3885061

Information

• Patent Grant
• 3885061

• References
• Source

• Patent Number

  3,885,061

• Date Filed

  Not available

• Date Issued

  Tuesday, May 20, 1975
  49 years ago

• CPC

  • H01L21/0242 - Crystalline insulating materials
  • H01L21/02532 - Silicon, silicon germanium, germanium
  • H01L21/02576 - N-type
  • H01L21/02579 - P-type
  • H01L21/0262 - Reduction or decomposition of gaseous compounds
  • Y10S148/007 - Autodoping
  • Y10S148/025 - Deposition multi-step
  • Y10S148/129 - Pulse doping
  • Y10S148/15 - Silicon on sapphire SOS

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 148 - Metal treatment
  • 257 - Active solid-state devices
  • 438 - Semiconductor device manufacturing: process