Trenches

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B81B2203/033

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/033Trenches

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for amplifying and detecting gene
- Patent number 12,351,864
- Issue date Jul 8, 2025
- Electronics and Telecommunications Research Institute
- Jin Tae Kim
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
- Patent number 12,308,302
- Issue date May 20, 2025
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical system fluid control
- Patent number 12,304,804
- Issue date May 20, 2025
- WATER STUFF & SUN GMBH
- Johan Bejhed
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical microphone with membrane trench reinforcemen...
- Patent number 12,269,734
- Issue date Apr 8, 2025
- TDK Corporation
- Pirmin Rombach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic passage with protective layer
- Patent number 12,240,239
- Issue date Mar 4, 2025
- Hewlett-Packard Development Company, L.P.
- Juan Carlos Ramos
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical system component or a microfluidic component...
- Patent number 12,234,143
- Issue date Feb 25, 2025
- Berkin B.V.
- Wouter Sparreboom
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing package structure
- Patent number 12,215,018
- Issue date Feb 4, 2025
- Winbond Electronics Corp.
- Jin-Neng Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for fabricating microfluidic devices
- Patent number 12,208,385
- Issue date Jan 28, 2025
- The Charles Draper Laboratory, Inc.
- Ashley Lynne Beckwith
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,209,013
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor device package and a method of manufacturing the same
- Patent number 12,168,605
- Issue date Dec 17, 2024
- Advanced Semiconductor Engineering, Inc.
- Hsu-Liang Hsiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,134,557
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor devices with gas-permeable cover and associated production m...
- Patent number 12,122,667
- Issue date Oct 22, 2024
- Infineon Technologies AG
- Rainer Markus Schaller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having an improved stress distribution and manufacturin...
- Patent number 12,084,341
- Issue date Sep 10, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional micro-electro-mechanical, microfluidic, and micro...
- Patent number 12,080,651
- Issue date Sep 3, 2024
- NIELSON SCIENTIFIC, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress isolation using three-dimensional trenches
- Patent number 12,054,385
- Issue date Aug 6, 2024
- Texas Instruments Incorporated
- Ting-Ta Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical actuator on insulating substrate
- Patent number 12,030,771
- Issue date Jul 9, 2024
- MICROGLASS LLC
- John Wasserbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic chip and valve, production process and uses
- Patent number 12,017,220
- Issue date Jun 25, 2024
- Curiosity Diagnostics sp. z o.o.
- Pawel Solczynski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isotachophoresis for purification of nucleic acids
- Patent number 12,006,496
- Issue date Jun 11, 2024
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-pump fluidic strategy for fabricating perovskite microwire ar...
- Patent number 12,005,445
- Issue date Jun 11, 2024
- King Abdullah University of Science and Technology
- Bin Xin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric actuator provided with a deformable structure having...
- Patent number 11,981,558
- Issue date May 14, 2024
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
- Patent number 11,978,690
- Issue date May 7, 2024
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plate
- Patent number 11,970,681
- Issue date Apr 30, 2024
- Ushio Denki Kabushiki Kaisha
- Daisuke Nomoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure and method for manufacturing the same
- Patent number 11,970,388
- Issue date Apr 30, 2024
- Winbond Electronics Corp.
- Jin-Neng Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sample loading cartridge
- Patent number 11,958,049
- Issue date Apr 16, 2024
- Astrego Diagnostics AB
- Johan Öhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor device and corresponding manufacturing method
- Patent number 11,952,263
- Issue date Apr 9, 2024
- Robert Bosch GmbH
- Mike Schwarz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
- Patent number 11,926,524
- Issue date Mar 12, 2024
- Iowa State University Research Foundation, Inc.
- Metin Uz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-nano channel structure, sensor and manufacturing method there...
- Patent number 11,905,163
- Issue date Feb 20, 2024
- BOE Technology Group Co., Ltd.
- Xiaochen Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device with contact pad
- Patent number 11,897,756
- Issue date Feb 13, 2024
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Connected field effect transistors
- Patent number 11,827,512
- Issue date Nov 28, 2023
- Hewlett-Packard Development Company, L.P.
- Eric Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional features formed in molded panel
- Patent number 11,807,523
- Issue date Nov 7, 2023
- Hewlett-Packard Development Company, L.P.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE
- Publication number 20250214829
- Publication date Jul 3, 2025
- MICROGLASS LLC
- John WASSERBAUER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20250197195
- Publication date Jun 19, 2025
- AAC TECHNOLOGIES PTE. LTD
- Veronica Tan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
THREE-DIMENSIONAL MICRO-ELECTRO-MECHANICAL, MICROFLUIDIC, AND MICRO...
- Publication number 20250174566
- Publication date May 29, 2025
- Nielson Scientific, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC VALVE
- Publication number 20250170576
- Publication date May 29, 2025
- EMERGING VIRAL DIAGNOSTICS (HK) LIMITED
- Johnson Yiu-Nam LAU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME
- Publication number 20250115473
- Publication date Apr 10, 2025
- Advanced Semiconductor Engineering, Inc.
- Hsu-Liang HSIAO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE
- Publication number 20250100872
- Publication date Mar 27, 2025
- MEMSensing Microsystems (Suzhou, China) Co., Ltd.
- Yanzi MENG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM (MEMS) STRUCTURE AND MEMS MICROPHONE...
- Publication number 20250059024
- Publication date Feb 20, 2025
- MEMSENSING MICROSYSTEMS (SUZHOU, CHINA) CO., LTD.
- Genlan RONG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS Microphone
- Publication number 20250011158
- Publication date Jan 9, 2025
- AAC ACOUSTIC TECHNOLOGIES (SHENZHEN) CO., LTD
- Xingfu Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF
- Publication number 20250011165
- Publication date Jan 9, 2025
- Vanguard International Semiconductor Corporation
- JIA JIE XIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...
- Publication number 20240425359
- Publication date Dec 26, 2024
- STMicroelectronics S.r.l
- Nicolo' BONI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
LIQUID EJECTION CHIP AND METHOD FOR MANUFACTURING LIQUID EJECTION CHIP
- Publication number 20240409396
- Publication date Dec 12, 2024
- Canon Kabushiki Kaisha
- RYOTARO MURAKAMI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID
- Publication number 20240400378
- Publication date Dec 5, 2024
- ROBERT BOSCH GmbH
- Peter Engelhart
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
- Publication number 20240391760
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Silvia NICOLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS ISOLATION USING THREE-DIMENSIONAL TRENCHES
- Publication number 20240391758
- Publication date Nov 28, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Ting-Ta YEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240383744
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Isotachophoresis for Purification of Nucleic Acids
- Publication number 20240301395
- Publication date Sep 12, 2024
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical Devices For Higher Order Passive Temperature...
- Publication number 20240294372
- Publication date Sep 5, 2024
- Stathera IP Holdings Inc.
- Anosh Daruwalla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240280513
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jae Hong LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM FLUID CONTROL
- Publication number 20240279048
- Publication date Aug 22, 2024
- Water Stuff & Sun GmbH
- Johan BEJHED
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SHEAR WAVE MODE PIEZOELECTRIC RESONATOR
- Publication number 20240278285
- Publication date Aug 22, 2024
- BIOMENSIO LTD
- Jyrki KAITILA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
- Publication number 20240243035
- Publication date Jul 18, 2024
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING PACKAGE STRUCTURE
- Publication number 20240217808
- Publication date Jul 4, 2024
- WINBOND ELECTRONICS CORP.
- Jin-Neng WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICE AND A METHOD FOR MANUFACTURING A MICROFLUIDIC D...
- Publication number 20240207845
- Publication date Jun 27, 2024
- IMEC vzw
- Lei ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240158225
- Publication date May 16, 2024
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240092632
- Publication date Mar 21, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...
- Publication number 20240092628
- Publication date Mar 21, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaochen MA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20240017989
- Publication date Jan 18, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240017988
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LA...
- Publication number 20240009668
- Publication date Jan 11, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Ramsey Hazbun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...
- Publication number 20240010490
- Publication date Jan 11, 2024
- STMicroelectronics S.r.l.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and device for amplifying and detecting gene

