Trenches

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B81B2203/033

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Parent Industries

BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81BMICRO-STRUCTURAL DEVICES OR SYSTEMS B81B2203/00Basic micro-electromechanical structures

Current Industry

B81B2203/033Trenches

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Semiconductor device package and a method of manufacturing the same
- Patent number 12,168,605
- Issue date Dec 17, 2024
- Advanced Semiconductor Engineering, Inc.
- Hsu-Liang Hsiao
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Arched membrane structure for MEMS device
- Patent number 12,134,557
- Issue date Nov 5, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor devices with gas-permeable cover and associated production m...
- Patent number 12,122,667
- Issue date Oct 22, 2024
- Infineon Technologies AG
- Rainer Markus Schaller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS device having an improved stress distribution and manufacturin...
- Patent number 12,084,341
- Issue date Sep 10, 2024
- STMicroelectronics S.r.l.
- Nicolo' Boni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional micro-electro-mechanical, microfluidic, and micro...
- Patent number 12,080,651
- Issue date Sep 3, 2024
- NIELSON SCIENTIFIC, LLC
- Gregory Nolan Nielson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Stress isolation using three-dimensional trenches
- Patent number 12,054,385
- Issue date Aug 6, 2024
- Texas Instruments Incorporated
- Ting-Ta Yen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microelectromechanical actuator on insulating substrate
- Patent number 12,030,771
- Issue date Jul 9, 2024
- MICROGLASS LLC
- John Wasserbauer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic chip and valve, production process and uses
- Patent number 12,017,220
- Issue date Jun 25, 2024
- Curiosity Diagnostics sp. z o.o.
- Pawel Solczynski
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isotachophoresis for purification of nucleic acids
- Patent number 12,006,496
- Issue date Jun 11, 2024
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-pump fluidic strategy for fabricating perovskite microwire ar...
- Patent number 12,005,445
- Issue date Jun 11, 2024
- King Abdullah University of Science and Technology
- Bin Xin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric actuator provided with a deformable structure having...
- Patent number 11,981,558
- Issue date May 14, 2024
- STMicroelectronics S.r.l.
- Domenico Giusti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Anchor and cavity configuration for MEMS-based cooling systems
- Patent number 11,978,690
- Issue date May 7, 2024
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Package structure and method for manufacturing the same
- Patent number 11,970,388
- Issue date Apr 30, 2024
- Winbond Electronics Corp.
- Jin-Neng Wu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plate
- Patent number 11,970,681
- Issue date Apr 30, 2024
- Ushio Denki Kabushiki Kaisha
- Daisuke Nomoto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sample loading cartridge
- Patent number 11,958,049
- Issue date Apr 16, 2024
- Astrego Diagnostics AB
- Johan Öhman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor device and corresponding manufacturing method
- Patent number 11,952,263
- Issue date Apr 9, 2024
- Robert Bosch GmbH
- Mike Schwarz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods, apparatus, and systems for fabricating solution-based cond...
- Patent number 11,926,524
- Issue date Mar 12, 2024
- Iowa State University Research Foundation, Inc.
- Metin Uz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-nano channel structure, sensor and manufacturing method there...
- Patent number 11,905,163
- Issue date Feb 20, 2024
- BOE Technology Group Co., Ltd.
- Xiaochen Ma
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical device with contact pad
- Patent number 11,897,756
- Issue date Feb 13, 2024
- Robert Bosch GmbH
- Jochen Reinmuth
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Connected field effect transistors
- Patent number 11,827,512
- Issue date Nov 28, 2023
- Hewlett-Packard Development Company, L.P.
- Eric Martin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three-dimensional features formed in molded panel
- Patent number 11,807,523
- Issue date Nov 7, 2023
- Hewlett-Packard Development Company, L.P.
- Chien-Hua Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor devices with gas-permeable cover and associated production m...
- Patent number 11,795,053
- Issue date Oct 24, 2023
- Infineon Technologies AG
- Rainer Markus Schaller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Calcite channel structures with heterogeneous wettability
- Patent number 11,774,437
- Issue date Oct 3, 2023
- Saudi Arabian Oil Company
- Dong Kyu Cha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Mass flow control based on micro-electromechanical devices
- Patent number 11,772,958
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Nir Merry
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic chip and a method for the manufacture of a microfluidi...
- Patent number 11,759,782
- Issue date Sep 19, 2023
- Teknologian tutkimuskeskus VTT Oy
- Tiina Maaninen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate assembly and method of bonding substrates
- Patent number 11,752,499
- Issue date Sep 12, 2023
- Taiwan Green Point Enterprises Co., Ltd.
- Sung-Yi Yang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Microfluidic device with integrated micro-structured electrodes and...
- Patent number 11,707,738
- Issue date Jul 25, 2023
- Indian Institute of Science
- Jatin Panwar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS devices comprising spring element and comb drive and associate...
