Patent Grant
10453896
This disclosure relates generally to electronic memory, for example, the disclosure describes a resistive switching device configured according to a NAND logical arrangement and having cell area as small as 4F2.
A recent innovation within the field of integrated circuit technology is resistive memory. While much of resistive memory technology is in the development stage, various technological concepts for resistive memory have been demonstrated by the assignee of the present invention and are in one or more stages of verification to prove or disprove associated theory(ies). Even so, resistive memory technology promises to hold substantial advantages over competing technologies in the semiconductor electronics industry.
Resistive random access memory (RRAM) is one example of resistive memory. The inventors of the present disclosure believe RRAM has the potential to be a high density non-volatile information storage technology. Generally, RRAM stores information by controllably switching among distinct resistive states. A single resistive memory can store a single bit of information, or multiple bits, and can be configured as a one-time programmable cell, or a programmable and erasable device, as various memory models demonstrated by the assignee provide.
Various theories have been proposed by the inventors to explain the phenomenon of resistive switching. In one such theory, resistive switching is a result of formation of a conductive structure within an otherwise electrically insulating medium. The conductive structure could be formed from ions, atoms that can be ionized under appropriate circumstances (e.g., a suitable electric field), or other charge carrying mechanisms. In other such theories, field-assisted diffusion of atoms can occur in response to a suitable electric potential applied to a resistive memory cell. In still other theories proposed by the inventors, formation of the conductive filament can occur in response to joule heating and electrochemical processes in binary oxides (e.g., NiO, TiO2, or the like), or by a redox process for ionic conductors including oxides, chalcogenides, polymers, and so on.
The inventors expect resistive devices based on an electrode, insulator, electrode model to exhibit good endurance and life cycle. Further, the inventors expect such devices to have high on-chip densities. Accordingly, resistive elements may be viable alternatives to metal-oxide semiconductor (MOS) transistors employed for digital information storage. The inventors of the subject patent application, for instance, believe that models of resistive-switching memory devices provide some potential technical advantages over non-volatile Flash MOS devices.
In light of the above, the inventors endeavor to make further improvements in memory technology, and resistive memory.
The following presents a simplified summary of the specification in order to provide a basic understanding of some aspects of the specification. This summary is not an extensive overview of the specification. It is intended to neither identify key or critical elements of the specification nor delineate the scope of any particular embodiments of the specification, or any scope of the claims. Its purpose is to present some concepts of the specification in a simplified form as a prelude to the more detailed description that is presented in this disclosure.
In some disclosed embodiments, there is provided a logical NAND memory architecture for two-terminal resistive switching memory. The logical NAND architecture (also referred to as a NAND array in the present disclosure) can comprise an array of multiple memory cells, such as an 8-cell array or other suitable sized array. In various embodiments, individual memory cells of the array can comprise memory cells having one transistor in parallel with one resistive memory device. Further, respective memory cells of disclosed memory architectures can be formed consuming an area as small as 4F2, providing great scaling potential with the emergence of advanced lithographic technologies (e.g., below 28 nm resolution). In some embodiments, two-terminal resistive switching memory can be formed from a vertical or substantially vertical stack of components overlying a substrate. In at least some such embodiments, adjacent memory cells can be formed in different back-end-of-line (BEOL) layers of an integrated circuit. In other embodiments, two-terminal resistive switching memory can be formed from a horizontal or substantially horizontal stack of components. In the latter embodiments, adjacent memory cells can be formed in a common BEOL layer(s), permitting other devices or other memory cells to be formed in other BEOL layers at least in part above or below the adjacent memory cells.
In an embodiment, there is disclosed a method for fabricating a memory device. The method can comprise providing a substrate having a set of transistors formed therein, and forming a set of metal lines in a layer over the substrate. Further, the method can comprise forming a two-terminal switching device in a second layer over the first layer and connected at a first terminal to one of the set of metal lines, and forming a set of second metal lines in a third layer over the second layer, wherein one of the second metal lines is connected to a second terminal of the two-terminal switching device. Further to the above, the method can comprise forming a second two-terminal switching device in a fourth layer over the third layer and at least in part offset about 1F distance from the two-terminal switching device, and wherein the second two-terminal switching device is connected at one end to the one of the second metal lines. Moreover, the method can comprise forming a set of third metal lines in a fifth layer over the fourth layer, with one of the third metal lines connected at a second end of the second two-terminal switching device.
In additional embodiments, there is provided a method of fabricating a memory device. The method can comprise forming a set of bottom electrodes in a back-end-of-line (BEOL) layer of an integrated circuit device, at least in part overlying one or more transistors. The method can further comprise forming a switching layer in electrical contact with a bottom electrode of the set of bottom electrodes, wherein the switching layer is at least in part within the BEOL layer of the integrated circuit device. Furthermore, the method can comprise forming a top electrode in electrical contact with the switching layer and at least in part within the BEOL layer, wherein the bottom electrode, the switching layer and the top electrode form a memory cell having a width approximately equal to two times a minimum feature size employed for the integrated circuit device.
Further embodiments provide a resistive memory array formed in a logical NAND arrangement. The resistive memory array can comprise a set of multiple resistive switching memory cells connected respectively in series from respective first terminals to respective second terminals. Further, respective memory cells of the set of multiple resistive switching memory cells can be connected in parallel with a transistor of a set of transistors, forming a parallel 1T1R arrangement for each memory cell. In addition to the foregoing, a projected distance onto a substrate surface between adjacent memory cells of the set of multiple resistive switching memory cells can be about two times a minimum feature size of fabrication employed to form the set of multiple resistive switching memory cells.
In yet another embodiment, the present disclosure provides a memory array comprising two-terminal resistive switching memory. The memory array can comprise multiple two-terminal resistive switching memory cells formed at least in part in a common BEOL layer of an integrated circuit, and a set of transistors formed within a substrate, wherein transistors of the set of transistors are respectively connected electrically in parallel to memory cells of the multiple two-terminal resistive switching memory cells. Further, a distance between a first of the multiple two-terminal resistive switching memory cells and a second of the two-terminal resistive switching memory cells is no greater than about two times a minimum feature size of the integrated circuit. Moreover, the multiple two-terminal resistive switching memory cells can be formed from a layer of materials stacked in a direction that is non-perpendicular to a top surface of the substrate.
