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Treatment for improving the physical properties not provided for in groups B81C1/0065 - B81C1/00706
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B81C1/00714
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
Current Industry
B81C1/00714
Treatment for improving the physical properties not provided for in groups B81C1/0065 - B81C1/00706
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Patents Grants
last 30 patents
Information
Patent Grant
MOx-based gas sensor and manufacturing method thereof
Patent number
10,871,462
Issue date
Dec 22, 2020
STMicroelectronics S.r.l.
Alessandra Alberti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Enhanced control of shuttle mass motion in MEMS devices
Patent number
10,858,241
Issue date
Dec 8, 2020
Rensselaer Polytechnic Institute
Diana-Andra Borca-Tasciuc
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical device with a movable structure, in partic...
Patent number
10,649,202
Issue date
May 12, 2020
STMicroelectronics S.R.L.
Sonia Costantini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical timepiece part and said...
Patent number
10,558,169
Issue date
Feb 11, 2020
Nivarox-Far S.A.
Philippe Dubois
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Centrifugal microfluidic device
Patent number
10,265,647
Issue date
Apr 23, 2019
Royal Melbourne Institute of Technology
James Friend
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electro-mechanical device with a movable structure, in partic...
Patent number
10,197,794
Issue date
Feb 5, 2019
STMicroelectronics S.r.l.
Sonia Costantini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods and apparatus for MEMS devices with increased sensitivity
Patent number
9,505,605
Issue date
Nov 29, 2016
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for modifying the properties of a thin layer and substrate...
Patent number
9,102,518
Issue date
Aug 11, 2015
Universite Claude Bernard Lyon I
Olivier Marty
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a switch system
Patent number
8,506,826
Issue date
Aug 13, 2013
Harris Corporation
John E. Rogers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanical quantity sensor and method of manufacturing the same
Patent number
8,329,491
Issue date
Dec 11, 2012
Dai Nippon Printing Co., Ltd.
Kiyokazu Takeshita
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical conditioning of MEMS device and insulating layer thereof
Patent number
7,932,728
Issue date
Apr 26, 2011
QUALCOMM MEMS Technologies, Inc.
Chen-Jean Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrochemical miniaturization of organic micro-and nanostructures
Patent number
7,611,619
Issue date
Nov 3, 2009
Northwestern University
Chad A. Mirkin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of altering the properties of a thin film and substrate impl...
Patent number
7,553,369
Issue date
Jun 30, 2009
Universite Claude Bernard Lyon 1
Olivier Marty
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electrical conditioning of MEMS device and insulating layer thereof
Patent number
7,547,568
Issue date
Jun 16, 2009
QUALCOMM MEMS Technologies, Inc.
Chen-Jean Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for fabrication of passivated microfluidic str...
Patent number
7,446,382
Issue date
Nov 4, 2008
Intel Corporation
Paul Winer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and apparatus for fabrication of passivated microfluidic str...
Patent number
6,878,567
Issue date
Apr 12, 2005
Intel Corporation
Paul Winer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing semiconductor components having micromecha...
Patent number
6,204,086
Issue date
Mar 20, 2001
Robert Bosch GmbH
Joerg Muchow
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICROFLUIDIC CHIP AND FABRICATION METHOD
Publication number
20230211345
Publication date
Jul 6, 2023
SHANGHAI TIANMA MICRO-ELECTRONICS CO., LTD.
Wei LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
Publication number
20210198096
Publication date
Jul 1, 2021
Rensselaer Polytechnic Institute
Diana-Andra Borca-Tasciuc
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OPTICALLY TRANSPARENT MICROMACHINED ULTRASONIC TRANSDUCER (CMUT)
Publication number
20200282424
Publication date
Sep 10, 2020
North Carolina State University
Omer ORALKAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MOX-BASED GAS SENSOR AND MANUFACTURING METHOD THEREOF
Publication number
20190128830
Publication date
May 2, 2019
STMicroelectronics S.r.l.
Alessandra ALBERTI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE WITH A MOVABLE STRUCTURE, IN PARTIC...
Publication number
20190121122
Publication date
Apr 25, 2019
STMicroelectronics S.r.l
Sonia Costantini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ENHANCED CONTROL OF SHUTTLE MASS MOTION IN MEMS DEVICES
Publication number
20180354780
Publication date
Dec 13, 2018
Rensselaer Polytechnic Institute
Diana-Andra Borca-Tasciuc
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE WITH A MOVABLE STRUCTURE, IN PARTIC...
Publication number
20180180871
Publication date
Jun 28, 2018
STMicroelectronics S.r.l.
Sonia Costantini
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods and Apparatus for MEMS Devices with Increased Sensitivity
Publication number
20150338435
Publication date
Nov 26, 2015
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
CENTRIFUGAL MICROFLUIDIC DEVICE
Publication number
20150231530
Publication date
Aug 20, 2015
Royal Melbourne Institute of Technology
James Friend
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MECHANISMS FOR FORMING MICRO-ELECTRO MECHANICAL SYSTEM DEVICE
Publication number
20150137276
Publication date
May 21, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Chun-Wen CHENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Methods and Apparatus for MEMS Devices with Increased Sensitivity
Publication number
20140252358
Publication date
Sep 11, 2014
Chia-Hua Chu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A SWITCH SYSTEM
Publication number
20130032570
Publication date
Feb 7, 2013
Harris Corporation
John E. Rogers
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MEMS STRUCTURES
Publication number
20100297781
Publication date
Nov 25, 2010
ROBERT BOSCH GmbH
Andreas Scheurle
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MECHANICAL QUANTITY SENSOR AND METHOD OF MANUFACTURING THE SAME
Publication number
20100077859
Publication date
Apr 1, 2010
DAI NIPPON PRINTING CO., LTD.
Kiyokazu Takeshita
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRICAL CONDITIONING OF MEMS DEVICE AND INSULATING LAYER THEREOF
Publication number
20090315567
Publication date
Dec 24, 2009
QUALCOMM MEMS TECHNOLOGIES, INC.
Chen-Jean Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MODIFYING THE PROPERTIES OF A THIN LAYER AND SUBSTRATE...
Publication number
20090226680
Publication date
Sep 10, 2009
UNIVERSITE CLAUDE BERNARD LYON I
Olivier MARTY
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrical conditioning of MEMS device and insulating layer thereof
Publication number
20070196944
Publication date
Aug 23, 2007
Chen-Jean Chou
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Electrochemical miniaturization of organic micro-and nanostructures
Publication number
20060081479
Publication date
Apr 20, 2006
Chad A. Mirkin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method of altering the properties of a thin film and substrate impl...
Publication number
20050229837
Publication date
Oct 20, 2005
Olivier Marty
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and apparatus for fabrication of passivated microfluidic str...
Publication number
20050090034
Publication date
Apr 28, 2005
Intel Corporation
Paul Winer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Microfluidic structures in a semiconductor substrate and method and...
Publication number
20030003619
Publication date
Jan 2, 2003
Paul Winer
B81 - MICRO-STRUCTURAL TECHNOLOGY