using materials for controlling the level of pressure, contaminants or moisture inside of the package

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B81C1/00285

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BPERFORMING OPERATIONS TRANSPORTING B81Micro-structural technology B81CPROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS B81C1/00Manufacture or treatment of devices or systems in or on a substrate

Current Industry

B81C1/00285using materials for controlling the level of pressure, contaminants or moisture inside of the package

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Micromechanical device with perforated membrane
- Patent number 12,030,021
- Issue date Jul 9, 2024
- Infineon Technologies AG
- Abidin Güçlü Onaran
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Systems and methods for providing getters in microelectromechanical...
- Patent number 11,945,713
- Issue date Apr 2, 2024
- Invensense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Electronic device and corresponding method
- Patent number 11,945,714
- Issue date Apr 2, 2024
- STMicroelectronics S.r.l.
- Alex Gritti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed housing with a semiconductor component and meth...
- Patent number 11,876,007
- Issue date Jan 16, 2024
- Infineon Technologies AG
- Rainer Markus Schaller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric microelectromechanical resonator device and correspon...
- Patent number 11,855,604
- Issue date Dec 26, 2023
- STMicroelectronics S.r.l.
- Federico Vercesi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Outgassing material coated cavity for a micro-electro mechanical sy...
- Patent number 11,827,513
- Issue date Nov 28, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonance device and method for producing resonance device
- Patent number 11,757,425
- Issue date Sep 12, 2023
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS with small-molecule barricade
- Patent number 11,731,869
- Issue date Aug 22, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS with small-molecule barricade
- Patent number 11,718,518
- Issue date Aug 8, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Capping plate for panel scale packaging of MEMS products
- Patent number 11,685,649
- Issue date Jun 27, 2023
- OBSIDIAN SENSORS, INC.
- John Hong
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electromechanical system and method for producing same
- Patent number 11,685,645
- Issue date Jun 27, 2023
- LYNRED
- Sylvain Lemettre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Detachable MEMS package top cover
- Patent number 11,673,795
- Issue date Jun 13, 2023
- BEIJING VOYAGER TECHNOLOGY CO., LTD.
- Anan Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Getter technology for micromachined ultrasonic transducer cavities
- Patent number 11,638,931
- Issue date May 2, 2023
- BFLY OPERATIONS, INC.
- Keith G. Fife
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMs using outgassing material to adjust the pressure level in a ca...
- Patent number 11,634,318
- Issue date Apr 25, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yuan-Chih Hsieh
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Composite media protection for pressure sensor
- Patent number 11,532,532
- Issue date Dec 20, 2022
- NXP USA, INC.
- Michael B. Vincent
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus having a bondline structure and a diffusion barrier with...
- Patent number 11,505,451
- Issue date Nov 22, 2022
- Texas Instruments Incorporated
- Ganapathy Subramaniam Sivakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical sensor device with improved liquid tightness protec...
- Patent number 11,401,157
- Issue date Aug 2, 2022
- Robert Bosch GmbH
- Christian Doering
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Selective gettering through phase segregation and temperature depen...
- Patent number 11,345,589
- Issue date May 31, 2022
- Texas Instruments Incorporated
- Simon Joshua Jacobs
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method to form a rough crystalline surface
- Patent number 11,312,615
- Issue date Apr 26, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetic housing comprising a getter, optoelectronic component or M...
- Patent number 11,305,983
- Issue date Apr 19, 2022
- LYNRED
- Sylvain Lemettre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Hermetically sealed housing with a semiconductor component and meth...
- Patent number 11,289,353
- Issue date Mar 29, 2022
- Infineon Technologies AG
- Rainer Markus Schaller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Outgassing material coated cavity for a micro-electro mechanical sy...
- Patent number 11,180,363
- Issue date Nov 23, 2021
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
CMOS-MEMS structure and method of forming the same
- Patent number 11,148,936
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Company Ltd.
- Jung-Huei Peng
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for the monolithic encapsulation of a micro-sc...
- Patent number 11,117,800
- Issue date Sep 14, 2021
- HRL Laboratories, LLC
- Deborah J. Kirby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Use of a reactive, or reducing gas as a method to increase contact...
- Patent number 11,111,136
- Issue date Sep 7, 2021
- International Business Machines Corporation
- John M. Cotte
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a microelectromechanical component and wafer s...
- Patent number 10,994,989
- Issue date May 4, 2021
- Robert Bosch GmbH
- Vijaye Rajaraman
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pressure sensor generating a transduced signal with reduced ambient...
- Patent number 10,962,431
- Issue date Mar 30, 2021
- STMicroelectronics S.r.l.
- Enri Duqi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus having a cavity structure and method for producing same
- Patent number 10,875,763
- Issue date Dec 29, 2020
- Infineon Technologies AG
