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3798084
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Information
Patent Grant
3798084
References
Source
Patent Number
3,798,084
Date Filed
Not available
Date Issued
Tuesday, March 19, 1974
51 years ago
CPC
H01L21/223 - using diffusion into or out of a solid from or into a gaseous phase
H01L21/033 - comprising inorganic layers
H01L21/2225 - Diffusion sources
Y10S148/04 - Dopants, special
Y10S148/041 - Doping control in crystal growth
Y10S148/151 - Simultaneous diffusion
Y10S148/167 - Two diffusions in one hole
US Classifications
438 - Semiconductor device manufacturing: process
148 - Metal treatment
257 - Active solid-state devices
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