Treatment for improving the physical properties not provided for in groups B81C1/0065 - B81C1/00706

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B81C1/00714

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00714Treatment for improving the physical properties not provided for in groups B81C1/0065 - B81C1/00706

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Microfluidic chip and fabrication method
- Patent number 12,134,097
- Issue date Nov 5, 2024
- Shanghai Tianma Micro-Electronics Co., Ltd.
- Wei Li
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MOx-based gas sensor and manufacturing method thereof
- Patent number 10,871,462
- Issue date Dec 22, 2020
- STMicroelectronics S.r.l.
- Alessandra Alberti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Enhanced control of shuttle mass motion in MEMS devices
- Patent number 10,858,241
- Issue date Dec 8, 2020
- Rensselaer Polytechnic Institute
- Diana-Andra Borca-Tasciuc
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device with a movable structure, in partic...
- Patent number 10,649,202
- Issue date May 12, 2020
- STMicroelectronics S.R.L.
- Sonia Costantini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a micromechanical timepiece part and said...
- Patent number 10,558,169
- Issue date Feb 11, 2020
- Nivarox-Far S.A.
- Philippe Dubois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Centrifugal microfluidic device
- Patent number 10,265,647
- Issue date Apr 23, 2019
- Royal Melbourne Institute of Technology
- James Friend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device with a movable structure, in partic...
- Patent number 10,197,794
- Issue date Feb 5, 2019
- STMicroelectronics S.r.l.
- Sonia Costantini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and apparatus for MEMS devices with increased sensitivity
- Patent number 9,505,605
- Issue date Nov 29, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for modifying the properties of a thin layer and substrate...
- Patent number 9,102,518
- Issue date Aug 11, 2015
- Universite Claude Bernard Lyon I
- Olivier Marty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing a switch system
- Patent number 8,506,826
- Issue date Aug 13, 2013
- Harris Corporation
- John E. Rogers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mechanical quantity sensor and method of manufacturing the same
- Patent number 8,329,491
- Issue date Dec 11, 2012
- Dai Nippon Printing Co., Ltd.
- Kiyokazu Takeshita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical conditioning of MEMS device and insulating layer thereof
- Patent number 7,932,728
- Issue date Apr 26, 2011
- QUALCOMM MEMS Technologies, Inc.
- Chen-Jean Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrochemical miniaturization of organic micro-and nanostructures
- Patent number 7,611,619
- Issue date Nov 3, 2009
- Northwestern University
- Chad A. Mirkin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of altering the properties of a thin film and substrate impl...
- Patent number 7,553,369
- Issue date Jun 30, 2009
- Universite Claude Bernard Lyon 1
- Olivier Marty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electrical conditioning of MEMS device and insulating layer thereof
- Patent number 7,547,568
- Issue date Jun 16, 2009
- QUALCOMM MEMS Technologies, Inc.
- Chen-Jean Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for fabrication of passivated microfluidic str...
- Patent number 7,446,382
- Issue date Nov 4, 2008
- Intel Corporation
- Paul Winer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for fabrication of passivated microfluidic str...
- Patent number 6,878,567
- Issue date Apr 12, 2005
- Intel Corporation
- Paul Winer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing semiconductor components having micromecha...
- Patent number 6,204,086
- Issue date Mar 20, 2001
- Robert Bosch GmbH
- Joerg Muchow
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROFLUIDIC CHIP AND FABRICATION METHOD
- Publication number 20230211345
- Publication date Jul 6, 2023
- SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.
- Wei LI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
- Publication number 20210198096
- Publication date Jul 1, 2021
- Rensselaer Polytechnic Institute
- Diana-Andra Borca-Tasciuc
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OPTICALLY TRANSPARENT MICROMACHINED ULTRASONIC TRANSDUCER (CMUT)
- Publication number 20200282424
- Publication date Sep 10, 2020
- North Carolina State University
- Omer ORALKAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF
- Publication number 20190128830
- Publication date May 2, 2019
- STMicroelectronics S.r.l.
- Alessandra ALBERTI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE WITH A MOVABLE STRUCTURE, IN PARTIC...
- Publication number 20190121122
- Publication date Apr 25, 2019
- STMicroelectronics S.r.l
- Sonia Costantini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
- Publication number 20180354780
- Publication date Dec 13, 2018
- Rensselaer Polytechnic Institute
- Diana-Andra Borca-Tasciuc
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE WITH A MOVABLE STRUCTURE, IN PARTIC...
- Publication number 20180180871
- Publication date Jun 28, 2018
- STMicroelectronics S.r.l.
- Sonia Costantini
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods and Apparatus for MEMS Devices with Increased Sensitivity
- Publication number 20150338435
- Publication date Nov 26, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CENTRIFUGAL MICROFLUIDIC DEVICE
- Publication number 20150231530
- Publication date Aug 20, 2015
- Royal Melbourne Institute of Technology
- James Friend
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE
- Publication number 20150137276
- Publication date May 21, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chun-Wen CHENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Methods and Apparatus for MEMS Devices with Increased Sensitivity
- Publication number 20140252358
- Publication date Sep 11, 2014
- Chia-Hua Chu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING A SWITCH SYSTEM
- Publication number 20130032570
- Publication date Feb 7, 2013
- Harris Corporation
- John E. Rogers
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING MEMS STRUCTURES
- Publication number 20100297781
- Publication date Nov 25, 2010
- ROBERT BOSCH GmbH
- Andreas Scheurle
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MECHANICAL QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20100077859
- Publication date Apr 1, 2010
- DAI NIPPON PRINTING CO., LTD.
- Kiyokazu Takeshita
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRICAL CONDITIONING OF MEMS DEVICE AND INSULATING LAYER THEREOF
- Publication number 20090315567
- Publication date Dec 24, 2009
- QUALCOMM MEMS TECHNOLOGIES, INC.
- Chen-Jean Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FOR MODIFYING THE PROPERTIES OF A THIN LAYER AND SUBSTRATE...
- Publication number 20090226680
- Publication date Sep 10, 2009
- UNIVERSITE CLAUDE BERNARD LYON I
- Olivier MARTY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrical conditioning of MEMS device and insulating layer thereof
- Publication number 20070196944
- Publication date Aug 23, 2007
- Chen-Jean Chou
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Electrochemical miniaturization of organic micro-and nanostructures
- Publication number 20060081479
- Publication date Apr 20, 2006
- Chad A. Mirkin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method of altering the properties of a thin film and substrate impl...
- Publication number 20050229837
- Publication date Oct 20, 2005
- Olivier Marty
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method and apparatus for fabrication of passivated microfluidic str...
- Publication number 20050090034
- Publication date Apr 28, 2005
- Intel Corporation
- Paul Winer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microfluidic structures in a semiconductor substrate and method and...
- Publication number 20030003619
- Publication date Jan 2, 2003
- Paul Winer
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Treatment for improving the physical properties not provided for in groups B81C1/0065 - B81C1/00706

