Translation in a plane parallel to the substrate

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/055Translation in a plane parallel to the substrate

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Patents Grantslast 30 patents

Information Patent Grant
MEMS actuator system
- Patent number 12,135,437
- Issue date Nov 5, 2024
- MEMS DRIVE (NANJING) CO., LTD.
- Matthew Ng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system package having movable platform
- Patent number 11,643,325
- Issue date May 9, 2023
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 11,465,901
- Issue date Oct 11, 2022
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator structures resistant to shock
- Patent number 11,124,411
- Issue date Sep 21, 2021
- MEMS DRIVE (NANJING) CO., LTD
- Gerardo Morabito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Physical quantity sensor, complex sensor, inertial measurement unit...
- Patent number 11,112,424
- Issue date Sep 7, 2021
- Seiko Epson Corporation
- Juichiro Matsuzawa
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 10,858,238
- Issue date Dec 8, 2020
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS actuator structures resistant to shock
- Patent number 10,815,119
- Issue date Oct 27, 2020
- MEMS Drive, Inc.
- Gerardo Morabito
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor compensation for off-axis movement
- Patent number 10,766,764
- Issue date Sep 8, 2020
- Invensense, Inc.
- Ilya Gurin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Droplet control and detection device, operating method thereof, and...
- Patent number 10,654,711
- Issue date May 19, 2020
- BOE Technology Group Co., Ltd.
- Xiaoliang Ding
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-axis accelerometers with reduced cross-axis sensitivity
- Patent number 10,634,696
- Issue date Apr 28, 2020
- Khalifa University of Science and Technology
- Zakriya Mohammed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor package having a movable sensor
- Patent number 10,589,982
- Issue date Mar 17, 2020
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Miniature kinetic energy harvester for generating electrical energy...
- Patent number 10,581,344
- Issue date Mar 3, 2020
- Chambre de Commerce et D'Industrie de Region Paris Ile de France
- Francesco Cottone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Miniature hermetic acceleration detection device
- Patent number 10,422,813
- Issue date Sep 24, 2019
- Circor Aerospace, Inc.
- Brent Salamone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Manufacturing method of sensor package
- Patent number 10,384,928
- Issue date Aug 20, 2019
- PixArt Imaging Inc.
- Chih-Ming Sun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined monolithic 3-axis gyroscope with single drive
- Patent number 10,050,155
- Issue date Aug 14, 2018
- FAIRCHILD SEMICONDUCTOR CORPORATION
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface mount actuator
- Patent number 9,414,495
- Issue date Aug 9, 2016
- DigitalOptics Corporation MEMS
- Roman C. Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Surface mount actuator
- Patent number 8,571,405
- Issue date Oct 29, 2013
- DigitalOptics Corporation MEMS
- Roman C. Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Movable device
- Patent number 7,602,097
- Issue date Oct 13, 2009
- Fujitsu Limited
- Shunji Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
6-axis electromagnetically-actuated meso-scale nanopositioner
- Patent number 7,557,470
- Issue date Jul 7, 2009
- Massachusetts Institute of Technology
- Martin L. Culpepper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Forming an actuating mechanism for a micro-scanning device
- Patent number 7,532,376
- Issue date May 12, 2009
- International Business Machines Corporation
- Mark A. Lantz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mass-balanced actuating mechanism for a micro scanning device
- Patent number 7,440,155
- Issue date Oct 21, 2008
- International Business Machines Corporation
- Mark A. Lantz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial sensor
- Patent number 7,363,816
- Issue date Apr 29, 2008
- Analog Devices, Inc.
- Michael W. Judy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and method for anchoring micromachined structures
- Patent number 7,134,340
- Issue date Nov 14, 2006
- Analog Devices, Inc.
- Howard R. Samuels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mirror device, optical switch, thin film elastic structure, and thi...
- Patent number 7,002,730
- Issue date Feb 21, 2006
- Nikon Corporation
- Tohru Ishizuya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor
- Patent number 6,920,788
- Issue date Jul 26, 2005
- Wacoh Corporation
- Kazuhiro Okada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Reducing offset in accelerometers
- Patent number 6,892,576
- Issue date May 17, 2005
- Analog Devices, Inc.
- Howard R. Samuels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Acceleration sensor and manufacturing method for the same
- Patent number 6,772,632
- Issue date Aug 10, 2004
- Wacoh Corporation
- Kazuhiro Okada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonant thermal out-of-plane buckle-beam actuator
- Patent number 6,708,492
- Issue date Mar 23, 2004
- Microsoft Corporation
- Michael J. Sinclair
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
System and method for constraining totally released microcomponents
- Patent number 6,677,225
- Issue date Jan 13, 2004
- Zyvex Corporation
- Matthew D. Ellis
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Bi-directional, single material thermal actuator
- Patent number 6,608,714
