3530343

Information

• Patent Grant
• 3530343

• References
• Source

• Patent Number

  3,530,343

• Date Filed

  Not available

• Date Issued

  Tuesday, September 22, 1970
  54 years ago

• CPC

  • H01L29/0688 - characterised by the particular shape of a junction between semiconductor regions
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/32 - using masks
  • H01L21/76221 - with a plurality of successive local oxidation steps
  • H01L27/00 - Devices consisting of a plurality of semiconductor or other solid state components formed in or on a common substrate
  • H01L29/00 - Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier
  • Y10S148/031 - Diffusion at an edge
  • Y10S148/037 - Diffusion-deposition
  • Y10S148/043 - Dual dielectric
  • Y10S148/049 - Equivalence and options
  • Y10S148/051 - Etching
  • Y10S148/117 - Oxidation, selective
  • Y10S148/145 - Shaped junctions

• US Classifications

  • 257 - Active solid-state devices
  • 148 - Metal treatment
  • 438 - Semiconductor device manufacturing: process