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using materials for controlling the level of pressure, contaminants or moisture inside of the package
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B81B7/0038
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Parent Industries
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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81B
MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81B7/00
Micro-structural systems; Auxiliary parts of micro-structural devices or systems
Current Industry
B81B7/0038
using materials for controlling the level of pressure, contaminants or moisture inside of the package
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Patents Grants
last 30 patents
Information
Patent Grant
Outgassing material coated cavity for a micro-electro mechanical sy...
Patent number
12,234,141
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Company Limited
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Wafer level package for device
Patent number
12,209,012
Issue date
Jan 28, 2025
Teknologian tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for fabricating a MEMS device
Patent number
12,180,069
Issue date
Dec 31, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonator and resonance device including same
Patent number
12,170,514
Issue date
Dec 17, 2024
Murata Manufacturing Co., Ltd.
Yoshihisa Inoue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical device with perforated membrane
Patent number
12,030,021
Issue date
Jul 9, 2024
Infineon Technologies AG
Abidin Güçlü Onaran
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Protective cover member and member supplying sheet including the same
Patent number
11,969,975
Issue date
Apr 30, 2024
Nitto Denko Corporation
Yuichi Abe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Bonded structures
Patent number
11,948,847
Issue date
Apr 2, 2024
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for providing getters in microelectromechanical...
Patent number
11,945,713
Issue date
Apr 2, 2024
Invensense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Electronic device and corresponding method
Patent number
11,945,714
Issue date
Apr 2, 2024
STMicroelectronics S.r.l.
Alex Gritti
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Multiaxis sensing system for detection of airborne molecules and ra...
Patent number
11,940,576
Issue date
Mar 26, 2024
National Technology & Engineering Solutions of Sandia, LLC
Mark D. Allendorf
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS device having a connection portion formed of a eutectic alloy
Patent number
11,909,379
Issue date
Feb 20, 2024
Murata Manufacturing Co., Ltd.
Yoshihisa Inoue
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-opto-mechanical system sensor, arrangement and manufacturing...
Patent number
11,898,899
Issue date
Feb 13, 2024
MIRAEX SA
Mitchell Anderson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonance device and manufacturing method of resonance device
Patent number
11,881,838
Issue date
Jan 23, 2024
Murata Manufacturing Co., Ltd.
Kentarou Dehara
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Piezoelectric microelectromechanical resonator device and correspon...
Patent number
11,855,604
Issue date
Dec 26, 2023
STMicroelectronics S.r.l.
Federico Vercesi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Outgassing material coated cavity for a micro-electro mechanical sy...
Patent number
11,827,513
Issue date
Nov 28, 2023
Taiwan Semiconductor Manufacturing Company Limited
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Hermetically sealed optically transparent wafer-level packages and...
Patent number
11,764,117
Issue date
Sep 19, 2023
Corning Incorporated
Robert Alan Bellman
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Resonance device and method for producing resonance device
Patent number
11,757,425
Issue date
Sep 12, 2023
Murata Manufacturing Co., Ltd.
Masakazu Fukumitsu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS with small-molecule barricade
Patent number
11,731,869
Issue date
Aug 22, 2023
SiTime Corporation
Charles I. Grosjean
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMS with small-molecule barricade
Patent number
11,718,518
Issue date
Aug 8, 2023
SiTime Corporation
Charles I. Grosjean
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Capping plate for panel scale packaging of MEMS products
Patent number
11,685,649
Issue date
Jun 27, 2023
OBSIDIAN SENSORS, INC.
John Hong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micro-electromechanical system and method for producing same
Patent number
11,685,645
Issue date
Jun 27, 2023
LYNRED
Sylvain Lemettre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Detachable MEMS package top cover
Patent number
11,673,795
Issue date
Jun 13, 2023
BEIJING VOYAGER TECHNOLOGY CO., LTD.
Anan Pan
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication techniques and structures for gettering materials in ul...
Patent number
11,655,141
Issue date
May 23, 2023
BFLY OPERATIONS, INC.
Jianwei Liu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Getter technology for micromachined ultrasonic transducer cavities
Patent number
11,638,931
Issue date
May 2, 2023
BFLY OPERATIONS, INC.
Keith G. Fife
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
MEMs using outgassing material to adjust the pressure level in a ca...
Patent number
11,634,318
Issue date
Apr 25, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Yuan-Chih Hsieh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor with chamber
Patent number
11,618,670
Issue date
Apr 4, 2023
AINOS, INC.
Yu-Fen Tzeng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Sensor package
Patent number
11,565,933
Issue date
Jan 31, 2023
Infineon Technologies AG
Michael Kandler
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Thin film getter and manufacturing method therefor
Patent number
11,524,271
Issue date
Dec 13, 2022
Industry-University Cooperation Foundation Hanyang University Erica Campus
Yongho Choa
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing a micromechanical device having a damper struc...
Patent number
11,505,455
Issue date
Nov 22, 2022
Robert Bosch GmbH
Holger Hoefer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Micromechanical sensor device with improved liquid tightness protec...
Patent number
11,401,157
Issue date
Aug 2, 2022
Robert Bosch GmbH
Christian Doering
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
COMBINED SOUND TRANSDUCER AND PRESSURE SENSOR PACKAGE
Publication number
20240425363
Publication date
Dec 26, 2024
INFINEON TECHNOLOGIES AG
Bernhard Rieder
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MAKING
Publication number
20240409395
Publication date
Dec 12, 2024
Taiwan Semiconductor Manufacturing Company Limited
Chih-Chung LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
Publication number
20240375940
Publication date
Nov 14, 2024
Murata Manufacturing Co., Ltd.