- Patent number 11,703,681
- Issue date Jul 18, 2023
- Infineon Technologies AG
- Stephan Gerhard Albert
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Inertial pumps
- Patent number 11,686,327
- Issue date Jun 27, 2023
- Hewlett-Packard Development Company, L.P.
- Erik D Torniainen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Isotachophoresis for purification of nucleic acids
- Patent number 11,674,132
- Issue date Jun 13, 2023
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
LIQUID EJECTION CHIP AND METHOD FOR MANUFACTURING LIQUID EJECTION CHIP
- Publication number 20240409396
- Publication date Dec 12, 2024
- Canon Kabushiki Kaisha
- RYOTARO MURAKAMI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID
- Publication number 20240400378
- Publication date Dec 5, 2024
- ROBERT BOSCH GmbH
- Peter Engelhart
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS
- Publication number 20240391760
- Publication date Nov 28, 2024
- STMicroelectronics International N.V.
- Silvia NICOLI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STRESS ISOLATION USING THREE-DIMENSIONAL TRENCHES
- Publication number 20240391758
- Publication date Nov 28, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Ting-Ta YEN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240383744
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Isotachophoresis for Purification of Nucleic Acids
- Publication number 20240301395
- Publication date Sep 12, 2024
- Purigen Biosystems, Inc.
- Lewis A. Marshall
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Microelectromechanical Devices For Higher Order Passive Temperature...
- Publication number 20240294372
- Publication date Sep 5, 2024
- Stathera IP Holdings Inc.
- Anosh Daruwalla
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME
- Publication number 20240280513
- Publication date Aug 22, 2024
- Samsung Electronics Co., Ltd.
- Jae Hong LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL SYSTEM FLUID CONTROL
- Publication number 20240279048
- Publication date Aug 22, 2024
- Water Stuff & Sun GmbH
- Johan BEJHED
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SHEAR WAVE MODE PIEZOELECTRIC RESONATOR
- Publication number 20240278285
- Publication date Aug 22, 2024
- BIOMENSIO LTD
- Jyrki KAITILA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS
- Publication number 20240243035
- Publication date Jul 18, 2024
- Frore Systems Inc.
- Vikram Mukundan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING PACKAGE STRUCTURE
- Publication number 20240217808
- Publication date Jul 4, 2024
- WINBOND ELECTRONICS CORP.
- Jin-Neng WU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC DEVICE AND A METHOD FOR MANUFACTURING A MICROFLUIDIC D...
- Publication number 20240207845
- Publication date Jun 27, 2024
- IMEC vzw
- Lei ZHANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20240158225
- Publication date May 16, 2024
- UNITED MICROELECTRONICS CORP.
- Jung-Hao Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240092632
- Publication date Mar 21, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...
- Publication number 20240092628
- Publication date Mar 21, 2024
- BOE TECHNOLOGY GROUP CO., LTD.
- Xiaochen MA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE
- Publication number 20240017989
- Publication date Jan 18, 2024
- Rohm Co., Ltd.
- Martin Wilfried HELLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE
- Publication number 20240017988
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jhao-Yi Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LA...
- Publication number 20240009668
- Publication date Jan 11, 2024
- GLOBALFOUNDRIES U.S. Inc.
- Ramsey Hazbun
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...
- Publication number 20240010490
- Publication date Jan 11, 2024
- STMicroelectronics S.r.l.
- Gabriele GATTERE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICES WITH GAS-PERMEABLE COVER AND ASSOCIATED PRODUCTION M...
- Publication number 20240002217
- Publication date Jan 4, 2024
- INFINEON TECHNOLOGIES AG
- Rainer Markus SCHALLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC RE...
- Publication number 20240002216
- Publication date Jan 4, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Hakhamanesh MANSOORZARE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
A MICROFLUIDIC SENSOR
- Publication number 20230404777
- Publication date Dec 21, 2023
- CAMBRIDGE ENTERPRISE LIMITED
- Sohini KAR-NARAYAN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER
- Publication number 20230399226
- Publication date Dec 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fan Hu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE PACKAGE
- Publication number 20230391610
- Publication date Dec 7, 2023
- Fortemedia, Inc.
- Yen-Son Paul HUANG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20230382714
- Publication date Nov 30, 2023
- DB HITEK CO., LTD.
- Min Hyun JUNG
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVI...
- Publication number 20230357001
- Publication date Nov 9, 2023
- ROBERT BOSCH GmbH
- Heribert Weber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...
- Publication number 20230348258
- Publication date Nov 2, 2023
- STMicroelectronics S.r.l.
- Mikel AZPEITIA URQUIA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS with cover drive and method of operating the same
- Publication number 20230322546
- Publication date Oct 12, 2023
- Fraunhofer-Gesellschaft zur Forderung der angewandten Forschung e.V.
- Sergiu LANGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL PUMPS
- Publication number 20230279876
- Publication date Sep 7, 2023
- Hewlett-Packard Development Company, L.P.
- Erik D Torniainen
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Semiconductor device package and a method of manufacturing the same

