BRIEF DESCRIPTION OF THE DRAWINGS
The above and/or other aspects and advantages will become more apparent and more readily appreciated from the following detailed description of example embodiments taken in conjunction with the accompanying drawings of which:
FIG. 1 is an ion beam apparatus according to the conventional art;
FIG. 2A is an apparatus for controlling an ion beam according to an example embodiment;
FIG. 2B is an example potential diagram according to a position of extraction electrodes of an apparatus for controlling an ion beam according to an example embodiment;
FIG. 3 is a view of an ion beam controlling extraction electrode according to an example embodiment;
FIG. 4 is a view of an ion beam controlling extraction electrode according to another example embodiment;
FIG. 5 illustrates ion beam distribution according to an example embodiment measured on a semiconductor substrate; and
FIG. 6 is a flow chart for illustrating a method for preparing a beam controlling extraction electrode according to an example embodiment.