Claims
- 1. A method of fabricating a self-actuated cantilever for analyzing a sample disposed in a fluid, the method comprising:providing a cantilever; disposing a piezoelectric element on said cantilever, said piezoelectric element having a plurality of electrodes; and depositing an insulating layer on said cantilever with a controlled stress so as to insulate said electrodes from the fluid during cantilever operation.
- 2. The method of claim 1, wherein said insulating layer is selected from a group consisting of silicon nitride, silicon dioxide, and a polymer.
- 3. The method of claim 1, wherein said cantilever includes a tip, and the method further comprises the step of removing said insulating layer from the tip so as to enhance data collection resolution.
- 4. A method of fabricating a self-actuated cantilever for analyzing a sample disposed in a fluid, the method comprising:providing a cantilever; disposing a piezoelectric element on said cantilever, said piezoelectric element having a plurality of electrodes; and depositing an insulating layer on said cantilever with a controlled stress so as to insulate said electrodes from the fluid during cantilever operation, wherein said depositing step includes dipping said cantilever into an elastomer.
- 5. The method of claim 4, wherein said elastomer is polydimethylsiloxane elastomer.
- 6. A method of fabricating a self-actuated cantilever for analyzing a sample disposed in a fluid, the method comprising:providing a cantilever; disposing a piezoelectrie element on said cantilever, said piezoelectric element having a plurality of electrodes; and depositing an insulating layer on said cantilever with a controlled stress so as to insulate said electrodes from the fluid during cantilever operation, wherein said cantilever includes a tip and said depositing step includes shadow masking at least an apex of the tip and then depositing a polymer on said cantilever.
- 7. The method of claim 6, wherein said shadow masking step is performed using one of a micropipette and a pulled pipette.
- 8. A method of fabricating a self-actuated cantilever for analyzing a sample disposed in a fluid, the method comprising:providing a cantilever; disposing a piezoelectric element on said cantilever, said piezoelectric element having a plurality of electrodes; and depositing an insulating layer on said cantilever with a controlled stress so as to insulate said electrodes, and thus passivate the piezoelectric element, from the fluid during cantilever operation.
- 9. The method of claim 8, wherein the cantilever extends from a base and supports a tip, and wherein the insulating layer is deposited onto the entire cantilever and the tip.
CROSS REFERENCE TO A RELATED APPLICATION
This application is a division of U.S. patent application Ser. No. 09/476,163, filed Dec. 30, 1999, now U.S. Pat No. 6,530,266, which is a continuation-in-part of U.S. patent application Ser. No. 09/280,160, filed Mar. 29, 1999, now U.S. Pat. No. 6,189,374.
US Referenced Citations (12)
Non-Patent Literature Citations (3)
Entry |
Vettiger, P. et al., “Ultrahigh Density, High-Data-Rate NEMS-Based AFM Data Storage”, Microelectronic Engineering, vol. 46, May 1999, pp. 11-17.* |
Atomic Force Microscopy For High Speed Imaging Using Cantilevers With An Integrated Actuator And Sensor, S.R. Manalis, S.C. Minne, C.F. Quate, Appl. Phys. Lett. 68(6), Feb. 5, 1996, pp. 871-873. |
Regulation Of A Microcantilever Response By Force Feedback, J. Mertz, O. Marti, J. Mlynek, Appl. Phys. Lett. 62 (19), May 10, 1993, pp. 2344-2346. |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09/280160 |
Mar 1999 |
US |
Child |
09/476163 |
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US |