- Issue date Aug 19, 2003
- Southwest Research Institute
- Heather Shannon Hanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP
- Publication number 20240391757
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Marco GARBARINO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...
- Publication number 20230373781
- Publication date Nov 23, 2023
- HAHN-SCHICKARD-GESELLSCHAFT FUR ANGEWANDTE FORSCHUNG E.V.
- Jan Rockstroh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...
- Publication number 20230358975
- Publication date Nov 9, 2023
- NIHARIKA KOHLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TORSION SPRING ELEMENT
- Publication number 20230219805
- Publication date Jul 13, 2023
- NORTHROP GRUMMAN LITEF GMBH
- Jan Daniel Rende
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DIE AND MEMS-BASED VIBRATION SENSOR
- Publication number 20230192475
- Publication date Jun 22, 2023
- KNOWLES ELECTRONICS, LLC
- Ken Deng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...
- Publication number 20230107094
- Publication date Apr 6, 2023
- STMicroelectronics S.r.l.
- Gianluca LONGONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM
- Publication number 20230002214
- Publication date Jan 5, 2023
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20210053817
- Publication date Feb 25, 2021
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20200172391
- Publication date Jun 4, 2020
- PIXART IMAGING Inc.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR PACKAGE HAVING A MOVABLE SENSOR
- Publication number 20190308872
- Publication date Oct 10, 2019
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MANUFACTURING METHOD OR SENSOR PACKAGE
- Publication number 20190241426
- Publication date Aug 8, 2019
- PIXART IMAGING INC.
- Chih-Ming SUN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DROPLET CONTROL AND DETECTION DEVICE, OPERATING METHOD THEREOF, AND...
- Publication number 20190092623
- Publication date Mar 28, 2019
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaoliang DING
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MINIATURE KINETIC ENERGY HARVESTER FOR GENERATING ELECTRICAL ENERGY...
- Publication number 20170373611
- Publication date Dec 28, 2017
- Chambre de Commerce et D'Industrie de Region Paris Ile de France
- Francesco Cottone
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL APPARATUS HAVING CENTRAL ANCHOR
- Publication number 20170184628
- Publication date Jun 29, 2017
- Industrial Technology Research Institute
- Yu-Wen Hsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION...
- Publication number 20170138734
- Publication date May 18, 2017
- FREESCALE SEMICONDUCTOR, INC.
- Peng SHAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MONOLITHIC 3-AXIS GYROSCOPE WITH SINGLE DRIVE
- Publication number 20160264404
- Publication date Sep 15, 2016
- Fairchild Semiconductor Corporation
- Cenk Acar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE MOUNT ACTUATOR
- Publication number 20140055971
- Publication date Feb 27, 2014
- DigitalOptics Corporation MEMS
- Roman C. Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SURFACE MOUNT ACTUATOR
- Publication number 20130077948
- Publication date Mar 28, 2013
- DigitalOptics Corporation MEMS
- Roman C. Gutierrez
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMACHINED MOVER
- Publication number 20090190254
- Publication date Jul 30, 2009
- Seagate Technology LLC
- Zoran Jandric
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOVABLE DEVICE
- Publication number 20090021884
- Publication date Jan 22, 2009
- Fujitsu Limited
- Shunji Nakamura
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
6-Axis electromagnetically-actuated meso-scale nanopositioner
- Publication number 20070220882
- Publication date Sep 27, 2007
- Martin L. Culpepper
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Inertial sensor
- Publication number 20070180912
- Publication date Aug 9, 2007
- Analog Devices, Inc.
- Michael W. Judy
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Assembly process for out-of-plane MEMS and three-axis sensors
- Publication number 20070087474
- Publication date Apr 19, 2007
- E. Jesper Eklund
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Apparatus and method for anchoring micromachined structures
- Publication number 20050262942
- Publication date Dec 1, 2005
- Howard R. Samuels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Acceleration sensor and manufacturing method for the same
- Publication number 20040231422
- Publication date Nov 25, 2004
- WACOH CORPORATION
- Kazuhiro Okada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Mirror device, optical switch, thin film elastic structure, and thi...
- Publication number 20040114259
- Publication date Jun 17, 2004
- Tohru Ishizuya
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Reducing offset in accelerometers
- Publication number 20040055382
- Publication date Mar 25, 2004
- Howard R. Samuels
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Acceleration sensor and manufacturing method for the same
- Publication number 20030209075
- Publication date Nov 13, 2003
- WACOH CORPORATION
- Kazuhiro Okada
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Bi-directional, single material thermal actuator
- Publication number 20030002133
- Publication date Jan 2, 2003
- SOUTH WEST RESEARCH INSTITUTE
- Heather Shannon Hanson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Resonant thermal out-of-plane buckle-beam actuator
- Publication number 20020088224
- Publication date Jul 11, 2002
- Michael J. Sinclair
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Translation in a plane parallel to the substrate

