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3857090
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Information
Patent Grant
3857090
References
Source
Patent Number
3,857,090
Date Filed
Not available
Date Issued
Tuesday, December 24, 1974
51 years ago
CPC
H01J37/3045 - Object or beam position registration
G01R19/08 - Measuring current density
G01R33/028 - Electrodynamic magnetometers
H01J2237/24507 - Intensity, dose or other characteristics of particle beams or electromagnetic radiation
H01J2237/30472 - Controlling the beam
H01J2237/31749 - Focused ion beam
US Classifications
324 - Electricity: measuring and testing
250 - Radiant energy
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