Patent Grant
11127709
The present invention relates to a capillary transport device for transporting a capillary, a capillary mounting device, a capillary replacement device, a capillary transport method, a capillary mounting method, and a capillary replacement method.
A wire bonding device includes a capillary for inserting a wire of gold, aluminum, copper, or the like, and is an device for electrically connecting an electrode and an electrode by the use of the wire (for example, refer to Patent Literature 1). After using a capillary a fixed number of times for bonding, the capillary is required to be replaced.
The conventional capillary replacement method will be explained.
First, there is removed a used capillary that is mounted in a capillary mounting hole of an ultrasonic horn by the use of a capillary fastening screw. Specifically, an operator holds the capillary with tweezers, and loosens fastening of the capillary fastening screw by the use of a torque driver with a bit attached thereto, and removes the used capillary from the capillary mounting hole of the ultrasonic horn.
Next, a new capillary is mounted onto the ultrasonic horn. Specifically, an operator holds the capillary with tweezers, inserts the capillary into the capillary mounting hole of the ultrasonic horn, and fastens the capillary fastening screw by a specified torque through the use of the torque driver with a bit attached thereto. In this way, the capillary is replaced.
In the above-described conventional capillary replacement method, it is difficult to insert a capillary since the diameter of the capillary mounting hole is slightly larger than the diameter of the capillary. Accordingly, there has been a case where it takes time to replace a capillary.
In addition, when an operator strongly inserts or removes a capillary in a state where the direction along which the capillary is inserted into a capillary mounting hole is slightly shifted, the capillary mounting hole may deform or a vicinity of an inlet of the capillary mounting hole may sag. Accordingly, there has been a case where the gripping state of the capillary changes, resulting in a failure in precise bonding.
Furthermore, there has been a case where, when an operator holds a capillary with tweezers, he or she drops the capillary to thereby break the tip thereof. Moreover, there has been a case where an operator may drop a capillary into a wire bonding device, and thus it takes time for him or her to remove the capillary from the inside of the device.
PTL 1: Japanese Patent Laid-Open No. 2009-021493
An aspect of the present invention is to provide any of a capillary transport device, a capillary mounting device, a capillary replacement device, a capillary transport method, a capillary mounting method, and a capillary replacement method, capable of inserting, without manpower, a capillary into a mounting section of an ultrasonic horn.
Hereinafter, various aspects of the present invention will be explained.
[1] A capillary transport device includes: a first tube for transporting a capillary; an ultrasonic horn with a mounting section for mounting the capillary; a first movement mechanism for relatively moving the ultrasonic horn and a first end of the first tube; and a mechanism for blowing gas into a second end of the first tube.
[2] In the capillary transport device according to [1], the mechanism for blowing gas includes a second tube for pushing the capillary into the second end of the first tube and a second movement mechanism for moving the second tube.
[3] The capillary transport device according to [2] further includes a block arranged at the first end of the first tube and made of a material harder than the first tube.
[4] A capillary mounting device includes the capillary transport device according to any one of [1] to [3] and a mechanism for fixing the capillary to the mounting section.
[5] A capillary replacement device includes the capillary mounting device according to [4], a mechanism for removing the capillary fixed to the mounting section, and a mechanism for sucking gas from the second end of the first tube.
[6] A capillary replacement device includes: a fourth tube for transporting a first capillary; a first tube for transporting a second capillary; an ultrasonic horn with a mounting section for mounting the first or second capillary; a first movement mechanism for relatively moving the ultrasonic horn and a first end of the first tube as well as a first end of the fourth tube; a mechanism for blowing gas into a second end of the first tube; a mechanism for sucking gas from a second end of the fourth tube; a mechanism for removing the first capillary fixed to the mounting section; and a mechanism for fixing the second capillary to the mounting section.
[7] A capillary replacement device includes: a first tube including a first path for transporting a first capillary, a second path for transporting a second capillary, and a third path where the first path and the second path are merged; an ultrasonic horn with a mounting section for mounting the first or second capillary; a first movement mechanism for relatively moving the ultrasonic horn and an end of the third path of the first tube; a mechanism for blowing gas into an end of the second path of the first tube; a mechanism for removing the first capillary fixed to the mounting section; and a mechanism for fixing the second capillary to the mounting section.
