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3500139
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Information
Patent Grant
3500139
References
Source
Patent Number
3,500,139
Date Filed
Not available
Date Issued
Tuesday, March 10, 1970
54 years ago
CPC
H03F3/347 - in integrated circuits
H01L21/76 - Making of isolation regions between components
H01L21/76224 - using trench refilling with dielectric materials
H01L21/763 - Polycristalline semiconductor regions
H01L27/0647 - Bipolar transistors in combination with diodes, or capacitors, or resistors
Y10S148/036 - Diffusion, nonselective
Y10S148/043 - Dual dielectric
Y10S148/049 - Equivalence and options
Y10S148/05 - Etch and refill
Y10S148/085 - Isolated-integrated
Y10S148/122 - Polycrystalline
US Classifications
257 - Active solid-state devices
148 - Metal treatment
438 - Semiconductor device manufacturing: process
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