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3716404
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Information
Patent Grant
3716404
References
Source
Patent Number
3,716,404
Date Filed
Not available
Date Issued
Tuesday, February 13, 1973
52 years ago
CPC
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02395 - Arsenides
H01L21/02546 - Arsenides
H01L21/02576 - N-type
H01L21/0262 - Reduction or decomposition of gaseous compounds
H01L21/02631 - Physical deposition at reduced pressure
Y10S148/002 - Amphoteric doping
Y10S148/065 - Gp III-V generic compounds-processing
Y10S438/925 - Fluid growth doping control
US Classifications
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
148 - Metal treatment
257 - Active solid-state devices
438 - Semiconductor device manufacturing: process
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