[8] A capillary transport method includes the steps of: relatively moving an ultrasonic horn and a first end of a first tube to thereby align a mounting section of the ultrasonic horn and the first end of the first tube; inserting a capillary from a second end of the first tube into the first tube; and transporting the capillary from the second end of the first tube to the mounting section of the ultrasonic horn through the first end, by blowing gas into the second end of the first tube.
[9] A capillary mounting method includes the steps of: transporting the capillary to the mounting section of the ultrasonic horn by using the capillary transport method according to [8]; and fixing the capillary to the mounting section.
[10] A capillary replacement method includes the steps of: relatively moving an ultrasonic horn with a first capillary fixed to a mounting section thereof and a first end of a first tube to thereby insert the first capillary into the first end of the first tube; removing, from the ultrasonic horn, the first capillary fixed to the mounting section; transporting the first capillary to the second end from the first end of the first tube by sucking gas from the second end of the first tube to thereby eject the first capillary from the first tube; inserting a second capillary into the first tube from the second end of the first tube; transporting the second capillary from the second end of the first tube to the mounting section of the ultrasonic horn through the first end, by blowing gas into the second end of the first tube; and fixing the second capillary to the mounting section.
According to one aspect of the present invention, there is provided either one of a capillary transport device, a capillary mounting device, a capillary replacement device, a capillary transport method, a capillary mounting method, and a capillary replacement method, capable of inserting, without manpower, a capillary into a mounting section of an ultrasonic horn.
Hereinafter, embodiments of the present invention will be explained in detail by the use of the drawings. However, a person skilled in the art would easily understand that the present invention is not limited to the following explanation but the form and details thereof can be variously changed without deviating from the gist and the scope of the present invention. Accordingly, the present invention should not be construed as being limited to the description of the embodiments shown below.
As illustrated in
As illustrated in
Furthermore, the capillary interchange unit 18 includes: a mechanism for blowing gas (for example, air) into the second end 17b of the path tube 17. This gas blowing mechanism includes a capillary extrusion pipe 22 (also referred to as a second tube) for pushing the capillary 13 into the second end 17b of the path tube 17; and an air cylinder 23 as a second movement mechanism for moving the capillary extrusion pipe 22.
Moreover, the mechanism for blowing gas includes a gas injection/suction tube 24, which is connected to a first end 22a of the capillary extrusion pipe 22. Accordingly, the gas injected from the gas injection/suction tube 24 is to be blown into the second end 17b of the path tube 17 through the capillary extrusion pipe 22.
In addition, the mechanism for sucking gas includes the gas injection/suction tube 24, which is connected to the first end 22a of the capillary extrusion pipe 22. Accordingly, in a state where a second end 22b of the capillary extrusion pipe 22 is connected to the second end 17b of the path tube 17, the gas is sucked from the gas injection/suction tube 24, and thus the gas inside the tube 17 can be sucked from the second end 17b of the path tube 17.
The outer diameter of the capillary extrusion pipe 22 is smaller than the inner diameter of the path tube 17. Therefore, the capillary 13 can be inserted into the path tube 17 by pushing the capillary extrusion pipe 22, together with the capillaries 13 for replacement positioned above the stand 20, into the second end 17b of the path tube 17 by the use of the air cylinder 23. Note that the outer diameter of the capillary extrusion pipe 22 is, for example, 1.5 mm. Accordingly, the outer diameter of the capillary extrusion pipe 22 is smaller than the outer diameter of the capillary 13.
At the first end 17a of the path tube 17, there is arranged a horn pressing pipe 25 (also referred to as a block), which is preferably made of a material harder than that of the path tube 17. Accordingly, in pressing the pipe 25 against the ultrasonic horn 11, it is possible to reliably perform a positional alignment and to thereby suppress a positional displacement of the pipe 25. Note that, in this embodiment, the horn pressing pipe 25 in the shape of a tube is used, but not limited to a tubular one, and may be a block if the pipe is capable of suppressing a positional displacement, instead of being the tubular one.