In one or more additional embodiments, disclosed is a method for fabricating an array of memory devices. The method can comprise providing a substrate having an array of buried wordline transistors formed in the substrate, and having a dielectric layer formed over the substrate, wherein the transistor is a member of the array of buried wordline transistors and forming trenches through the dielectric layer exposing source and drain terminals of the transistors. Further, the method can comprise filling the trenches with conductive material to form bottom electrodes that electrically contact source or drain terminals of the transistors, etching back and smoothing a top surface of the conductive material and dielectric layer and forming a hardmask over the top surface of the conductive material and dielectric layer. Moreover, the method can comprise forming a second dielectric over the hardmask and etching second trenches through the second dielectric offset from the trenches, forming a switching layer over exposed surfaces of the second trenches and depositing second conductive material over the switching layer and filling the second trenches with the second conductive material. Further, the method can comprise removing second conductive material and second dielectric material to expose the hardmask to form top electrodes within the second trenches, forming a third dielectric over the bottom electrode, switching layer and top electrodes, forming third trenches in the third dielectric and filling the third trenches with a fourth conductive material. In addition to the foregoing, the method can comprise smoothing a top surface of the fourth conductive material and the third dielectric to form conductive contacts within the third trenches, forming vertical contacts connected respectively at a first end and a second end of the array of transistors and forming a first metal line connected to a first of the vertical contacts and a second metal line connected to a second of the vertical contacts.
The following description and the drawings set forth certain illustrative aspects of the specification. These aspects are indicative, however, of but a few of the various ways in which the principles of the specification may be employed. Other advantages and novel features of the specification will become apparent from the following detailed description of the specification when considered in conjunction with the drawings.
Various aspects or features of this disclosure are described with reference to the drawings, wherein like reference numerals are used to refer to like elements throughout. In this specification, numerous specific details are set forth in order to provide a thorough understanding of this disclosure. It should be understood, however, that certain aspects of the subject disclosure may be practiced without these specific details, or with other methods, components, materials, etc. In other instances, well-known structures and devices are shown in block diagram form to facilitate describing the subject disclosure;
This disclosure relates to resistive-switching two-terminal memory devices and one or more process(es) for manufacturing such device(s). Resistive-switching two-terminal memory cells (also referred to as resistive-switching memory cells or resistive-switching memory), as utilized herein, comprise circuit components having two conductive contacts with an active region between the two conductive contacts. The active region of the two-terminal memory device, in the context of resistive-switching memory, exhibits a plurality of stable or semi-stable resistive states, each resistive state having a distinct electrical resistance. Moreover, respective ones of the plurality of states can be formed or activated in response to a suitable electrical signal applied at the two conductive contacts. The suitable electrical signal can be a voltage value, a current value, a voltage or current polarity, or the like, or a suitable combination thereof. Examples of a resistive switching two-terminal memory device, though not exhaustive, can include a resistive random access memory (RRAM), a phase change RAM (PCRAM) and a magnetic RAM (MRAM). Non-volatile resistive switching memory, when formed into an array, can be activated or deactivated respectively by a suitable switching device or activation device (e.g., a transistor switch in the context of a one transistor, one resistor (1T1R) arrangement), or multiple resistive-switching memory cells can collectively be activated or deactivated by a single switching device (e.g., multiple resistive memory cells can be activated by a single transistor switch in a one transistor, many resistor (1TnR) arrangement).
One class of resistive-switching two-terminal memory devices is a filamentary based device, having multiple filamentary states each with measurably distinct electrical resistances. Composition of filamentary-based devices can vary per device, with different components selected to achieve desired characteristics (e.g., volatility/non-volatility, on/off current ratio, switching time, read time, memory durability, program/erase cycle, and so on).
Embodiments of the subject disclosure can provide a filamentary-based memory cell. In some embodiments, the filamentary-based memory cell includes a non-volatile memory device, whereas other embodiments provide a volatile selector device, either alone or in electrical series with the non-volatile memory device. In further embodiments, both the volatile selector device and the non-volatile memory device can be filamentary-based devices, though the subject disclosure is not limited to these embodiments.
One example of a filamentary-based device can comprise: one or more conductive layers (e.g., comprising, e.g., TiN, TaN, TiW, metal compounds), an optional interface layer (e.g., doped p-type (or n-type) silicon (Si) bearing layer (e.g., p-type or n-type polysilicon, p-type or n-type polycrystalline SiGe, etc., or a combination of the foregoing)), a resistive switching layer (RSL) and an active metal layer capable of being ionized. Under suitable conditions, the active metal layer can provide filament forming ions to the RSL. In such embodiments, a conductive filament (e.g., formed by the ions) can facilitate electrical conductivity through at least a subset of the RSL, and a resistance of the filament-based device can be determined by a tunneling resistance (or, e.g., ohmic contact resistance) between the filament and the conductive layer. To reverse electrical conductivity resulting from the conductive filament, whether for the volatile selector device or the non-volatile memory device (with the exception of one-time programmable memory devices), the filament can be deformed. In some embodiments, deformation of the filament can comprise the particles (e.g., metal ions)—trapped within the defect locations—becoming neutral particles (e.g., metal atoms) in absence of the bias condition that have a high electrical resistance. In other embodiments, deformation of the filament can comprise dispersion (or partial dispersion) of the particles within the RSL, breaking a conductive electrical path provided by the filament in response to the bias condition. In still other embodiments, deformation of the filament can be in response to another suitable physical mechanism, or a suitable combination of the foregoing.
Generally, deformation of a conductive filament results from a change in the bias conditions to a second set of bias conditions. The second set of bias conditions can vary for different devices. For instance, deformation of a conductive filament formed within the volatile selector device can be implemented by reducing an applied bias below a formation magnitude (or small range of magnitudes, such as a few tens of a volt) associated with filament formation within the volatile selector device. Depending on the embodiment, a conductive filament can be created within a volatile selector device in response to a positive bias (e.g., forward bias) or in response to a negative bias (e.g., reverse bias), and deformation of the filament can occur in response to a suitable lower-magnitude positive bias or a suitable lower-magnitude negative bias, respectively. See U.S. patent application Ser. No. 14/588,185 filed Dec. 31, 2014 commonly owned by the assignee of the present application, and hereby incorporated by reference herein in its entirety and for all purposes. In contrast, deformation of a conductive filament formed within the non-volatile memory device can be implemented by providing a suitable erase bias (e.g., a reverse bias), having opposite polarity from a program bias (e.g., forward bias) utilized to form the conductive filament within the non-volatile memory device.
