This application claims the benefit under 35 U.S.C. § 119 (a) of European Patent Application No. 23173996.2 filed May 17, 2023, the contents of which are incorporated by reference herein in their entirety.
The present disclosure relates to semiconductor device packages, and in particular to bond pad designs of semiconductor device packages.
A dual silicone no-lead (DSN) semiconductor device package is a type of surface-mount semiconductor packaging technology used to connect and protect semiconductor devices. A DSN semiconductor device package has contact terminals on the bottom, which may be used to connect the DSN package to a printed circuit board (PCB) or other electronic component. The contact terminals are typically placed closer to the edges of the DSN semiconductor device package, while the semiconductor device is typically placed closer to the center of the DSN semiconductor device package and in between the terminals. Depending on the type of semiconductor device, there may be two or more terminals on the outside of the DSN semiconductor device package. A bond pad layer above the layers defining the semiconductor device typically provides the terminals, which are typically substantially rectangularly shaped.
An example of a DSN diode 100 is shown in
Electrostatic discharge (ESD) protection is an important aspect of semiconductor device packages, such as DSN semiconductor device packages. ESD protection devices, which are typically implemented between the terminals and the semiconductor device withing the DSN semiconductor device package, preferably have low capacitance and low clamping voltages at the same time. A large capacitance can hamper data transfer and high clamping voltage can destroy the semiconductor device to be protected. High speed interfaces tolerate very little additional capacitance on the line, however miniaturization makes them increasingly sensitive to ESD strikes. Bond pad capacitance and interconnect capacitance disadvantageously adds to the total capacitance of the ESD protection device.
The present disclosure provides an improved bond pad design for semiconductor device packages and is particularly advantageous for application in DSN semiconductor device packages. The solution of the present disclosure may provide the same solder footprint and terminal dimensions as known DSN packages in order to comply with industry standards. Advantageously, the bond pad design of the present disclosure reduces the total overall capacitance and clamping voltages.
A summary of aspects of certain examples disclosed herein is set forth below. It should be understood that these aspects are presented merely to provide the reader with a brief summary of these certain embodiments and that these aspects are not intended to limit the scope of this disclosure. Indeed, this disclosure may encompass a variety of aspects and/or a combination of aspects that may not be set forth.
According to an aspect of the present disclosure, a semiconductor device package is presented. The semiconductor device package may include a bond pad defined by a first set of layers and a semiconductor device defined by a second set of layers. The bond pad may provide a terminal of the semiconductor device package. The first set of layers may include a first metallization layer exposing the bond pad to the outside of the semiconductor device package. The first metallization layer may include a first area in the plane of the first metallization layer. The first area may at least include a rectangularly shaped area. The first area may include a first metal. The first set of layers may further include a second metallization layer that is conductively connected to the first metallization layer.
The second metallization layer may include a second area in the plane of the second metallization layer. The second area may be positioned below the first area. The second area may include a second metal. The second metallization layer may further include a third area in the plane of the second metallization layer. The third area may be rectangularly shaped and may extend from one side of the second area towards a location above the semiconductor device. The width of the third area where the third area touches the one side of the second area may be smaller than the length of the one side of the second area. The third area may include the second metal.
The third area may be rectangularly shaped and may extend from the middle of one side of the second area towards a location above the semiconductor device. The second area and the third area may form one area of second metal.
The rectangularly shaped area of the first area may provide a terminal complying with industry standards.
It will be understood that the rectangularly shaped area may be substantially rectangular. For example, irregularities in the shape due to the manufacturing process and rounded corners are allowed.
Similarly, the rectangular shape of the third area may be substantially rectangular.
The expressions ‘below’ and ‘above’ in the context of layers are to be understood to indicate a relative position of the layers, where the highest layer corresponds to the first metallization layer and the second set of layers defining the semiconductor device is typically positioned below the first set of layers defining the bond pad.
The expression ‘towards a location above’ is to be understood to indicate a direction within a layer; it is not meant to indicate an extension as far as the location above.
In an embodiment, the second area and the third area may be fully covered by the first area.
In another embodiment, the second area may be fully covered by the first area and the third area may be not covered by the first area.
The expression ‘covered’ in the context of areas in different layers is to be understood to indicate that an area in a higher layer is positioned above an area in a lower layer. The shape of the areas may be different, but the area in the higher layer is at least similar in shape or larger than the area in the lower layer.
In an embodiment, the first set of layers may further include a third metallization layer providing a via between the third area of the second metallization layer and a device pad of the semiconductor device. The via may include the second metal.
In an embodiment, the first metal may be tin (Sn).
In another embodiment, the first metal may be a nickel/gold alloy (NiAu).
In another embodiment, the first metal may be a nickel/palladium/gold alloy (NiPdAu).
In an embodiment, the second metal may be copper (Cu).
In an embodiment, the width of the third area may be about one third of the length of the one side of the second area.
In an embodiment, the third area may extend from the middle of the one side of the second area to above an edge of the semiconductor device.
In an embodiment, the second metallization layer may be directly below the first metallization layer.
In another embodiment, the first set of layers may include one or more further metallization layers between and conductively connecting the first metallization layer and the second metallization layer.
In an embodiment, the semiconductor device package may include two similarly shaped bond pads each formed as the bond pad described above. The bond pads may be positioned in a mirrored orientation, such that the third area of each of the bond pads extends towards the location above the semiconductor device.
