3461004

Information

• Patent Grant
• 3461004

• References
• Source

• Patent Number

  3,461,004

• Date Filed

  Not available

• Date Issued

  Tuesday, August 12, 1969
  55 years ago

• CPC

  • H01L21/02381 - Silicon, silicon germanium, germanium
  • H01L21/02395 - Arsenides
  • H01L21/02463 - Arsenides
  • H01L21/02543 - Phosphides
  • H01L21/02546 - Arsenides
  • H01L21/0262 - Reduction or decomposition of gaseous compounds
  • Y10S148/052 - Face to face deposition
  • Y10S148/056 - Gallium arsenide
  • Y10S148/065 - Gp III-V generic compounds-processing
  • Y10S148/119 - Phosphides of gallium or indium
  • Y10S438/935 - Gas flow control

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 252 - Compositions
  • 257 - Active solid-state devices
  • 427 - Coating processes
  • 438 - Semiconductor device manufacturing: process