In various embodiments of a memory cell of the present disclosure, a conductive layer may include a metal, a doped semiconductor, titanium, titanium nitride (TiN), tantalum nitride (TaN), tungsten (W) or other suitable electrical conductor. The RSL (which can also be referred to in the art as a resistive switching media (RSM)) can comprise, e.g., an undoped amorphous Si layer, a semiconductor layer having intrinsic characteristics, a silicon nitride (e.g. SiN, Si3N4, SiNX where x is a suitable positive number, etc.), a Si sub-oxide (e.g., SiOy wherein y has a value between 0.1 and 2), a Si sub-nitride (e.g., SiNy wherein y has a value between 0.1 and 2), an Al sub-oxide, an Al sub-nitride, and so forth. Other examples of materials suitable for the RSL could include SiXGeYOZ (where X, Y and Z are respective suitable positive numbers), a silicon oxide (e.g., SiON, where N is a suitable positive number), a silicon oxynitride, an undoped amorphous Si (a-Si), amorphous SiGe (a-SiGe), TaOB (where B is a suitable positive number), HfOC (where C is a suitable positive number), TiOD (where D is a suitable number), Al2OE (where E is a suitable positive number) or other suitable oxides, a metal nitride (e.g., AlN, AlNF where F is a suitable positive number), a non-stoichiometric silicon compound, and so forth, or a suitable combination thereof. In various embodiments, the RSL includes a number of material voids or defects to trap or hold particles in place, in the absence of an external program stimulus causing the particles to drift within the RSL and form the conductive filament. For the non-volatile memory device then, the particles can remain trapped in the absence of the external program stimulus, requiring a suitable reverse bias (e.g., a negative polarity erase stimulus) to drive the particles out of the voids/defects, or otherwise break continuity of the conductive filament, thereby deforming the conductive filament.
The contact material layer can be comprised of any suitable conductor, such as a conductive metal, a suitably doped semiconductor, or the like. Where utilized, the contact material layer can be employed to provide good ohmic contact between the RSL and a metal wiring layer of an associated memory architecture. In some embodiments, the contact material layer can be removed and the RSL can be in physical contact with a metal wiring layer. Suitable metal wiring layers can include copper, aluminum, tungsten, platinum, gold, silver, or other suitable metals, suitable metal alloys, or combinations of the foregoing. In further embodiments, a diffusion mitigation layer or adhesion layer can be provided between the RSL and the metal wiring layer (or between the RSL and the contact material layer).
Examples of the active metal layer can include, among others: silver (Ag), gold (Au), titanium (Ti), titanium-nitride (TiN) or other suitable compounds of titanium, nickel (Ni), copper (Cu), aluminum (Al), chromium (Cr), tantalum (Ta), iron (Fe), manganese (Mn), tungsten (W), vanadium (V), cobalt (Co), platinum (Pt), and palladium (Pd). Other suitable conductive materials, as well as compounds or combinations (e.g., alloys, etc.) of the foregoing or similar materials can be employed for the active metal layer in some aspects of the subject disclosure. In some embodiments, a thin layer of barrier material composed of Ti, TiN, or the like, may be disposed between the RSL and the active metal layer (e.g., Ag, Al, and so on). Details pertaining to additional embodiments of the subject disclosure similar to the foregoing example(s) can be found in the following U.S. patent applications that are licensed to the assignee of the present application for patent: application Ser. No. 11/875,541 filed Oct. 19, 2007, application Ser. No. 12/575,921 filed Oct. 8, 2009, and the others cited herein, each of which are incorporated by reference herein in their respective entireties and for all purposes.
In response to a suitable program stimulus (or set of stimuli) a conductive path or a filament of varying width and length can be formed within a relatively high resistive portion of a non-volatile memory device (e.g., the RSL). This causes a memory cell associated with the non-volatile memory device to switch from a relatively high resistive state, to one or more relatively low resistive states. In some resistive-switching devices, an erase process can be implemented to deform the conductive filament, at least in part, causing the memory cell to return to the high resistive state from the low resistive state(s), as mentioned previously. This change of state, in the context of memory, can be associated with respective states of a binary bit or multiple binary bits. For an array of multiple memory cells, a word(s), byte(s), page(s), block(s), etc., of memory cells can be programmed or erased to represent zeroes or ones of binary information, and by retaining those states over time in effect storing the binary information. In various embodiments, multi-level information (e.g., multiple bits) may be stored in respective memory cells.
In some embodiments, the active metal layer can comprise a metal nitride selected from the group consisting of: TiNx, TaNx, AlNx, CuNx, WNx and AgNx, where x is a positive number. In other embodiments, the active metal layer can comprise a metal oxide selected from the group consisting of: TiOx, TaOx, AlOx, CuOx, WOx and AgOx. In other embodiments, the active metal layer can comprise a metal oxi-nitride selected from the group consisting of: TiOaNb, AlOaNb, CuOaNb, WOaNb and AgOaNb, where a and b are positive numbers. In some embodiments, the switching layer can comprise a material selected from the group consisting of: SiOy, AlNy, TiOy, TaOy, AlOy, CuOy, TiNx, TiNy, TaNx, TaNy, SiOx, SiNy, AlNx, CuNx, CuNy, AgNx, AgNy, TiOx, TaOx, AlOx, CuOx, AgOx, and AgOy, where x and y are positive numbers, and y is larger than x. Various combinations of the above are envisioned and contemplated within the scope of embodiments of the present invention.
In an embodiment, the active metal layer can comprise a metal nitride: MNx, e.g. AgNx, TiNx, AlNx, and the switching layer can comprise a metal nitride: MNy, e.g. AgNy, TiNy, AlNy, where y and x are positive numbers, and in some cases y is larger than x. In another embodiment, the active metal layer can comprise a metal oxide: MOx, e.g. AgOx, TiOx, AlOx, and the switching layer can comprise a metal oxide: MOy. e.g. AgOy, TiOy, AlOy, where y and x are positive numbers, and in some cases y is larger than x. In still other embodiments, the metal compound of the active metal layer is selected from a first group consisting of: MNx (e.g., AgNx, TiNx, AlNx), and the switching layer comprises MOy (e.g. AgOx, TiOx, AlOy) or SiOy, where x and y are typically non-stoichiometric values.
It should be appreciated that various embodiments herein may utilize a variety of memory cell technologies, having different physical properties. For instance, different resistive-switching memory cell technologies can have different discrete programmable resistances, different associated program/erase voltages, as well as other differentiating characteristics. For instance, various embodiments of the subject disclosure can employ a bipolar switching device that exhibits a first switching response (e.g., programming to one of a set of program states) to an electrical signal of a first polarity and a second switching response (e.g., erasing to an erase state) to the electrical signal having a second polarity. The bipolar switching device is contrasted, for instance, with a unipolar device that exhibits both the first switching response (e.g., programming) and the second switching response (e.g., erasing) in response to electrical signals having the same polarity and different magnitudes.
Where no specific memory cell technology or program/erase voltage is specified for the various aspects and embodiments herein, it is intended that such aspects and embodiments incorporate any suitable memory cell technology and be operated by program/erase voltages appropriate to that technology, as would be known by one of ordinary skill in the art or made known to one of ordinary skill by way of the context provided herein. It should be appreciated further that where substituting a different memory cell technology would require circuit modifications that would be known to one of ordinary skill in the art, or changes to operating signal levels that would be known to one of such skill, embodiments comprising the substituted memory cell technology(ies) or signal level changes are considered within the scope of the subject disclosure.