Anchor and cavity configuration for MEMS-based cooling systems

Micro-electro-mechanical system fluid control

Microelectromechanical microphone with membrane trench reinforcemen...

Microfluidic passage with protective layer

Microelectromechanical system component or a microfluidic component...

Method for manufacturing package structure

Systems and methods for fabricating microfluidic devices

Arched membrane structure for MEMS device

Semiconductor device package and a method of manufacturing the same

Arched membrane structure for MEMS device

Sensor devices with gas-permeable cover and associated production m...

MEMS device having an improved stress distribution and manufacturin...

Three-dimensional micro-electro-mechanical, microfluidic, and micro...

Stress isolation using three-dimensional trenches

Microelectromechanical actuator on insulating substrate

Microfluidic chip and valve, production process and uses

Isotachophoresis for purification of nucleic acids

Micro-pump fluidic strategy for fabricating perovskite microwire ar...

Piezoelectric actuator provided with a deformable structure having...

Anchor and cavity configuration for MEMS-based cooling systems

Plate

Package structure and method for manufacturing the same

Sample loading cartridge

Micromechanical sensor device and corresponding manufacturing method

Methods, apparatus, and systems for fabricating solution-based cond...

Micro-nano channel structure, sensor and manufacturing method there...

Micromechanical device with contact pad

Connected field effect transistors

Three-dimensional features formed in molded panel

Patents Applicationslast 30 patents

MICROELECTROMECHANICAL ACTUATOR ON INSULATING SUBSTRATE

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

THREE-DIMENSIONAL MICRO-ELECTRO-MECHANICAL, MICROFLUIDIC, AND MICRO...

MICROFLUIDIC VALVE

SEMICONDUCTOR DEVICE PACKAGE AND A METHOD OF MANUFACTURING THE SAME

AIRFLOW SENSOR AND AIRFLOW SENSOR PACKAGING STRUCTURE

MICRO-ELECTROMECHANICAL SYSTEM (MEMS) STRUCTURE AND MEMS MICROPHONE...

MEMS Microphone

MICRO-ELECTRO-MECHANICAL SYSTEM PACKAGE AND FABRICATION METHOD THEREOF

MEMS DEVICE HAVING AN IMPROVED STRESS DISTRIBUTION AND MANUFACTURIN...

LIQUID EJECTION CHIP AND METHOD FOR MANUFACTURING LIQUID EJECTION CHIP

MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID

CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS

STRESS ISOLATION USING THREE-DIMENSIONAL TRENCHES

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

Isotachophoresis for Purification of Nucleic Acids

Microelectromechanical Devices For Higher Order Passive Temperature...

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEM FLUID CONTROL

SHEAR WAVE MODE PIEZOELECTRIC RESONATOR

ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS

METHOD FOR MANUFACTURING PACKAGE STRUCTURE

MICROFLUIDIC DEVICE AND A METHOD FOR MANUFACTURING A MICROFLUIDIC D...

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LA...

DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...