In addition, the capillary replacement device includes a movement mechanism 61 (also referred to as a first movement mechanism) for moving the first end 17a of the path tube 17. By moving the first end 17a of the path tube 17 through the use of this movement mechanism, it is possible to insert the used capillary 13 into the horn pressing pipe 25 or the first end 17a of the path tube 17. By using the horn pressing pipe 25 made of a material harder than that of the path tube 17, it is possible to suppress deformation of the pipe 25 in pressing the pipe 25 against the ultrasonic horn 11 as compared with a case of pressing the first end 17a of the path tube 17 against the ultrasonic horn 11. Note that the movement mechanism is, for example, an air cylinder, and is controlled by a control section (not illustrated).
Furthermore, the first end 17a of the path tube 17 is not moved, but the ultrasonic horn 11 is moved through the use of a movement mechanism, and thereby the used capillary 13 may be inserted into the horn pressing pipe 25 or the first end 17a of the path tube 17.
The ultrasonic horn 11 is provided with a capillary mounting hole in which the capillary 13 is mounted, and the capillary 13 is to be mounted in the capillary mounting hole through the use of the capillary fastening screw 14.
Furthermore, the capillary replacement device includes, as a mechanism for fixing the capillary 13 to the capillary mounting hole, a screw fastening unit 27 that fastens by a torque driver or by the rotation of a motor. This screw fastening unit 27 functions also as a mechanism for removing the capillary 13 fixed to the capillary mounting hole. Specifically, the capillary 13 is mounted in the capillary mounting hole of the ultrasonic horn 11 by inserting the capillary 13 into the capillary mounting hole of the ultrasonic horn and fastening the capillary fastening screw 14 by a specified torque through the use of the screw fastening unit 27 with a bit 26 attached thereto. Moreover, the capillary 13 is removed from the capillary mounting hole of the ultrasonic horn 11 by loosening, through the use of the screw fastening unit 27 with the bit 26 attached thereto, the fastening of the capillary fastening screw 14 fixing the capillary 13 to the capillary mounting hole of the ultrasonic horn 11. Note that the screw fastening unit 27 that fastens by a torque driver or by the rotation of a motor is controlled by the control section.
As illustrated in
Note that, in the present embodiment, the horn pressing pipe 25 is moved upward while the ultrasonic horn 11 is fixed directly above the horn pressing pipe 25, but the ultrasonic horn 11 may be moved downward while the horn pressing pipe 25 is fixed. Furthermore, when a flexible tube is used for the path tube 17, the bending angle of the path tube 17 just slightly changes even if the horn pressing pipe 25 is moved in the vertical direction, and thus the horn pressing pipe 25 can be vertically moved with smaller force. The bit 26 and screw fastening unit 27 may be fixed and installed at a position where a bonding operation is not disturbed or may be installed so as to be able to be horizontally moved by a movement mechanism.
Next, the capillary fastening screw 14 is loosened by turning the bit 26. Subsequently, once gas (air) is sucked from the gas injection/suction tube 24 in a state illustrated in
Next, as illustrated in
Subsequently, as illustrated in
As illustrated in
Next, as illustrated in
Note that, in this embodiment, as illustrated in
Next, as illustrated in
Then, as illustrated in
According to this embodiment, the capillary 13 can be inserted into the capillary mounting hole of the ultrasonic horn 11 without manpower.
Furthermore, in this embodiment, a path can be freely changed to some extent by the use of a flexible material for the path tube 17, and thus there is no problem in finding an installation place of the path tube 17. In addition, the capillary 13 does not drop and a capillary replacement work can be stably and quickly finished.
Moreover, since the capillary 13 is inserted into the capillary mounting hole of the ultrasonic horn 11 by blowing out air from the gas injection/suction tube 24, a force applied to the ultrasonic horn 11 can be made small and thus the ultrasonic horn 11 can be prevented from deforming.
In addition, since the capillary 13 reaches the ultrasonic horn 11 through the path tube 17, there is no need to pinch the capillary 13 with tweezers unlike in the conventional technique, and the capillary 13 is not dropped. Moreover, the capillary fastening screw 14 is turned by a predetermined torque by the use of the screw fastening unit 27 while the angle and turning speed of the bit are set to be the same, and thus a variation in the fastening force can be reduced. In addition, since the capillary 13 can be automatically replaced without manpower, the work amount of an operator decreases and the time for the capillary replacement work can be reduced.