According to various disclosed embodiments, disclosed resistive switching devices can be fabricated consistent with foundry compatible processes. As utilized herein, foundry compatible refers to consistency with physical constraints associated with fabrication of a semiconductor-based device in a commercial semiconductor fabrication foundry, such as Taiwan Semiconductor Manufacturing Corporation, among others. Physical constraints include a thermal budget (e.g., maximum operating temperature) of a die, and of materials and metals constructed on the die prior to a given process step. For example, where a die comprises one or more metal layers or constructs, and viability of device models require the metal layers to maintain tight position tolerance, the thermal budget may be set by the softening temperature of the metal(s) to avoid loss of metal rigidity. Other physical constraints can include, CMOS, nMOS or pMOS fabrication constraints, where suitable, fabrication toolset limitations of a particular metallization scheme (e.g., etching/masking/grooving toolsets available for Aluminum, Copper, etc.), physical properties requiring special process handling (e.g., dispersion properties of Cu, oxidation properties of metals, semi-conducting materials, etc.), or the like, or other constraints of commercial foundry. Accordingly, the phrase “foundry compatible” implies consistency with process limitations of at least one commercial semiconductor fabrication foundry.
Thermal budget refers to an amount of thermal energy transferred to a wafer during a particular temperature operation. During the process of manufacturing the resistive memory, for example, there is a desire to not adversely affect complementary metal oxide semiconductor (CMOS) devices by application of excess heat, or the like. Accordingly, CMOS devices within a substrate can impose a thermal budget constraint to the manufacture of memory components upon a CMOS chip or substrate (e.g., by way of a backend of line fabrication process). Likewise, thermal budget constraints should be considered during the manufacture of a resistive memory device in an integrated circuit, for instance.
An integrated circuit (IC) foundry includes various equipment and processes that are leveraged in order to incorporate the resistive memory into the backend of line process. The inventors of the present disclosure are familiar with backend material compatibility issues associated there with. The one or more disclosed aspects can perform the process of fabricating the resistive memory device in a relatively simple manner compared to other resistive memory fabrication processes. For example, a common material(s), or common process step(s) can be employed in fabricating differently configured memory arrays (e.g., 1T1R, 1TnR) disclosed herein.
An integrated circuit (IC) foundry includes various equipment and processes that are leveraged in order to incorporate the resistive memory into the backend of line process. The inventors of the present disclosure are familiar with backend material compatibility issues associated there with. The one or more disclosed aspects can perform the process of fabricating the resistive memory device in a relatively simple manner compared to other resistive memory fabrication processes. For example, a common material(s), or common process step(s) can be employed in fabricating differently configured memory arrays (e.g., 1T1R, 1TnR) disclosed herein.
Further, one or more disclosed aspects can enable smaller die sizes and lower costs through one or more disclosed processes for monolithic integration of resistive memory onto a product of a frontend of line process (e.g., e.g., a MOS substrate, including CMOS, nMOS, or pMOS devices). Further, the fabrication of the resistive memory devices may be performed using standard IC foundry-compatible fabrication processes. Various embodiments can also be implemented without design changes after monolithic integration (e.g., over a CMOS device) to account for changes in parasitic structure. A parasitic structure is a portion of the device (e.g., memory device) that resembles in structure a different semiconductor device, which might cause the device to enter an unintended mode of operation. Further, in at least one disclosed embodiment, there is provided a product (e.g., a memory device) of a fabrication process that can comprise monolithic integration of resistive memory over a CMOS circuitry. Further, the fabrication process can comprise IC foundry-compatible processes in a further embodiment (e.g., new or different processes are not necessary, though in alternative embodiments future improvements to such processes should not be excluded from the scope of various aspects of the present disclosure). In addition, the disclosed aspects can be performed within a thermal budget of frontend of line devices.
In various embodiments of the present disclosure, there are provided architectures for fabricating arrays of two-terminal resistive switching memory cells having respective areas of 4F2, where F is a minimum feature size (or technology node) of a semiconductor fabrication process. As an example, for a 28 nm minimum feature size, disclosed architectures can provide resistive switching memory cells that respectively consume 4*(28 nm)2, or 3136 nm2 of silicon space. Moreover, the disclosed architectures are highly scalable at advanced technology nodes, yielding proportionately higher memory densities for smaller minimum feature sizes (e.g., 22 nm, 14 nm, 10 nm, 7 nm, etc.). In some embodiments, there are provided example arrays of memory cells organized logically in NAND architectures, where each memory cell comprises a two-terminal resistive switching memory cell electrically in parallel to a transistor. Furthermore, respective memory cells of the array can have area as small as 4F2, resulting in memory devices having high memory densities in addition to the excellent memory retention, longevity and high read and write times of resistive switching memory cells.
Referring now to the drawings,
NAND circuit 100 can comprise an array of memory cells 102, in which respective memory cells 103 of the array are arranged electrically in serial with other such memory cells 103. Respective memory cells 103, such as memory cell 103A, can be comprised of a parallel 1T-1R arrangement including a transistor 104 arranged electrically in parallel with a two-terminal resistive switching memory device 106. Transistor 104 can be a three-terminal semiconductor transistor of various suitable technologies. Examples can include a field effect transistor (FET) or various derivatives of the FET, such as carbon nanotube FET, metal oxide semiconductor FET (MOSFET), junction FET (JFET), organic FET (OFET), dual-gated FET, Fin-FET, etc., an insulated-gate bipolar transistor, a thin film transistor, and others. Two-terminal memory device 106 can comprise a non-volatile memory device in some aspects. Examples can include a resistive-switching device in at least one aspect. In other aspects, two-terminal memory device 106 can comprise a resistive random access memory, a ferromagnetic memory, a phase change memory, a magneto-resistive memory, an organic memory, a conductive bridging memory, or a suitable combination thereof. Respective memory cells 103 have a first shared node that connects a first transistor terminal of an associated transistor 104 (e.g., source, drain) with a corresponding first terminal of an associated two-terminal memory device 106. A second shared node connects a second transistor terminal (e.g., drain, source) of the associated transistor 104 with a corresponding second terminal of the associated two-terminal memory device 106.