- Stephan Pindl
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High efficiency getter design in vacuum MEMS device
- Patent number 10,875,764
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Process for encapsulation of a microelectronic device by easily man...
- Patent number 10,865,104
- Issue date Dec 15, 2020
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Messaoud Bedjaoui
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
- Publication number 20240409395
- Publication date Dec 12, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Chung LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
- Publication number 20240375940
- Publication date Nov 14, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
- Publication number 20240367964
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROCESS FLOW FOR THIN CONTACTLESS THERMAL SENSORS
- Publication number 20240272004
- Publication date Aug 15, 2024
- STMicroelectronics International N.V.
- Enri DUQI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...
- Publication number 20240262682
- Publication date Aug 8, 2024
- ROBERT BOSCH GmbH
- Raphael Schuler
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
- Publication number 20240199415
- Publication date Jun 20, 2024
- STMicroelectronics International N.V.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND M...
- Publication number 20240182294
- Publication date Jun 6, 2024
- Kabushiki Kaisha Toshiba
- Hiroki HIRAGA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL ENVIRONMENTAL BARRIER DEVICE
- Publication number 20240182297
- Publication date Jun 6, 2024
- INFINEON TECHNOLOGIES AG
- Hutomo Suryo Wasisto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems of Getters for Microelectronics and Methods for Production...
- Publication number 20240174515
- Publication date May 30, 2024
- Mesoline Inc.
- Marnix P. Rebergen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...
- Publication number 20240154599
- Publication date May 9, 2024
- STMicroelectronics S.r.l.
- Federico VERCESI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF ATTACHING FILM
- Publication number 20240140785
- Publication date May 2, 2024
- Advanced Semiconductor Engineering, Inc.
- Chin-Song LEE
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
- Publication number 20230365398
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Kuei-Sung Chang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
3D DOME WAFER-LEVEL PACKAGE FOR OPTICAL MEMS MIRROR WITH REDUCED FO...
- Publication number 20230288695
- Publication date Sep 14, 2023
- INFINEON TECHNOLOGIES AG
- Andre BROCKMEIER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20230249961
- Publication date Aug 10, 2023
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INERTIAL SENSOR, METHOD FOR MANUFACTURING INERTIAL SENSOR, AND INER...
- Publication number 20230221346
- Publication date Jul 13, 2023
- SEIKO EPSON CORPORATION
- Teruo TAKIZAWA
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR PRODUCING SAME
- Publication number 20230123544
- Publication date Apr 20, 2023
- LYNRED
- Sylvain Lemettre
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Waterproof MEMS Pressure Sensor Package With A Metal Lid And An Emb...
- Publication number 20230087021
- Publication date Mar 23, 2023
- InvenSense, Inc.
- Roberto Brioschi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A CAPACITIVE PRESSURE SENSOR AND CAPACITIV...
- Publication number 20230064114
- Publication date Mar 2, 2023
- STMicroelectronics S.r.l.
- Paolo FERRARI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PROTECTIVE BONDLINE CONTROL STRUCTURE
- Publication number 20230064645
- Publication date Mar 2, 2023
- TEXAS INSTRUMENTS INCORPORATED
- Ganapathy Subramaniam Sivakumar
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer level package for device
- Publication number 20230050181
- Publication date Feb 16, 2023
- Teknologian Tutkimuskeskus VTT Oy
- Jae-Wung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING GETTERS IN MICROELECTROMECHANICAL...
- Publication number 20220348455
- Publication date Nov 3, 2022
- InvenSense, Inc.
- Daesung Lee
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
- Publication number 20220340413
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing company Ltd.
- YUAN-CHIH HSIEH
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
BARRIER STRUCTURE WITHIN A MICROELECTRONIC ENCLOSURE
- Publication number 20220212919
- Publication date Jul 7, 2022
- TEXAS INSTRUMENTS INCORPORATED
- Jennifer Lynne HOLM
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Enclosures for Microphone Assemblies Including a Fluoropolymer Insu...
- Publication number 20220201387
- Publication date Jun 23, 2022
- KNOWLES ELECTRONICS, LLC
- Adam Ariffin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HERMETICALLY SEALED HOUSING WITH A SEMICONDUCTOR COMPONENT AND METH...
- Publication number 20220172971
- Publication date Jun 2, 2022
- INFINEON TECHNOLOGIES AG
- Rainer Markus SCHALLER
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20220153573
- Publication date May 19, 2022
- Murata Manufacturing Co., Ltd.
- Yoshiyuki Higuchi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DETACHABLE MEMS PACKAGE TOP COVER
- Publication number 20220144626
- Publication date May 12, 2022
- Anan Pan
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD TO FORM A ROUGH CRYSTALLINE SURFACE
- Publication number 20220033246
- Publication date Feb 3, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Ting-Jung Chen
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC DEVICE AND CORRESPONDING METHOD
- Publication number 20220033251
- Publication date Feb 3, 2022
- STMicroelectronics S.r.l.
- Alex Gritti
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
HERMETIC HOUSING COMPRISING A GETTER, OPTOELECTRONIC COMPONENT OR M...
- Publication number 20220033250
- Publication date Feb 3, 2022
- LYNRED
- Sylvain Lemettre
- B81 - MICRO-STRUCTURAL TECHNOLOGY

