Claims
- 1. A method for producing an aluminum nitride sintered body having graded metallurgy comprising the steps of:
- providing an aluminum nitride unsintered body having at least one via therein;
- forming a first layer of metallurgy paste proximate to said at least one via and in direct contact with said aluminum nitride body, said first layer of metallurgy paste comprising, based on the solids content of said paste, 30 to 60 volume percent aluminum nitride and 40 to 70 volume percent of a metal selected from the group consisting of tungsten, molybdenum and mixtures thereof;
- forming a second layer of metallurgy paste in direct contact with, and that completely covers, said first layer of metallurgy paste, said second layer of metallurgy paste, based on the solids content of said paste, comprising 90 to 100 volume percent of a metal selected from the group consisting of tungsten, molybdenum, and mixtures thereof, and 0 to 10 volume percent of aluminum nitride; and
- sintering said aluminum nitride body and said first and second layers of metallurgy paste at a predetermined time and temperature to form a fully dense aluminum nitride sintered body having first and second layers of graded metallurgy wherein said second layer of metallurgy completely covers said first layer of metallurgy and wherein said graded metallurgy is in direct contact with said at least one via.
- 2. The method of claim 1 wherein said first layer of metallurgy is in direct contact with said at least one via.
- 3. The method of claim 1 wherein said first layer of metallurgy is positioned around said at least one via but is not in contact therewith and said second layer of metallurgy is in direct contact with said at least one via.
- 4. The method of claim 1 wherein said first layer of metallurgy further comprises a sintering aid.
- 5. The method of claim 1 wherein said metal in said first and second layers is tungsten.
- 6. The method of claim 1 wherein said second layer of metallurgy is 100 volume percent metal.
- 7. The method of claim 6 wherein said metal is tungsten.
- 8. A method for producing a co-fired aluminum nitride sintered body having adherent graded metallurgy comprising the steps of:
- providing an aluminum nitride unsintered body;
- forming a first layer of metallurgy paste in direct contact with said aluminum nitride body, said first layer of metallurgy paste comprising, based on the solids content of said paste, 30 to 60 volume percent aluminum nitride and 40 to 70 volume percent of a metal selected from the group consisting of tungsten, molybdenum and mixtures thereof;
- forming a second layer of metallurgy paste in direct contact with, and that completely covers, said first layer of metallurgy paste, said second layer of metallurgy paste, based on the solids content of said paste, comprising 90 to 100 volume percent of a metal selected from the group consisting of tungsten, molybdenum, and mixtures thereof, and 0 to 10 volume percent of aluminum nitride; and
- sintering said aluminum nitride body and said first and second layers of metallurgy paste at a predetermined time and temperature to form a fully dense co-fired aluminum nitride sintered body having first and second layers of graded metallurgy wherein said second layer of metallurgy completely covers said first layer of metallurgy and wherein said graded metallurgy is in direct contact with, and adherent to, said aluminum nitride sintered body.
- 9. The method of claim 8 wherein said first layer of metallurgy further comprises a sintering aid.
- 10. The method of claim 8 wherein said metal is tungsten.
- 11. The method of claim 8 wherein said second layer of metallurgy is 100 volume percent metal.
- 12. The method of claim 11 wherein said metal is tungsten.
RELATED APPLICATION
This application is a divisional of U.S. patent application Ser. No. 08/437,494 filed on May 9, 1995 now U.S. Pat. No. 5,552,108 which is a divisional of U.S. patent application Ser. No. 08/361,351 filed on Dec. 21, 1994 U.S. Pat. No. 5,552,232, and both of which are assigned to the assignee of the present invention.
US Referenced Citations (21)
Foreign Referenced Citations (1)
Number |
Date |
Country |
0 574 956 A1 |
Dec 1993 |
EPX |
Divisions (2)
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Number |
Date |
Country |
Parent |
437494 |
May 1995 |
|
Parent |
361351 |
Dec 1994 |
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