3650042

Information

• Patent Grant
• 3650042

• References
• Source

• Patent Number

  3,650,042

• Date Filed

  Not available

• Date Issued

  Tuesday, March 21, 1972
  52 years ago

• CPC

  • H01L21/67173 - in-line arrangement
  • C23C14/56 - Apparatus specially adapted for continuous coating Arrangements for maintaining the vacuum
  • C23C16/54 - Apparatus specially adapted for continuous coating
  • C23F1/00 - Etching metallic material by chemical means
  • C30B31/106 - Continuous processes
  • C30B31/16 - Feed and outlet means for the gases Modifying the flow of the gases
  • H01L21/67109 - mainly by convection
  • H01L21/6719 - characterized by the construction of the processing chambers

• US Classifications

  • 034 - Drying and gas or vapor contact with solids
  • 068 - Textiles: fluid treating apparatus
  • 118 - Coating apparatus