As depicted, respective memory cells 103 of the array of memory cells 102 can be connected in series, in which a second shared node of one memory cell 103 is connected to a first shared node of a subsequent memory cell 103. In at least some disclosed embodiments, a first memory cell 103A of the array is connected at a first shared node to a bit line select transistor 108 (bit line select 108) and a last memory cell 103B of the array is connected at a second shared node to a source line select transistor 112 (source line select 112). Bit line select 108 can be activated or deactivated by a select line, and when activated, connects a signal applied to a bitline 110 to the first shared node of first memory cell 103A. Accordingly, the signal (e.g., voltage, current) applied to bitline 110 can be applied to array of memory cells 102 by activation of bit line select 108, and the signal can be isolated from array of memory cells 102 by deactivation of bit line select 108. Source line select 112 can be activated or deactivated by a source line. A second node of source line select 112 can be connected to ground, a second signal (e.g., a reverse bias, an erase bias, or the like) or a read circuit to facilitate various memory operations for array of memory cells 102.
In operation, a signal applied to array of memory cells 102 will propagate primarily through either the transistor 104 or two-terminal memory device 106, of respective memory cells 103 of the array of memory cells 102. In various embodiments, an activation resistance of transistors 104 can be substantially lower in magnitude than activation or deactivation resistances of two-terminal memory device 106. Accordingly, when a transistor 104 of a memory cell 103 is activated, the signal will primarily propagate through the activated transistor 104 and bypass the two-terminal memory device 106 of that memory cell 103. In further embodiments, a deactivation resistance of transistors 104 can be substantially higher in magnitude than the activation or deactivation resistances of two-terminal memory device 106, causing the signal to primarily propagate through the two-terminal memory device 106 of that memory cell 103. To apply an operation signal (e.g., read, write, erase signal, etc.) to a particular two-terminal memory device 106 of a particular memory cell 103A, the transistor 104 of the particular memory cell 103A is deactivated, directing the operational signal through the particular two-terminal memory device 106. Transistors 104 of other memory cells 103 can be activated, directing the operational signal through the transistors of these other memory cells 103. In such a manner the operational signal can be directed to a single memory cell 103 of array of memory cells 102.
Chip 200 can comprise a substrate 202 with buried wordlines 210 formed within the substrate 202. A channel region 204 can be formed with conductive regions 205 (illustrated in black) interspersed between semiconducting regions 203 of substrate 202. In various embodiments, conductive regions 205 can be formed by suitably doping subsets of substrate 202 to form the black conductive regions 205 to have higher electrical conductivity than substrate 202. In other embodiments, conductive regions 205 can be formed by deposition, implantation, etc., of any suitable conductive material (e.g., metal, metal compound, metal alloy, doped semiconducting material, and so forth) into substrate 202. In an embodiment(s), respective buried wordlines 210 and respective conductive regions 205 and semiconducting regions 203 can each have a width of F. Arranged as depicted, buried wordlines 210 can facilitate conductivity of an adjacent semiconducting region 203, and therefore conductivity between two conductive regions 205 adjacent the semiconducting region 203. As such, buried wordlines 210, semiconducting regions 203 and conductive regions 205 form an electrically serial array of transistors.
Overlying channel region 204 is a set of metal layers, including a first metal layer 214A (ML1), a second metal layer 214B (ML2), a third metal layer 214C (ML3), a fourth metal layer 214D (ML4) and a fifth metal layer 214E (ML5) (referred to collectively as metal layers 214A-214E). In some embodiments, metal layers 214A-214E can be backend-of-line metal layers, and can include more or fewer metal layers than depicted (e.g., for a chip comprising more or fewer memory cells per array); the scope of the present disclosure is not limited to the number of metal lines and memory cells depicted for chip 200.
Conductive interconnects 216 are provided between respective metal layers 214A-214E, as depicted by cross-hatched blocks of
In the embodiment depicted by
Electrically in serial to memory cell 218A is a second memory cell 218B. Second memory cell 218B has a bottom electrode 222 connected to the second node formed by the second metal line of second metal layer 214B, and a top electrode 224 connected to a third node formed by a third metal line of third metal layer 214C. Additionally, the third node is connected to a third conductive region 205, causing second memory cell 218B to be electrically in parallel to a second transistor of the array of transistors. Utilizing the five backend metal layers depicted by metal layers 214A-214E, at least 8 resistive switching memory cells 218 can be formed per NAND array of memory cells.
In operation, a bitline select transistor 208A (bit line select 208A) can be activated to electrically connect a metal bitline 226 to the array of memory cells via a bitline node 206. Bitline node 206 is connected to a first of the memory cells of the serially connected array (e.g., analogous to cell 103A of
Chip 300 comprises a substrate 302 having a set of recessed, buried nMOS transistors 304 forming therein. The nMOS transistors 304 can be formed from buried wordlines 306 within substrate 302, according to one or more embodiments, and a doped channel region 305. A gate insulator (e.g., gate oxide, etc.) having high electrical resistivity can be formed around buried wordlines 306, mitigating or preventing leakage currents within nMOS transistors 304. Buried wordlines 306 can have relatively small area on a top surface of substrate 302, compared to conventional transistors, enabling spacing between channel regions of nMOS transistors 304 to be reduced and generally reducing silicon space consumed by respective nMOS transistors 304. This can further facilitate increased memory density for chip 300. The buried wordline 306 and gate insulator 308 can form a conductive path around a perimeter of buried wordline 306, between two conductive segments 307 of channel region 305 serving as source and drain 310 of nMOS transistors 304 (see the dotted line defining a conductive path about buried wordline 306; note that the arrows are indicative of current flow but not necessarily of direction, as current is not restricted to flow between conductive segments 307 according to a particular orientation; rather, current flows according to relative application of high and low potential voltage, as known to one of ordinary skill in the art, which can be configurable based on operational circuitry (not depicted) applied to nMOS transistors 304). In one embodiment, source and drain 310 of nMOS transistors 304 can be n+ doped conductive segments 307.
Array of memory devices 301 further comprises a set of resistive switching devices 320 that overly channel region 305 and substrate 302. A vertical contact 314 connects a sourceline 316 to a source line select transistor 315 (SLS 315) of nMOS transistors 304, and a second vertical contact 314 connects a bitline 318 to another bit line select transistor 317 (BLS 317) of nMOS transistors 304. By activation of SLS 315 and BLS 317, a potential applied across sourceline 316 and bitline 318 can be applied to array of memory devices 301.
