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PERFORMING OPERATIONS TRANSPORTING
B81
Micro-structural technology
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICRO-STRUCTURAL DEVICES OR SYSTEMS
B81C1/00
Manufacture or treatment of devices or systems in or on a substrate
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B81C1/0046
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Patents Grants
last 30 patents
Information
Patent Grant
Micro-nano incremental mechanical surface treatment method
Patent number
12,168,604
Issue date
Dec 17, 2024
Nanjing University of Aeronautics and Astronautics
Hongyu Wei
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Imprinting apparatus including silicon master with a plurality of n...
Patent number
12,157,252
Issue date
Dec 3, 2024
Illumina, Inc.
Alexandre Richez
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a sensor device and moulding support structure
Patent number
12,024,418
Issue date
Jul 2, 2024
Melexis Technologies NV
Appolonius Jacobus Van Der Wiel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
Patent number
11,993,512
Issue date
May 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yang-Che Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Flattening apparatus, article manufacturing method, flattening meth...
Patent number
11,915,948
Issue date
Feb 27, 2024
Canon Kabushiki Kaisha
Tomohiko Yoshida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Imprint lithography stamp method of making and using the same
Patent number
11,860,535
Issue date
Jan 2, 2024
Koninklijke Philips N.V.
Marcus Antonius Verschuuren
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pattern forming method, imprint apparatus, and article manufacturin...
Patent number
11,840,010
Issue date
Dec 12, 2023
Canon Kabushiki Kaisha
Ryohei Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Liquid crystal diffractive devices with nano-scale pattern and meth...
Patent number
11,693,282
Issue date
Jul 4, 2023
Magic Leap, Inc.
Chulwoo Oh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing a sensor device and moulding support structure
Patent number
11,655,142
Issue date
May 23, 2023
Melexis Technologies NV
Appolonius Jacobus Van Der Wiel
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method and system for fabricating glass-based nanostructures on lar...
Patent number
11,579,523
Issue date
Feb 14, 2023
Ecole Polytechnique Federale de Lausanne (EPFL)
Fabien Sorin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Curable composition for imprinting, method of manufacturing cured p...
Patent number
11,435,663
Issue date
Sep 6, 2022
FUJIFILM Corporation
Yuichiro Goto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Curable composition for imprinting, method of manufacturing cured p...
Patent number
11,402,750
Issue date
Aug 2, 2022
FUJIFILM Corporation
Yuichiro Goto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanoimprint lithography system and method for adjusting a radiation...
Patent number
11,366,384
Issue date
Jun 21, 2022
Canon Kabushiki Kaisha
Anshuman Cherala
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Dual micro-electro mechanical system and manufacturing method thereof
Patent number
11,274,037
Issue date
Mar 15, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
Yang-Che Chen
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
System and method for qualifying a multi-layered optical stack for...
Patent number
11,199,719
Issue date
Dec 14, 2021
Magic Leap, Inc.
Huihang Dong
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for forming a MEMS device layer on an active device layer a...
Patent number
11,180,366
Issue date
Nov 23, 2021
General Electric Company
Marco Francesco Aimi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Nanostructures fabricated by metal asisted chemical etching for ant...
Patent number
11,172,680
Issue date
Nov 16, 2021
International Business Machines Corporation
Stacey M. Gifford
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of depositing electrodes and electrolyte on microelectromech...
Patent number
11,169,110
Issue date
Nov 9, 2021
Honeywell International Inc.
Keith Francis Edwin Pratt
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Imprint lithography stamp method of making and using the same
Patent number
11,163,230
Issue date
Nov 2, 2021
Koninklijke Philips N.V.
Marcus Antonius Verschuuren
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Mobile terminal shell for enhancing antenna slot mechanical propert...
Patent number
11,064,061
Issue date
Jul 13, 2021
GUANGDONG OPPO MOBILE TELECOMMUNICATIONS CORP., LTD.
Yuanqing Zeng
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Methods for multiple-patterning nanosphere lithography for fabricat...
Patent number
11,037,794
Issue date
Jun 15, 2021
The Regents of the University of California
Xiaobin Xu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method of manufacturing partially freestanding two-dimensional crys...