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS actuator system

Micro-electromechanical system package having movable platform

Sensor package having a movable sensor

MEMS actuator structures resistant to shock

Physical quantity sensor, complex sensor, inertial measurement unit...

Sensor package having a movable sensor

MEMS actuator structures resistant to shock

MEMS sensor compensation for off-axis movement

Droplet control and detection device, operating method thereof, and...

Multi-axis accelerometers with reduced cross-axis sensitivity

Sensor package having a movable sensor

Miniature kinetic energy harvester for generating electrical energy...

Miniature hermetic acceleration detection device

Manufacturing method of sensor package

Micromachined monolithic 3-axis gyroscope with single drive

Surface mount actuator

Surface mount actuator

Movable device

6-axis electromagnetically-actuated meso-scale nanopositioner

Forming an actuating mechanism for a micro-scanning device

Mass-balanced actuating mechanism for a micro scanning device

Inertial sensor

Apparatus and method for anchoring micromachined structures

Mirror device, optical switch, thin film elastic structure, and thi...

Acceleration sensor

Reducing offset in accelerometers

Acceleration sensor and manufacturing method for the same

Resonant thermal out-of-plane buckle-beam actuator

System and method for constraining totally released microcomponents

Bi-directional, single material thermal actuator

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL ACCELEROMETER WITH FORCE FEEDBACK LOOP

MEMS ACTUATOR, IN PARTICULAR A MICROMIRROR, WITH INCREASED DEFLECTA...

INTEGRATED OPTICAL MICROELECTRONIC MECHANICAL SYSTEMS DEVICES AND M...

TORSION SPRING ELEMENT

MEMS DIE AND MEMS-BASED VIBRATION SENSOR

PROCESS FOR MANUFACTURING A MICRO-ELECTRO-MECHANICAL DEVICE FROM A...

MICRO-ELECTROMECHANICAL SYSTEM PACKAGE HAVING MOVABLE PLATFORM

SENSOR PACKAGE HAVING A MOVABLE SENSOR

SENSOR PACKAGE HAVING A MOVABLE SENSOR

SENSOR PACKAGE HAVING A MOVABLE SENSOR

MANUFACTURING METHOD OR SENSOR PACKAGE

DROPLET CONTROL AND DETECTION DEVICE, OPERATING METHOD THEREOF, AND...

MINIATURE KINETIC ENERGY HARVESTER FOR GENERATING ELECTRICAL ENERGY...

MICRO-ELECTROMECHANICAL APPARATUS HAVING CENTRAL ANCHOR

MEMS DEVICE WITH CAPACITANCE ENHANCEMENT ON QUADRATURE COMPENSATION...

MICROMACHINED MONOLITHIC 3-AXIS GYROSCOPE WITH SINGLE DRIVE

SURFACE MOUNT ACTUATOR

SURFACE MOUNT ACTUATOR

MICROMACHINED MOVER

MOVABLE DEVICE

6-Axis electromagnetically-actuated meso-scale nanopositioner

Inertial sensor

Assembly process for out-of-plane MEMS and three-axis sensors

Apparatus and method for anchoring micromachined structures

Acceleration sensor and manufacturing method for the same

Mirror device, optical switch, thin film elastic structure, and thi...

Reducing offset in accelerometers

Acceleration sensor and manufacturing method for the same

Bi-directional, single material thermal actuator

Resonant thermal out-of-plane buckle-beam actuator