Note that, in this embodiment, as the mechanism for fixing the capillary 13 to the ultrasonic horn 11, the capillary 13 is inserted into the capillary mounting hole 12 of the ultrasonic horn 11 and is fixed by the use of the capillary fastening screw 14, but not limited to such a fixing method, and another fixing method may be used and the fixing can also be carried out by, for example, pinching of the capillary 13.
As illustrated in
Next, as illustrated in
Furthermore, in mounting a capillary for replacement onto the ultrasonic horn 11, the operations in the order reverse to the order of the operations of the
Also in this embodiment, the similar effect to that of the first embodiment can be obtained.
A capillary cartridge 121 has a space. The second end 17b of the path tube 17 illustrated in
In mounting a capillary for replacement onto the ultrasonic horn, as illustrated in
In removing a used capillary from the ultrasonic horn, the operation similar to that of the first embodiment is performed. Once gas (air) is sucked from the gas injection/suction tube 24, the capillary 13 is removed from the capillary mounting hole of the ultrasonic horn 11 and is positioned between the slide plate 39 and slide plate 38 through the second end 17b from the first end 17a of the path tube 17 (refer to
Subsequently, as illustrated in
Also in this embodiment, the similar effect to that of the first embodiment can be obtained.
A capillary cartridge 122 has a space. The second end 17b of the path tube 17 illustrated in
In mounting a capillary for replacement onto the ultrasonic horn, as illustrated in
In removing a used capillary from the ultrasonic horn, the operation similar to that of the first embodiment is performed. Once gas (air) is sucked from the gas injection/suction tube 24, the capillary 13 is removed from the capillary mounting hole of the ultrasonic horn 11, and is held by the holding member 40 of the capillary cartridge 122 through the second end 17b from the first end 17a of the path tube 17 (refer to
Subsequently, as illustrated in
Also in this embodiment, the similar effect to that of the first embodiment can be obtained.
A capillary cartridge 123 has a space. The second end 17b of the path tube 17 illustrated in
In mounting a capillary for replacement onto the ultrasonic horn, as illustrated in
In removing a used capillary from the ultrasonic horn, the operation similar to that of the first embodiment is performed. Once gas (air) is sucked from the gas injection/suction tube 24, the capillary 13 is removed from the capillary mounting hole of the ultrasonic horn 11 and is positioned between the slide plate 42 and the member 41a through the second end 17b from the first end 17a of the path tube 17 (refer to
Subsequently, as illustrated in
Also in this embodiment, the similar effect to that of the first embodiment can be obtained.
A path tube 46 includes an ejection tube 46a provided with a first path for transporting a capillary for replacement and an injection tube 46b provided with a second path for transporting a capillary for replacement. The path tube 46 includes a third path 45 where the first path and the second path are merged.
At an end of the third path 45 of the path tube 46, a non-illustrated horn pressing pipe (also referred to as a block) is arranged. Furthermore, the capillary replacement device includes a non-illustrated movement mechanism (also referred to as a first movement mechanism) for moving the end of the third path 45 of the path tube 46. A used capillary can be inserted into the horn pressing pipe or the end of the third path 45 of the path tube 46, by moving the end of the third path 45 of the path tube 46 by the use of this movement mechanism. By the use of the horn pressing pipe made of a material harder than that of the path tube 46, deformation of the horn pressing pipe can be suppressed in pressing the horn pressing pipe against the ultrasonic horn 11, as compared with a case where the end of the third path 45 of the path tube 46 is pressed against the ultrasonic horn 11.
Moreover, a used capillary may be inserted into the horn pressing pipe or the end of the third path 45 of the path tube 46, not by moving the end of the third path 45 of the path tube 46 but by moving the ultrasonic horn 11 through the use of a movement mechanism.
The ejection tube 46a is constituted so that gas is blown thereinto by a method similar to that in the first embodiment.
In removing a used capillary from the ultrasonic horn, as illustrated in
In mounting a capillary for replacement onto the ultrasonic horn 11, as illustrated in
Also in this embodiment, the similar effect to that of the first embodiment can be obtained.
The path tube includes an ejection tube 47 (also referred to as a fourth tube) for transporting the used capillary 13 and an injection tube 48 (also referred to as a first tube) for transporting a capillary for replacement.