Patent number
11,033,862
Issue date
Jun 15, 2021
Koninklijke Philips N.V.
Kamal Asadi
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing pattern laminate, method for producing reversa...
Patent number
11,029,597
Issue date
Jun 8, 2021
FUJIFILM Corporation
Yuichiro Goto
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Systems and methods for fabricating 3D soft microstructures
Patent number
11,014,804
Issue date
May 25, 2021
President and Fellows of Harvard College
Nicholas W. Bartlett
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Fabrication and self-aligned local functionalization of nanocups an...
Patent number
11,002,908
Issue date
May 11, 2021
California Institute of Technology
Chieh-feng Chang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Imprint apparatus and method of manufacturing article
Patent number
10,998,190
Issue date
May 4, 2021
Canon Kabushiki Kaisha
Kenji Yoshida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for producing structured surfaces
Patent number
10,941,035
Issue date
Mar 9, 2021
Leibniz-Institut für Neue Materialien gemeinnützige GmbH
Johannes H. M. Maurer
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Three dimensional microstructures and fabrication process
Patent number
10,730,748
Issue date
Aug 4, 2020
The Regents of the University of Michigan
Khalil Najafi
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Two-dimensional micro- and nano-pattern, methods for forming the sa...
Patent number
10,661,273
Issue date
May 26, 2020
The Regents of the University of Michigan
Jong G. Ok
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Pattern formation method
Patent number
10,553,443
Issue date
Feb 4, 2020
TOSHIBA MEMORY CORPORATION
Tomoaki Sawabe
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Packaging of microelectromechanical system devices
Publication number
20240391762
Publication date
Nov 28, 2024
Teknologian Tutkimuskeskus VTT Oy
Jae-Wung Lee
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DUAL MICRO-ELECTRO MECHANICAL SYSTEM AND MANUFACTURING METHOD THEREOF
Publication number
20240262681
Publication date
Aug 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yang-Che CHEN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A SENSOR DEVICE AND MOULDING SUPPORT STRUCTURE
Publication number
20230249962
Publication date
Aug 10, 2023
MELEXIS TECHNOLOGIES NV
Appolonius Jacobus VAN DER WIEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR FORMING MICRO CHANNELS IN MOLDED COMPONENTS AND AN ASSOC...
Publication number
20220306459
Publication date
Sep 29, 2022
Tessy Plastics Corporation
Robert Benson
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PROGRESSIVE METALLIC SURFACE MICRO-NANO MODIFICATION METHOD
Publication number
20220063992
Publication date
Mar 3, 2022
NANJING UNIVERSITY OF AERONAUTICS AND ASTRONAUTICS
Hongyu WEI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPRINT LITHOGRAPHY STAMP METHOD OF MAKING AND USING THE SAME
Publication number
20220043341
Publication date
Feb 10, 2022
Koninklijke Philips N.V.
MARCUS ANTONIUS VERSCHUUREN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PATTERN FORMING METHOD, IMPRINT APPARATUS, AND ARTICLE MANUFACTURIN...
Publication number
20210394429
Publication date
Dec 23, 2021
Canon Kabushiki Kaisha
Ryohei Suzuki
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LIQUID CRYSTAL DIFFRACTIVE DEVICES WITH NANO-SCALE PATTERN AND METH...
Publication number
20210341775
Publication date
Nov 4, 2021
Magic Leap, Inc.
Chulwoo Oh
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEM AND METHOD FOR QUALIFYING A MULTI-LAYERED OPTICAL STACK FOR...
Publication number
20210215943
Publication date
Jul 15, 2021
Magic Leap, Inc.
Huihang DONG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Nanoimprint Lithography System and Method for Adjusting a Radiation...
Publication number
20210191256
Publication date
Jun 24, 2021
Canon Kabushiki Kaisha
Anshuman Cherala
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
NANOIMPRINTING BY USING SOFT MOLD AND RESIST SPREADING
Publication number
20210101316
Publication date
Apr 8, 2021
National Cheng Kung University
Yung-Chun LEE
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FLATTENING APPARATUS, ARTICLE MANUFACTURING METHOD, FLATTENING METH...
