Claims
- 1. An aluminum nitride sintered body having graded metallurgy comprising:
- an aluminum nitride sintered body having at least one via therein; and
- graded metallurgy on said sintered body and in direct contact with said at least one via, said graded metallurgy comprising a first layer of metallurgy in direct contact with said sintered body and a second layer of metallurgy in direct contact with, and that completely covers, said first layer of metallurgy;
- said first layer of metallurgy comprising 30 to 60 volume percent aluminum nitride and 40 to 70 volume percent of a metal selected from the group consisting of tungsten, molybdenum and mixtures thereof;
- said second layer of metallurgy comprising 90 to 100 volume percent of a metal selected from the group consisting of tungsten, molybdenum and mixtures thereof and 0 to 10 volume percent of aluminum nitride.
- 2. The aluminum nitride sintered body of claim 1 wherein said first layer of metallurgy is in direct contact with said at least one via.
- 3. The aluminum nitride sintered body of claim 1 wherein said first layer of metallurgy further comprises a sintering aid.
- 4. The aluminum nitride body of claim 1 wherein said metal in said first and second layers of metallurgy is tungsten.
- 5. The aluminum nitride body of claim 1 wherein said second layer of metallurgy is 100 volume percent metal.
- 6. The aluminum nitride body of claim 5 wherein said metal in said first and second layers of metallurgy is tungsten.
- 7. A co-fired aluminum nitride sintered body having adherent, graded metallurgy comprising:
- an aluminum nitride sintered body; and
- graded metallurgy on, and in direct contact with, said sintered body, said graded metallurgy comprising a first layer of metallurgy in direct contact with said sintered body and a second layer of metallurgy in direct contact with, and that completely covers, said first layer of metallurgy;
- said first layer of metallurgy comprising 30 to 60 volume percent aluminum nitride and 40 to 70 volume percent of a metal selected from the group consisting of tungsten, molybdenum and mixtures thereof;
- said second layer of metallurgy comprising 90 to 100 volume percent of a metal selected from the group consisting of tungsten, molybdenum and mixtures thereof and 0 to 10 volume percent of aluminum nitride.
- 8. The aluminum nitride sintered body of claim 7 wherein said first layer of metallurgy further comprises a sintering aid.
- 9. The aluminum nitride body of claim 7 wherein said metal in said first and second layers of metallurgy is tungsten.
- 10. The aluminum nitride body of claim 7 wherein said second layer of metallurgy is 100 volume percent metal.
- 11. The aluminum nitride body of claim 7 wherein said metal in said first and second layers of metallurgy is tungsten.
Parent Case Info
This application is a divisional of U.S. patent application Ser. no. 08/361,351 filed on Dec. 21, 1994, now U.S. Pat. No 5,552,232 and which is assigned to the assignee of the present invention.
US Referenced Citations (21)
Foreign Referenced Citations (1)
Number |
Date |
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0 574 956 A1 |
Dec 1993 |
EPX |
Divisions (1)
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Number |
Date |
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Parent |
361351 |
Dec 1994 |
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