Masakazu FUKUMITSU
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
Publication number
20240367964
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Company Limited
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROCESS FLOW FOR THIN CONTACTLESS THERMAL SENSORS
Publication number
20240272004
Publication date
Aug 15, 2024
STMicroelectronics International N.V.
Enri DUQI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
EMBEDDED PERMEABLE POLYSILICON LAYER IN MEMS DEVICE FOR MULTIPLE CA...
Publication number
20240199415
Publication date
Jun 20, 2024
STMicroelectronics International N.V.
Federico VERCESI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELECTRONIC DEVICE, ELECTRONIC DEVICE MANUFACTURING APPARATUS, AND M...
Publication number
20240182294
Publication date
Jun 6, 2024
Kabushiki Kaisha Toshiba
Hiroki HIRAGA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Systems of Getters for Microelectronics and Methods for Production...
Publication number
20240174515
Publication date
May 30, 2024
Mesoline Inc.
Marnix P. Rebergen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDED STRUCTURES
Publication number
20240162102
Publication date
May 16, 2024
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PIEZOELECTRIC MICROELECTROMECHANICAL RESONATOR DEVICE AND CORRESPON...
Publication number
20240154599
Publication date
May 9, 2024
STMicroelectronics S.r.l.
Federico VERCESI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROMECHANICAL DEVICE COMPRISING A HYDROGEN DRAINAGE LAYER
Publication number
20240124296
Publication date
Apr 18, 2024
ROBERT BOSCH GmbH
Johannes Boy
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDED STRUCTURES
Publication number
20240120245
Publication date
Apr 11, 2024
ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
OUTGASSING MATERIAL COATED CAVITY FOR A MICRO-ELECTRO MECHANICAL SY...
Publication number
20230365398
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company Limited
Kuei-Sung Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
3D DOME WAFER-LEVEL PACKAGE FOR OPTICAL MEMS MIRROR WITH REDUCED FO...
Publication number
20230288695
Publication date
Sep 14, 2023
INFINEON TECHNOLOGIES AG
Andre BROCKMEIER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
Publication number
20230249961
Publication date
Aug 10, 2023
Taiwan Semiconductor Manufacturing company Ltd.
YUAN-CHIH HSIEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
INERTIAL SENSOR, METHOD FOR MANUFACTURING INERTIAL SENSOR, AND INER...
Publication number
20230221346
Publication date
Jul 13, 2023
SEIKO EPSON CORPORATION
Teruo TAKIZAWA
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICRO-ELECTROMECHANICAL SYSTEM AND METHOD FOR PRODUCING SAME
Publication number
20230123544
Publication date
Apr 20, 2023
LYNRED
Sylvain Lemettre
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROTECTIVE COVER MEMBER AND MEMBER SUPPLYING SHEET
Publication number
20230108896
Publication date
Apr 6, 2023
Nitto Denko Corporation
Hiroki KIGAMI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Waterproof MEMS Pressure Sensor Package With A Metal Lid And An Emb...
Publication number
20230087021
Publication date
Mar 23, 2023
InvenSense, Inc.
Roberto Brioschi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Wafer level package for device
Publication number
20230050181
Publication date
Feb 16, 2023
Teknologian Tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD AND SYSTEM FOR FABRICATING A MEMS DEVICE CAP
Publication number
20230045563
Publication date
Feb 9, 2023
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BONDED STRUCTURES
Publication number
20220367302
Publication date
Nov 17, 2022
INVENSAS BONDING TECHNOLOGIES, INC.
Rajesh Katkar
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEMS AND METHODS FOR PROVIDING GETTERS IN MICROELECTROMECHANICAL...
Publication number
20220348455
Publication date
Nov 3, 2022
InvenSense, Inc.
Daesung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD FOR THE SAME
Publication number
20220340413
Publication date
Oct 27, 2022
Taiwan Semiconductor Manufacturing company Ltd.
YUAN-CHIH HSIEH
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Thin film getter structure having miniature heater and manufacturin...
Publication number
20220340412
Publication date
Oct 27, 2022
SHANGHAI INDUSTRIAL µTECHNOLOGY RESEARCH INSTITUTE
Shinan WANG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROTECTIVE COVER MEMBER AND MEMBER SUPPLYING SHEET INCLUDING THE SAME
Publication number
20220266575
Publication date
Aug 25, 2022
Nitto Denko Corporation
Yuichi ABE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
BARRIER STRUCTURE WITHIN A MICROELECTRONIC ENCLOSURE
Publication number
20220212919
Publication date
Jul 7, 2022
TEXAS INSTRUMENTS INCORPORATED
Jennifer Lynne HOLM
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIQUID-RESISTANT AIR INLET PASSIVE DEVICE AND METHODS OF MAKING SAME
Publication number
20220212920
Publication date
Jul 7, 2022
Kathirgamasundaram SOORIAKUMAR
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Enclosures for Microphone Assemblies Including a Fluoropolymer Insu...
Publication number
20220201387
Publication date
Jun 23, 2022
KNOWLES ELECTRONICS, LLC
Adam Ariffin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PACKAGE STRUCTURE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20220153573
Publication date
May 19, 2022
Murata Manufacturing Co., Ltd.
Yoshiyuki Higuchi
B81 - MICRO-STRUCTURAL TECHNOLOGY