In addition to nMOS transistors 304, array of memory devices 301 include a set of resistive switching devices 320. As shown in the cut-out magnified illustration (dotted circle), respective resistive switching devices 320 include a bottom electrode 322, a switching layer 324, and a top electrode 326. In various disclosed embodiments, switching layer 324 can be a non-volatile switching medium, and resistive switching devices 320 can be non-volatile filamentary-based resistive switching memory cells. By utilizing thin film processing techniques, at least in part, BE 322, switching layer 324 and TE 326 can be formed collectively within a distance of 1F. In such embodiments, resistive switching devices 320 can have a width of 1F and electrode contacts can likewise have a width substantially of 1F, resulting in devices having 2F width, as illustrated by the dashed lines in
The recessed buried nMOS transistors 404 comprise a buried wordline 406 formed within a substrate 402 of chip 400. In an embodiment, substrate 402 can be a base material upon which other materials of chip 400 are formed, comprising a suitable semiconductor device (e.g., silicon, silicon germanium, and so forth). In another embodiment, substrate 402 can be formed above one or more other layers including the base material (not depicted), and therefore is not itself the base material for chip 400. In either embodiment, however, buried wordlines 406 are formed within substrate 402, and between adjacent source/drain segments 410 to form a set of recessed buried nMOS transistors 404.
Overlying substrate 402 are a set of resistive switching devices 420. As illustrated in the magnified cut-out (illustrated within the dotted circle), a resistive switching device 420 can comprise a bottom electrode 422 electrically connected to a BE contact 421A, a switching layer 424, and a top electrode 426 electrically connected to a TE contact 421B.
In addition to the foregoing, respective recessed buried nMOS transistors 404 can be connected electrically in parallel to respective resistive switching devices 420 via pairs of BE/TE contacts 421. Respective bottom electrode contacts 421A are in electrical contact with respective source/drain segments 410 of nMOS transistors 404, forming a parallel connection between a resistive switching device 420 and a nMOS transistor 404. Though each bottom electrode contact can be constructed beneath and in electrical contact with a top electrode contact (e.g., see the far left bottom electrode contact 429A and top electrode contact 429B), it should be appreciated that adjacent pairs of bottom/top electrode contacts, such as bottom electrode contact 421A and top electrode contact 421B, can serve as opposite terminals for a single two-terminal resistive switching device 420.
As illustrated, a sourceline 416 is connected to a first end of array of memory devices 401 by a vertical contact 414. A similar vertical contact can connect a bitline 418 to a second end of array of memory devices 401. Thus, a potential applied across sourceline 416 and bitline 418 is likewise applied across array of memory devices 401, facilitating operational control for voltage, current or field driven memory operations (e.g., a read operation, a write operation, an erase operation, etc.). By deactivating an nMOS transistor(s) 404 of array of memory devices 401, a resistive switching device(s) 420 that is electrically in parallel to the deactivated nMOS transistor(s) 404 is targeted for a memory operation. Likewise, by activating a subset of nMOS transistors 404, associated resistive switching devices 420 connected in parallel to the activated nMOS transistors are insulated from the memory operation. This facilitates bit-level operability for memory cells of array of memory devices 401 (and similarly for memory cells of chip 200 and chip 300). Furthermore, as indicated by the dashed lines, a single memory device 401 can be formed with a width of 2F, facilitating high density arrays of memory devices 401.
Example Methods for Fabrication of a Non-Volatile Memory Formed in a NAND Array and Having Area of 4F2
The diagrams included herein are described with respect to interaction between several memory cells, memory cell components, or memory architectures. It should be appreciated that such diagrams can include those memory cells, components and architectures specified therein, some of the specified memory cells/components/architectures, or suitable alternative or additional memory cells/components/architectures. Sub-components can also be implemented as electrically connected to other sub-components rather than included within a parent architecture. Moreover, some of the disclosed embodiments can be implemented as part(s) of other disclosed embodiments where suitable. Additionally, it is noted that one or more disclosed processes can be combined into a single process providing aggregate functionality. For instance, a program process can comprise an erase process, or vice versa, to facilitate programming and erasing a semiconductor cell by way of a single process. In addition, it should be appreciated that respective rows of multiple cell memory architectures can be erased in groups (e.g., multiple rows erased concurrently) or individually. Moreover, it should be appreciated that multiple memory cells on a particular row can be read or programmed in groups (e.g., multiple memory cells read/programmed concurrently) or individually. Components of the disclosed architectures can also interact with one or more other components not specifically described herein but known by those of skill in the art or made evident by way of the context provided herein.
In view of the exemplary diagrams described supra, process methods that can be implemented in accordance with the disclosed subject matter will be better appreciated with reference to the block diagrams of
Referring to
Referring to
At 510, method 500 can comprise etching back or smoothing a top surface of the conductive material and the electrically conductive contact layer. In an embodiment, top surfaces of the conductive material and the electrically conductive contact layer can be substantially coplanar following the etching back or smoothing. At 512, method 500 can comprise forming a hardmask over the top surface of the conductive material and the electrically conductive contact layer. At 514, method 500 can comprise forming a second dielectric over the hardmask.
At 516, method 500 can comprise etching second trenches through the second dielectric. In at least some disclosed embodiments, the second trenches can be at least in part offset in orientation (e.g., offset in a depth dimension of the memory device, offset in a lateral dimension of the memory device, etc.) from the trenches and the bottom electrodes. At 518, method 500 can comprise forming a switching layer over exposed surfaces of the second trenches (e.g., exposed in response to the etching second trenches). At 520, method 500 can comprise depositing second conductive material over the switching layer and filling the second trenches.
Referring to
Example Operating Environments
In order to provide a context for the various aspects of the disclosed subject matter,
A column controller 706 and sense amps 708 can be formed adjacent to memory array 702. Moreover, column controller 706 can be configured to activate (or identify for activation) a subset of bitlines of memory array 702. Column controller 706 can utilize a control signal provided by a reference and control signal generator(s) 718 to activate, as well as operate upon, respective ones of the subset of bitlines, applying suitable program, erase or read voltages to those bitlines. Non-activated bitlines can be kept at an inhibit voltage (also applied by reference and control signal generator(s) 718), to mitigate or avoid bit-disturb effects on these non-activated bitlines.
In addition, operating and control environment 700 can comprise a row controller 704. Row controller 704 can be formed adjacent to and electrically connected with word lines of memory array 702. Further, utilizing control signals of reference and control signal generator(s) 718, row controller 704 can select particular rows of memory cells with a suitable selection voltage. Moreover, row controller 704 can facilitate program, erase or read operations by applying suitable voltages at selected word lines.
Sense amps 708 can read data from, or write data to the activated memory cells of memory array 702, which are selected by column control 706 and row control 704. Data read out from memory array 702 can be provided to an input and input/output buffer 712 (e.g., an LPDDR buffer, in some embodiments). Likewise, data to be written to memory array 702 can be received from the input and input/output buffer 712 and written to the activated memory cells of memory array 702.
