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B81C1/00063
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00063
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Patents Grants
last 30 patents
Information
Patent Grant
Method for manufacturing a micromechanical structure and micromecha...
Patent number
11,787,687
Issue date
Oct 17, 2023
Robert Bosch GmbH
Andrea Urban
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low-parasitic capacitance MEMS inertial sensors and related methods
Patent number
11,746,004
Issue date
Sep 5, 2023
Analog Devices, Inc.
Charles Blackmer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS devices comprising spring element and comb drive and associate...
Patent number
11,703,681
Issue date
Jul 18, 2023
Infineon Technologies AG
Stephan Gerhard Albert
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for preparing micro-cavity array surface product with inclin...
Patent number
11,655,144
Issue date
May 23, 2023
JIANGSU UNIVERSITY
Jian Li
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical system device including a precision proof m...
Patent number
11,634,320
Issue date
Apr 25, 2023
Taiwan Semiconductor Manufacturing Company Limited
Ting-Jung Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Segmented pedestal for mounting device on chip
Patent number
11,542,153
Issue date
Jan 3, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS with over-voltage protection
Patent number
11,312,622
Issue date
Apr 26, 2022
SiTime Corporation
Nicholas Miller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low-parasitic capacitance MEMS inertial sensors and related methods
Patent number
11,279,614
Issue date
Mar 22, 2022
Analog Devices, Inc.
Charles Blackmer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Segmented pedestal for mounting device on chip
Patent number
11,084,715
Issue date
Aug 10, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Infrared detector pixel structure and manufacturing method thereof
Patent number
11,034,577
Issue date
Jun 15, 2021
Shanghai IC R&D Center Co., Ltd.
Xiaoxu Kang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Process for manufacturing a microelectromechanical device having a...
Patent number
10,961,117
Issue date
Mar 30, 2021
STMicroelectronics S.r.l.
Enri Duqi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
3D stack configuration for 6-axis motion sensor
Patent number
10,941,033
Issue date
Mar 9, 2021
Invensense, Inc.
Dongyang Kang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deposition of protective material at wafer level in front end for e...
Patent number
10,858,245
Issue date
Dec 8, 2020
Infineon Technologies AG
Florian Brandl
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Microfabricated gas flow structure
Patent number
10,794,374
Issue date
Oct 6, 2020
The Regents of the University of Michigan
Yogesh Gianchandani
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Semiconductor element and methods for manufacturing the same
Patent number
10,766,769
Issue date
Sep 8, 2020
Infineon Technologies AG
Christian Bretthauer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS with over-voltage protection
Patent number
10,737,934
Issue date
Aug 11, 2020
SiTime Corporation
Nicholas Miller
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing a micromechanical inertial sensor
Patent number
10,730,746
Issue date
Aug 4, 2020
Robert Bosch GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for manufacturing microelectromechanical system structure ha...
Patent number
10,654,713
Issue date
May 19, 2020
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for making nanoscale channels
Patent number
10,622,209
Issue date
Apr 14, 2020
Tsinghua University
Mo Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Deposition of protective material at wafer level in front end for e...
Patent number
10,370,244
Issue date
Aug 6, 2019
Infineon Technologies AG
Florian Brandl
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Method for manufacturing microelectromechanical system structure ha...
Patent number
10,273,152
Issue date
Apr 30, 2019
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Han Meng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Substrate etch
Patent number
9,988,263
Issue date
Jun 5, 2018
Hewlett-Packard Development Company, L.P.
Patrick Wayne Sadik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanical stress-decoupling in semiconductor device
Patent number
9,991,340
Issue date
Jun 5, 2018
Infineon Technologies AG
Steffen Bieselt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Stress decoupled piezoresistive relative pressure sensor and method...
Patent number
9,938,135
Issue date
Apr 10, 2018
Infineon Technologies Dresden GmbH
Steffen Bieselt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming oriented block copolymer line patterns, block cop...
Patent number
9,718,094
Issue date
Aug 1, 2017
UNIST ACADEMY-INDUSTRY
Thomas P. Russell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mechanical stress-decoupling in semiconductor device
Patent number
9,663,354
Issue date
May 30, 2017
Infineon Technologies AG
Steffen Bieselt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Component of a biosensor and process for production
Patent number
9,364,807
Issue date
Jun 14, 2016
Boehringer Ingelheim microParts GmbH
Christian Schoen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming oriented block copolymer line patterns, block cop...
Patent number
9,156,682
Issue date
Oct 13, 2015
The University of Massachusetts
Thomas P. Russell
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electromagnetic wave oscillator having multi-tunnel and electromagn...
Patent number
9,082,579
Issue date
Jul 14, 2015
Samsung Electronics Co., Ltd.
Chan-wook Baik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of forming wide trenches using a sacrificial silicon slab
Patent number
9,034,764
Issue date
May 19, 2015
Robert Bosch GmbH
Gary O'Brien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF...
Publication number
20230249963
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing Company Limited
Ting-Jung CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
High Rate Printing of Microscale and Nanoscale Patterns Using Inter...
Publication number
20230145232
Publication date
May 11, 2023
Northeastern University
Zhimin CHAI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR ETCHING GAPS OF UNEQUAL WIDTH
Publication number
20220340415
Publication date
Oct 27, 2022
Murata Manufacturing Co., Ltd.
Petteri KILPINEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM DEVICE INCLUDING A PRECISION PROOF M...
