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  • CPC
  • C23C14/3478
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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

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C23C14/3478using electrons
Industries

Patents Grantslast 30 patents

  • Information Patent Grant

    Sputtering system and method
    • Patent number 11,257,663
    • Issue date Feb 22, 2022
    • Agency for Science, Technology and Research
    • Jianwei Chai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods of forming molybdenum sputtering targets
    • Patent number 9,926,623
    • Issue date Mar 27, 2018
    • H.C. Starck Inc.
    • Brad Lemon
    • C21 - METALLURGY OF IRON
  • Information Patent Grant

    Apparatus for enhanced physical vapor deposition
    • Patent number 9,911,583
    • Issue date Mar 6, 2018
    • HIA, Inc.
    • Samuel D. Harkness
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Remote arc discharge plasma assisted processes
    • Patent number 9,412,569
    • Issue date Aug 9, 2016
    • Vapor Technologies, Inc.
    • Vladimir Gorokhovsky
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Methods of depositing thin films using molybdenum sputtering targets
    • Patent number 9,309,591
    • Issue date Apr 12, 2016
    • H. C. Starck, Inc.
    • Brad Lemon
    • C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
  • Information Patent Grant

    Methods of forming molybdenum sputtering targets
    • Patent number 8,425,833
    • Issue date Apr 23, 2013
    • H.C. Starck Inc.
    • Brad Lemon
    • C21 - METALLURGY OF IRON
  • Information Patent Grant

    Film forming method, fabrication process of semiconductor device, c...
    • Patent number 7,816,254
    • Issue date Oct 19, 2010
    • Fujitsu Semiconductor Limited
    • Tatsuo Muraoka
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Dual anode AC supply for continuous deposition of a cathode material
    • Patent number 7,211,179
    • Issue date May 1, 2007
    • Advanced Energy Industries, Inc.
    • Eric Seymour
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Vacuum system with separable work piece support
    • Patent number 7,025,863
    • Issue date Apr 11, 2006
    • Unaxis Balzers Limited
    • Roger Seeli
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Process and system for the treatment of substrates using ions from...
    • Patent number 6,045,667
    • Issue date Apr 4, 2000
    • Dr. Eberhard Moll GmbH
    • Eberhard Moll
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Thin film deposition system
    • Patent number 5,427,668
    • Issue date Jun 27, 1995
    • Ricoh Company, Ltd.
    • Tatsuya Sato
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of producing coating using negative DC pulses with specified...
    • Patent number 5,192,578
    • Issue date Mar 9, 1993
    • Balzers AG
    • Jurgen Ramm
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Apparatus and process for producing a thin layer on a substrate
    • Patent number 5,110,435
    • Issue date May 5, 1992
    • Helmut Haberland
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Cathode sputtering apparatus
    • Patent number 4,308,126
    • Issue date Dec 29, 1981
    • United Technologies Corporation
    • Robert J. Wright
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Workpiece support apparatus for use with cathode sputtering devices
    • Patent number 4,271,005
    • Issue date Jun 2, 1981
    • United Technologies Corporation
    • Robert J. Wright
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Anode assisted sputter etch and deposition apparatus
    • Patent number 4,201,654
    • Issue date May 6, 1980
    • The United States of America as represented by the Secretary of the Air Force
    • B. Wayne Castleman
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Triode sputtering system
    • Patent number 4,111,783
    • Issue date Sep 5, 1978
    • Bell Telephone Laboratories, Incorporated
    • Jeffrey Bruce Bindell
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Supported plasma sputtering apparatus for high deposition rate over...
    • Patent number 4,038,171
    • Issue date Jul 26, 1977
    • Battelle Memorial Institute
    • Ronald W. Moss
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3869368
    • Patent number 3,869,368
    • Issue date Mar 4, 1975
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3779891
    • Patent number 3,779,891
    • Issue date Dec 18, 1973
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3707452
    • Patent number 3,707,452
    • Issue date Dec 26, 1972
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3669871
    • Patent number 3,669,871
    • Issue date Jun 13, 1972
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3583899
    • Patent number 3,583,899
    • Issue date Jun 8, 1971
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3528387
    • Patent number 3,528,387
    • Issue date Sep 15, 1970
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3515663
    • Patent number 3,515,663
    • Issue date Jun 2, 1970
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3501393
    • Patent number 3,501,393
    • Issue date Mar 17, 1970
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3492215
    • Patent number 3,492,215
    • Issue date Jan 27, 1970
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3481854
    • Patent number 3,481,854
    • Issue date Dec 2, 1969
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3475315
    • Patent number 3,475,315
    • Issue date Oct 28, 1969
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    3472755
    • Patent number 3,472,755
    • Issue date Oct 14, 1969
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents