2024
- Canon ANELVA Corporation
- Masahiro ATSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNGSTEN GAP FILL WITH HYDROGEN PLASMA TREATMENT
- Publication number 20240047267
- Publication date Feb 8, 2024
- Tsung-Han YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230349036
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT T...
- Publication number 20230335423
- Publication date Oct 19, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hsi Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA...
- Publication number 20230317478
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Robert Irwin DECOTTIGNIES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCHROMIC CATHODE MATERIALS
- Publication number 20230296953
- Publication date Sep 21, 2023
- VIEW, INC.
- Robert Tad Rozbicki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENS...
- Publication number 20230279537
- Publication date Sep 7, 2023
- SCHNEIDER GMBH & CO. KG
- Gunter SCHNEIDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER
- Publication number 20230282458
- Publication date Sep 7, 2023
- VIEW, INC.
- Bo Garrett Neilan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
- Publication number 20230257869
- Publication date Aug 17, 2023
- QORVO BIOTECHNOLOGIES, LLC
- Derya Deniz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230212735
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Nagabhushana NANJUNDAPPA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COUNTER ELECTRODE MATERIAL FOR ELECTROCHROMIC DEVICES
- Publication number 20230205032
- Publication date Jun 29, 2023
- VIEW, INC.
- Anshu A. Pradhan
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ELECTROCHROMIC CATHODE MATERIALS
- Publication number 20230148443
- Publication date May 11, 2023
- VIEW, INC.
- Robert T. Rozbicki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF...
- Publication number 20230137506
- Publication date May 4, 2023
- Applied Materials, Inc.
- Thomas DEPPISCH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSFER APPARATUS AND FILM DEPOSITION APPARATUS USING TRANSFER APP...
- Publication number 20230123586
- Publication date Apr 20, 2023
- SHINCRON CO., LTD.
- Yoshinori OGO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC COATED LITHIUM METAL ANODE
- Publication number 20230056566
- Publication date Feb 23, 2023
- Applied Materials, Inc.
- Subramanya P. HERLE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EVAPORATOR FOR EFFECTIVE SURFACE AREA EVAPORATION
- Publication number 20230048728
- Publication date Feb 16, 2023
- Applied Materials, Inc.
- Sambhu KUNDU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Transferring the substrates through a series of coating stations

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Magnetic levitation system, base and carrier of a magnetic levitati...

Carrier with vertical grid for supporting substrates in coater

Transport system

System and method to evaporate an OLED layer stack in a vertical or...

Fabrication of low defectivity electrochromic devices

System for forming nano-laminate optical coating

Fabrication of low defectivity electrochromic devices

Multi-chamber substrate processing platform

Metal nanoparticle fabrication on TCO for plasmonic interaction of...

In-line monitoring of OLED layer thickness and dopant concentration

Device, method and use for the coating of lenses

Deposition apparatus

Organic layer deposition apparatus and method of manufacturing orga...

In-line coater for vacuum deposition of thin film coatings

Carrier with vertical grid for supporting substrates in coater

Semiconductor component with oxidized aluminum nitride film and man...

Counter electrode material for electrochromic devices

Device for processing a component, carriage for the device, and met...

Sputtering apparatus

Vacuum process apparatus and vacuum process method

Film formation device for cutting tool provided with coating film,...

Film formation apparatus and film formation method

Apparatus and method for contactless transportation of a device in...

Flexible substrate deposition system

Fabrication of low defectivity electrochromic devices

Carrier with vertical grid for supporting substrates in coater

System with dual-motion substrate carriers

Counter electrode for electrochromic devices

Apparatus for processing long base material by roll-to-roll method...

Organic layer deposition apparatus and method of manufacturing orga...

Patents Applicationslast 30 patents

SURFACE TREATMENT APPARATUS

STABLE GROUND ANODE APERTURE FOR THIN FILM PROCESSING

SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME

SEMICONDUCTOR PROCESS EQUIPMENT

SUBSTRATE HOLDER, SUBSTRATE HOLDING METHOD, AND FILM FORMATION APPA...

IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION

MANUFACTURING DEVICE OF DISPLAY DEVICE

APPLYING A TRANSPARENT CONDUCTIVE FILM TO FLUORINE-DOPED TIN OXIDE

METHOD AND DEVICE FOR CHANGING TEST SUBSTRATES IN A CONTINUOUS-FLOW...

Multi-chamber Configuration

MAGNETRON SPUTTERING APPARATUS

FILM DEPOSITION APPARATUS AND FILM DEPOSITION METHOD

DEPOSITION APPARATUS

TUNGSTEN GAP FILL WITH HYDROGEN PLASMA TREATMENT

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

MULTI-CHAMBER SEMICONDUCTOR PROCESSING SYSTEM WITH TRANSFER ROBOT T...

MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA...

ELECTROCHROMIC CATHODE MATERIALS

COATING INSTALLATION, CLAMPING RING AND MAGAZINE FOR SPECTACLE LENS...

CARRIER WITH VERTICAL GRID FOR SUPPORTING SUBSTRATES IN COATER

SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...

SUBSTRATE PROCESSING SYSTEM

COUNTER ELECTRODE MATERIAL FOR ELECTROCHROMIC DEVICES

ELECTROCHROMIC CATHODE MATERIALS

PROCESSING SYSTEM FOR PROCESSING A FLEXIBLE SUBSTRATE AND METHOD OF...

TRANSFER APPARATUS AND FILM DEPOSITION APPARATUS USING TRANSFER APP...

DIELECTRIC COATED LITHIUM METAL ANODE

EVAPORATOR FOR EFFECTIVE SURFACE AREA EVAPORATION