using materials for controlling the level of pressure, contaminants or moisture inside of the package

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Micromechanical device with perforated membrane

Systems and methods for providing getters in microelectromechanical...

Electronic device and corresponding method

Hermetically sealed housing with a semiconductor component and meth...

Piezoelectric microelectromechanical resonator device and correspon...

Outgassing material coated cavity for a micro-electro mechanical sy...

Resonance device and method for producing resonance device

MEMS with small-molecule barricade

MEMS with small-molecule barricade

Capping plate for panel scale packaging of MEMS products

Micro-electromechanical system and method for producing same

Detachable MEMS package top cover

Getter technology for micromachined ultrasonic transducer cavities

MEMs using outgassing material to adjust the pressure level in a ca...

Composite media protection for pressure sensor

Apparatus having a bondline structure and a diffusion barrier with...

Micromechanical sensor device with improved liquid tightness protec...

Selective gettering through phase segregation and temperature depen...

Method to form a rough crystalline surface

Hermetic housing comprising a getter, optoelectronic component or M...

Hermetically sealed housing with a semiconductor component and meth...

Outgassing material coated cavity for a micro-electro mechanical sy...

CMOS-MEMS structure and method of forming the same

Method and apparatus for the monolithic encapsulation of a micro-sc...

Use of a reactive, or reducing gas as a method to increase contact...

Method for producing a microelectromechanical component and wafer s...

Pressure sensor generating a transduced signal with reduced ambient...

Apparatus having a cavity structure and method for producing same

High efficiency getter design in vacuum MEMS device

Process for encapsulation of a microelectronic device by easily man...

Patents Applicationslast 30 patents

SEMICONDUCTOR DEVICE AND METHOD OF MAKING

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...

PROCESS FLOW FOR THIN CONTACTLESS THERMAL SENSORS

METHOD FOR PRODUCING A MICROMECHANICAL DEVICE COMPRISING A CAVITY H...

EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...

ELECTRONIC DEVICE, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND M...

MICROMECHANICAL ENVIRONMENTAL BARRIER DEVICE

Systems of Getters for Microelectronics and Methods for Production...

PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...

METHOD OF ATTACHING FILM

OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...

3D DOME WAFER-LEVEL PACKAGE FOR OPTICAL MEMS MIRROR WITH REDUCED FO...

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

INERTIAL SENSOR, METHOD FOR MANUFACTURING INERTIAL SENSOR, AND INER...

MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR PRODUCING SAME

Waterproof MEMS Pressure Sensor Package With A Metal Lid And An Emb...

METHOD FOR MANUFACTURING A CAPACITIVE PRESSURE SENSOR AND CAPACITIV...

PROTECTIVE BONDLINE CONTROL STRUCTURE

Wafer level package for device

SYSTEMS AND METHODS FOR PROVIDING GETTERS IN MICROELECTROMECHANICAL...

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME

BARRIER STRUCTURE WITHIN A MICROELECTRONIC ENCLOSURE

Enclosures for Microphone Assemblies Including a Fluoropolymer Insu...

HERMETICALLY SEALED HOUSING WITH A SEMICONDUCTOR COMPONENT AND METH...

PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

DETACHABLE MEMS PACKAGE TOP COVER

METHOD TO FORM A ROUGH CRYSTALLINE SURFACE

ELECTRONIC DEVICE AND CORRESPONDING METHOD

HERMETIC HOUSING COMPRISING A GETTER, OPTOELECTRONIC COMPONENT OR M...