Arched membrane structure for MEMS device

Sensor devices with gas-permeable cover and associated production m...

MEMS device having an improved stress distribution and manufacturin...

Three-dimensional micro-electro-mechanical, microfluidic, and micro...

Stress isolation using three-dimensional trenches

Microelectromechanical actuator on insulating substrate

Microfluidic chip and valve, production process and uses

Isotachophoresis for purification of nucleic acids

Micro-pump fluidic strategy for fabricating perovskite microwire ar...

Piezoelectric actuator provided with a deformable structure having...

Anchor and cavity configuration for MEMS-based cooling systems

Package structure and method for manufacturing the same

Plate

Sample loading cartridge

Micromechanical sensor device and corresponding manufacturing method

Methods, apparatus, and systems for fabricating solution-based cond...

Micro-nano channel structure, sensor and manufacturing method there...

Micromechanical device with contact pad

Connected field effect transistors

Three-dimensional features formed in molded panel

Sensor devices with gas-permeable cover and associated production m...

Calcite channel structures with heterogeneous wettability

Mass flow control based on micro-electromechanical devices

Microfluidic chip and a method for the manufacture of a microfluidi...

Substrate assembly and method of bonding substrates

Microfluidic device with integrated micro-structured electrodes and...

MEMS devices comprising spring element and comb drive and associate...

Inertial pumps

Isotachophoresis for purification of nucleic acids

Patents Applicationslast 30 patents

LIQUID EJECTION CHIP AND METHOD FOR MANUFACTURING LIQUID EJECTION CHIP

MEMS TRANSDUCER, IN PARTICULAR FOR INTERACTING WITH A FLUID

CAPACITIVE MEMS PRESSURE TRANSDUCER AND RELATED MANUFACTURING PROCESS

STRESS ISOLATION USING THREE-DIMENSIONAL TRENCHES

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

Isotachophoresis for Purification of Nucleic Acids

Microelectromechanical Devices For Higher Order Passive Temperature...

BIOMATERIAL DETECTION SENSOR AND METHOD OF MANUFACTURING THE SAME

MICRO-ELECTRO-MECHANICAL SYSTEM FLUID CONTROL

SHEAR WAVE MODE PIEZOELECTRIC RESONATOR

ANCHOR AND CAVITY CONFIGURATION FOR MEMS-BASED COOLING SYSTEMS

METHOD FOR MANUFACTURING PACKAGE STRUCTURE

MICROFLUIDIC DEVICE AND A METHOD FOR MANUFACTURING A MICROFLUIDIC D...

MEMS DEVICE AND METHOD FOR MANUFACTURING THE SAME

MEMS DEVICE AND MANUFACTURING METHOD THEREOF

MICRO-NANO CHANNEL STRUCTURE, SENSOR AND MANUFACTURING METHOD THERE...

MEMS DEVICE AND METHOD OF MANUFACTURING MEMS DEVICE

ARCHED MEMBRANE STRUCTURE FOR MEMS DEVICE

MICROFLUIDIC CHANNELS IN A SUBSTRATE WITH A SURFACE COVERED BY A LA...

DETECTION STRUCTURE FOR A MEMS ACCELEROMETER HAVING IMPROVED PERFOR...

SENSOR DEVICES WITH GAS-PERMEABLE COVER AND ASSOCIATED PRODUCTION M...

MICRO-ACOUSTIC RESONATOR SPRINGY ANCHOR BASED ON OFFSET ACOUSTIC RE...

A MICROFLUIDIC SENSOR

MICRO-ELECTROMECHANICAL SYSTEMS (MEMS) DEVICE WITH OUTGAS LAYER

MEMS MICROPHONE PACKAGE

MEMS MICROPHONE AND METHOD OF MANUFACTURING THE SAME

PRODUCTION METHOD FOR A MICROMECHANICAL COMPONENT FOR A SENSOR DEVI...

MEMS STRUCTURE INCLUDING A BURIED CAVITY WITH ANTISTICTION PROTUBER...

MEMS with cover drive and method of operating the same

INERTIAL PUMPS