The semiconductor device package may include more than two similarly shaped bond pads each formed as the bond pad described above. Two bond pads may, e.g., be used for a DSN diode. Three bond pads may, e.g., be used for a DSN MOSFET.
In an embodiment, the first metallization layer may further include a fourth area between the first areas of the bond pads. The fourth area may include a protective, non-conductive coating.
In an embodiment, the semiconductor device package may be a DSN semiconductor device package.
According to an aspect of the present disclosure, a method of manufacturing a semiconductor device package, such as a DSN semiconductor device package, is presented. The semiconductor device package may include a bond pad defined by a first set of layers and a semiconductor device defined by a second set of layers. The bond pad may provide a terminal of the semiconductor device package. Moreover, the semiconductor device package may include any of the features described above. The method may include creating a second metallization layer of the first set of layers. The method may further include creating a first metallization of the first set of layers. The first set of layers may thus be formed having one or more of the above described features.
The first metallization layer and the second metallization layer may be created in a single step.
In an embodiment, the two similarly shaped bond pads may be created, each formed as the bond pad. The bond pads may be positioned in a mirrored orientation, the third area of each of the bond pads extending towards the location above the semiconductor device. A similar result may be achieved by having one bond pad rotated 180° relative to the other bond pad.
The method may further include using further masks to create the second set of layers. I.e., it is to be understood that further manufacturing steps may be performed to create the semiconductor device package.
Embodiments of the present disclosure will now be described, by way of example only, with reference to the accompanying schematic drawings in which corresponding reference symbol indicate corresponding parts, in which:
The figures are intended for illustrative purposes only, and do not serve as restriction of the scope of the protection as laid down by the claims.
Where appropriate, the x/y/z orientation of the views has been indicated in the drawings.
It will be readily understood that the components of the embodiments as generally described herein and illustrated in the appended figures could be arranged and designed in a wide variety of different configurations. Thus, the following more detailed description of various embodiments, as represented in the figures, is not intended to limit the scope of the present disclosure, but is merely representative of various embodiments. While the various aspects of the embodiments are presented in drawings, the drawings are not necessarily drawn to scale unless specifically indicated.
The described embodiments are to be considered in all respects only as illustrative and not restrictive. The scope of the present disclosure is, therefore, indicated by the appended claims rather than by this detailed description. All changes which come within the meaning and range of equivalency of the claims are to be embraced within their scope. Reference throughout this specification to features, advantages, or similar language does not imply that all of the features and advantages that may be realized with the present disclosure should be or are in any single example of the present disclosure. Rather, language referring to the features and advantages is understood to mean that a specific feature, advantage, or characteristic described in connection with an embodiment is included in at least one embodiment of the present disclosure. Thus, discussions of the features and advantages, and similar language, throughout this specification may, but do not necessarily, refer to the same example.
Furthermore, the described features, advantages, and characteristics of the present disclosure may be combined in any suitable manner in one or more embodiments. One skilled in the relevant art will recognize, in light of the description herein, that the present disclosure can be practiced without one or more of the specific features or advantages of a particular embodiment. In other instances, additional features and advantages may be recognized in certain embodiments that may not be present in all embodiments of the present disclosure.
Reference throughout this specification to “one embodiment,” “an embodiment,” or similar language means that a particular feature, structure, or characteristic described in connection with the indicated embodiment is included in at least one embodiment of the present disclosure. Thus, the phrases “in one embodiment,” “in an embodiment,” and similar language throughout this specification may, but do not necessarily, all refer to the same embodiment. In the following examples DSN semiconductor device packages are shown. The present disclosure is particularly advantageous for DSN semiconductor device packages, but may be applied to other semiconductor device packages. I.e., the present disclosure is not limited to DSN semiconductor device packages. In
The bond pad 510 may be conductively connected to the semiconductor device 550 via a third metallization layer 540 and a device pad 542. The third metallization layer 540 provides, e.g., a via between the second metallization layer 530 and the device pad 542. The present disclosure is not limited to such third metallization layer 540 and device pad 542. Any other suitable implementation may be used for connecting the bond pad 510 to the semiconductor device 550.
In an example embodiment, the first metallization layer may include a fourth area 524, which is typically located between the two first areas 522 of the bond pads. The fourth area may include a protective, non-conductive coating. Examples of DSN semiconductor device packages including such fourth area 524 are shown in
As shown in
It has been found that a rectangular shape of the third area 434, 534, extending from the center of the side of the second area 432, 532, such as shown in
In an example embodiment, the distance between the second metallization layer 530 and the semiconductor device 550, e.g., a P-type substrate in the second set of layers 552, may be 4 μm to 5 μm, or even larger than 5 μm. In another example embodiment, this distance may be increased by 7 μm or more by introducing further layers with, e.g., vias.
In an example embodiment, the thickness of the first metallization layer and the second metallization layer together may be about 8 μm.
It has been found that also the improved distance between the second metallization layer 530 and the semiconductor device 550 reduces the overall capacitance and improves clamping voltages.
The present disclosure is not limited to the examples shown in
Changing the layout of the second area 432, 532 of the second metallization layer 1430 from a rectangular layout, such as shown in
As shown in the examples of
It will be understood that further manufacturing steps may be performed to create the full DSN semiconductor device package, as known per se.
Number | Date | Country | Kind |
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23173996.2 | May 2023 | EP | regional |