A horn pressing pipe 49 (also referred to as a block) is arranged at a first end of the ejection tube 47. A horn pressing pipe 50 (also referred to as a block) is arranged at a first end of the injection tube 48. Moreover, the capillary replacement device includes a non-illustrated movement mechanism (also referred to as a first movement mechanism) for moving the first end of the ejection tube 47 and the first end of the injection tube 48. The used capillary 13 can be inserted into the horn pressing pipe 49 or the first end of the ejection tube 47, by moving the first end of the ejection tube 47 and the first end of the injection tube 48 through the use of this movement mechanism. By the use of the horn pressing pipes 49 and 50 made of a material harder than the ejection tube 47 and injection tube 48, deformation of the horn pressing pipes 49 and 50 can be suppressed in pressing the horn pressing pipes 49 and 50 against the ultrasonic horn 11, as compared with a case where the first end of each of the ejection tube 47 and injection tube 48 is pressed against the ultrasonic horn 11.
Moreover, the used capillary 13 may be inserted into the horn pressing pipe 49 or the first end of the ejection tube 47, not by moving the first end of each of the ejection tube 47 and injection tube 48 but by moving the ultrasonic horn 11 through the use of the movement mechanism.
The ejection tube 47 is constituted so as to suck gas from a second end by a method similar to that in the first embodiment, whereas the injection tube 48 is constituted so that gas is blown into a second end thereof by a method similar to that in the first embodiment.
In removing the used capillary 13 from the ultrasonic horn 11, as illustrated in
Note that, in this embodiment, the capillary 13 is ejected by sucking gas from the second end of the ejection tube 47, but the capillary 13 may be allowed to fall freely by the force of gravity without being sucked.
In mounting a capillary for replacement onto the ultrasonic horn 11, as illustrated in
Also in this embodiment, the similar effect to that of the first embodiment can be obtained.
A path tube 53 includes a first tube 51 provided with a first path for transporting a capillary for replacement and a second tube 52 provided with a second path connected to the first path. A first end of an L-shaped third tube 54 is connected to a first end of the first tube 51. Note that, in this embodiment, the third tube 54 has an L-shape, but the third tube 54 may not have an L-shape if the third tube 54 is capable of being connected to the path tube 53. Furthermore, the first tube 51 and second tube 52 may be connected so that a capillary can pass therethrough.
A non-illustrated horn pressing pipe is arranged at a second end of the first tube 51 of the path tube 53. Furthermore, the capillary replacement device includes a non-illustrated movement mechanism for moving the first end of the first tube 51 of the path tube 53. The first end of the first tube 51 can be aligned relative to the capillary mounting hole of the ultrasonic horn 11, by moving the first end of the first tube 51 through the use of this movement mechanism.
Moreover, the horn pressing pipe or the first end of the first tube 51 may be aligned relative to the capillary mounting hole of the ultrasonic horn 11, not by moving the first end of the first tube 51 of the path tube 53 but by moving the ultrasonic horn 11 through the use of a movement mechanism.
The second tube 52 is constituted so that gas (air) is blown thereinto by a method similar to that in the first embodiment.
In mounting a capillary for replacement onto the ultrasonic horn 11, as illustrated in
Also in this embodiment, the similar effect to that of the first embodiment can be obtained.
Note that the above-described first to eighth embodiments may be implemented in combination with each other.
| Number | Date | Country | Kind |
|---|---|---|---|
| JP2015-246301 | Dec 2015 | JP | national |
| Number | Name | Date | Kind |
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| 4046263 | Cwycyshyn | Sep 1977 | A |
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| 20080023028 | Fujita | Jan 2008 | A1 |
| 20080023525 | Maeda | Jan 2008 | A1 |
| 20120075079 | Takagi | Mar 2012 | A1 |
| 20140109398 | Choi | Apr 2014 | A1 |
| Number | Date | Country |
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| 8-186146 | Jul 1996 | JP |
| 2008-141025 | Jun 2008 | JP |
| 2009-21493 | Jan 2009 | JP |
| 2014-516213 | Jul 2014 | JP |
| Entry |
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| International Search Report dated Dec. 27, 2016 in International (PCT) Application No. PCT/JP2016/079730. |
| Number | Date | Country | |
|---|---|---|---|
| 20200091107 A1 | Mar 2020 | US |
| Number | Date | Country | |
|---|---|---|---|
| Parent | 15566021 | US | |
| Child | 16693966 | US |