A clock source(s) 710 can provide respective clock pulses to facilitate timing for read, write, and program operations of row controller 704 and column controller 706. Clock source(s) 710 can further facilitate selection of wordlines or bitlines in response to external or internal commands received by operating and control environment 700. Input and input/output buffer 712 can comprise a command and address input, as well as a bidirectional data input and output. Instructions are provided over the command and address input, and the data to be written to memory array 702 as well as data read from memory array 702 is conveyed on the bidirectional data input and output, facilitating connection to an external host apparatus, such as a computer or other processing device (not depicted, but see e.g., computer 802 of
Input and input/output buffer 712 can be configured to receive write data, receive an erase instruction, receive a status or maintenance instruction, output readout data, output status information, and receive address data and command data, as well as address data for respective instructions. Address data can be transferred to row controller 704 and column controller 706 by an address register 710. In addition, input data is transmitted to memory array 702 via signal input lines between sense amps 708 and input and input/output buffer 712, and output data is received from memory array 702 via signal output lines from sense amps 708 to input and input/output buffer 712. Input data can be received from the host apparatus, and output data can be delivered to the host apparatus via the I/O bus.
Commands received from the host apparatus can be provided to a command interface 716. Command interface 716 can be configured to receive external control signals from the host apparatus, and determine whether data input to the input and input/output buffer 712 is write data, a command, or an address. Input commands can be transferred to a state machine 720.
State machine 720 can be configured to manage programming and reprogramming of memory array 702 (as well as other memory banks of the multi-bank memory array). Instructions provided to state machine 720 are implemented according to control logic configurations, enabling state machine 720 to manage read, write, erase, data input, data output, and other functionality associated with memory array 702. In some aspects, state machine 720 can send and receive acknowledgments and negative acknowledgments regarding successful receipt or execution of various commands. In further embodiments, state machine 720 can decode and implement status-related commands, decode and implement configuration commands, and so on.
To implement read, write, erase, input, output, etc., functionality, state machine 720 can control clock source(s) 708 or reference and control signal generator(s) 718. Control of clock source(s) 708 can cause output pulses configured to facilitate row controller 704 and column controller 706 implementing the particular functionality. Output pulses can be transferred to selected bitlines by column controller 706, for instance, or wordlines by row controller 704, for instance.
With reference to
The system bus 808 can be any of several types of bus structure(s) including the memory bus or memory controller, a peripheral bus or external bus, and/or a local bus using any variety of available bus architectures including, but not limited to, Industrial Standard Architecture (ISA), Micro-Channel Architecture (MSA), Extended ISA (EISA), Intelligent Drive Electronics (IDE), VESA Local Bus (VLB), Peripheral Component Interconnect (PCI), Card Bus, Universal Serial Bus (USB), Advanced Graphics Port (AGP), Personal Computer Memory Card International Association bus (PCMCIA), Firewire (IEEE 1394), and Small Computer Systems Interface (SCSI).
The system memory 806 includes volatile memory 810 and non-volatile memory 812. The basic input/output system (BIOS), containing the basic routines to transfer information between elements within the computer 802, such as during start-up, is stored in non-volatile memory 812. In addition, according to present innovations, codec 835 may include at least one of an encoder or decoder, wherein the at least one of an encoder or decoder may consist of hardware, software, or a combination of hardware and software. Although, codec 835 is depicted as a separate component, codec 835 may be contained within non-volatile memory 812. By way of illustration, and not limitation, non-volatile memory 812 can include read only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory 810 includes random access memory (RAM), which acts as external cache memory. By way of illustration and not limitation, RAM is available in many forms such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), and enhanced SDRAM (ESDRAM).
Computer 802 may also include removable/non-removable, volatile/non-volatile computer storage medium.
It is to be appreciated that
A user enters commands or information into the computer 802 through input device(s) 828. Input devices 828 include, but are not limited to, a pointing device such as a mouse, trackball, stylus, touch pad, keyboard, microphone, joystick, game pad, satellite dish, scanner, TV tuner card, digital camera, digital video camera, web camera, and the like. These and other input devices connect to the processing unit 804 through the system bus 808 via interface port(s) 830. Interface port(s) 830 include, for example, a serial port, a parallel port, a game port, and a universal serial bus (USB). Output device(s) 836 use some of the same type of ports as input device(s) 828. Thus, for example, a USB port may be used to provide input to computer 802 and to output information from computer 802 to an output device 836. Output adapter 834 is provided to illustrate that there are some output devices 836 like monitors, speakers, and printers, among other output devices 836, which require special adapters. The output adapters 834 include, by way of illustration and not limitation, video and sound cards that provide a means of connection between the output device 836 and the system bus 808. It should be noted that other devices and/or systems of devices provide both input and output capabilities such as remote computer(s) 838.
Computer 802 can operate in a networked environment using logical connections to one or more remote computers, such as remote computer(s) 838. The remote computer(s) 838 can be a personal computer, a server, a router, a network PC, a workstation, a microprocessor based appliance, a peer device, a smart phone, a tablet, or other network node, and typically includes many of the elements described relative to computer 802. For purposes of brevity, only a memory storage device 840 is illustrated with remote computer(s) 838. Remote computer(s) 838 is logically connected to computer 802 through a network interface 842 and then connected via communication connection(s) 844. Network interface 842 encompasses wire and/or wireless communication networks such as local-area networks (LAN) and wide-area networks (WAN) and cellular networks. LAN technologies include Fiber Distributed Data Interface (FDDI), Copper Distributed Data Interface (CDDI), Ethernet, Token Ring and the like. WAN technologies include, but are not limited to, point-to-point links, circuit switching networks like Integrated Services Digital Networks (ISDN) and variations thereon, packet switching networks, and Digital Subscriber Lines (DSL).
Communication connection(s) 844 refers to the hardware/software employed to connect the network interface 842 to the bus 808. While communication connection 844 is shown for illustrative clarity inside computer 802, it can also be external to computer 802. The hardware/software necessary for connection to the network interface 842 includes, for exemplary purposes only, internal and external technologies such as, modems including regular telephone grade modems, cable modems and DSL modems, ISDN adapters, and wired and wireless Ethernet cards, hubs, and routers.
The illustrated aspects of the disclosure may also be practiced in distributed computing environments where certain tasks are performed by remote processing devices that are linked through a communications network. In a distributed computing environment, program modules or stored information, instructions, or the like can be located in local or remote memory storage devices.
Moreover, it is to be appreciated that various components described herein can include electrical circuit(s) that can include components and circuitry elements of suitable value in order to implement the embodiments of the subject disclosure. Furthermore, it can be appreciated that many of the various components can be implemented on one or more IC chips. For example, in one embodiment, a set of components can be implemented in a single IC chip. In other embodiments, one or more of respective components are fabricated or implemented on separate IC chips.