Publication number
20210090915
Publication date
Mar 25, 2021
Canon Kabushiki Kaisha
Tomohiko Yoshida
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPRINTING METHOD, PRE-PROCESSING APPARATUS, SUBSTRATE FOR IMPRINTI...
Publication number
20210061649
Publication date
Mar 4, 2021
Canon Kabushiki Kaisha
Hiroshi SATO
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method and System for Fabricating Glass-Based Nanostructures on Lar...
Publication number
20200257194
Publication date
Aug 13, 2020
ECOLE POLYTECHNIQUE FEDERALE DE LAUSANNE (EPFL)
Fabien Sorin
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF MANUFACTURING A SENSOR DEVICE AND MOULDING SUPPORT STRUCTURE
Publication number
20200231432
Publication date
Jul 23, 2020
MELEXIS TECHNOLOGIES NV
Appolonius Jacobus VAN DER WIEL
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Three Dimensional Microstructures And Fabrication Process
Publication number
20200216311
Publication date
Jul 9, 2020
The Regents of the University of Michigan
Khalil NAJAFI
B22 - CASTING POWDER METALLURGY
Information
Patent Application
MOBILE TERMINAL SHELL, PREPARATION METHOD AND MOBILE TERMINAL
Publication number
20200128117
Publication date
Apr 23, 2020
GUANGDONG OPPO MOBILE TELECOMMUNICATIONS CORP., LTD.
Yuanqing ZENG
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
SYSTEMS AND METHODS FOR FABRICATING 3D SOFT MICROSTRUCTURES
Publication number
20200079643
Publication date
Mar 12, 2020
President and Fellows of Harvard College
Nicholas W. Bartlett
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MASTER MOLD FOR PATTERN TRANSFER
Publication number
20200073234
Publication date
Mar 5, 2020
University of Massachusetts
James J. Watkins
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Method For Producing Structured Surfaces
Publication number
20180251370
Publication date
Sep 6, 2018
LEIBNIZ-INSTITUT FÜR NEUE MATERIALIEN GEMEINNÜTZIGE GMBH
Johannes H.M. MAURER
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
TRANSFER PRINTING USING SHAPE MEMORY POLYMERS
Publication number
20180100046
Publication date
Apr 12, 2018
Seok Kim
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
IMPRINT TEMPLATE, DETECTION METHOD AND DETECTION DEVICE
Publication number
20180021987
Publication date
Jan 25, 2018
BOE TECHNOLOGY GROUP CO., LTD.
Feng GUAN
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR CREATING PATTERNS
Publication number
20180001582
Publication date
Jan 4, 2018
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Nicolas POSSEME
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD FOR OBTAINING PATTERNS IN A LAYER
Publication number
20170372904
Publication date
Dec 28, 2017
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Stephan LANDIS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
FABRICATION OF THREE-DIMENSIONAL STRUCTURES USING REFLOWED MOLDING
Publication number
20170341932
Publication date
Nov 30, 2017
HONEYWELL INTERNATIONAL INC.
Grant Lodden
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHOD OF IMPRINTING TO CORRECT FOR A DISTORTION WITHIN AN IMPRINT...
Publication number
20170334126
Publication date
Nov 23, 2017
Canon Kabushiki Kaisha
Anshuman Cherala
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Imprinting Metallic Substrates at Hot Working Temperatures
Publication number
20170151598
Publication date
Jun 1, 2017
Agency for Science, Technology and Research
Xue LI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
Release Strategies for Making Transferable Semiconductor Structures...
Publication number
20140361409
Publication date
Dec 11, 2014
THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
John A. ROGERS
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
PATTERN TONE REVERSAL
Publication number
20140242341
Publication date
Aug 28, 2014
HGST NETHERLANDS B.V.
Thomas Albrecht
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MICROFLUIDIC DEVICE AND MICROTUBE THEREOF
Publication number
20140044900
Publication date
Feb 13, 2014
Integrated Sensing Systems, Inc.
Douglas Ray Sparks
B81 - MICRO-STRUCTURAL TECHNOLOGY