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Microfluidic chip and fabrication method

MOx-based gas sensor and manufacturing method thereof

Enhanced control of shuttle mass motion in MEMS devices

Micro-electro-mechanical device with a movable structure, in partic...

Method for manufacturing a micromechanical timepiece part and said...

Centrifugal microfluidic device

Micro-electro-mechanical device with a movable structure, in partic...

Methods and apparatus for MEMS devices with increased sensitivity

Process for modifying the properties of a thin layer and substrate...

Method of manufacturing a switch system

Mechanical quantity sensor and method of manufacturing the same

Electrical conditioning of MEMS device and insulating layer thereof

Electrochemical miniaturization of organic micro-and nanostructures

Method of altering the properties of a thin film and substrate impl...

Electrical conditioning of MEMS device and insulating layer thereof

Method and apparatus for fabrication of passivated microfluidic str...

Method and apparatus for fabrication of passivated microfluidic str...

Method for manufacturing semiconductor components having micromecha...

Patents Applicationslast 30 patents

MICROFLUIDIC CHIP AND FABRICATION METHOD

ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES

OPTICALLY TRANSPARENT MICROMACHINED ULTRASONIC TRANSDUCER (CMUT)

MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF

MICRO-ELECTRO-MECHANICAL DEVICE WITH A MOVABLE STRUCTURE, IN PARTIC...

ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES

MICRO-ELECTRO-MECHANICAL DEVICE WITH A MOVABLE STRUCTURE, IN PARTIC...

Methods and Apparatus for MEMS Devices with Increased Sensitivity

CENTRIFUGAL MICROFLUIDIC DEVICE

MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE

Methods and Apparatus for MEMS Devices with Increased Sensitivity

METHOD OF MANUFACTURING A SWITCH SYSTEM

METHOD FOR MANUFACTURING MEMS STRUCTURES

MECHANICAL QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME

ELECTRICAL CONDITIONING OF MEMS DEVICE AND INSULATING LAYER THEREOF

PROCESS FOR MODIFYING THE PROPERTIES OF A THIN LAYER AND SUBSTRATE...

Electrical conditioning of MEMS device and insulating layer thereof

Electrochemical miniaturization of organic micro-and nanostructures

Method of altering the properties of a thin film and substrate impl...

Method and apparatus for fabrication of passivated microfluidic str...

Microfluidic structures in a semiconductor substrate and method and...