As utilized herein, terms “component,” “system,” “architecture” and the like are intended to refer to a computer or electronic-related entity, either hardware, a combination of hardware and software, software (e.g., in execution), or firmware. For example, a component can be one or more transistors, a memory cell, an arrangement of transistors or memory cells, a gate array, a programmable gate array, an application specific integrated circuit, a controller, a processor, a process running on the processor, an object, executable, program or application accessing or interfacing with semiconductor memory, a computer, or the like, or a suitable combination thereof. The component can include erasable programming (e.g., process instructions at least in part stored in erasable memory) or hard programming (e.g., process instructions burned into non-erasable memory at manufacture).
By way of illustration, both a process executed from memory and the processor can be a component. As another example, an architecture can include an arrangement of electronic hardware (e.g., parallel or serial transistors), processing instructions and a processor, which implement the processing instructions in a manner suitable to the arrangement of electronic hardware. In addition, an architecture can include a single component (e.g., a transistor, a gate array, . . . ) or an arrangement of components (e.g., a series or parallel arrangement of transistors, a gate array connected with program circuitry, power leads, electrical ground, input signal lines and output signal lines, and so on). A system can include one or more components as well as one or more architectures. One example system can include a switching block architecture comprising crossed input/output lines and pass gate transistors, as well as power source(s), signal generator(s), communication bus(ses), controllers, I/O interface, address registers, and so on. It is to be appreciated that some overlap in definitions is anticipated, and an architecture or a system can be a stand-alone component, or a component of another architecture, system, etc.
In addition to the foregoing, the disclosed subject matter can be implemented as a method, apparatus, or article of manufacture using typical manufacturing, programming or engineering techniques to produce hardware, firmware, software, or any suitable combination thereof to control an electronic device to implement the disclosed subject matter. The terms “apparatus” and “article of manufacture” where used herein are intended to encompass an electronic device, a semiconductor device, a computer, or a computer program accessible from any computer-readable device, carrier, or media. Computer-readable media can include hardware media, or software media. In addition, the media can include non-transitory media, or transport media. In one example, non-transitory media can include computer readable hardware media. Specific examples of computer readable hardware media can include but are not limited to magnetic storage devices (e.g., hard disk, floppy disk, magnetic strips . . . ), optical disks (e.g., compact disk (CD), digital versatile disk (DVD) . . . ), smart cards, and flash memory devices (e.g., card, stick, key drive . . . ). Computer-readable transport media can include carrier waves, or the like. Of course, those skilled in the art will recognize many modifications can be made to this configuration without departing from the scope or spirit of the disclosed subject matter.
What has been described above includes examples of the subject innovation. It is, of course, not possible to describe every conceivable combination of components or methodologies for purposes of describing the subject innovation, but one of ordinary skill in the art can recognize that many further combinations and permutations of the subject innovation are possible. Accordingly, the disclosed subject matter is intended to embrace all such alterations, modifications and variations that fall within the spirit and scope of the disclosure. Furthermore, to the extent that a term “includes”, “including”, “has” or “having” and variants thereof is used in either the detailed description or the claims, such term is intended to be inclusive in a manner similar to the term “comprising” as “comprising” is interpreted when employed as a transitional word in a claim.
Moreover, the word “exemplary” is used herein to mean serving as an example, instance, or illustration. Any aspect or design described herein as “exemplary” is not necessarily to be construed as preferred or advantageous over other aspects or designs. Rather, use of the word exemplary is intended to present concepts in a concrete fashion. As used in this application, the term “or” is intended to mean an inclusive “or” rather than an exclusive “or”. That is, unless specified otherwise, or clear from context, “X employs A or B” is intended to mean any of the natural inclusive permutations. That is, if X employs A; X employs B; or X employs both A and B, then “X employs A or B” is satisfied under any of the foregoing instances. In addition, the articles “a” and “an” as used in this application and the appended claims should generally be construed to mean “one or more” unless specified otherwise or clear from context to be directed to a singular form.
Additionally, some portions of the detailed description have been presented in terms of algorithms or process operations on data bits within electronic memory. These process descriptions or representations are mechanisms employed by those cognizant in the art to effectively convey the substance of their work to others equally skilled. A process is here, generally, conceived to be a self-consistent sequence of acts leading to a desired result. The acts are those requiring physical manipulations of physical quantities. Typically, though not necessarily, these quantities take the form of electrical and/or magnetic signals capable of being stored, transferred, combined, compared, and/or otherwise manipulated.
It has proven convenient, principally for reasons of common usage, to refer to these signals as bits, values, elements, symbols, characters, terms, numbers, or the like. It should be borne in mind, however, that all of these and similar terms are to be associated with the appropriate physical quantities and are merely convenient labels applied to these quantities. Unless specifically stated otherwise or apparent from the foregoing discussion, it is appreciated that throughout the disclosed subject matter, discussions utilizing terms such as processing, computing, replicating, mimicking, determining, or transmitting, and the like, refer to the action and processes of processing systems, and/or similar consumer or industrial electronic devices or machines, that manipulate or transform data or signals represented as physical (electrical or electronic) quantities within the circuits, registers or memories of the electronic device(s), into other data or signals similarly represented as physical quantities within the machine or computer system memories or registers or other such information storage, transmission and/or display devices.
In regard to the various functions performed by the above described components, architectures, circuits, processes and the like, the terms (including a reference to a “means”) used to describe such components are intended to correspond, unless otherwise indicated, to any component which performs the specified function of the described component (e.g., a functional equivalent), even though not structurally equivalent to the disclosed structure, which performs the function in the herein illustrated exemplary aspects of the embodiments. In addition, while a particular feature may have been disclosed with respect to only one of several implementations, such feature may be combined with one or more other features of the other implementations as may be desired and advantageous for any given or particular application. It will also be recognized that the embodiments include a system as well as a computer-readable medium having computer-executable instructions for performing the acts and/or events of the various processes.
The present application for patent claims the benefit of and priority to U.S. Provisional Patent Application No. 62/415,150 filed Oct. 31, 2016 and entitled “4F2 RESISITVE NON-VOLATILE MEMORY FORMED IN A NAND ARCHITECTURE”, which is hereby incorporated by reference herein in its entirety and for all purposes. The following are hereby incorporated by reference herein in their respective entireties and for all purposes: U.S. application Ser. No. 11/875,541 filed Oct. 19, 2007, and U.S. application Ser. No. 12/575,921 filed Oct. 8, 2009.
| Number | Name | Date | Kind |
|---|---|---|---|
| 20120044742 | Narayanan | Feb 2012 | A1 |
| 20120287697 | Hanzawa | Nov 2012 | A1 |
| 20160190208 | Nazarian | Jun 2016 | A1 |
| Number | Date | Country | |
|---|---|---|---|
| 62415150 | Oct 2016 | US |