Publication number
20220267145
Publication date
Aug 25, 2022
Taiwan Semiconductor Manufacturing Company Limited
Ting-Jung CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW-PARASITIC CAPACITANCE MEMS INERTIAL SENSORS AND RELATED METHODS
Publication number
20220162059
Publication date
May 26, 2022
Analog Devices, Inc.
Charles Blackmer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS-ISOLATED MEMS DEVICE COMPRISING SUBSTRATE HAVING CAVITY AND...
Publication number
20210380403
Publication date
Dec 9, 2021
Analog Devices, Inc.
Xin Zhang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS DEVICES COMPRISING SPRING ELEMENT AND COMB DRIVE AND ASSOCIATE...
Publication number
20210373322
Publication date
Dec 2, 2021
INFINEON TECHNOLOGIES AG
Stephan Gerhard ALBERT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
Publication number
20210331915
Publication date
Oct 28, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANO-PATTERNED SURFACES FOR MICROFLUIDIC DEVICES AND METHODS FOR MA...
Publication number
20210213448
Publication date
Jul 15, 2021
Corning Incorporated
Donald Erwin Allen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW-PARASITIC CAPACITANCE MEMS INERTIAL SENSORS AND RELATED METHODS
Publication number
20200407217
Publication date
Dec 31, 2020
Analog Devices, Inc.
Charles Blackmer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEGMENTED PEDESTAL FOR MOUNTING DEVICE ON CHIP
Publication number
20200369515
Publication date
Nov 26, 2020
Taiwan Semiconductor Manufacturing Co., LTD
Lee-Chuan Tseng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
3D STACK CONFIGURATION FOR 6-AXIS MOTION SENSOR
Publication number
20200131027
Publication date
Apr 30, 2020
InvenSense, Inc.
Dongyang KANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING MICROSTRUCTURES
Publication number
20200071160
Publication date
Mar 5, 2020
EPIGEM LIMITED
Richard TRAYNOR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FOR MANUFACTURING A MICROELECTROMECHANICAL DEVICE HAVING A...
Publication number
20190375629
Publication date
Dec 12, 2019
STMicroelectronics S.r.l.
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
Publication number
20190300362
Publication date
Oct 3, 2019
INFINEON TECHNOLOGIES AG
Florian BRANDL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
Publication number
20190256350
Publication date
Aug 22, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han MENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INFRARED DETECTOR PIXEL STRUCTURE AND MANUFACTUREING METHOD THEREOF
Publication number
20190177158
Publication date
Jun 13, 2019
SHANGHAI IC R&D CENTER CO., LTD.
Xiaoxu Kang
G01 - MEASURING TESTING
Information
Patent Application
DEPOSITION OF PROTECTIVE MATERIAL AT WAFER LEVEL IN FRONT END FOR E...
Publication number
20190161345
Publication date
May 30, 2019
INFINEON TECHNOLOGIES AG
Florian BRANDL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MEMS SENSOR AND METHOD FOR MANUFACTURING SAME
Publication number
20190152774
Publication date
May 23, 2019
SHIN SUNG C&T CO., LTD.
Ci Moo SONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL SYSTEM STRUCTURE
Publication number
20190092625
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Chin-Han MENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL INERTIAL SENSOR
Publication number
20180312397
Publication date
Nov 1, 2018
ROBERT BOSCH GmbH
Jochen Reinmuth
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
STRESS DECOUPLED PIEZORESISTIVE RELATIVE PRESSURE SENSOR AND METHOD...
Publication number
20170369306
Publication date
Dec 28, 2017
INFINEON TECHNOLOGIES DRESDEN GMBH
Steffen BIESELT
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MECHANICAL STRESS-DECOUPLING IN SEMICONDUCTOR DEVICE
Publication number
20170229537
Publication date
Aug 10, 2017
INFINEON TECHNOLOGIES AG
Steffen Bieselt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Substrate Etch
Publication number
20160200568
Publication date
Jul 14, 2016
Hewlett-Packard Development Company, L.P.
Patrick Wayne Sadik
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTROMAGNETIC WAVE OSCILLATOR HAVING MULTI-TUNNEL AND ELECTROMAGN...
Publication number
20130200789
Publication date
Aug 8, 2013
Samsung Electronics Co., Ltd.
Chan-wook BAIK
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING MICROFLUIDIC CHIP, MICROFLUIDIC CHIP, AND A...
Publication number
20130140976
Publication date
Jun 6, 2013
FUJIKURA LTD.
Satoshi YAMAMOTO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
COMPONENT OF A BIOSENSOR AND PROCESS FOR PRODUCTION
Publication number
20130126022
Publication date
May 23, 2013
Boehringer Ingelheim microParts GmbH
Christian Schoen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF FORMING WIDE TRENCHES USING A SACRIFICIAL SILICON SLAB
Publication number
20130115775
Publication date
May 9, 2013
ROBERT BOSCH GmbH
Gary O'Brien
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEFECT FREE DEEP TRENCH METHOD FOR SEMICONDUCTOR CHIP
Publication number
20120322259
Publication date
Dec 20, 2012
Kun-Yi Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS OF FORMING SEMICONDUCTOR STRUCTURES
Publication number
20120309197
Publication date
Dec 6, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsing-Fei CHOU
B81 - MICRO-STRUCTURAL TECHNOLOGY